[Scan]
initial_time=2016-01-18T23:19:31
final_time=2016-01-18T23:19:50
ip_count=19
run=1024
dataset=11
scan=833
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09526E0
qbias_imon=-1.08834E-4
ql1_vset=
ql1_vmon=-7.56979E-1
ql1_imon=1.41894E-8
ql2_vset=
ql2_vmon=-7.34997E-1
ql2_imon=2.02645E-9
ql3_vset=
ql3_vmon=-9.19495E0
ql3_imon=2.49982E-10
ql4_vset=
ql4_vmon=-9.19025E0
ql4_imon=-2.45082E-10
mult1=-9.99324E-9
mult2=-2.70863E-9
rf_tmon=-5.4437E-3
rf_agc=3.20899E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.48227E-3
ql5_imon=1.69789E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66013E0
bslens_imon=2.67474E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19616E1
lens5a_imon=2.00398E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12488E2
lens4a_imon=2.05154E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54159E1
cs_ef1b_imon=3.15802E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04612E2
lens23_imon=1.0215E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04555E1
cs_ea1_imon=1.10707E-5
lens1_vset=-5.0E0
lens1_vmon=-5.4008E0
lens1_imon=2.59183E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6484E1
os_ef1alow_imon=2.97487E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03558E1
cs_ea2_imon=1.34031E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84319E1
cs_ef1a_imon=3.04403E-5
olens2_vset=9.7E-1
olens2_vmon=9.7065E-1
olens2_imon=1.1661E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11448E1
os_restr1_imon=4.30034E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1521E1
os_ea1_imon=2.43802E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63543E1
os_ef1bup_imon=3.08991E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2545E0
cs_ionrep_imon=9.50252E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91926E2
cs_nozzle_imon=1.93496E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01838E1
cs_anode1_imon=1.96497E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20437E0
olens4_imon=3.15077E-8
tplens_vset=1.4E-1
tplens_vmon=1.63122E0
tplens_imon=-3.35395E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26092E1
iondef3_imon=1.52272E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2626E1
iondef2_imon=1.56165E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0292E2
lens6_imon=2.98227E-4
ql6_vset=1.0E-1
ql6_vmon=9.51529E-2
ql6_imon=4.00957E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30016E0
ionrepsh_imon=8.57244E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3382E1
lens5b_imon=2.19072E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74623E1
cs_ef2b_imon=3.12987E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4684E0
os_ea2_imon=-7.6799E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0608E2
lens4b_imon=2.00558E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71333E1
cs_ef2a_imon=3.17644E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06209E0
os_ef2alow_imon=-2.44252E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.09973E-1
os_ef2bup_imon=-5.17407E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11286E1
os_restr2_imon=3.38391E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23069E2
cs_ionfoca_imon=6.2845E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01636E1
cs_anode2_imon=2.07861E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73273E1
iondef1_imon=1.10094E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68922E1
iondef4_imon=1.10206E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=4.72579E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81355E-1
olens1_imon=7.07448E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13477E0
cs_ionaccel_imon=-8.75184E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02085E2
cs_ionfocb_imon=1.47466E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56359E1
einzel_imon=7.86508E-6
window_vset=0.0E0
window_vmon=2.53597E-1
window_imon=-7.32698E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82626E2
mask1_imon=2.39286E-4
mask2_vset=0.0E0
mask2_vmon=-1.86506E1
mask2_imon=-5.62411E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92639E3
multa_neg_imon=7.33234E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93702E3
defgrida_imon=6.81683E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50105E3
multb_neg_imon=7.49456E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38953E0
defgridb_imon=5.88675E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33242E1
os_fil1_imon=9.40972E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07787E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61163E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31826E1
cs_fil1_imon=6.98623E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.68534E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63623E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.73748E-2
os_fil2_imon=-2.42013E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92973E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.48981E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28279E-1
cs_fil2_imon=-2.42592E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.49533E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21739E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.99686E-1
chamber_ion_pmon=1.20311E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40056E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.14434E-1
res40_imon=-2.38692E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=172
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09487E0	-7.5717E-1	-7.34663E-1	-9.19495E0	-9.19027E0	4.45843E-3	9.52005E-2	2.73352E1	-3.26127E1	-3.26173E1	2.68442E1	1.20017E-7	2.5199E-3	2.5199E-3	6.32386E-3	2.97187E-1
2.0E0	3.5E1	0.0E0	3.16E2	1.6E2	-2.09394E0	-7.56955E-1	-7.34997E-1	-9.19487E0	-9.19006E0	4.33922E-3	9.48906E-2	2.73602E1	-3.26456E1	-3.26438E1	2.68346E1	1.1969E-7	2.51498E-3	2.51498E-3	6.31798E-3	2.98342E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09348E0	-7.57027E-1	-7.34997E-1	-9.19495E0	-9.1898E0	4.26769E-3	9.50098E-2	2.73207E1	-3.26567E1	-3.26127E1	2.68499E1	1.20244E-7	2.5147E-3	2.5147E-3	6.32978E-3	2.98819E-1
4.0E0	1.2E1	0.0E0	6.55E2	3.98E2	-2.09348E0	-7.56979E-1	-7.34711E-1	-9.19459E0	-9.18987E0	4.62532E-3	9.51529E-2	2.73283E1	-3.2626E1	-3.25965E1	2.68458E1	1.20142E-7	2.51603E-3	2.51603E-3	6.34982E-3	3.00348E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09356E0	-7.57027E-1	-7.34687E-1	-9.19483E0	-9.19001E0	4.62532E-3	9.5439E-2	2.7312E1	-3.26497E1	-3.26254E1	2.68406E1	1.20028E-7	2.51679E-3	2.51679E-3	6.28667E-3	2.9926E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09387E0	-7.5686E-1	-7.34854E-1	-9.19485E0	-9.18968E0	4.50611E-3	9.4986E-2	2.73075E1	-3.26404E1	-3.26326E1	2.68292E1	1.1995E-7	2.51527E-3	2.51527E-3	6.31321E-3	3.00916E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09387E0	-7.56931E-1	-7.35116E-1	-9.19478E0	-9.18994E0	4.52995E-3	9.51529E-2	2.73294E1	-3.26417E1	-3.26086E1	2.68001E1	1.20055E-7	2.52276E-3	2.52276E-3	6.31817E-3	3.00966E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09487E0	-7.56812E-1	-7.34997E-1	-9.19476E0	-9.18996E0	4.50611E-3	9.48668E-2	2.73261E1	-3.26512E1	-3.26603E1	2.68569E1	1.19851E-7	2.51525E-3	2.51525E-3	6.31278E-3	2.98665E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09433E0	-7.56741E-1	-7.35021E-1	-9.19516E0	-9.18996E0	4.31538E-3	9.49144E-2	2.72903E1	-3.26526E1	-3.26178E1	2.6837E1	1.19902E-7	2.51739E-3	2.51739E-3	6.32356E-3	2.9841E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09487E0	-7.56645E-1	-7.35044E-1	-9.19518E0	-9.19008E0	4.43459E-3	9.50813E-2	2.73598E1	-3.26603E1	-3.2629E1	2.68829E1	1.19965E-7	2.5199E-3	2.5199E-3	6.32936E-3	2.9874E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09456E0	-7.5686E-1	-7.35068E-1	-9.19483E0	-9.18994E0	4.50611E-3	9.51529E-2	2.73311E1	-3.26012E1	-3.26337E1	2.68268E1	1.19902E-7	2.51632E-3	2.51632E-3	6.33436E-3	3.00197E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09503E0	-7.56741E-1	-7.35116E-1	-9.19511E0	-9.19015E0	4.36306E-3	9.50098E-2	2.73273E1	-3.26567E1	-3.26194E1	2.68382E1	1.20069E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.01085E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09418E0	-7.57027E-1	-7.35021E-1	-9.19497E0	-9.19006E0	4.72069E-3	9.53197E-2	2.7349E1	-3.26296E1	-3.2638E1	2.68064E1	1.20069E-7	2.52099E-3	2.52099E-3	6.33486E-3	3.01609E-1
1.7E1	2.0E0	0.0E0	6.87E2	4.7E2	-2.09449E0	-7.56931E-1	-7.35021E-1	-9.19483E0	-9.19006E0	4.52995E-3	9.52482E-2	2.73257E1	-3.26697E1	-3.26408E1	2.67956E1	1.19965E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.00824E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09418E0	-7.57003E-1	-7.35068E-1	-9.19485E0	-9.18984E0	4.57764E-3	9.50575E-2	2.73027E1	-3.26657E1	-3.262E1	2.68472E1	1.2026E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.00453E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09356E0	-7.56788E-1	-7.34758E-1	-9.19497E0	-9.18975E0	4.22001E-3	9.52959E-2	2.73442E1	-3.26945E1	-3.25828E1	2.6836E1	1.20174E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.00302E-1
2.0E1	1.1E1	0.0E0	8.08E2	5.58E2	-2.09394E0	-7.56812E-1	-7.35116E-1	-9.19464E0	-9.19003E0	4.26769E-3	9.51529E-2	2.73225E1	-3.26615E1	-3.2644E1	2.68749E1	1.19809E-7	2.52647E-3	2.52647E-3	6.31288E-3	3.00824E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09487E0	-7.56907E-1	-7.3483E-1	-9.19461E0	-9.19001E0	4.41074E-3	9.51529E-2	2.73216E1	-3.26915E1	-3.26124E1	2.68256E1	1.19913E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.00041E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09503E0	-7.57337E-1	-7.35044E-1	-9.19459E0	-9.19011E0	4.22001E-3	9.50575E-2	2.7324E1	-3.26974E1	-3.25989E1	2.6783E1	1.19697E-7	2.52276E-3	2.52276E-3	6.33977E-3	3.0071E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09526E0	-7.56979E-1	-7.34997E-1	-9.19495E0	-9.19025E0	4.48227E-3	9.51529E-2	2.73273E1	-3.2626E1	-3.26092E1	2.68922E1	1.20311E-7	2.51632E-3	2.51632E-3	6.31817E-3	2.99686E-1