[Scan]
initial_time=2016-01-18T23:10:37
final_time=2016-01-18T23:10:57
ip_count=19
run=1024
dataset=11
scan=813
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09426E0
qbias_imon=-1.08755E-4
ql1_vset=
ql1_vmon=-7.57909E-1
ql1_imon=1.42596E-8
ql2_vset=
ql2_vmon=-7.35354E-1
ql2_imon=1.97765E-9
ql3_vset=
ql3_vmon=-9.19425E0
ql3_imon=5.76329E-10
ql4_vset=
ql4_vmon=-9.18987E0
ql4_imon=-2.37942E-10
mult1=-1.08888E-8
mult2=-2.53366E-9
rf_tmon=-4.7194E-3
rf_agc=3.41134E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.45843E-3
ql5_imon=1.6605E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63369E0
bslens_imon=2.36111E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19382E1
lens5a_imon=2.01335E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12499E2
lens4a_imon=2.05194E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53905E1
cs_ef1b_imon=3.17804E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04607E2
lens23_imon=1.02305E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04862E1
cs_ea1_imon=1.10418E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38878E0
lens1_imon=2.81533E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64813E1
os_ef1alow_imon=2.97261E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03931E1
cs_ea2_imon=1.34463E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.844E1
cs_ef1a_imon=3.06415E-5
olens2_vset=9.7E-1
olens2_vmon=9.69982E-1
olens2_imon=1.17923E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1143E1
os_restr1_imon=4.26139E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14525E1
os_ea1_imon=2.43045E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63918E1
os_ef1bup_imon=3.07496E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20764E0
cs_ionrep_imon=9.32227E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91922E2
cs_nozzle_imon=1.93582E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01929E1
cs_anode1_imon=1.9617E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20408E0
olens4_imon=3.17375E-8
tplens_vset=1.4E-1
tplens_vmon=1.67868E0
tplens_imon=-3.78655E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26657E1
iondef3_imon=1.51875E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26601E1
iondef2_imon=1.57247E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02948E2
lens6_imon=2.98267E-4
ql6_vset=1.0E-1
ql6_vmon=9.51767E-2
ql6_imon=3.99745E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27012E0
ionrepsh_imon=8.60849E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33742E1
lens5b_imon=2.18098E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74501E1
cs_ef2b_imon=3.1456E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.43775E0
os_ea2_imon=-6.95891E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06099E2
lens4b_imon=2.00735E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71264E1
cs_ef2a_imon=3.16434E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03474E0
os_ef2alow_imon=-2.40687E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.99226E-1
os_ef2bup_imon=-5.12786E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11117E1
os_restr2_imon=3.39247E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23045E2
cs_ionfoca_imon=6.30649E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01677E1
cs_anode2_imon=2.08531E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72911E1
iondef1_imon=1.12509E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68596E1
iondef4_imon=1.10395E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=4.69763E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81736E-1
olens1_imon=7.11355E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13855E0
cs_ionaccel_imon=-6.98589E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02082E2
cs_ionfocb_imon=1.47342E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5679E1
einzel_imon=7.73469E-6
window_vset=0.0E0
window_vmon=2.7861E-1
window_imon=-6.98589E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82672E2
mask1_imon=2.39207E-4
mask2_vset=0.0E0
mask2_vmon=-1.86584E1
mask2_imon=-6.01282E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92685E3
multa_neg_imon=7.3792E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93725E3
defgrida_imon=6.85288E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50152E3
multb_neg_imon=7.27827E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.48578E0
defgridb_imon=6.04537E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33251E1
os_fil1_imon=9.41267E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08008E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61501E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3182E1
cs_fil1_imon=6.56018E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.03864E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63276E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.56982E-2
os_fil2_imon=-2.4257E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.13932E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.44986E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30688E-1
cs_fil2_imon=-1.99923E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.26836E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21782E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=3.0071E-1
chamber_ion_pmon=1.19697E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.27767E-1
res40_imon=-2.54382E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=155
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09449E0	-7.57861E-1	-7.34901E-1	-9.19476E0	-9.18977E0	4.43459E-3	9.47475E-2	2.73045E1	-3.26891E1	-3.26225E1	2.68366E1	1.20122E-7	2.52647E-3	2.52647E-3	6.32386E-3	3.00302E-1
2.0E0	3.4E1	0.0E0	3.16E2	1.6E2	-2.09356E0	-7.57933E-1	-7.34973E-1	-9.19478E0	-9.18982E0	4.79221E-3	9.4986E-2	2.73192E1	-3.2667E1	-3.26199E1	2.68316E1	1.19953E-7	2.51525E-3	2.51525E-3	6.30202E-3	2.97901E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09356E0	-7.57861E-1	-7.35283E-1	-9.19454E0	-9.19003E0	4.57764E-3	9.47952E-2	2.73114E1	-3.26431E1	-3.26232E1	2.68667E1	1.19925E-7	2.51359E-3	2.51359E-3	6.32978E-3	2.99348E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09433E0	-7.57742E-1	-7.35164E-1	-9.19492E0	-9.19015E0	4.74453E-3	9.50098E-2	2.73099E1	-3.2644E1	-3.26506E1	2.68262E1	1.19891E-7	2.52025E-3	2.52025E-3	6.33919E-3	2.99343E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0941E0	-7.5798E-1	-7.35259E-1	-9.19476E0	-9.1897E0	4.74453E-3	9.48429E-2	2.73364E1	-3.26567E1	-3.2613E1	2.68388E1	1.19749E-7	2.51525E-3	2.51525E-3	6.32356E-3	3.01223E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09402E0	-7.58052E-1	-7.35188E-1	-9.19476E0	-9.18963E0	4.76837E-3	9.48668E-2	2.73069E1	-3.26567E1	-3.26086E1	2.68454E1	1.19913E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.01085E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09333E0	-7.58123E-1	-7.35211E-1	-9.19483E0	-9.18972E0	4.57764E-3	9.47952E-2	2.731E1	-3.26707E1	-3.25893E1	2.67842E1	1.19965E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.01347E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09433E0	-7.57957E-1	-7.35521E-1	-9.19447E0	-9.18968E0	4.55379E-3	9.48191E-2	2.73263E1	-3.26431E1	-3.26077E1	2.68689E1	1.19705E-7	2.51771E-3	2.51771E-3	6.3074E-3	2.99E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09387E0	-7.58266E-1	-7.35664E-1	-9.19454E0	-9.18961E0	4.50611E-3	9.4986E-2	2.73009E1	-3.26609E1	-3.2629E1	2.68508E1	1.19861E-7	2.5199E-3	2.5199E-3	6.32936E-3	2.98481E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09348E0	-7.581E-1	-7.35474E-1	-9.19428E0	-9.18963E0	4.62532E-3	9.46283E-2	2.73135E1	-3.26633E1	-3.26416E1	2.68454E1	1.19913E-7	2.52538E-3	2.52538E-3	6.33486E-3	3.00824E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09379E0	-7.58076E-1	-7.3514E-1	-9.19449E0	-9.1897E0	4.36306E-3	9.48906E-2	2.73261E1	-3.265E1	-3.26218E1	2.68023E1	1.198E-7	2.52061E-3	2.52061E-3	6.31817E-3	3.00966E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0934E0	-7.57766E-1	-7.35617E-1	-9.19454E0	-9.18968E0	4.64916E-3	9.46999E-2	2.73505E1	-3.26337E1	-3.26054E1	2.68141E1	1.20226E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.01347E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09487E0	-7.58004E-1	-7.35688E-1	-9.19461E0	-9.19006E0	4.26769E-3	9.45091E-2	2.73293E1	-3.26821E1	-3.26399E1	2.68773E1	1.19809E-7	2.52209E-3	2.52209E-3	6.3074E-3	3.01347E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09433E0	-7.58004E-1	-7.35521E-1	-9.19435E0	-9.18987E0	4.45843E-3	9.48906E-2	2.73093E1	-3.26754E1	-3.26056E1	2.68048E1	1.19869E-7	2.52177E-3	2.52177E-3	6.3121E-3	3.006E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09418E0	-7.57694E-1	-7.35497E-1	-9.19447E0	-9.18992E0	4.55379E-3	9.48429E-2	2.73213E1	-3.26332E1	-3.2647E1	2.67907E1	1.19827E-7	2.51278E-3	2.51278E-3	6.30111E-3	3.00257E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09394E0	-7.57742E-1	-7.35474E-1	-9.19418E0	-9.19008E0	4.74453E-3	9.46283E-2	2.74048E1	-3.25797E1	-3.25912E1	2.68166E1	1.19653E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.00041E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09364E0	-7.57885E-1	-7.35307E-1	-9.19449E0	-9.18982E0	4.62532E-3	9.49144E-2	2.73345E1	-3.26464E1	-3.27131E1	2.6829E1	1.20069E-7	2.52428E-3	2.52428E-3	6.31837E-3	3.00041E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09325E0	-7.57647E-1	-7.35736E-1	-9.19435E0	-9.18994E0	4.31538E-3	9.50098E-2	2.73316E1	-3.26644E1	-3.26354E1	2.68827E1	1.20017E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.01085E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09325E0	-7.57837E-1	-7.35593E-1	-9.19447E0	-9.18982E0	4.74453E-3	9.49383E-2	2.73151E1	-3.26661E1	-3.26225E1	2.681E1	1.20004E-7	2.52061E-3	2.52061E-3	6.32356E-3	2.99941E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09426E0	-7.57909E-1	-7.35354E-1	-9.19425E0	-9.18987E0	4.45843E-3	9.51767E-2	2.72911E1	-3.26601E1	-3.26657E1	2.68596E1	1.19697E-7	2.51847E-3	2.51847E-3	6.30202E-3	3.0071E-1