[Scan]
initial_time=2016-01-18T23:15:04
final_time=2016-01-18T23:15:24
ip_count=19
run=1024
dataset=11
scan=823
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09348E0
qbias_imon=-1.08804E-4
ql1_vset=
ql1_vmon=-7.57003E-1
ql1_imon=1.42158E-8
ql2_vset=
ql2_vmon=-7.35474E-1
ql2_imon=1.99847E-9
ql3_vset=
ql3_vmon=-9.19476E0
ql3_imon=3.17073E-10
ql4_vset=
ql4_vmon=-9.19006E0
ql4_imon=-2.50792E-10
mult1=-9.69223E-9
mult2=-2.68867E-9
rf_tmon=-4.30814E-3
rf_agc=3.37001E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.57764E-3
ql5_imon=1.70748E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65914E0
bslens_imon=2.46185E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19388E1
lens5a_imon=2.01412E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12481E2
lens4a_imon=2.05086E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53546E1
cs_ef1b_imon=3.16636E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04623E2
lens23_imon=1.02411E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04776E1
cs_ea1_imon=1.09387E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39085E0
lens1_imon=2.77686E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64881E1
os_ef1alow_imon=2.98183E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03301E1
cs_ea2_imon=1.35898E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84342E1
cs_ef1a_imon=3.03361E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=1.18439E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11413E1
os_restr1_imon=4.30624E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14716E1
os_ea1_imon=2.41478E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63751E1
os_ef1bup_imon=3.08539E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20255E0
cs_ionrep_imon=9.47696E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91933E2
cs_nozzle_imon=1.93441E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01433E1
cs_anode1_imon=1.96497E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20449E0
olens4_imon=3.18372E-8
tplens_vset=1.4E-1
tplens_vmon=1.66916E0
tplens_imon=-2.63493E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26398E1
iondef3_imon=1.5094E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26536E1
iondef2_imon=1.57311E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02924E2
lens6_imon=2.98109E-4
ql6_vset=1.0E-1
ql6_vmon=9.50813E-2
ql6_imon=4.01492E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.281E0
ionrepsh_imon=8.59919E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33805E1
lens5b_imon=2.17516E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74716E1
cs_ef2b_imon=3.14481E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45915E0
os_ea2_imon=-6.06816E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.061E2
lens4b_imon=2.00566E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71182E1
cs_ef2a_imon=3.16219E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05108E0
os_ef2alow_imon=-2.47032E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.9781E-1
os_ef2bup_imon=-5.03506E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11338E1
os_restr2_imon=3.39121E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23023E2
cs_ionfoca_imon=6.29999E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01815E1
cs_anode2_imon=2.08834E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7361E1
iondef1_imon=1.10591E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68671E1
iondef4_imon=1.09859E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=4.74916E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8145E-1
olens1_imon=7.12937E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12956E0
cs_ionaccel_imon=-7.18797E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02094E2
cs_ionfocb_imon=1.47417E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56266E1
einzel_imon=7.83728E-6
window_vset=0.0E0
window_vmon=2.38537E-1
window_imon=-7.04896E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82635E2
mask1_imon=2.39063E-4
mask2_vset=0.0E0
mask2_vmon=-1.86419E1
mask2_imon=-5.31134E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92634E3
multa_neg_imon=7.27191E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93711E3
defgrida_imon=6.57818E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50141E3
multb_neg_imon=7.18696E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38784E0
defgridb_imon=5.99064E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33252E1
os_fil1_imon=9.39837E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07642E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61471E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31821E1
cs_fil1_imon=6.63291E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.16405E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63691E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.52221E-2
os_fil2_imon=-2.32745E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.20196E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.34015E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30026E-1
cs_fil2_imon=-2.48963E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.92973E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21813E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.9943E-1
chamber_ion_pmon=1.19646E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.72731E-1
res40_imon=-2.35912E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.0948E0	-7.57146E-1	-7.35092E-1	-9.19483E0	-9.18992E0	4.43459E-3	9.49621E-2	2.73523E1	-3.26632E1	-3.26272E1	2.68617E1	1.20142E-7	2.51498E-3	2.51498E-3	6.33919E-3	3.02875E-1
2.0E0	3.4E1	0.0E0	3.16E2	1.6E2	-2.09449E0	-7.57098E-1	-7.35021E-1	-9.19466E0	-9.19013E0	4.33922E-3	9.52244E-2	2.73273E1	-3.26861E1	-3.26038E1	2.6846E1	1.19902E-7	2.51417E-3	2.51417E-3	6.31278E-3	3.00966E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09472E0	-7.57241E-1	-7.35354E-1	-9.19497E0	-9.1902E0	4.3869E-3	9.50336E-2	2.73092E1	-3.26455E1	-3.26225E1	2.68406E1	1.19925E-7	2.5225E-3	2.5225E-3	6.32418E-3	2.98554E-1
4.0E0	9.0E0	0.0E0	6.55E2	3.98E2	-2.09426E0	-7.57122E-1	-7.35092E-1	-9.19495E0	-9.18992E0	4.45843E-3	9.49383E-2	2.72839E1	-3.26638E1	-3.26012E1	2.67758E1	1.20209E-7	2.51739E-3	2.51739E-3	6.33436E-3	2.9892E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09394E0	-7.57289E-1	-7.35164E-1	-9.19473E0	-9.18999E0	4.26769E-3	9.50098E-2	2.73305E1	-3.26402E1	-3.26242E1	2.68611E1	1.20158E-7	2.52061E-3	2.52061E-3	6.32356E-3	2.99175E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0934E0	-7.57241E-1	-7.35259E-1	-9.19487E0	-9.18994E0	4.14848E-3	9.49383E-2	2.73327E1	-3.26512E1	-3.26278E1	2.68466E1	1.20209E-7	2.51525E-3	2.51525E-3	6.31278E-3	2.99941E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09394E0	-7.57527E-1	-7.35259E-1	-9.19476E0	-9.1902E0	4.22001E-3	9.49144E-2	2.73257E1	-3.26638E1	-3.2606E1	2.68094E1	1.19595E-7	2.51632E-3	2.51632E-3	6.3074E-3	3.0148E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09456E0	-7.57456E-1	-7.35116E-1	-9.19492E0	-9.18999E0	4.33922E-3	9.52244E-2	2.72947E1	-3.26621E1	-3.2634E1	2.68022E1	1.20069E-7	2.51334E-3	2.51334E-3	6.32386E-3	2.9952E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09426E0	-7.57313E-1	-7.35402E-1	-9.1948E0	-9.18992E0	4.43459E-3	9.5439E-2	2.7324E1	-3.26614E1	-3.2652E1	2.68328E1	1.19913E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.00824E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09402E0	-7.57384E-1	-7.35044E-1	-9.19487E0	-9.19006E0	4.48227E-3	9.50098E-2	2.73291E1	-3.26591E1	-3.26146E1	2.68232E1	1.19851E-7	2.5131E-3	2.5131E-3	6.29665E-3	3.00197E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09441E0	-7.57265E-1	-7.34925E-1	-9.19495E0	-9.18994E0	4.52995E-3	9.47714E-2	2.73195E1	-3.26609E1	-3.26284E1	2.68556E1	1.19925E-7	2.51248E-3	2.51248E-3	6.32418E-3	2.97499E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09464E0	-7.56907E-1	-7.35044E-1	-9.19466E0	-9.19018E0	4.57764E-3	9.48668E-2	2.73303E1	-3.2647E1	-3.2623E1	2.68178E1	1.19705E-7	2.51334E-3	2.51334E-3	6.32936E-3	2.9926E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09495E0	-7.57027E-1	-7.34639E-1	-9.19516E0	-9.19042E0	4.57764E-3	9.47952E-2	2.73225E1	-3.26801E1	-3.26398E1	2.68142E1	1.19851E-7	2.51847E-3	2.51847E-3	6.32896E-3	3.00197E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0941E0	-7.56979E-1	-7.34782E-1	-9.19511E0	-9.19023E0	4.33922E-3	9.48429E-2	2.73222E1	-3.26517E1	-3.25893E1	2.68496E1	1.20084E-7	2.51804E-3	2.51804E-3	6.31299E-3	2.99613E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0941E0	-7.57003E-1	-7.34639E-1	-9.19509E0	-9.19011E0	4.26769E-3	9.5129E-2	2.73174E1	-3.26725E1	-3.26267E1	2.68327E1	1.19861E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.01085E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0948E0	-7.56955E-1	-7.34782E-1	-9.19487E0	-9.19013E0	4.62532E-3	9.47714E-2	2.73387E1	-3.26667E1	-3.26296E1	2.67848E1	1.19757E-7	2.51793E-3	2.51793E-3	6.33706E-3	3.01766E-1
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-2.09464E0	-7.57408E-1	-7.35211E-1	-9.19507E0	-9.19025E0	4.60148E-3	9.48906E-2	2.73099E1	-3.26801E1	-3.26068E1	2.68514E1	1.20069E-7	2.51334E-3	2.51334E-3	6.32386E-3	3.02133E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09449E0	-7.57051E-1	-7.35426E-1	-9.19528E0	-9.1903E0	4.45843E-3	9.50575E-2	2.73434E1	-3.26585E1	-3.26266E1	2.68214E1	1.198E-7	2.51203E-3	2.51203E-3	6.29128E-3	3.0148E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0941E0	-7.56884E-1	-7.35259E-1	-9.19495E0	-9.19006E0	4.55379E-3	9.4986E-2	2.7337E1	-3.26726E1	-3.26585E1	2.68157E1	1.19809E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.01347E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09348E0	-7.57003E-1	-7.35474E-1	-9.19476E0	-9.19006E0	4.57764E-3	9.50813E-2	2.7361E1	-3.26536E1	-3.26398E1	2.68671E1	1.19646E-7	2.51954E-3	2.51954E-3	6.32356E-3	2.9943E-1