[Scan]
initial_time=2016-01-18T23:12:51
final_time=2016-01-18T23:13:11
ip_count=19
run=1024
dataset=11
scan=818
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09495E0
qbias_imon=-1.08841E-4
ql1_vset=
ql1_vmon=-7.57813E-1
ql1_imon=1.42267E-8
ql2_vset=
ql2_vmon=-7.35307E-1
ql2_imon=2.03396E-9
ql3_vset=
ql3_vmon=-9.1948E0
ql3_imon=4.54438E-10
ql4_vset=
ql4_vmon=-9.19025E0
ql4_imon=-2.43461E-10
mult1=-1.08116E-8
mult2=-2.73502E-9
rf_tmon=-3.41226E-3
rf_agc=3.44771E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.76837E-3
ql5_imon=1.67613E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68273E0
bslens_imon=2.41938E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19742E1
lens5a_imon=1.99465E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12491E2
lens4a_imon=2.04955E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53863E1
cs_ef1b_imon=3.16866E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04642E2
lens23_imon=1.02209E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04422E1
cs_ea1_imon=1.08467E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37197E0
lens1_imon=2.80871E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64981E1
os_ef1alow_imon=2.97549E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03909E1
cs_ea2_imon=1.36747E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8446E1
cs_ef1a_imon=3.04289E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.18065E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11328E1
os_restr1_imon=4.29671E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15229E1
os_ea1_imon=2.4346E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63821E1
os_ef1bup_imon=3.08433E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26921E0
cs_ionrep_imon=9.40617E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91964E2
cs_nozzle_imon=1.93728E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01713E1
cs_anode1_imon=1.96746E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20437E0
olens4_imon=3.17104E-8
tplens_vset=1.4E-1
tplens_vmon=1.73228E0
tplens_imon=-9.71409E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26266E1
iondef3_imon=1.48816E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26638E1
iondef2_imon=1.56355E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02939E2
lens6_imon=2.9831E-4
ql6_vset=1.0E-1
ql6_vmon=9.48906E-2
ql6_imon=4.00088E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.258E0
ionrepsh_imon=8.51778E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33492E1
lens5b_imon=2.17693E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74573E1
cs_ef2b_imon=3.14272E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45915E0
os_ea2_imon=-6.66986E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06111E2
lens4b_imon=2.00644E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71174E1
cs_ef2a_imon=3.16146E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05276E0
os_ef2alow_imon=-2.35641E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.87213E-1
os_ef2bup_imon=-5.05578E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1134E1
os_restr2_imon=3.39211E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23053E2
cs_ionfoca_imon=6.27238E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01797E1
cs_anode2_imon=2.10225E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73535E1
iondef1_imon=1.11865E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68435E1
iondef4_imon=1.11224E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=4.78405E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81665E-1
olens1_imon=7.13835E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15657E0
cs_ionaccel_imon=-7.85084E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.47316E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56447E1
einzel_imon=7.80677E-6
window_vset=0.0E0
window_vmon=2.47976E-1
window_imon=-6.80569E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82631E2
mask1_imon=2.39156E-4
mask2_vset=0.0E0
mask2_vmon=-1.86464E1
mask2_imon=-4.85955E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92691E3
multa_neg_imon=7.63647E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93699E3
defgrida_imon=6.47908E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50145E3
multb_neg_imon=7.11971E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.54729E0
defgridb_imon=6.48616E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33257E1
os_fil1_imon=9.41051E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07774E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61553E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31841E1
cs_fil1_imon=6.7524E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.16705E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63978E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.5602E-2
os_fil2_imon=-2.37765E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.19338E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.25916E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3004E-1
cs_fil2_imon=-2.44372E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.53866E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21791E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29098E-3
inlet_lpb_pmon=3.01347E-1
chamber_ion_pmon=1.19809E-7
chamber_cvt_pmon=2.52318E-3
foreline_cvt_pmon=2.52318E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.32573E-1
res40_imon=-2.46093E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=219
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09557E0	-7.5748E-1	-7.35211E-1	-9.19483E0	-9.19015E0	4.36306E-3	9.54151E-2	2.73252E1	-3.2672E1	-3.26437E1	2.67872E1	1.20055E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.0148E-1
2.0E0	4.4E1	0.0E0	3.16E2	1.6E2	-2.09549E0	-7.57456E-1	-7.35712E-1	-9.1948E0	-9.18994E0	4.45843E-3	9.48906E-2	2.73039E1	-3.26634E1	-3.26315E1	2.68178E1	1.20055E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.01223E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09611E0	-7.57527E-1	-7.35307E-1	-9.19476E0	-9.19018E0	4.52995E-3	9.49621E-2	2.73159E1	-3.26458E1	-3.26567E1	2.69151E1	1.19978E-7	2.51693E-3	2.51693E-3	6.31299E-3	3.00144E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-2.09533E0	-7.57504E-1	-7.35641E-1	-9.19478E0	-9.18996E0	4.60148E-3	9.4986E-2	2.72803E1	-3.26467E1	-3.26119E1	2.68372E1	1.19965E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.01085E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09557E0	-7.57527E-1	-7.35664E-1	-9.19459E0	-9.18984E0	4.57764E-3	9.52005E-2	2.72889E1	-3.26434E1	-3.2593E1	2.6816E1	1.19953E-7	2.52276E-3	2.52276E-3	6.29665E-3	2.99686E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09526E0	-7.57909E-1	-7.35497E-1	-9.19461E0	-9.18996E0	4.36306E-3	9.52244E-2	2.73182E1	-3.26152E1	-3.2634E1	2.68155E1	1.19891E-7	2.51603E-3	2.51603E-3	6.29684E-3	3.01104E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0948E0	-7.57432E-1	-7.35378E-1	-9.19499E0	-9.18996E0	4.50611E-3	9.53674E-2	2.73246E1	-3.26267E1	-3.26104E1	2.68277E1	1.20177E-7	2.51886E-3	2.51886E-3	6.30221E-3	3.00741E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09611E0	-7.57527E-1	-7.35259E-1	-9.19473E0	-9.18994E0	4.52995E-3	9.52482E-2	2.73444E1	-3.26402E1	-3.26055E1	2.68204E1	1.20188E-7	2.52147E-3	2.52147E-3	6.32518E-3	3.01326E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09549E0	-7.57599E-1	-7.35307E-1	-9.19487E0	-9.19018E0	4.48227E-3	9.51529E-2	2.73232E1	-3.2656E1	-3.26048E1	2.67947E1	1.1988E-7	2.52405E-3	2.52405E-3	6.31779E-3	3.00989E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09456E0	-7.57504E-1	-7.35426E-1	-9.19466E0	-9.18987E0	4.52995E-3	9.52244E-2	2.73302E1	-3.26494E1	-3.26437E1	2.68226E1	1.19937E-7	2.51384E-3	2.51384E-3	6.34164E-3	2.9917E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0958E0	-7.57957E-1	-7.35331E-1	-9.19456E0	-9.19008E0	4.50611E-3	9.52959E-2	2.73175E1	-3.26632E1	-3.26298E1	2.67519E1	1.19839E-7	2.51422E-3	2.51422E-3	6.32267E-3	2.97768E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09487E0	-7.57527E-1	-7.35283E-1	-9.19507E0	-9.19034E0	4.29153E-3	9.52959E-2	2.73381E1	-3.26861E1	-3.26236E1	2.6822E1	1.1995E-7	2.51238E-3	2.51238E-3	6.34231E-3	3.02025E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09518E0	-7.57194E-1	-7.35235E-1	-9.19449E0	-9.19018E0	4.57764E-3	9.50336E-2	2.73351E1	-3.26771E1	-3.2623E1	2.6816E1	1.19757E-7	2.51007E-3	2.51007E-3	6.32936E-3	3.01609E-1
1.7E1	2.0E0	0.0E0	6.87E2	4.7E2	-2.09549E0	-7.5748E-1	-7.35235E-1	-9.19449E0	-9.18999E0	4.72069E-3	9.51052E-2	2.73237E1	-3.26807E1	-3.26128E1	2.68412E1	1.19913E-7	2.52099E-3	2.52099E-3	6.28552E-3	2.9978E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09426E0	-7.57837E-1	-7.35116E-1	-9.19452E0	-9.19001E0	4.60148E-3	9.50336E-2	2.73075E1	-3.26326E1	-3.26272E1	2.68256E1	1.20122E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.00041E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09518E0	-7.57909E-1	-7.35116E-1	-9.19476E0	-9.19011E0	4.57764E-3	9.5129E-2	2.73352E1	-3.26803E1	-3.26207E1	2.684E1	1.19653E-7	2.51771E-3	2.51771E-3	6.28552E-3	3.01085E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09487E0	-7.5767E-1	-7.35283E-1	-9.19473E0	-9.19003E0	4.45843E-3	9.50336E-2	2.73093E1	-3.26284E1	-3.26597E1	2.68034E1	1.19851E-7	2.51417E-3	2.51417E-3	6.29128E-3	2.99175E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09619E0	-7.57647E-1	-7.35164E-1	-9.19459E0	-9.19006E0	4.69685E-3	9.49144E-2	2.73068E1	-3.26808E1	-3.26344E1	2.68065E1	1.20383E-7	2.5199E-3	2.5199E-3	6.29098E-3	3.00302E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0958E0	-7.58004E-1	-7.35402E-1	-9.19478E0	-9.19015E0	4.3869E-3	9.51767E-2	2.73267E1	-3.26494E1	-3.26326E1	2.68016E1	1.19967E-7	2.51447E-3	2.51447E-3	6.32273E-3	2.99421E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09495E0	-7.57813E-1	-7.35307E-1	-9.1948E0	-9.19025E0	4.76837E-3	9.48906E-2	2.73535E1	-3.26638E1	-3.26266E1	2.68435E1	1.19809E-7	2.52318E-3	2.52318E-3	6.29098E-3	3.01347E-1