[Scan]
initial_time=2016-01-18T23:15:31
final_time=2016-01-18T23:15:50
ip_count=19
run=1024
dataset=11
scan=824
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09255E0
qbias_imon=-1.08757E-4
ql1_vset=
ql1_vmon=-7.57313E-1
ql1_imon=1.41916E-8
ql2_vset=
ql2_vmon=-7.35164E-1
ql2_imon=2.06864E-9
ql3_vset=
ql3_vmon=-9.19497E0
ql3_imon=3.16191E-10
ql4_vset=
ql4_vmon=-9.1898E0
ql4_imon=-2.34115E-10
mult1=-1.02481E-8
mult2=-2.70362E-9
rf_tmon=-4.42978E-3
rf_agc=3.35426E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.45843E-3
ql5_imon=1.73131E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67215E0
bslens_imon=2.59183E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19532E1
lens5a_imon=2.00038E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12475E2
lens4a_imon=2.04996E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53965E1
cs_ef1b_imon=3.16434E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04641E2
lens23_imon=1.02521E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04826E1
cs_ea1_imon=1.084E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38037E0
lens1_imon=2.80091E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64638E1
os_ef1alow_imon=2.97946E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03558E1
cs_ea2_imon=1.33454E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84262E1
cs_ef1a_imon=3.04505E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.18269E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11616E1
os_restr1_imon=4.29022E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15083E1
os_ea1_imon=2.4373E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63455E1
os_ef1bup_imon=3.07712E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23227E0
cs_ionrep_imon=9.48089E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91934E2
cs_nozzle_imon=1.93615E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02019E1
cs_anode1_imon=1.96062E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20411E0
olens4_imon=3.18121E-8
tplens_vset=1.4E-1
tplens_vmon=1.71053E0
tplens_imon=-5.06042E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.2626E1
iondef3_imon=1.51226E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26493E1
iondef2_imon=1.5649E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02949E2
lens6_imon=2.98274E-4
ql6_vset=1.0E-1
ql6_vmon=9.48191E-2
ql6_imon=3.98841E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24969E0
ionrepsh_imon=8.39941E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33694E1
lens5b_imon=2.16801E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74585E1
cs_ef2b_imon=3.12506E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.43174E0
os_ea2_imon=-7.86015E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06114E2
lens4b_imon=2.00803E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.713E1
cs_ef2a_imon=3.1683E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06537E0
os_ef2alow_imon=-2.41768E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.83008E-1
os_ef2bup_imon=-5.22878E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11165E1
os_restr2_imon=3.39319E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23028E2
cs_ionfoca_imon=6.28847E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01863E1
cs_anode2_imon=2.10117E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73088E1
iondef1_imon=1.10671E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68881E1
iondef4_imon=1.11332E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=4.74937E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81474E-1
olens1_imon=7.13869E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14876E0
cs_ionaccel_imon=-8.28332E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02047E2
cs_ionfocb_imon=1.47493E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56669E1
einzel_imon=7.79956E-6
window_vset=0.0E0
window_vmon=2.72603E-1
window_imon=-7.63461E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82634E2
mask1_imon=2.39135E-4
mask2_vset=0.0E0
mask2_vmon=-1.8653E1
mask2_imon=-4.89559E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92627E3
multa_neg_imon=7.18454E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9372E3
defgrida_imon=6.43471E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50126E3
multb_neg_imon=7.29269E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.47375E0
defgridb_imon=6.40947E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33231E1
os_fil1_imon=9.41159E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07978E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6156E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31836E1
cs_fil1_imon=7.31702E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.92389E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63843E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.51823E-2
os_fil2_imon=-2.49178E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.15734E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.37638E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32371E-1
cs_fil2_imon=-2.48577E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.31041E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21785E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.01365E-1
chamber_ion_pmon=1.20161E-7
chamber_cvt_pmon=2.51956E-3
foreline_cvt_pmon=2.51956E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.76421E-1
res40_imon=-2.5294E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09495E0	-7.57122E-1	-7.35259E-1	-9.19485E0	-9.19006E0	4.50611E-3	9.49383E-2	2.7311E1	-3.26809E1	-3.2616E1	2.68192E1	1.20017E-7	2.52318E-3	2.52318E-3	6.31288E-3	2.9926E-1
2.0E0	4.1E1	0.0E0	3.16E2	1.6E2	-2.09487E0	-7.57265E-1	-7.35545E-1	-9.19471E0	-9.19013E0	4.64916E-3	9.50813E-2	2.73394E1	-3.26603E1	-3.26162E1	2.68214E1	1.20192E-7	2.51919E-3	2.51919E-3	6.32328E-3	3.01862E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09487E0	-7.57027E-1	-7.35188E-1	-9.19442E0	-9.19034E0	4.673E-3	9.52721E-2	2.73277E1	-3.26486E1	-3.26411E1	2.68508E1	1.19872E-7	2.51693E-3	2.51693E-3	6.34099E-3	3.02277E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09402E0	-7.5736E-1	-7.34997E-1	-9.19499E0	-9.19006E0	4.3869E-3	9.52482E-2	2.73375E1	-3.26579E1	-3.26212E1	2.68442E1	1.19902E-7	2.52061E-3	2.52061E-3	6.29128E-3	3.01738E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09387E0	-7.5736E-1	-7.35116E-1	-9.19485E0	-9.19011E0	4.31538E-3	9.52005E-2	2.73131E1	-3.26774E1	-3.26432E1	2.67758E1	1.20017E-7	2.51552E-3	2.51552E-3	6.34037E-3	3.00302E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09371E0	-7.57146E-1	-7.35044E-1	-9.19478E0	-9.19011E0	4.43459E-3	9.53674E-2	2.73075E1	-3.26627E1	-3.26224E1	2.68322E1	1.19925E-7	2.51804E-3	2.51804E-3	6.3074E-3	2.98026E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09379E0	-7.57146E-1	-7.34997E-1	-9.19452E0	-9.18984E0	4.33922E-3	9.5129E-2	2.72901E1	-3.26296E1	-3.26152E1	2.68803E1	1.19913E-7	2.51552E-3	2.51552E-3	6.36244E-3	2.9874E-1
8.0E0	0.0E0	1.0E0	1.332E3	8.73E2	-2.09426E0	-7.56955E-1	-7.34997E-1	-9.19485E0	-9.18987E0	4.72069E-3	9.51052E-2	2.73074E1	-3.26562E1	-3.26112E1	2.68487E1	1.19851E-7	2.52061E-3	2.52061E-3	6.32356E-3	2.97901E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.0948E0	-7.57051E-1	-7.3514E-1	-9.19471E0	-9.18977E0	4.55379E-3	9.52005E-2	2.73213E1	-3.26615E1	-3.2629E1	2.67908E1	1.19941E-7	2.51709E-3	2.51709E-3	6.32328E-3	3.01104E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09518E0	-7.57313E-1	-7.35188E-1	-9.19499E0	-9.19001E0	4.57764E-3	9.55105E-2	2.734E1	-3.26522E1	-3.26248E1	2.68325E1	1.19705E-7	2.51334E-3	2.51334E-3	6.29645E-3	3.01085E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0948E0	-7.57313E-1	-7.35235E-1	-9.19497E0	-9.19018E0	4.52995E-3	9.52721E-2	2.73424E1	-3.26939E1	-3.25888E1	2.68613E1	1.201E-7	2.51725E-3	2.51725E-3	6.33021E-3	3.00794E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09456E0	-7.5736E-1	-7.35021E-1	-9.19492E0	-9.19025E0	4.33922E-3	9.50336E-2	2.73111E1	-3.26554E1	-3.26422E1	2.68501E1	1.19902E-7	2.52061E-3	2.52061E-3	6.32356E-3	3.00966E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09394E0	-7.57408E-1	-7.35044E-1	-9.19456E0	-9.18999E0	4.41074E-3	9.49383E-2	2.73399E1	-3.26615E1	-3.25906E1	2.68149E1	1.20226E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.00041E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09371E0	-7.57122E-1	-7.35354E-1	-9.1949E0	-9.18999E0	4.3869E-3	9.50813E-2	2.73269E1	-3.26644E1	-3.26537E1	2.68389E1	1.20017E-7	2.51552E-3	2.51552E-3	6.32386E-3	2.9926E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09348E0	-7.57122E-1	-7.34973E-1	-9.19483E0	-9.18984E0	4.60148E-3	9.49621E-2	2.73063E1	-3.26425E1	-3.26187E1	2.68346E1	1.20069E-7	2.52099E-3	2.52099E-3	6.31288E-3	2.9874E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09379E0	-7.57003E-1	-7.35235E-1	-9.1948E0	-9.18999E0	4.36306E-3	9.51052E-2	2.73623E1	-3.26579E1	-3.2593E1	2.68244E1	1.19861E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.01609E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09309E0	-7.57027E-1	-7.35092E-1	-9.19487E0	-9.18987E0	4.07696E-3	9.50575E-2	2.73141E1	-3.26729E1	-3.26128E1	2.68797E1	1.20069E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.01871E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0934E0	-7.57265E-1	-7.35021E-1	-9.19485E0	-9.18996E0	4.19617E-3	9.52482E-2	2.73204E1	-3.2659E1	-3.26225E1	2.68134E1	1.19697E-7	2.51525E-3	2.51525E-3	6.30202E-3	2.99175E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09379E0	-7.57241E-1	-7.34901E-1	-9.19468E0	-9.18996E0	4.24385E-3	9.51529E-2	2.73314E1	-3.26585E1	-3.26428E1	2.68447E1	1.19902E-7	2.51847E-3	2.51847E-3	6.33436E-3	3.0071E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09255E0	-7.57313E-1	-7.35164E-1	-9.19497E0	-9.1898E0	4.45843E-3	9.48191E-2	2.73088E1	-3.26493E1	-3.2626E1	2.68881E1	1.20161E-7	2.51956E-3	2.51956E-3	6.3074E-3	3.01365E-1