[Scan]
initial_time=2016-01-18T23:11:57
final_time=2016-01-18T23:12:17
ip_count=19
run=1024
dataset=11
scan=816
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0934E0
qbias_imon=-1.08769E-4
ql1_vset=
ql1_vmon=-7.57504E-1
ql1_imon=1.41564E-8
ql2_vset=
ql2_vmon=-7.35211E-1
ql2_imon=2.0004E-9
ql3_vset=
ql3_vmon=-9.19504E0
ql3_imon=4.93157E-10
ql4_vset=
ql4_vmon=-9.18977E0
ql4_imon=-2.2248E-10
mult1=-1.01739E-8
mult2=-2.74256E-9
rf_tmon=-3.68929E-3
rf_agc=3.43189E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.33922E-3
ql5_imon=1.73234E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67205E0
bslens_imon=2.69371E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19843E1
lens5a_imon=2.00977E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12427E2
lens4a_imon=2.05145E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53838E1
cs_ef1b_imon=3.15751E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04646E2
lens23_imon=1.02141E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04891E1
cs_ea1_imon=1.08083E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39191E0
lens1_imon=2.67664E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64731E1
os_ef1alow_imon=2.96792E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03383E1
cs_ea2_imon=1.33116E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8431E1
cs_ef1a_imon=3.05483E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=1.18276E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11347E1
os_restr1_imon=4.28593E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15066E1
os_ea1_imon=2.4353E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63786E1
os_ef1bup_imon=3.081E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21681E0
cs_ionrep_imon=9.50025E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91915E2
cs_nozzle_imon=1.93608E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01709E1
cs_anode1_imon=1.9519E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20425E0
olens4_imon=3.17509E-8
tplens_vset=1.4E-1
tplens_vmon=1.65737E0
tplens_imon=-1.78485E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26344E1
iondef3_imon=1.5009E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26669E1
iondef2_imon=1.54086E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02935E2
lens6_imon=2.98199E-4
ql6_vset=1.0E-1
ql6_vmon=9.4986E-2
ql6_imon=4.00275E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28284E0
ionrepsh_imon=8.7045E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33879E1
lens5b_imon=2.16857E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74479E1
cs_ef2b_imon=3.13871E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44847E0
os_ea2_imon=-5.30253E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06049E2
lens4b_imon=2.00681E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71274E1
cs_ef2a_imon=3.1669E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06798E0
os_ef2alow_imon=-2.42203E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.08795E-1
os_ef2bup_imon=-5.24729E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1123E1
os_restr2_imon=3.37695E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23055E2
cs_ionfoca_imon=6.29211E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01804E1
cs_anode2_imon=2.08075E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73514E1
iondef1_imon=1.10371E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68442E1
iondef4_imon=1.10433E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=4.75436E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81712E-1
olens1_imon=7.14729E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13294E0
cs_ionaccel_imon=-9.05382E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02082E2
cs_ionfocb_imon=1.47525E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56254E1
einzel_imon=7.74153E-6
window_vset=0.0E0
window_vmon=2.56033E-1
window_imon=-7.54389E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82638E2
mask1_imon=2.39161E-4
mask2_vset=0.0E0
mask2_vmon=-1.86646E1
mask2_imon=-5.86618E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92631E3
multa_neg_imon=7.87802E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93715E3
defgrida_imon=6.37532E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50129E3
multb_neg_imon=6.99006E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.50715E0
defgridb_imon=6.09186E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33251E1
os_fil1_imon=9.42045E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07939E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61624E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31834E1
cs_fil1_imon=7.30459E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.16685E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64044E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.44424E-2
os_fil2_imon=-2.55474E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.07014E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.27761E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29772E-1
cs_fil2_imon=-2.25275E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.0747E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21842E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=2.98481E-1
chamber_ion_pmon=1.19965E-7
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.88207E-1
res40_imon=-2.34821E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=220
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09418E0	-7.57527E-1	-7.35378E-1	-9.19507E0	-9.19003E0	4.52995E-3	9.46283E-2	2.74112E1	-3.26684E1	-3.26441E1	2.67701E1	1.20064E-7	2.51956E-3	2.51956E-3	6.32273E-3	2.99179E-1
2.0E0	3.5E1	0.0E0	3.16E2	1.6E2	-2.09356E0	-7.57718E-1	-7.35402E-1	-9.19476E0	-9.19008E0	4.48227E-3	9.49383E-2	2.73246E1	-3.26354E1	-3.2636E1	2.68484E1	1.19775E-7	2.51952E-3	2.51952E-3	6.33021E-3	2.98092E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09309E0	-7.57504E-1	-7.35402E-1	-9.19492E0	-9.1902E0	4.24385E-3	9.5129E-2	2.73598E1	-3.26657E1	-3.26254E1	2.68184E1	1.20004E-7	2.51417E-3	2.51417E-3	6.29665E-3	3.00453E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-2.09348E0	-7.57623E-1	-7.35569E-1	-9.19464E0	-9.19006E0	4.17233E-3	9.5129E-2	2.73092E1	-3.26124E1	-3.26649E1	2.68406E1	1.20017E-7	2.51826E-3	2.51826E-3	6.32936E-3	3.01347E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09387E0	-7.57742E-1	-7.35354E-1	-9.1948E0	-9.19013E0	4.45843E-3	9.52005E-2	2.73309E1	-3.26645E1	-3.26254E1	2.68436E1					
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09418E0	-7.57384E-1	-7.35521E-1	-9.19461E0	-9.19044E0	4.33922E-3	9.48668E-2	2.73039E1	-3.26542E1	-3.26352E1	2.68182E1	1.20055E-7	2.51954E-3	2.51954E-3	6.32356E-3	2.99941E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09495E0	-7.57551E-1	-7.35235E-1	-9.19464E0	-9.19025E0	4.41074E-3	9.50336E-2	2.73315E1	-3.26446E1	-3.25984E1	2.68343E1	1.20244E-7	2.5225E-3	2.5225E-3	6.3074E-3	3.00144E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09518E0	-7.57575E-1	-7.35354E-1	-9.19437E0	-9.19011E0	4.55379E-3	9.50336E-2	2.72898E1	-3.27009E1	-3.2606E1	2.6804E1	1.20069E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.00824E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09464E0	-7.57837E-1	-7.35283E-1	-9.1944E0	-9.19001E0	4.26769E-3	9.50813E-2	2.73247E1	-3.26389E1	-3.26046E1	2.68587E1	1.19697E-7	2.5131E-3	2.5131E-3	6.3074E-3	2.99175E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0951E0	-7.57837E-1	-7.35545E-1	-9.19437E0	-9.19023E0	4.48227E-3	9.50575E-2	2.73246E1	-3.26638E1	-3.25847E1	2.68358E1	1.19766E-7	2.5225E-3	2.5225E-3	6.31858E-3	3.0201E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09402E0	-7.58028E-1	-7.35688E-1	-9.19473E0	-9.19011E0	4.62532E-3	9.51529E-2	2.73357E1	-3.26837E1	-3.2635E1	2.6807E1	1.20106E-7	2.51954E-3	2.51954E-3	6.33436E-3	3.0071E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09449E0	-7.57766E-1	-7.35474E-1	-9.19447E0	-9.19023E0	4.43459E-3	9.47952E-2	2.73033E1	-3.26651E1	-3.26086E1	2.68707E1	1.19965E-7	2.52099E-3	2.52099E-3	6.31837E-3	2.9978E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09449E0	-7.57504E-1	-7.35497E-1	-9.19442E0	-9.19006E0	4.52995E-3	9.48429E-2	2.73364E1	-3.26693E1	-3.26106E1	2.68383E1	1.19861E-7	2.51552E-3	2.51552E-3	6.31288E-3	2.9952E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09433E0	-7.5767E-1	-7.35426E-1	-9.19433E0	-9.18992E0	4.50611E-3	9.50813E-2	2.7311E1	-3.26809E1	-3.26012E1	2.68012E1	1.1993E-7	2.5199E-3	2.5199E-3	6.3282E-3	3.0E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09487E0	-7.57527E-1	-7.35331E-1	-9.19428E0	-9.19008E0	4.14848E-3	9.49383E-2	2.73369E1	-3.26826E1	-3.25847E1	2.68504E1	1.20158E-7	2.51632E-3	2.51632E-3	6.32356E-3	2.99175E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0951E0	-7.57575E-1	-7.35283E-1	-9.19435E0	-9.19015E0	4.19617E-3	9.51052E-2	2.73252E1	-3.26838E1	-3.26331E1	2.68233E1	1.20116E-7	2.51527E-3	2.51527E-3	6.29581E-3	3.00087E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09426E0	-7.57384E-1	-7.35259E-1	-9.19437E0	-9.18992E0	4.33922E-3	9.48906E-2	2.73308E1	-3.26487E1	-3.26272E1	2.67992E1	1.19953E-7	2.51525E-3	2.51525E-3	6.31278E-3	3.02769E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09394E0	-7.57408E-1	-7.35283E-1	-9.19464E0	-9.18975E0	4.24385E-3	9.51529E-2	2.73404E1	-3.2638E1	-3.26123E1	2.68702E1	1.20031E-7	2.52027E-3	2.52027E-3	6.3074E-3	2.99613E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09325E0	-7.57599E-1	-7.35211E-1	-9.19507E0	-9.18982E0	4.3869E-3	9.50575E-2	2.73321E1	-3.26711E1	-3.26284E1	2.68304E1	1.20127E-7	2.52405E-3	2.52405E-3	6.29703E-3	2.98522E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0934E0	-7.57504E-1	-7.35211E-1	-9.19504E0	-9.18977E0	4.33922E-3	9.4986E-2	2.73514E1	-3.26669E1	-3.26344E1	2.68442E1	1.19965E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.98481E-1