[Scan]
initial_time=2016-01-18T23:19:57
final_time=2016-01-18T23:20:17
ip_count=19
run=1024
dataset=11
scan=834
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09549E0
qbias_imon=-1.08763E-4
ql1_vset=
ql1_vmon=-7.56645E-1
ql1_imon=1.42284E-8
ql2_vset=
ql2_vmon=-7.35068E-1
ql2_imon=1.9835E-9
ql3_vset=
ql3_vmon=-9.19502E0
ql3_imon=2.0386E-10
ql4_vset=
ql4_vmon=-9.18972E0
ql4_imon=-2.42567E-10
mult1=-9.49958E-9
mult2=-2.81243E-9
rf_tmon=-3.57514E-3
rf_agc=3.49318E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.62532E-3
ql5_imon=1.70429E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64035E0
bslens_imon=2.22718E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19731E1
lens5a_imon=1.98942E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12484E2
lens4a_imon=2.05159E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5373E1
cs_ef1b_imon=3.15677E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04641E2
lens23_imon=1.02209E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04302E1
cs_ea1_imon=1.09211E-5
lens1_vset=-5.0E0
lens1_vmon=-5.4099E0
lens1_imon=2.85159E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64921E1
os_ef1alow_imon=2.97585E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03886E1
cs_ea2_imon=1.35289E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84364E1
cs_ef1a_imon=3.03532E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.17052E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11346E1
os_restr1_imon=4.29454E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15281E1
os_ea1_imon=2.41805E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63635E1
os_ef1bup_imon=3.07821E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25087E0
cs_ionrep_imon=9.41151E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91928E2
cs_nozzle_imon=1.93505E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02133E1
cs_anode1_imon=1.9635E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2043E0
olens4_imon=3.15713E-8
tplens_vset=1.4E-1
tplens_vmon=1.67571E0
tplens_imon=-2.30036E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26236E1
iondef3_imon=1.49283E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26711E1
iondef2_imon=1.56776E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02952E2
lens6_imon=2.98159E-4
ql6_vset=1.0E-1
ql6_vmon=9.4986E-2
ql6_imon=4.06238E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26495E0
ionrepsh_imon=8.40879E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33731E1
lens5b_imon=2.16131E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74627E1
cs_ef2b_imon=3.12686E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.41555E0
os_ea2_imon=-6.89157E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06063E2
lens4b_imon=2.00608E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.713E1
cs_ef2a_imon=3.1629E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10802E0
os_ef2alow_imon=-2.37804E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.87813E-1
os_ef2bup_imon=-5.20715E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11099E1
os_restr2_imon=3.37697E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23055E2
cs_ionfoca_imon=6.2901E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01917E1
cs_anode2_imon=2.09108E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73279E1
iondef1_imon=1.12039E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6816E1
iondef4_imon=1.1144E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=4.73479E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81617E-1
olens1_imon=7.07088E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14035E0
cs_ionaccel_imon=-9.90511E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02067E2
cs_ionfocb_imon=1.47522E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56447E1
einzel_imon=7.70946E-6
window_vset=0.0E0
window_vmon=2.70801E-1
window_imon=-7.31025E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82643E2
mask1_imon=2.39156E-4
mask2_vset=0.0E0
mask2_vmon=-1.86482E1
mask2_imon=-5.50827E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92573E3
multa_neg_imon=7.18202E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93712E3
defgrida_imon=6.56129E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50118E3
multb_neg_imon=7.24446E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.5108E0
defgridb_imon=6.20134E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3322E1
os_fil1_imon=9.40961E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07726E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61318E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31836E1
cs_fil1_imon=6.98665E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.67762E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63394E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.50095E-2
os_fil2_imon=-2.5999E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.10929E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.40479E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31594E-1
cs_fil2_imon=-2.31158E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.64678E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21893E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34037E-3
inlet_lpb_pmon=2.9874E-1
chamber_ion_pmon=1.19913E-7
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.88724E-1
res40_imon=-2.23388E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=166
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09456E0	-7.56884E-1	-7.35044E-1	-9.19473E0	-9.1898E0	4.26769E-3	9.49383E-2	2.73219E1	-3.26671E1	-3.26202E1	2.68569E1	1.20017E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.00563E-1
2.0E0	3.7E1	0.0E0	3.16E2	1.6E2	-2.09379E0	-7.57146E-1	-7.35021E-1	-9.19459E0	-9.1898E0	4.57764E-3	9.50336E-2	2.73161E1	-3.26719E1	-3.26254E1	2.67836E1	1.20004E-7	2.51632E-3	2.51632E-3	6.32896E-3	2.99941E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0948E0	-7.57098E-1	-7.34901E-1	-9.19473E0	-9.19008E0	4.36306E-3	9.51529E-2	2.7359E1	-3.26608E1	-3.26162E1	2.68099E1	1.19819E-7	2.51136E-3	2.51136E-3	6.31299E-3	3.0201E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09487E0	-7.57122E-1	-7.34878E-1	-9.19507E0	-9.19032E0	4.33922E-3	9.49144E-2	2.73399E1	-3.26579E1	-3.2602E1	2.68388E1	1.19891E-7	2.52025E-3	2.52025E-3	6.31798E-3	3.006E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0951E0	-7.57289E-1	-7.35164E-1	-9.19509E0	-9.19018E0	4.45843E-3	9.47475E-2	2.72951E1	-3.26673E1	-3.26254E1	2.68214E1	1.20017E-7	2.50789E-3	2.50789E-3	6.29645E-3	2.97963E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09418E0	-7.57289E-1	-7.34949E-1	-9.19502E0	-9.19015E0	4.52995E-3	9.47952E-2	2.73135E1	-3.26957E1	-3.2608E1	2.68725E1	1.2026E-7	2.51847E-3	2.51847E-3	6.31817E-3	2.9892E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09464E0	-7.57074E-1	-7.34925E-1	-9.19521E0	-9.19025E0	4.81606E-3	9.5129E-2	2.73265E1	-3.26254E1	-3.26217E1	2.68268E1	1.19913E-7	2.52099E-3	2.52099E-3	6.32936E-3	3.00563E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09526E0	-7.57027E-1	-7.35164E-1	-9.19478E0	-9.19008E0	4.26769E-3	9.47475E-2	2.73086E1	-3.26638E1	-3.2613E1	2.68058E1	1.19978E-7	2.51693E-3	2.51693E-3	6.34099E-3	3.01475E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09449E0	-7.56955E-1	-7.35188E-1	-9.19466E0	-9.19006E0	4.41074E-3	9.47952E-2	2.72973E1	-3.26723E1	-3.26404E1	2.68597E1	1.20055E-7	2.52384E-3	2.52384E-3	6.31817E-3	3.00966E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09356E0	-7.57146E-1	-7.35116E-1	-9.19478E0	-9.18992E0	4.50611E-3	9.4986E-2	2.73269E1	-3.26425E1	-3.26455E1	2.68442E1	1.19749E-7	2.5131E-3	2.5131E-3	6.32356E-3	2.98665E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09348E0	-7.57313E-1	-7.34997E-1	-9.19495E0	-9.19025E0	4.43459E-3	9.52244E-2	2.73448E1	-3.26476E1	-3.2614E1	2.68148E1	1.19965E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.00563E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09379E0	-7.56979E-1	-7.34663E-1	-9.19478E0	-9.18994E0	4.57764E-3	9.4676E-2	2.73291E1	-3.26573E1	-3.26098E1	2.68418E1	1.19861E-7	2.51443E-3	2.51443E-3	6.33486E-3	3.01085E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09379E0	-7.57408E-1	-7.34735E-1	-9.19483E0	-9.19003E0	4.72069E-3	9.47714E-2	2.73225E1	-3.27011E1	-3.26326E1	2.684E1	1.19913E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.00302E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09472E0	-7.56979E-1	-7.34854E-1	-9.19473E0	-9.18975E0	4.57764E-3	9.51052E-2	2.73225E1	-3.26717E1	-3.26206E1	2.6828E1	1.20069E-7	2.51662E-3	2.51662E-3	6.34037E-3	2.98222E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09441E0	-7.56931E-1	-7.34901E-1	-9.19492E0	-9.19018E0	4.45843E-3	9.50575E-2	2.73277E1	-3.26695E1	-3.26174E1	2.6852E1	1.20122E-7	2.51334E-3	2.51334E-3	6.31837E-3	2.99E-1
1.9E1	3.0E0	0.0E0	7.68E2	5.29E2	-2.09503E0	-7.56717E-1	-7.34973E-1	-9.1949E0	-9.19015E0	4.52995E-3	9.4986E-2	2.73033E1	-3.26431E1	-3.26313E1	2.68046E1	1.20174E-7	2.52209E-3	2.52209E-3	6.29645E-3	3.01085E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09549E0	-7.56812E-1	-7.35021E-1	-9.19464E0	-9.19006E0	4.673E-3	9.50575E-2	2.73204E1	-3.26744E1	-3.2629E1	2.68617E1	1.20122E-7	2.51552E-3	2.51552E-3	6.34037E-3	3.02659E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0951E0	-7.56693E-1	-7.35021E-1	-9.19476E0	-9.19015E0	4.64916E-3	9.4986E-2	2.73423E1	-3.26626E1	-3.26478E1	2.67902E1	1.20004E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.01738E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09518E0	-7.56693E-1	-7.34878E-1	-9.19511E0	-9.19006E0	4.64916E-3	9.51529E-2	2.73249E1	-3.26681E1	-3.26242E1	2.68262E1	1.20055E-7	2.52061E-3	2.52061E-3	6.31817E-3	3.01738E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09549E0	-7.56645E-1	-7.35068E-1	-9.19502E0	-9.18972E0	4.62532E-3	9.4986E-2	2.73279E1	-3.26711E1	-3.26236E1	2.6816E1	1.19913E-7	2.51552E-3	2.51552E-3	6.34037E-3	2.9874E-1