[Scan]
initial_time=2016-01-18T23:19:04
final_time=2016-01-18T23:19:23
ip_count=19
run=1024
dataset=11
scan=832
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09533E0
qbias_imon=-1.08817E-4
ql1_vset=
ql1_vmon=-7.56907E-1
ql1_imon=1.40293E-8
ql2_vset=
ql2_vmon=-7.35188E-1
ql2_imon=2.03388E-9
ql3_vset=
ql3_vmon=-9.19497E0
ql3_imon=2.01261E-10
ql4_vset=
ql4_vmon=-9.19032E0
ql4_imon=-2.28715E-10
mult1=-9.99324E-9
mult2=-2.7246E-9
rf_tmon=-3.85152E-3
rf_agc=3.22581E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.05312E-3
ql5_imon=1.77381E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64891E0
bslens_imon=2.60071E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19973E1
lens5a_imon=2.01277E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12456E2
lens4a_imon=2.05083E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53811E1
cs_ef1b_imon=3.16186E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04647E2
lens23_imon=1.02225E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04345E1
cs_ea1_imon=1.07872E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37372E0
lens1_imon=2.83709E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64662E1
os_ef1alow_imon=2.98295E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03627E1
cs_ea2_imon=1.3363E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84272E1
cs_ef1a_imon=3.04748E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=1.1695E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11584E1
os_restr1_imon=4.29028E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15207E1
os_ea1_imon=2.4612E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63655E1
os_ef1bup_imon=3.08708E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23761E0
cs_ionrep_imon=9.44188E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91908E2
cs_nozzle_imon=1.93716E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01935E1
cs_anode1_imon=1.96003E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20413E0
olens4_imon=3.16117E-8
tplens_vset=1.4E-1
tplens_vmon=1.74166E0
tplens_imon=-2.18492E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25948E1
iondef3_imon=1.49412E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26488E1
iondef2_imon=1.57616E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02929E2
lens6_imon=2.98349E-4
ql6_vset=1.0E-1
ql6_vmon=9.50575E-2
ql6_imon=4.00188E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27527E0
ionrepsh_imon=8.61802E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33576E1
lens5b_imon=2.16746E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7445E1
cs_ef2b_imon=3.13215E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44966E0
os_ea2_imon=-5.45255E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06083E2
lens4b_imon=2.00637E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71002E1
cs_ef2a_imon=3.17517E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07078E0
os_ef2alow_imon=-2.4321E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.00838E-1
os_ef2bup_imon=-5.14304E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1114E1
os_restr2_imon=3.38105E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23021E2
cs_ionfoca_imon=6.28955E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01679E1
cs_anode2_imon=2.08533E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73351E1
iondef1_imon=1.09749E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68478E1
iondef4_imon=1.09826E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=4.75001E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8114E-1
olens1_imon=7.08347E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14323E0
cs_ionaccel_imon=-8.20555E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.47581E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56496E1
einzel_imon=7.88245E-6
window_vset=0.0E0
window_vmon=2.40326E-1
window_imon=-7.52269E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82669E2
mask1_imon=2.39245E-4
mask2_vset=0.0E0
mask2_vmon=-1.8639E1
mask2_imon=-6.05455E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92607E3
multa_neg_imon=7.14063E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93708E3
defgrida_imon=6.4593E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50146E3
multb_neg_imon=7.16149E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3282E0
defgridb_imon=6.10125E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33235E1
os_fil1_imon=9.42198E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07352E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61369E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31805E1
cs_fil1_imon=7.40712E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.53535E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6329E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.50118E-2
os_fil2_imon=-2.50569E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.18326E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.48295E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28241E-1
cs_fil2_imon=-2.05614E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.2671E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21685E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.9943E-1
chamber_ion_pmon=1.20158E-7
chamber_cvt_pmon=2.52384E-3
foreline_cvt_pmon=2.52384E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.18631E-1
res40_imon=-2.43893E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=222
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09572E0	-7.56884E-1	-7.35188E-1	-9.19476E0	-9.19018E0	4.8399E-3	9.48906E-2	2.73647E1	-3.26526E1	-3.26012E1	2.68341E1	1.19991E-7	2.51603E-3	2.51603E-3	6.29684E-3	2.99845E-1
2.0E0	2.7E1	0.0E0	3.16E2	1.6E2	-2.09572E0	-7.56669E-1	-7.3514E-1	-9.19471E0	-9.19013E0	4.72069E-3	9.5129E-2	2.73075E1	-3.26958E1	-3.25997E1	2.68196E1	1.19902E-7	2.52061E-3	2.52061E-3	6.32896E-3	2.9892E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09503E0	-7.56693E-1	-7.35092E-1	-9.19456E0	-9.19003E0	4.81606E-3	9.49383E-2	2.73364E1	-3.26773E1	-3.25818E1	2.67986E1	1.20297E-7	2.52027E-3	2.52027E-3	6.34099E-3	2.99083E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09487E0	-7.56955E-1	-7.34997E-1	-9.19504E0	-9.1897E0	4.76837E-3	9.50813E-2	2.73246E1	-3.26413E1	-3.26154E1	2.68447E1	1.19902E-7	2.51632E-3	2.51632E-3	6.31278E-3	2.98156E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0951E0	-7.56741E-1	-7.34901E-1	-9.19485E0	-9.18999E0	4.3869E-3	9.49621E-2	2.73281E1	-3.26437E1	-3.26231E1	2.68094E1	1.19902E-7	2.51739E-3	2.51739E-3	6.33977E-3	2.97647E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09456E0	-7.56741E-1	-7.35044E-1	-9.19476E0	-9.1898E0	4.45843E-3	9.48668E-2	2.73207E1	-3.2647E1	-3.26218E1	2.68556E1	1.19953E-7	2.51739E-3	2.51739E-3	6.3074E-3	2.99175E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0941E0	-7.56764E-1	-7.35235E-1	-9.19478E0	-9.18989E0	4.45843E-3	9.48906E-2	2.73322E1	-3.26537E1	-3.25959E1	2.68304E1	1.20435E-7	2.5188E-3	2.5188E-3	6.30192E-3	2.9952E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09426E0	-7.56931E-1	-7.34782E-1	-9.1949E0	-9.18996E0	4.673E-3	9.48191E-2	2.7355E1	-3.26573E1	-3.26332E1	2.68076E1	1.19953E-7	2.52276E-3	2.52276E-3	6.30202E-3	3.0148E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09426E0	-7.56741E-1	-7.3483E-1	-9.19523E0	-9.1897E0	4.41074E-3	9.51767E-2	2.73308E1	-3.26774E1	-3.26181E1	2.68743E1	1.20487E-7	2.51662E-3	2.51662E-3	6.34588E-3	3.01871E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09518E0	-7.56836E-1	-7.3514E-1	-9.19507E0	-9.19018E0	4.48227E-3	9.47952E-2	2.73339E1	-3.26446E1	-3.26236E1	2.68196E1	1.19705E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.00563E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09549E0	-7.57027E-1	-7.35021E-1	-9.19507E0	-9.18996E0	4.60148E-3	9.48906E-2	2.73183E1	-3.26735E1	-3.26567E1	2.68701E1	1.19925E-7	2.51359E-3	2.51359E-3	6.3074E-3	3.00942E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09572E0	-7.57027E-1	-7.35164E-1	-9.19518E0	-9.19008E0	4.52995E-3	9.50336E-2	2.736E1	-3.26785E1	-3.26425E1	2.67931E1	1.19595E-7	2.51739E-3	2.51739E-3	6.33436E-3	2.99175E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09595E0	-7.56836E-1	-7.35044E-1	-9.19518E0	-9.19011E0	4.52995E-3	9.45091E-2	2.73135E1	-3.26789E1	-3.2641E1	2.68514E1	1.20383E-7	2.51334E-3	2.51334E-3	6.31837E-3	2.9952E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09541E0	-7.56931E-1	-7.35068E-1	-9.19511E0	-9.19003E0	4.3869E-3	9.50575E-2	2.73157E1	-3.26413E1	-3.26077E1	2.68388E1	1.19749E-7	2.52599E-3	2.52599E-3	6.31817E-3	2.97901E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09495E0	-7.56955E-1	-7.34925E-1	-9.19528E0	-9.1902E0	4.52995E-3	9.5129E-2	2.73267E1	-3.26392E1	-3.26314E1	2.68707E1	1.19861E-7	2.51334E-3	2.51334E-3	6.32386E-3	2.99E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09533E0	-7.56955E-1	-7.34735E-1	-9.19514E0	-9.1898E0	4.57764E-3	9.4986E-2	2.7321E1	-3.26254E1	-3.26236E1	2.67337E1	1.20122E-7	2.5199E-3	2.5199E-3	6.30192E-3	2.97963E-1
2.0E1	2.0E0	1.0E0	8.08E2	5.58E2	-2.09441E0	-7.56955E-1	-7.35068E-1	-9.19518E0	-9.1898E0	4.48227E-3	9.52482E-2	2.73183E1	-3.26837E1	-3.2632E1	2.68178E1	1.20122E-7	2.51552E-3	2.51552E-3	6.31288E-3	2.9926E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09426E0	-7.56931E-1	-7.34949E-1	-9.19535E0	-9.18975E0	4.64916E-3	9.48906E-2	2.73063E1	-3.2637E1	-3.26196E1	2.6855E1	1.19913E-7	2.52099E-3	2.52099E-3	6.29645E-3	2.9952E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09526E0	-7.57051E-1	-7.3483E-1	-9.19473E0	-9.19015E0	4.36306E-3	9.50336E-2	2.73546E1	-3.26891E1	-3.2659E1	2.68522E1	1.20004E-7	2.51954E-3	2.51954E-3	6.31278E-3	2.99941E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09533E0	-7.56907E-1	-7.35188E-1	-9.19497E0	-9.19032E0	4.05312E-3	9.50575E-2	2.73351E1	-3.26488E1	-3.25948E1	2.68478E1	1.20158E-7	2.52384E-3	2.52384E-3	6.3074E-3	2.9943E-1