[Scan]
initial_time=2016-01-18T23:13:18
final_time=2016-01-18T23:13:37
ip_count=19
run=1024
dataset=11
scan=819
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09619E0
qbias_imon=-1.08826E-4
ql1_vset=
ql1_vmon=-7.5767E-1
ql1_imon=1.42007E-8
ql2_vset=
ql2_vmon=-7.35116E-1
ql2_imon=2.03094E-9
ql3_vset=
ql3_vmon=-9.19421E0
ql3_imon=4.7549E-10
ql4_vset=
ql4_vmon=-9.18992E0
ql4_imon=-2.39837E-10
mult1=-9.61021E-9
mult2=-2.68125E-9
rf_tmon=-6.02753E-3
rf_agc=3.23856E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.8399E-3
ql5_imon=1.57466E-9
bslens_vset=-6.2E0
bslens_vmon=-6.70603E0
bslens_imon=2.6459E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19415E1
lens5a_imon=2.00025E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12452E2
lens4a_imon=2.04979E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54028E1
cs_ef1b_imon=3.17889E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04608E2
lens23_imon=1.02055E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04748E1
cs_ea1_imon=1.09271E-5
lens1_vset=-5.0E0
lens1_vmon=-5.4089E0
lens1_imon=2.73155E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64842E1
os_ef1alow_imon=2.96948E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03671E1
cs_ea2_imon=1.35551E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84063E1
cs_ef1a_imon=3.04616E-5
olens2_vset=9.7E-1
olens2_vmon=9.70006E-1
olens2_imon=1.1822E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11454E1
os_restr1_imon=4.28468E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1504E1
os_ea1_imon=2.43591E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63577E1
os_ef1bup_imon=3.08158E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23328E0
cs_ionrep_imon=9.40476E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91939E2
cs_nozzle_imon=1.93642E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0177E1
cs_anode1_imon=1.96916E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20427E0
olens4_imon=3.18401E-8
tplens_vset=1.4E-1
tplens_vmon=1.71476E0
tplens_imon=-2.93578E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26364E1
iondef3_imon=1.50852E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26719E1
iondef2_imon=1.5673E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0291E2
lens6_imon=2.98221E-4
ql6_vset=1.0E-1
ql6_vmon=9.47237E-2
ql6_imon=4.03197E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29363E0
ionrepsh_imon=8.70785E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33794E1
lens5b_imon=2.1809E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74839E1
cs_ef2b_imon=3.14152E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45001E0
os_ea2_imon=-6.12833E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06091E2
lens4b_imon=2.00638E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71271E1
cs_ef2a_imon=3.1641E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04548E0
os_ef2alow_imon=-2.35425E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.87477E-1
os_ef2bup_imon=-5.14891E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11169E1
os_restr2_imon=3.38985E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23024E2
cs_ionfoca_imon=6.29266E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01562E1
cs_anode2_imon=2.08632E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73082E1
iondef1_imon=1.1184E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68208E1
iondef4_imon=1.10547E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=4.73413E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81569E-1
olens1_imon=7.13697E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15544E0
cs_ionaccel_imon=-9.76383E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02071E2
cs_ionfocb_imon=1.47448E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56366E1
einzel_imon=7.82018E-6
window_vset=0.0E0
window_vmon=2.36684E-1
window_imon=-7.00031E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82634E2
mask1_imon=2.39162E-4
mask2_vset=0.0E0
mask2_vmon=-1.86487E1
mask2_imon=-5.56016E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92671E3
multa_neg_imon=7.48144E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.80789E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50174E3
multb_neg_imon=6.72613E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3775E0
defgridb_imon=6.30176E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33255E1
os_fil1_imon=9.41479E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07511E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61619E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31818E1
cs_fil1_imon=7.18223E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.10242E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64118E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.47283E-2
os_fil2_imon=-2.47063E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.08334E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.33256E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3091E-1
cs_fil2_imon=-2.37333E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.54491E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21877E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32328E-3
inlet_lpb_pmon=3.01104E-1
chamber_ion_pmon=1.19941E-7
chamber_cvt_pmon=2.52025E-3
foreline_cvt_pmon=2.52025E-3
chamber_tmon=1.40041E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.21663E-1
res40_imon=-2.40096E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09557E0	-7.57909E-1	-7.35831E-1	-9.19473E0	-9.18989E0	4.673E-3	9.51529E-2	2.7357E1	-3.26667E1	-3.26048E1	2.68719E1	1.19682E-7	2.52147E-3	2.52147E-3	6.31332E-3	2.98232E-1
2.0E0	2.8E1	0.0E0	3.16E2	1.6E2	-2.09541E0	-7.57718E-1	-7.35426E-1	-9.19499E0	-9.18987E0	4.55379E-3	9.51767E-2	2.734E1	-3.26682E1	-3.26585E1	2.68352E1	1.20158E-7	2.52061E-3	2.52061E-3	6.32356E-3	2.9943E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09464E0	-7.57766E-1	-7.3545E-1	-9.19507E0	-9.18961E0	4.48227E-3	9.51767E-2	2.7337E1	-3.26782E1	-3.25999E1	2.68142E1	1.19925E-7	2.51804E-3	2.51804E-3	6.30182E-3	2.99613E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.0951E0	-7.57957E-1	-7.35474E-1	-9.19499E0	-9.18977E0	4.52995E-3	9.51052E-2	2.73291E1	-3.26717E1	-3.26218E1	2.68106E1	1.1974E-7	2.51814E-3	2.51814E-3	6.31269E-3	3.00852E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09565E0	-7.58052E-1	-7.35617E-1	-9.19497E0	-9.19008E0	4.74453E-3	9.5129E-2	2.7352E1	-3.26506E1	-3.26332E1	2.68308E1	1.19757E-7	2.51225E-3	2.51225E-3	6.32386E-3	3.01085E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0951E0	-7.57813E-1	-7.35593E-1	-9.1948E0	-9.18982E0	4.64916E-3	9.50098E-2	2.73281E1	-3.26484E1	-3.26101E1	2.68274E1	1.19601E-7	2.52318E-3	2.52318E-3	6.3074E-3	2.9978E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09565E0	-7.57504E-1	-7.35617E-1	-9.19507E0	-9.18992E0	4.62532E-3	9.4986E-2	2.73265E1	-3.26297E1	-3.26193E1	2.68665E1	1.19902E-7	2.51525E-3	2.51525E-3	6.31278E-3	2.99941E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09487E0	-7.57885E-1	-7.35879E-1	-9.19492E0	-9.18987E0	4.76837E-3	9.48191E-2	2.73254E1	-3.26596E1	-3.26249E1	2.68671E1	1.19861E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.00563E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09518E0	-7.57861E-1	-7.35497E-1	-9.1948E0	-9.18989E0	4.62532E-3	9.48906E-2	2.73141E1	-3.26284E1	-3.26026E1	2.68196E1	1.20055E-7	2.51739E-3	2.51739E-3	6.31278E-3	2.9943E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09518E0	-7.57933E-1	-7.35068E-1	-9.19466E0	-9.18972E0	5.00679E-3	9.49144E-2	2.73231E1	-3.26771E1	-3.2599E1	2.68328E1	1.19809E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.00563E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.0948E0	-7.57551E-1	-7.35068E-1	-9.19478E0	-9.18956E0	4.57764E-3	9.48906E-2	2.73357E1	-3.26368E1	-3.26386E1	2.68696E1	1.20226E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.00302E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09441E0	-7.57408E-1	-7.35211E-1	-9.19461E0	-9.18989E0	4.48227E-3	9.51767E-2	2.73333E1	-3.26476E1	-3.26488E1	2.68569E1	1.20278E-7	2.51771E-3	2.51771E-3	6.33486E-3	3.01085E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09456E0	-7.5736E-1	-7.35259E-1	-9.19464E0	-9.18989E0	4.98295E-3	9.52721E-2	2.7308E1	-3.26048E1	-3.26284E1	2.68526E1	1.20017E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.00824E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09472E0	-7.57432E-1	-7.35235E-1	-9.19473E0	-9.18996E0	4.93526E-3	9.50575E-2	2.73464E1	-3.26549E1	-3.26266E1	2.6846E1	1.19902E-7	2.51954E-3	2.51954E-3	6.34518E-3	2.9892E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09464E0	-7.57694E-1	-7.35044E-1	-9.19459E0	-9.18992E0	4.64916E-3	9.51529E-2	2.73484E1	-3.26717E1	-3.26158E1	2.68166E1	1.198E-7	2.52061E-3	2.52061E-3	6.33436E-3	2.9943E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09526E0	-7.5767E-1	-7.35044E-1	-9.19456E0	-9.19018E0	4.72069E-3	9.53674E-2	2.73063E1	-3.26771E1	-3.2611E1	2.68366E1	1.20017E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.01085E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09503E0	-7.5779E-1	-7.34949E-1	-9.19459E0	-9.19015E0	4.36306E-3	9.50098E-2	2.73281E1	-3.26567E1	-3.26077E1	2.68827E1	1.19653E-7	2.51225E-3	2.51225E-3	6.31837E-3	3.01871E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09503E0	-7.57527E-1	-7.34854E-1	-9.19461E0	-9.19001E0	4.31538E-3	9.50336E-2	2.73363E1	-3.2638E1	-3.26266E1	2.68124E1	1.19697E-7	2.51847E-3	2.51847E-3	6.32356E-3	2.9943E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09518E0	-7.57599E-1	-7.34758E-1	-9.19433E0	-9.19013E0	4.52995E-3	9.48906E-2	2.73144E1	-3.26735E1	-3.26086E1	2.68238E1	1.20174E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.00302E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09619E0	-7.5767E-1	-7.35116E-1	-9.19421E0	-9.18992E0	4.8399E-3	9.47237E-2	2.73082E1	-3.26719E1	-3.26364E1	2.68208E1	1.19941E-7	2.52025E-3	2.52025E-3	6.32328E-3	3.01104E-1