[Scan]
initial_time=2016-01-18T23:15:57
final_time=2016-01-18T23:16:17
ip_count=19
run=1024
dataset=11
scan=825
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09456E0
qbias_imon=-1.08802E-4
ql1_vset=
ql1_vmon=-7.57194E-1
ql1_imon=1.42013E-8
ql2_vset=
ql2_vmon=-7.35331E-1
ql2_imon=1.99243E-9
ql3_vset=
ql3_vmon=-9.19468E0
ql3_imon=3.12877E-10
ql4_vset=
ql4_vmon=-9.18996E0
ql4_imon=-2.61521E-10
mult1=-9.51162E-9
mult2=-2.80245E-9
rf_tmon=-4.206E-3
rf_agc=3.25225E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.50611E-3
ql5_imon=1.62172E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63369E0
bslens_imon=2.31785E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19388E1
lens5a_imon=2.01191E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12507E2
lens4a_imon=2.04927E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54067E1
cs_ef1b_imon=3.16038E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04624E2
lens23_imon=1.02384E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04363E1
cs_ea1_imon=1.09445E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42063E0
lens1_imon=2.81173E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64831E1
os_ef1alow_imon=2.97802E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03444E1
cs_ea2_imon=1.37924E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8449E1
cs_ef1a_imon=3.04937E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=1.1757E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11376E1
os_restr1_imon=4.2931E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15534E1
os_ea1_imon=2.44631E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63551E1
os_ef1bup_imon=3.07965E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23227E0
cs_ionrep_imon=9.76568E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91918E2
cs_nozzle_imon=1.93553E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01929E1
cs_anode1_imon=1.97179E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20418E0
olens4_imon=3.17429E-8
tplens_vset=1.4E-1
tplens_vmon=1.65585E0
tplens_imon=-6.1419E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26158E1
iondef3_imon=1.5083E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26524E1
iondef2_imon=1.57247E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02906E2
lens6_imon=2.98205E-4
ql6_vset=1.0E-1
ql6_vmon=9.48906E-2
ql6_imon=4.00231E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.31458E0
ionrepsh_imon=8.38499E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33465E1
lens5b_imon=2.21018E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74573E1
cs_ef2b_imon=3.13407E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.40831E0
os_ea2_imon=-6.77866E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06104E2
lens4b_imon=2.0068E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.713E1
cs_ef2a_imon=3.17083E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09901E0
os_ef2alow_imon=-2.4393E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.87813E-1
os_ef2bup_imon=-5.11345E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11346E1
os_restr2_imon=3.3795E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23026E2
cs_ionfoca_imon=6.29676E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01659E1
cs_anode2_imon=2.08315E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73357E1
iondef1_imon=1.09265E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68184E1
iondef4_imon=1.10287E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=4.72593E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81617E-1
olens1_imon=7.10891E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14756E0
cs_ionaccel_imon=-8.57164E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02088E2
cs_ionfocb_imon=1.4745E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56633E1
einzel_imon=7.76713E-6
window_vset=0.0E0
window_vmon=2.44973E-1
window_imon=-6.66154E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82658E2
mask1_imon=2.39358E-4
mask2_vset=0.0E0
mask2_vmon=-1.86422E1
mask2_imon=-6.12094E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9267E3
multa_neg_imon=6.75194E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93732E3
defgrida_imon=6.66542E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50101E3
multb_neg_imon=7.04755E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.59104E0
defgridb_imon=6.23643E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33247E1
os_fil1_imon=9.42072E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.079E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61441E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31823E1
cs_fil1_imon=7.35906E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.9359E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63618E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.58271E-2
os_fil2_imon=-2.44973E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.0312E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.34029E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28616E-1
cs_fil2_imon=-2.39567E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.55067E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21785E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.0148E-1
chamber_ion_pmon=1.19749E-7
chamber_cvt_pmon=2.51203E-3
foreline_cvt_pmon=2.51203E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.77912E-1
res40_imon=-2.39245E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=214
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09464E0	-7.57575E-1	-7.35164E-1	-9.1948E0	-9.18994E0	4.45843E-3	9.54628E-2	2.73039E1	-3.26284E1	-3.26464E1	2.68268E1	1.20017E-7	2.52318E-3	2.52318E-3	6.32936E-3	3.00041E-1
2.0E0	2.9E1	0.0E0	3.16E2	1.6E2	-2.09472E0	-7.57504E-1	-7.35259E-1	-9.1949E0	-9.1902E0	4.98295E-3	9.53436E-2	2.72996E1	-3.26658E1	-3.25979E1	2.68088E1	1.20055E-7	2.52492E-3	2.52492E-3	6.32356E-3	3.00453E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09449E0	-7.5767E-1	-7.3514E-1	-9.19511E0	-9.19011E0	4.79221E-3	9.54628E-2	2.7341E1	-3.26425E1	-3.25964E1	2.68609E1	1.20297E-7	2.52027E-3	2.52027E-3	6.34099E-3	2.98819E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09426E0	-7.57384E-1	-7.35068E-1	-9.19516E0	-9.19011E0	4.8399E-3	9.52244E-2	2.73291E1	-3.26434E1	-3.2593E1	2.68112E1	1.20042E-7	2.52025E-3	2.52025E-3	6.3445E-3	2.97593E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09426E0	-7.57265E-1	-7.35211E-1	-9.19509E0	-9.18989E0	4.86374E-3	9.50813E-2	2.73086E1	-3.26667E1	-3.26254E1	2.68214E1	1.19749E-7	2.51954E-3	2.51954E-3	6.31278E-3	2.9943E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0934E0	-7.57289E-1	-7.34854E-1	-9.19487E0	-9.18987E0	4.81606E-3	9.52244E-2	2.73225E1	-3.26416E1	-3.26008E1	2.68394E1	1.19809E-7	2.51334E-3	2.51334E-3	6.32936E-3	3.00041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09456E0	-7.57337E-1	-7.35331E-1	-9.19471E0	-9.19003E0	4.673E-3	9.53913E-2	2.72965E1	-3.2637E1	-3.26144E1	2.68665E1	1.19913E-7	2.5188E-3	2.5188E-3	6.33486E-3	2.9978E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09426E0	-7.57456E-1	-7.34925E-1	-9.19499E0	-9.19011E0	4.43459E-3	9.52482E-2	2.73139E1	-3.26679E1	-3.26284E1	2.68352E1	1.20297E-7	2.51915E-3	2.51915E-3	6.32418E-3	2.99613E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09518E0	-7.57265E-1	-7.35116E-1	-9.19468E0	-9.19011E0	4.55379E-3	9.4986E-2	2.73568E1	-3.26573E1	-3.26116E1	2.67998E1	1.20004E-7	2.51632E-3	2.51632E-3	6.30202E-3	3.00966E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09526E0	-7.57217E-1	-7.35164E-1	-9.19464E0	-9.1903E0	4.57764E-3	9.51767E-2	2.73452E1	-3.26661E1	-3.2593E1	2.6847E1	1.19697E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.00197E-1
1.4E1	3.0E0	0.0E0	5.66E2	3.82E2	-2.09487E0	-7.57337E-1	-7.35259E-1	-9.19507E0	-9.19003E0	4.8399E-3	9.51052E-2	2.73387E1	-3.26621E1	-3.26152E1	2.6843E1	1.20069E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.00824E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09565E0	-7.57384E-1	-7.35235E-1	-9.19502E0	-9.19018E0	4.95911E-3	9.5129E-2	2.73228E1	-3.26508E1	-3.26284E1	2.68028E1	1.19757E-7	2.51334E-3	2.51334E-3	6.32936E-3	2.9926E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09449E0	-7.57265E-1	-7.35283E-1	-9.19471E0	-9.19013E0	4.98295E-3	9.5129E-2	2.73308E1	-3.26389E1	-3.26242E1	2.68184E1	1.19953E-7	2.50882E-3	2.50882E-3	6.31278E-3	3.01738E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09464E0	-7.57146E-1	-7.35331E-1	-9.19483E0	-9.19006E0	4.62532E-3	9.5129E-2	2.73375E1	-3.2659E1	-3.26065E1	2.68058E1	1.20017E-7	2.52099E-3	2.52099E-3	6.29645E-3	2.99E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09456E0	-7.57384E-1	-7.35402E-1	-9.19468E0	-9.19015E0	4.64916E-3	9.49144E-2	2.73417E1	-3.26502E1	-3.26201E1	2.68702E1	1.19861E-7	2.52099E-3	2.52099E-3	6.32386E-3	2.99E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09364E0	-7.5736E-1	-7.35092E-1	-9.19485E0	-9.18992E0	4.673E-3	9.50575E-2	2.73296E1	-3.2645E1	-3.25887E1	2.67795E1	1.20004E-7	2.51525E-3	2.51525E-3	6.32896E-3	3.02769E-1
2.0E1	9.0E0	0.0E0	8.08E2	5.58E2	-2.09286E0	-7.57217E-1	-7.35164E-1	-9.19468E0	-9.18999E0	4.79221E-3	9.47952E-2	2.73357E1	-3.26699E1	-3.25936E1	2.68743E1	1.20069E-7	2.51552E-3	2.51552E-3	6.34588E-3	3.01871E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09418E0	-7.57241E-1	-7.34925E-1	-9.19483E0	-9.19032E0	4.673E-3	9.47952E-2	2.73181E1	-3.26726E1	-3.2626E1	2.68435E1	1.19861E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.00824E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09387E0	-7.57241E-1	-7.35283E-1	-9.19495E0	-9.18987E0	4.64916E-3	9.47714E-2	2.73281E1	-3.2659E1	-3.26337E1	2.68034E1	1.20174E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.00041E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09456E0	-7.57194E-1	-7.35331E-1	-9.19468E0	-9.18996E0	4.50611E-3	9.48906E-2	2.73357E1	-3.26524E1	-3.26158E1	2.68184E1	1.19749E-7	2.51203E-3	2.51203E-3	6.3074E-3	3.0148E-1