[Scan]
initial_time=2016-01-18T23:20:24
final_time=2016-01-18T23:20:43
ip_count=19
run=1024
dataset=11
scan=835
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09487E0
qbias_imon=-1.08814E-4
ql1_vset=
ql1_vmon=-7.56645E-1
ql1_imon=1.41324E-8
ql2_vset=
ql2_vmon=-7.35164E-1
ql2_imon=2.06075E-9
ql3_vset=
ql3_vmon=-9.19502E0
ql3_imon=2.66421E-10
ql4_vset=
ql4_vmon=-9.19018E0
ql4_imon=-2.20072E-10
mult1=-1.03785E-8
mult2=-2.88229E-9
rf_tmon=-4.32016E-3
rf_agc=3.37662E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.00543E-3
ql5_imon=1.68363E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65052E0
bslens_imon=2.56299E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19604E1
lens5a_imon=2.0047E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12466E2
lens4a_imon=2.0523E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53929E1
cs_ef1b_imon=3.16398E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04635E2
lens23_imon=1.02233E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04676E1
cs_ea1_imon=1.06741E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39779E0
lens1_imon=2.92348E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64608E1
os_ef1alow_imon=2.97009E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03852E1
cs_ea2_imon=1.35473E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84352E1
cs_ef1a_imon=3.04289E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=1.17478E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11448E1
os_restr1_imon=4.28914E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14867E1
os_ea1_imon=2.42179E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63545E1
os_ef1bup_imon=3.07028E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21725E0
cs_ionrep_imon=9.5602E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91932E2
cs_nozzle_imon=1.93618E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01797E1
cs_anode1_imon=1.96494E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20444E0
olens4_imon=3.15836E-8
tplens_vset=1.4E-1
tplens_vmon=1.67929E0
tplens_imon=-2.99346E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2584E1
iondef3_imon=1.47982E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26597E1
iondef2_imon=1.58472E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02989E2
lens6_imon=2.98176E-4
ql6_vset=1.0E-1
ql6_vmon=9.51529E-2
ql6_imon=4.02392E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26592E0
ionrepsh_imon=8.6157E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33243E1
lens5b_imon=2.1471E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74453E1
cs_ef2b_imon=3.1319E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44677E0
os_ea2_imon=-6.85076E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06081E2
lens4b_imon=2.00605E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71456E1
cs_ef2a_imon=3.17335E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07198E0
os_ef2alow_imon=-2.41768E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.86011E-1
os_ef2bup_imon=-5.13868E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11208E1
os_restr2_imon=3.37625E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23042E2
cs_ionfoca_imon=6.29315E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01815E1
cs_anode2_imon=2.0954E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73087E1
iondef1_imon=1.11067E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68094E1
iondef4_imon=1.1126E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=4.78457E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81617E-1
olens1_imon=7.11511E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14336E0
cs_ionaccel_imon=-9.50867E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02065E2
cs_ionfocb_imon=1.475E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56303E1
einzel_imon=7.79596E-6
window_vset=0.0E0
window_vmon=2.4257E-1
window_imon=-7.34629E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82635E2
mask1_imon=2.39221E-4
mask2_vset=0.0E0
mask2_vmon=-1.86422E1
mask2_imon=-5.97678E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92657E3
multa_neg_imon=7.27106E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93723E3
defgrida_imon=6.38424E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50114E3
multb_neg_imon=7.62074E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.4557E0
defgridb_imon=6.52844E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33254E1
os_fil1_imon=9.4248E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07858E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6138E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31818E1
cs_fil1_imon=7.10078E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.65359E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63641E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.58271E-2
os_fil2_imon=-2.5158E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.99516E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.39443E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3017E-1
cs_fil2_imon=-2.75607E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.32843E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21745E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34037E-3
inlet_lpb_pmon=2.9978E-1
chamber_ion_pmon=1.19965E-7
chamber_cvt_pmon=2.52099E-3
foreline_cvt_pmon=2.52099E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.20559E-1
res40_imon=-2.36002E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=171
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09595E0	-7.56621E-1	-7.35211E-1	-9.19471E0	-9.19015E0	4.33922E-3	9.49144E-2	2.72912E1	-3.26712E1	-3.26318E1	2.68099E1	1.20158E-7	2.51954E-3	2.51954E-3	6.3074E-3	3.04063E-1
2.0E0	4.4E1	0.0E0	3.16E2	1.6E2	-2.09487E0	-7.56836E-1	-7.34901E-1	-9.19471E0	-9.18977E0	4.22001E-3	9.50575E-2	2.73651E1	-3.26395E1	-3.2645E1	2.68487E1	1.20004E-7	2.51632E-3	2.51632E-3	6.29665E-3	3.00966E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09487E0	-7.56741E-1	-7.35354E-1	-9.19466E0	-9.18982E0	4.3869E-3	9.50336E-2	2.73582E1	-3.26708E1	-3.26219E1	2.68227E1	1.19913E-7	2.52209E-3	2.52209E-3	6.32112E-3	3.01478E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09433E0	-7.56741E-1	-7.34925E-1	-9.19483E0	-9.18984E0	4.3869E-3	9.51529E-2	2.73448E1	-3.26549E1	-3.26398E1	2.68376E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09418E0	-7.56788E-1	-7.35021E-1	-9.19454E0	-9.18999E0	4.43459E-3	9.52959E-2	2.73051E1	-3.26449E1	-3.26201E1	2.68499E1	1.2026E-7	2.5131E-3	2.5131E-3	6.31817E-3	3.00966E-1
6.0E0	0.0E0	1.0E0	9.93E2	6.35E2	-2.09456E0	-7.57074E-1	-7.34997E-1	-9.1948E0	-9.19011E0	4.26769E-3	9.50098E-2	2.72913E1	-3.26597E1	-3.26146E1	2.68112E1	1.19965E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.00302E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09533E0	-7.5686E-1	-7.34735E-1	-9.19483E0	-9.18987E0	4.55379E-3	9.50098E-2	2.73147E1	-3.26693E1	-3.2617E1	2.68274E1	1.198E-7	2.52276E-3	2.52276E-3	6.31278E-3	3.00197E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09495E0	-7.57003E-1	-7.34973E-1	-9.19473E0	-9.19025E0	4.50611E-3	9.51529E-2	2.73003E1	-3.26687E1	-3.26278E1	2.68322E1	1.19978E-7	2.51025E-3	2.51025E-3	6.31858E-3	2.99879E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09472E0	-7.57051E-1	-7.34901E-1	-9.19509E0	-9.19003E0	4.36306E-3	9.4986E-2	2.73428E1	-3.26526E1	-3.26054E1	2.68545E1	1.19953E-7	2.52815E-3	2.52815E-3	6.33436E-3	3.0148E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09549E0	-7.56931E-1	-7.35021E-1	-9.19521E0	-9.19001E0	4.1008E-3	9.54151E-2	2.73123E1	-3.26885E1	-3.2611E1	2.67752E1	1.19705E-7	2.5199E-3	2.5199E-3	6.30192E-3	3.00563E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09518E0	-7.56907E-1	-7.35068E-1	-9.19516E0	-9.18994E0	4.26769E-3	9.4986E-2	2.73369E1	-3.26548E1	-3.26456E1	2.6825E1	1.20069E-7	2.52209E-3	2.52209E-3	6.31288E-3	2.99E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09588E0	-7.56788E-1	-7.34878E-1	-9.19492E0	-9.1898E0	4.22001E-3	9.52959E-2	2.73145E1	-3.26644E1	-3.26231E1	2.6771E1	1.19965E-7	2.52099E-3	2.52099E-3	6.32936E-3	2.9978E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09642E0	-7.56788E-1	-7.34901E-1	-9.19511E0	-9.19003E0	4.07696E-3	9.50575E-2	2.73099E1	-3.26206E1	-3.26098E1	2.68671E1	1.19965E-7	2.52209E-3	2.52209E-3	6.31288E-3	3.01085E-1
1.7E1	0.0E0	1.0E0	6.87E2	4.7E2	-2.09619E0	-7.5686E-1	-7.34878E-1	-9.19518E0	-9.19025E0	4.33922E-3	9.51529E-2	2.73255E1	-3.26356E1	-3.26182E1	2.68466E1	1.20017E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.02396E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09565E0	-7.56788E-1	-7.35092E-1	-9.19516E0	-9.19025E0	4.45843E-3	9.48429E-2	2.73339E1	-3.26561E1	-3.26386E1	2.68244E1	1.19913E-7	2.51116E-3	2.51116E-3	6.32386E-3	2.9978E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09541E0	-7.56645E-1	-7.35188E-1	-9.19521E0	-9.1903E0	4.41074E-3	9.48429E-2	2.73216E1	-3.26467E1	-3.26307E1	2.68343E1	1.19809E-7	2.52318E-3	2.52318E-3	6.32386E-3	3.00041E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.0958E0	-7.56741E-1	-7.35092E-1	-9.19509E0	-9.19003E0	4.07696E-3	9.50098E-2	2.73213E1	-3.26463E1	-3.26312E1	2.6843E1	1.1974E-7	2.52131E-3	2.52131E-3	6.32328E-3	3.00097E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09572E0	-7.56693E-1	-7.34806E-1	-9.19485E0	-9.19011E0	4.26769E-3	9.50098E-2	2.73341E1	-3.26434E1	-3.2622E1	2.68094E1	1.19991E-7	2.52236E-3	2.52236E-3	6.31269E-3	3.00097E-1
2.2E1	2.0E0	0.0E0	8.89E2	6.17E2	-2.09572E0	-7.56812E-1	-7.34878E-1	-9.19483E0	-9.19008E0	4.33922E-3	9.53436E-2	2.73269E1	-3.26543E1	-3.26366E1	2.68683E1	1.20042E-7	2.52131E-3	2.52131E-3	6.2863E-3	2.99845E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09487E0	-7.56645E-1	-7.35164E-1	-9.19502E0	-9.19018E0	4.00543E-3	9.51529E-2	2.73087E1	-3.26597E1	-3.2584E1	2.68094E1	1.19965E-7	2.52099E-3	2.52099E-3	6.34037E-3	2.9978E-1