[Scan]
initial_time=2016-01-18T23:11:04
final_time=2016-01-18T23:11:23
ip_count=19
run=1024
dataset=11
scan=814
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09418E0
qbias_imon=-1.08779E-4
ql1_vset=
ql1_vmon=-7.57337E-1
ql1_imon=1.43204E-8
ql2_vset=
ql2_vmon=-7.3545E-1
ql2_imon=2.0003E-9
ql3_vset=
ql3_vmon=-9.19445E0
ql3_imon=6.67739E-10
ql4_vset=
ql4_vmon=-9.18987E0
ql4_imon=-2.58756E-10
mult1=-1.01016E-8
mult2=-2.8803E-9
rf_tmon=-4.44033E-3
rf_agc=3.27508E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.57764E-3
ql5_imon=1.65803E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64631E0
bslens_imon=2.48368E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19628E1
lens5a_imon=2.03787E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12488E2
lens4a_imon=2.05071E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54037E1
cs_ef1b_imon=3.15929E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04573E2
lens23_imon=1.02125E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04429E1
cs_ea1_imon=1.09193E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37977E0
lens1_imon=2.91988E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64747E1
os_ef1alow_imon=2.97585E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03552E1
cs_ea2_imon=1.35761E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84412E1
cs_ef1a_imon=3.04072E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.17877E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11454E1
os_restr1_imon=4.29454E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15185E1
os_ea1_imon=2.40485E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64086E1
os_ef1bup_imon=3.09154E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23648E0
cs_ionrep_imon=9.46287E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9191E2
cs_nozzle_imon=1.93561E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01881E1
cs_anode1_imon=1.96314E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20444E0
olens4_imon=3.17477E-8
tplens_vset=1.4E-1
tplens_vmon=1.6895E0
tplens_imon=-3.8226E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25918E1
iondef3_imon=1.50505E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26843E1
iondef2_imon=1.56778E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02914E2
lens6_imon=2.97946E-4
ql6_vset=1.0E-1
ql6_vmon=9.50098E-2
ql6_imon=3.99309E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28875E0
ionrepsh_imon=8.70222E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33862E1
lens5b_imon=2.19108E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74507E1
cs_ef2b_imon=3.14164E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48221E0
os_ea2_imon=-8.72534E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0608E2
lens4b_imon=2.00533E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71252E1
cs_ef2a_imon=3.16975E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04675E0
os_ef2alow_imon=-2.36002E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.05232E-1
os_ef2bup_imon=-5.19273E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11123E1
os_restr2_imon=3.39355E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23022E2
cs_ionfoca_imon=6.29496E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01845E1
cs_anode2_imon=2.08567E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73189E1
iondef1_imon=1.10563E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68406E1
iondef4_imon=1.10864E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=4.76781E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81593E-1
olens1_imon=7.13848E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12834E0
cs_ionaccel_imon=-9.22035E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02102E2
cs_ionfocb_imon=1.47482E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56483E1
einzel_imon=7.88966E-6
window_vset=0.0E0
window_vmon=2.8762E-1
window_imon=-7.13005E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82661E2
mask1_imon=2.39228E-4
mask2_vset=0.0E0
mask2_vmon=-1.86248E1
mask2_imon=-5.86866E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92651E3
multa_neg_imon=7.8154E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93705E3
defgrida_imon=6.40587E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50118E3
multb_neg_imon=7.06918E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.5339E0
defgridb_imon=5.96606E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33251E1
os_fil1_imon=9.40492E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07437E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61599E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31837E1
cs_fil1_imon=7.08276E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.97194E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6388E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.51823E-2
os_fil2_imon=-2.41369E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.13932E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.40603E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30299E-1
cs_fil2_imon=-2.03527E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.25034E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21797E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=2.99941E-1
chamber_ion_pmon=1.19953E-7
chamber_cvt_pmon=2.52492E-3
foreline_cvt_pmon=2.52492E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.06744E-1
res40_imon=-2.37083E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=170
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.09441E0	-7.57456E-1	-7.35211E-1	-9.19452E0	-9.19027E0	4.8399E-3	9.50575E-2	2.73287E1	-3.26673E1	-3.26201E1	2.68536E1	1.19705E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00302E-1
2.0E0	2.9E1	0.0E0	3.16E2	1.6E2	-2.09394E0	-7.57766E-1	-7.35402E-1	-9.19478E0	-9.19015E0	4.55379E-3	9.48906E-2	2.73418E1	-3.26725E1	-3.26303E1	2.68241E1	1.20004E-7	2.51632E-3	2.51632E-3	6.34518E-3	2.99686E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09348E0	-7.57647E-1	-7.35307E-1	-9.19459E0	-9.1902E0	4.60148E-3	9.49144E-2	2.73063E1	-3.2682E1	-3.26419E1	2.68052E1	1.19766E-7	2.51248E-3	2.51248E-3	6.31299E-3	2.98026E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.0934E0	-7.5748E-1	-7.35211E-1	-9.19456E0	-9.19006E0	4.57764E-3	9.49621E-2	2.73464E1	-3.26762E1	-3.25782E1	2.68482E1	1.19749E-7	2.50989E-3	2.50989E-3	6.3074E-3	2.9841E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09356E0	-7.5736E-1	-7.35331E-1	-9.1949E0	-9.19001E0	4.62532E-3	9.52482E-2	2.73243E1	-3.2647E1	-3.26338E1	2.684E1	1.19953E-7	2.51954E-3	2.51954E-3	6.28592E-3	2.9841E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09364E0	-7.57337E-1	-7.35354E-1	-9.19442E0	-9.18982E0	4.33922E-3	9.50575E-2	2.73135E1	-3.26615E1	-3.26182E1	2.68082E1	1.20069E-7	2.51552E-3	2.51552E-3	6.29645E-3	3.00041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09371E0	-7.57408E-1	-7.34997E-1	-9.19499E0	-9.19013E0	4.36306E-3	9.50336E-2	2.72939E1	-3.26732E1	-3.26024E1	2.68112E1	1.20174E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.01609E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09333E0	-7.57456E-1	-7.35021E-1	-9.19485E0	-9.19032E0	4.50611E-3	9.50336E-2	2.73333E1	-3.26645E1	-3.26242E1	2.68587E1	1.19646E-7	2.51632E-3	2.51632E-3	6.30202E-3	3.00197E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09387E0	-7.57408E-1	-7.34997E-1	-9.19487E0	-9.19037E0	4.64916E-3	9.49144E-2	2.73257E1	-3.26567E1	-3.26219E1	2.68267E1	1.20122E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.01871E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09379E0	-7.57551E-1	-7.35211E-1	-9.19456E0	-9.19023E0	4.8399E-3	9.51767E-2	2.72959E1	-3.26291E1	-3.26419E1	2.68494E1	1.20069E-7	2.51771E-3	2.51771E-3	6.30192E-3	2.9952E-1
1.4E1	3.0E0	0.0E0	5.66E2	3.82E2	-2.0951E0	-7.57432E-1	-7.35307E-1	-9.19476E0	-9.19013E0	4.88758E-3	9.47475E-2	2.73333E1	-3.26669E1	-3.2638E1	2.68094E1	1.19757E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.00302E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09387E0	-7.57861E-1	-7.35474E-1	-9.19456E0	-9.18987E0	4.48227E-3	9.47952E-2	2.73316E1	-3.26638E1	-3.2613E1	2.68286E1	1.19861E-7	2.51334E-3	2.51334E-3	6.32936E-3	2.9952E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09356E0	-7.57766E-1	-7.3576E-1	-9.19466E0	-9.18996E0	4.60148E-3	9.50336E-2	2.73326E1	-3.26548E1	-3.26138E1	2.67539E1	1.19809E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.00824E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09426E0	-7.5767E-1	-7.3545E-1	-9.19485E0	-9.18992E0	4.57764E-3	9.49621E-2	2.73177E1	-3.26855E1	-3.2623E1	2.68004E1	1.19913E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.02396E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09402E0	-7.57551E-1	-7.35569E-1	-9.19485E0	-9.18972E0	4.76837E-3	9.50098E-2	2.73195E1	-3.26567E1	-3.26296E1	2.68484E1	1.19809E-7	2.52318E-3	2.52318E-3	6.29645E-3	2.9952E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09472E0	-7.57456E-1	-7.35378E-1	-9.19485E0	-9.19001E0	4.45843E-3	9.50098E-2	2.73021E1	-3.26543E1	-3.26308E1	2.69109E1	1.20069E-7	2.51771E-3	2.51771E-3	6.30192E-3	2.9978E-1
2.0E1	3.0E0	1.0E0	8.08E2	5.58E2	-2.09371E0	-7.57384E-1	-7.35402E-1	-9.19468E0	-9.19001E0	4.57764E-3	9.49383E-2	2.7323E1	-3.26892E1	-3.26025E1	2.68188E1	1.20017E-7	2.51443E-3	2.51443E-3	6.30192E-3	2.9926E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09371E0	-7.57432E-1	-7.35235E-1	-9.19495E0	-9.19015E0	4.52995E-3	9.49383E-2	2.73388E1	-3.26527E1	-3.26273E1	2.68007E1	1.20161E-7	2.51752E-3	2.51752E-3	6.31761E-3	2.99421E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09418E0	-7.57408E-1	-7.35593E-1	-9.1949E0	-9.18992E0	4.74453E-3	9.48668E-2	2.73004E1	-3.26997E1	-3.26077E1	2.6831E1	1.1995E-7	2.51642E-3	2.51642E-3	6.31902E-3	3.01193E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09418E0	-7.57337E-1	-7.3545E-1	-9.19445E0	-9.18987E0	4.57764E-3	9.50098E-2	2.73189E1	-3.26843E1	-3.25918E1	2.68406E1	1.19953E-7	2.52492E-3	2.52492E-3	6.32896E-3	2.99941E-1