[Scan]
initial_time=2016-01-18T23:14:38
final_time=2016-01-18T23:14:57
ip_count=19
run=1024
dataset=11
scan=822
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09433E0
qbias_imon=-1.08776E-4
ql1_vset=
ql1_vmon=-7.57289E-1
ql1_imon=1.42104E-8
ql2_vset=
ql2_vmon=-7.35092E-1
ql2_imon=2.03168E-9
ql3_vset=
ql3_vmon=-9.19456E0
ql3_imon=3.72541E-10
ql4_vset=
ql4_vmon=-9.19034E0
ql4_imon=-2.3644E-10
mult1=-9.55847E-9
mult2=-2.80949E-9
rf_tmon=-4.83392E-3
rf_agc=3.31026E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.673E-3
ql5_imon=1.74205E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68777E0
bslens_imon=2.59543E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19262E1
lens5a_imon=2.0065E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12528E2
lens4a_imon=2.04635E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53944E1
cs_ef1b_imon=3.16658E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04621E2
lens23_imon=1.02453E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05E1
cs_ea1_imon=1.09193E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42784E0
lens1_imon=2.88383E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65022E1
os_ef1alow_imon=2.97196E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03083E1
cs_ea2_imon=1.35977E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8433E1
cs_ef1a_imon=3.05018E-5
olens2_vset=9.7E-1
olens2_vmon=9.69982E-1
olens2_imon=1.17678E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1138E1
os_restr1_imon=4.27992E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15017E1
os_ea1_imon=2.42756E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63638E1
os_ef1bup_imon=3.07661E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.19562E0
cs_ionrep_imon=9.57462E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91934E2
cs_nozzle_imon=1.93247E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01901E1
cs_anode1_imon=1.95997E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20418E0
olens4_imon=3.17076E-8
tplens_vset=1.4E-1
tplens_vmon=1.66487E0
tplens_imon=-3.97893E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26054E1
iondef3_imon=1.49496E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26762E1
iondef2_imon=1.5685E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02899E2
lens6_imon=2.9836E-4
ql6_vset=1.0E-1
ql6_vmon=9.50813E-2
ql6_imon=4.01957E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.31098E0
ionrepsh_imon=8.45709E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33369E1
lens5b_imon=2.20189E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74783E1
cs_ef2b_imon=3.14124E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45698E0
os_ea2_imon=-9.98707E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06095E2
lens4b_imon=2.00821E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71288E1
cs_ef2a_imon=3.19008E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09158E0
os_ef2alow_imon=-2.45046E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.76412E-1
os_ef2bup_imon=-5.17138E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11136E1
os_restr2_imon=3.37772E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23023E2
cs_ionfoca_imon=6.28991E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01809E1
cs_anode2_imon=2.08702E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73116E1
iondef1_imon=1.10923E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68476E1
iondef4_imon=1.1011E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=4.74482E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81569E-1
olens1_imon=7.12744E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14116E0
cs_ionaccel_imon=-9.63311E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02061E2
cs_ionfocb_imon=1.47439E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56436E1
einzel_imon=7.84206E-6
window_vset=0.0E0
window_vmon=2.54187E-1
window_imon=-7.39321E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82629E2
mask1_imon=2.39202E-4
mask2_vset=0.0E0
mask2_vmon=-1.86552E1
mask2_imon=-6.73226E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92638E3
multa_neg_imon=7.63155E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.96824E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50148E3
multb_neg_imon=7.32513E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.30532E0
defgridb_imon=6.02014E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33252E1
os_fil1_imon=9.42114E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07549E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61563E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31822E1
cs_fil1_imon=7.17048E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.37366E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64004E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.44084E-2
os_fil2_imon=-2.49903E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.09705E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.12246E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.2985E-1
cs_fil2_imon=-2.00943E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.68089E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21843E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.99686E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.09827E-1
res40_imon=-2.33663E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=211
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09371E0	-7.57337E-1	-7.35044E-1	-9.19483E0	-9.18987E0	4.24385E-3	9.51052E-2	2.73541E1	-3.26862E1	-3.26254E1	2.68436E1	1.19925E-7	2.51359E-3	2.51359E-3	6.31858E-3	2.98554E-1
2.0E0	3.9E1	0.0E0	3.16E2	1.6E2	-2.09371E0	-7.57098E-1	-7.34973E-1	-9.19464E0	-9.18963E0	4.673E-3	9.50098E-2	2.72922E1	-3.26756E1	-3.26395E1	2.68256E1	1.19991E-7	2.52342E-3	2.52342E-3	6.2863E-3	2.99594E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09441E0	-7.57241E-1	-7.34925E-1	-9.19485E0	-9.18989E0	4.76837E-3	9.4986E-2	2.72473E1	-3.26396E1	-3.26337E1	2.6828E1	1.20031E-7	2.5147E-3	2.5147E-3	6.34099E-3	2.98819E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09333E0	-7.57623E-1	-7.34735E-1	-9.19478E0	-9.19025E0	4.57764E-3	9.5129E-2	2.73712E1	-3.26915E1	-3.26195E1	2.68128E1	1.19902E-7	2.51739E-3	2.51739E-3	6.33977E-3	2.9841E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09433E0	-7.5736E-1	-7.34758E-1	-9.19495E0	-9.19003E0	4.48227E-3	9.4986E-2	2.7312E1	-3.26683E1	-3.26081E1	2.68316E1	1.19953E-7	2.51525E-3	2.51525E-3	6.31278E-3	2.9841E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0941E0	-7.57289E-1	-7.34711E-1	-9.19502E0	-9.18989E0	4.76837E-3	9.49383E-2	2.73556E1	-3.26723E1	-3.26158E1	2.68076E1	1.20158E-7	2.52061E-3	2.52061E-3	6.31278E-3	3.01223E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09356E0	-7.57313E-1	-7.34615E-1	-9.1949E0	-9.19001E0	4.55379E-3	9.52721E-2	2.73345E1	-3.26699E1	-3.26272E1	2.6825E1	1.19965E-7	2.51662E-3	2.51662E-3	6.31288E-3	2.9978E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09433E0	-7.5748E-1	-7.34687E-1	-9.19497E0	-9.19001E0	4.50611E-3	9.5129E-2	2.72859E1	-3.26573E1	-3.26326E1	2.68436E1	1.20278E-7	2.51552E-3	2.51552E-3	6.31288E-3	2.9926E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09495E0	-7.57265E-1	-7.34496E-1	-9.1948E0	-9.19006E0	4.60148E-3	9.52244E-2	2.73345E1	-3.26933E1	-3.26206E1	2.68285E1	1.19809E-7	2.51334E-3	2.51334E-3	6.32936E-3	2.9952E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09518E0	-7.56884E-1	-7.35021E-1	-9.19487E0	-9.18987E0	4.72069E-3	9.5129E-2	2.73207E1	-3.27029E1	-3.265E1	2.68562E1	1.198E-7	2.51739E-3	2.51739E-3	6.31278E-3	2.9892E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09449E0	-7.57146E-1	-7.34758E-1	-9.19478E0	-9.18994E0	4.45843E-3	9.5439E-2	2.73257E1	-3.26944E1	-3.26337E1	2.68128E1	1.19925E-7	2.51581E-3	2.51581E-3	6.31299E-3	3.00144E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09503E0	-7.5736E-1	-7.34806E-1	-9.19437E0	-9.19018E0	4.33922E-3	9.50098E-2	2.73147E1	-3.26482E1	-3.26242E1	2.68797E1	1.19851E-7	2.51739E-3	2.51739E-3	6.33436E-3	2.99941E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09464E0	-7.57504E-1	-7.34973E-1	-9.19483E0	-9.18996E0	4.36306E-3	9.49383E-2	2.73432E1	-3.27023E1	-3.26203E1	2.68331E1	1.19757E-7	2.5199E-3	2.5199E-3	6.29645E-3	3.01609E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0948E0	-7.57456E-1	-7.35164E-1	-9.19471E0	-9.18972E0	4.50611E-3	9.54866E-2	2.7314E1	-3.26674E1	-3.26286E1	2.68132E1	1.20177E-7	2.51783E-3	2.51783E-3	6.3126E-3	3.00247E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09464E0	-7.57408E-1	-7.35068E-1	-9.19461E0	-9.18984E0	4.3869E-3	9.52005E-2	2.73291E1	-3.26591E1	-3.2629E1	2.68052E1	1.19674E-7	2.52222E-3	2.52222E-3	6.32483E-3	3.01748E-1
1.9E1	2.0E0	0.0E0	7.68E2	5.29E2	-2.09379E0	-7.57194E-1	-7.35044E-1	-9.19437E0	-9.19003E0	4.29153E-3	9.52482E-2	2.73508E1	-3.26434E1	-3.25906E1	2.68286E1	1.19913E-7	2.51771E-3	2.51771E-3	6.33486E-3	2.9926E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09433E0	-7.57241E-1	-7.35068E-1	-9.19447E0	-9.19011E0	4.72069E-3	9.4986E-2	2.73249E1	-3.26795E1	-3.262E1	2.68058E1	1.19965E-7	2.52428E-3	2.52428E-3	6.31288E-3	3.00824E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0941E0	-7.57003E-1	-7.34949E-1	-9.19447E0	-9.19013E0	4.74453E-3	9.52005E-2	2.73346E1	-3.26642E1	-3.26347E1	2.68597E1	1.19902E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.00197E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09379E0	-7.57051E-1	-7.34925E-1	-9.19456E0	-9.19008E0	4.673E-3	9.52721E-2	2.73099E1	-3.26831E1	-3.26008E1	2.68322E1	1.20004E-7	2.51417E-3	2.51417E-3	6.3074E-3	3.02253E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09433E0	-7.57289E-1	-7.35092E-1	-9.19456E0	-9.19034E0	4.673E-3	9.50813E-2	2.73116E1	-3.26762E1	-3.26054E1	2.68476E1	1.20055E-7	2.51847E-3	2.51847E-3	6.32356E-3	2.99686E-1