[Scan]
initial_time=2016-01-18T23:12:24
final_time=2016-01-18T23:12:43
ip_count=19
run=1024
dataset=11
scan=817
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09541E0
qbias_imon=-1.08734E-4
ql1_vset=
ql1_vmon=-7.57504E-1
ql1_imon=1.41877E-8
ql2_vset=
ql2_vmon=-7.3545E-1
ql2_imon=2.03353E-9
ql3_vset=
ql3_vmon=-9.19471E0
ql3_imon=4.28712E-10
ql4_vset=
ql4_vmon=-9.18989E0
ql4_imon=-2.4097E-10
mult1=-9.42948E-9
mult2=-2.76238E-9
rf_tmon=-4.36179E-3
rf_agc=3.33145E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.26769E-3
ql5_imon=1.70665E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66798E0
bslens_imon=2.36983E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19618E1
lens5a_imon=1.99713E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12479E2
lens4a_imon=2.0493E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54115E1
cs_ef1b_imon=3.16975E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04631E2
lens23_imon=1.02298E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04705E1
cs_ea1_imon=1.09671E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36076E0
lens1_imon=2.53618E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64837E1
os_ef1alow_imon=2.97189E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03501E1
cs_ea2_imon=1.35721E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84316E1
cs_ef1a_imon=3.04505E-5
olens2_vset=9.7E-1
olens2_vmon=9.69934E-1
olens2_imon=1.18451E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11526E1
os_restr1_imon=4.28914E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14969E1
os_ea1_imon=2.42044E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63557E1
os_ef1bup_imon=3.0937E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25269E0
cs_ionrep_imon=9.65393E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91925E2
cs_nozzle_imon=1.93533E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01971E1
cs_anode1_imon=1.96782E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2043E0
olens4_imon=3.18667E-8
tplens_vset=1.4E-1
tplens_vmon=1.68568E0
tplens_imon=-1.11298E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26382E1
iondef3_imon=1.514E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2655E1
iondef2_imon=1.54904E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02955E2
lens6_imon=2.98257E-4
ql6_vset=1.0E-1
ql6_vmon=9.52721E-2
ql6_imon=4.00491E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30637E0
ionrepsh_imon=8.59211E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33734E1
lens5b_imon=2.18649E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74471E1
cs_ef2b_imon=3.12722E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.43615E0
os_ea2_imon=-6.03276E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06078E2
lens4b_imon=2.00704E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71246E1
cs_ef2a_imon=3.16326E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03834E0
os_ef2alow_imon=-2.46093E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.79404E-1
os_ef2bup_imon=-5.1567E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11063E1
os_restr2_imon=3.39355E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23032E2
cs_ionfoca_imon=6.28796E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01947E1
cs_anode2_imon=2.09685E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73016E1
iondef1_imon=1.10945E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68376E1
iondef4_imon=1.10035E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=4.79041E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81545E-1
olens1_imon=7.14413E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13555E0
cs_ionaccel_imon=-1.03376E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.47403E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56483E1
einzel_imon=7.9221E-6
window_vset=0.0E0
window_vmon=2.52181E-1
window_imon=-6.94985E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82655E2
mask1_imon=2.39279E-4
mask2_vset=0.0E0
mask2_vmon=-1.86512E1
mask2_imon=-7.34629E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92649E3
multa_neg_imon=7.51613E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93714E3
defgrida_imon=6.59588E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50143E3
multb_neg_imon=7.35685E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.32878E0
defgridb_imon=6.06497E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33246E1
os_fil1_imon=9.39831E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08002E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61538E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31848E1
cs_fil1_imon=6.21781E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.20309E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63803E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.62352E-2
os_fil2_imon=-2.3356E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.12731E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.37812E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30429E-1
cs_fil2_imon=-2.49778E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.43054E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21865E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.28552E-3
inlet_lpb_pmon=3.00563E-1
chamber_ion_pmon=1.20069E-7
chamber_cvt_pmon=2.51443E-3
foreline_cvt_pmon=2.51443E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.15754E-1
res40_imon=-2.45012E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=155
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09364E0	-7.57504E-1	-7.35378E-1	-9.19449E0	-9.18984E0	4.19617E-3	9.5129E-2	2.73659E1	-3.26537E1	-3.25824E1	2.68538E1	1.20311E-7	2.52061E-3	2.52061E-3	6.32356E-3	3.00453E-1
2.0E0	4.5E1	0.0E0	3.16E2	1.6E2	-2.09449E0	-7.57718E-1	-7.35497E-1	-9.19447E0	-9.19001E0	4.55379E-3	9.50813E-2	2.73437E1	-3.26676E1	-3.26242E1	2.67998E1	1.20055E-7	2.51632E-3	2.51632E-3	6.30202E-3	2.99175E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09418E0	-7.57766E-1	-7.35569E-1	-9.19452E0	-9.19001E0	4.31538E-3	9.50813E-2	2.73289E1	-3.26318E1	-3.26272E1	2.68621E1	1.19872E-7	2.52139E-3	2.52139E-3	6.32978E-3	2.99083E-1
4.0E0	8.0E0	0.0E0	6.55E2	3.98E2	-2.09464E0	-7.57813E-1	-7.35664E-1	-9.19478E0	-9.19003E0	4.02927E-3	9.48906E-2	2.73742E1	-3.26693E1	-3.26206E1	2.68532E1	1.20042E-7	2.51393E-3	2.51393E-3	6.3074E-3	2.98342E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09464E0	-7.57647E-1	-7.35593E-1	-9.19461E0	-9.1902E0	4.1008E-3	9.48429E-2	2.73255E1	-3.26897E1	-3.25972E1	2.68088E1	1.20069E-7	2.52318E-3	2.52318E-3	6.32386E-3	2.98222E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09549E0	-7.57742E-1	-7.35331E-1	-9.19471E0	-9.19001E0	4.07696E-3	9.49383E-2	2.73249E1	-3.26482E1	-3.26633E1	2.68226E1	1.20122E-7	2.51771E-3	2.51771E-3	6.3074E-3	2.9978E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09487E0	-7.57527E-1	-7.35164E-1	-9.19468E0	-9.18999E0	4.14848E-3	9.50575E-2	2.73261E1	-3.26657E1	-3.26212E1	2.68358E1	1.19965E-7	2.5199E-3	2.5199E-3	6.29645E-3	3.01085E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0958E0	-7.57432E-1	-7.3545E-1	-9.19476E0	-9.19001E0	4.41074E-3	9.50813E-2	2.73039E1	-3.26464E1	-3.26218E1	2.68442E1	1.20017E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.02659E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09495E0	-7.57384E-1	-7.35569E-1	-9.19466E0	-9.19027E0	4.12464E-3	9.49383E-2	2.72841E1	-3.26687E1	-3.26284E1	2.68929E1	1.19653E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.02396E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09487E0	-7.57456E-1	-7.35378E-1	-9.19499E0	-9.19011E0	4.55379E-3	9.4986E-2	2.72961E1	-3.27167E1	-3.2584E1	2.67716E1	1.19809E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.02396E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09441E0	-7.5748E-1	-7.3545E-1	-9.19471E0	-9.19037E0	4.62532E-3	9.50575E-2	2.73134E1	-3.26573E1	-3.26325E1	2.67535E1	1.198E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.00966E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09526E0	-7.57766E-1	-7.35569E-1	-9.19454E0	-9.1902E0	4.60148E-3	9.48429E-2	2.73279E1	-3.26543E1	-3.26717E1	2.69067E1	1.20069E-7	2.52099E-3	2.52099E-3	6.31288E-3	2.9978E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09379E0	-7.57742E-1	-7.35497E-1	-9.19452E0	-9.18999E0	4.57764E-3	9.50336E-2	2.73309E1	-3.26603E1	-3.2596E1	2.67277E1	1.19809E-7	2.51771E-3	2.51771E-3	6.32386E-3	2.9952E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09325E0	-7.57861E-1	-7.35378E-1	-9.19476E0	-9.19011E0	4.24385E-3	9.4986E-2	2.73261E1	-3.2617E1	-3.26573E1	2.68493E1	1.20017E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00302E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09418E0	-7.57694E-1	-7.35593E-1	-9.19464E0	-9.18984E0	4.45843E-3	9.52244E-2	2.73461E1	-3.26767E1	-3.26215E1	2.68314E1	1.19809E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.01085E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09371E0	-7.57837E-1	-7.35569E-1	-9.19471E0	-9.19003E0	4.26769E-3	9.4986E-2	2.73269E1	-3.26765E1	-3.26085E1	2.68456E1	1.19782E-7	2.51575E-3	2.51575E-3	6.323E-3	3.00494E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09464E0	-7.57885E-1	-7.35331E-1	-9.19452E0	-9.19032E0	4.22001E-3	9.52244E-2	2.73141E1	-3.26482E1	-3.25906E1	2.68124E1	1.19667E-7	2.51384E-3	2.51384E-3	6.33592E-3	3.01065E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09464E0	-7.57861E-1	-7.35211E-1	-9.19459E0	-9.19003E0	4.33922E-3	9.52005E-2	2.73375E1	-3.26531E1	-3.26095E1	2.68202E1	1.20069E-7	2.52428E-3	2.52428E-3	6.29098E-3	3.02922E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09487E0	-7.57861E-1	-7.35688E-1	-9.19456E0	-9.18999E0	4.33922E-3	9.51529E-2	2.73165E1	-3.26338E1	-3.2644E1	2.68603E1	1.198E-7	2.51847E-3	2.51847E-3	6.32896E-3	3.01995E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09541E0	-7.57504E-1	-7.3545E-1	-9.19471E0	-9.18989E0	4.26769E-3	9.52721E-2	2.73016E1	-3.2655E1	-3.26382E1	2.68376E1	1.20069E-7	2.51443E-3	2.51443E-3	6.28552E-3	3.00563E-1