[Scan]
initial_time=2016-01-18T23:18:11
final_time=2016-01-18T23:18:30
ip_count=19
run=1024
dataset=11
scan=830
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09472E0
qbias_imon=-1.08816E-4
ql1_vset=
ql1_vmon=-7.56907E-1
ql1_imon=1.42152E-8
ql2_vset=
ql2_vmon=-7.35044E-1
ql2_imon=2.02966E-9
ql3_vset=
ql3_vmon=-9.19492E0
ql3_imon=2.76959E-10
ql4_vset=
ql4_vmon=-9.18982E0
ql4_imon=-2.60949E-10
mult1=-9.7949E-9
mult2=-2.72914E-9
rf_tmon=-5.65388E-3
rf_agc=3.25658E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.41074E-3
ql5_imon=1.67274E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66237E0
bslens_imon=2.56735E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19518E1
lens5a_imon=2.02718E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12465E2
lens4a_imon=2.05086E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53829E1
cs_ef1b_imon=3.16601E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04605E2
lens23_imon=1.02237E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04715E1
cs_ea1_imon=1.09927E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38622E0
lens1_imon=2.72445E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64904E1
os_ef1alow_imon=2.97592E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03474E1
cs_ea2_imon=1.34961E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84261E1
cs_ef1a_imon=3.04473E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=1.17262E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11378E1
os_restr1_imon=4.28817E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15482E1
os_ea1_imon=2.45819E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63531E1
os_ef1bup_imon=3.07044E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25551E0
cs_ionrep_imon=9.49683E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91949E2
cs_nozzle_imon=1.93567E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01792E1
cs_anode1_imon=1.9674E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20411E0
olens4_imon=3.16194E-8
tplens_vset=1.4E-1
tplens_vmon=1.70006E0
tplens_imon=-4.34627E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26248E1
iondef3_imon=1.52993E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26372E1
iondef2_imon=1.56476E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02919E2
lens6_imon=2.98124E-4
ql6_vset=1.0E-1
ql6_vmon=9.50336E-2
ql6_imon=4.02209E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.31471E0
ionrepsh_imon=8.503E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33709E1
lens5b_imon=2.17506E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74403E1
cs_ef2b_imon=3.14725E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.43424E0
os_ea2_imon=-5.26837E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06087E2
lens4b_imon=2.0051E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7135E1
cs_ef2a_imon=3.17053E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0951E0
os_ef2alow_imon=-2.43905E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.65954E-1
os_ef2bup_imon=-5.23663E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11372E1
os_restr2_imon=3.38287E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23031E2
cs_ionfoca_imon=6.27947E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02018E1
cs_anode2_imon=2.08E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7308E1
iondef1_imon=1.11054E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68337E1
iondef4_imon=1.09789E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=4.7322E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81498E-1
olens1_imon=7.09965E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14115E0
cs_ionaccel_imon=-8.33481E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02033E2
cs_ionfocb_imon=1.47376E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56567E1
einzel_imon=7.72607E-6
window_vset=0.0E0
window_vmon=2.52438E-1
window_imon=-6.28441E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82654E2
mask1_imon=2.39192E-4
mask2_vset=0.0E0
mask2_vmon=-1.8686E1
mask2_imon=-5.13757E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92648E3
multa_neg_imon=7.57065E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93724E3
defgrida_imon=6.57682E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50117E3
multb_neg_imon=7.46136E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.4758E0
defgridb_imon=6.05429E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33237E1
os_fil1_imon=9.40086E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07885E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61509E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31817E1
cs_fil1_imon=6.4186E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.48841E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63394E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.52977E-2
os_fil2_imon=-2.56493E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.97607E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.39117E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29402E-1
cs_fil2_imon=-2.53018E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.72122E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21759E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=3.01609E-1
chamber_ion_pmon=1.19965E-7
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40035E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.36038E-1
res40_imon=-2.32784E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=223
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.0951E0	-7.56931E-1	-7.3514E-1	-9.19454E0	-9.19025E0	4.50611E-3	9.47952E-2	2.73294E1	-3.26391E1	-3.2636E1	2.68082E1	1.1993E-7	2.52197E-3	2.52197E-3	6.3282E-3	2.9926E-1
2.0E0	3.0E1	0.0E0	3.16E2	1.6E2	-2.09503E0	-7.56931E-1	-7.35021E-1	-9.19504E0	-9.19015E0	4.43459E-3	9.47475E-2	2.73159E1	-3.26422E1	-3.2644E1	2.68069E1	1.19883E-7	2.51498E-3	2.51498E-3	6.3245E-3	3.00794E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0948E0	-7.57313E-1	-7.35021E-1	-9.19487E0	-9.1903E0	4.45843E-3	9.48906E-2	2.73358E1	-3.26596E1	-3.26042E1	2.6836E1	1.20017E-7	2.52099E-3	2.52099E-3	6.32386E-3	2.99E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09456E0	-7.57241E-1	-7.35044E-1	-9.19468E0	-9.19044E0	4.72069E-3	9.48668E-2	2.73546E1	-3.26992E1	-3.25835E1	2.68082E1	1.19953E-7	2.52599E-3	2.52599E-3	6.29665E-3	2.9841E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09302E0	-7.57003E-1	-7.35354E-1	-9.19495E0	-9.19011E0	4.57764E-3	9.50098E-2	2.73183E1	-3.26561E1	-3.26008E1	2.68313E1	1.2026E-7	2.51096E-3	2.51096E-3	6.28592E-3	3.0071E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09371E0	-7.56955E-1	-7.35331E-1	-9.19499E0	-9.19011E0	4.673E-3	9.50098E-2	2.73225E1	-3.26573E1	-3.2641E1	2.68586E1	1.20017E-7	2.51662E-3	2.51662E-3	6.29645E-3	2.9926E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0941E0	-7.57027E-1	-7.35116E-1	-9.19509E0	-9.18996E0	4.45843E-3	9.5129E-2	2.72931E1	-3.26807E1	-3.26056E1	2.68381E1	1.20122E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.00824E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09541E0	-7.57098E-1	-7.35235E-1	-9.19492E0	-9.18999E0	4.57764E-3	9.5129E-2	2.73129E1	-3.26645E1	-3.26296E1	2.68268E1	1.20017E-7	2.5199E-3	2.5199E-3	6.31288E-3	2.9952E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0951E0	-7.57074E-1	-7.35211E-1	-9.19468E0	-9.19025E0	4.19617E-3	9.45807E-2	2.72859E1	-3.26675E1	-3.26476E1	2.68448E1	1.19809E-7	2.51443E-3	2.51443E-3	6.31837E-3	2.9874E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09518E0	-7.57122E-1	-7.35235E-1	-9.19497E0	-9.1898E0	4.41074E-3	9.47714E-2	2.73375E1	-3.26921E1	-3.26284E1	2.67825E1	1.20226E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.9952E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.0951E0	-7.57146E-1	-7.35044E-1	-9.19516E0	-9.19008E0	4.45843E-3	9.49144E-2	2.72907E1	-3.26747E1	-3.26446E1	2.6852E1	1.19965E-7	2.51443E-3	2.51443E-3	6.29645E-3	2.9978E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09495E0	-7.57003E-1	-7.35235E-1	-9.19502E0	-9.19003E0	4.43459E-3	9.49144E-2	2.73165E1	-3.26591E1	-3.2605E1	2.68472E1	1.20069E-7	2.5188E-3	2.5188E-3	6.28552E-3	2.9978E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09426E0	-7.57337E-1	-7.35235E-1	-9.19499E0	-9.19025E0	4.48227E-3	9.48191E-2	2.73305E1	-3.2682E1	-3.26508E1	2.67943E1	1.20017E-7	2.52428E-3	2.52428E-3	6.3074E-3	3.00824E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09495E0	-7.57194E-1	-7.35092E-1	-9.19487E0	-9.19006E0	4.26769E-3	9.47475E-2	2.73291E1	-3.26416E1	-3.26062E1	2.6828E1	1.20209E-7	2.52169E-3	2.52169E-3	6.32356E-3	2.99686E-1
1.8E1	5.0E0	0.0E0	7.27E2	5.0E2	-2.09464E0	-7.57003E-1	-7.35044E-1	-9.19471E0	-9.18984E0	4.62532E-3	9.48429E-2	2.72919E1	-3.26675E1	-3.26567E1	2.68502E1	1.19965E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.00302E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09441E0	-7.56764E-1	-7.35235E-1	-9.19483E0	-9.19001E0	4.45843E-3	9.50098E-2	2.73087E1	-3.26512E1	-3.26512E1	2.68076E1	1.19809E-7	2.52209E-3	2.52209E-3	6.34037E-3	3.00824E-1
2.0E1	1.0E1	0.0E0	8.08E2	5.58E2	-2.09387E0	-7.56693E-1	-7.35164E-1	-9.19504E0	-9.1902E0	4.33922E-3	9.52721E-2	2.73375E1	-3.26579E1	-3.26446E1	2.68244E1	1.19913E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.99E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09364E0	-7.57027E-1	-7.34997E-1	-9.19495E0	-9.18975E0	4.26769E-3	9.48906E-2	2.73075E1	-3.2635E1	-3.26272E1	2.68478E1	1.20069E-7	2.51662E-3	2.51662E-3	6.31288E-3	2.99E-1
2.2E1	2.0E0	0.0E0	8.89E2	6.17E2	-2.09472E0	-7.56836E-1	-7.34973E-1	-9.19476E0	-9.19013E0	4.29153E-3	9.53197E-2	2.72823E1	-3.26837E1	-3.26434E1	2.67511E1	1.19757E-7	2.51771E-3	2.51771E-3	6.32936E-3	2.9978E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09472E0	-7.56907E-1	-7.35044E-1	-9.19492E0	-9.18982E0	4.41074E-3	9.50336E-2	2.7308E1	-3.26372E1	-3.26248E1	2.68337E1	1.19965E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.01609E-1