[Scan]
initial_time=2016-01-18T23:21:17
final_time=2016-01-18T23:21:37
ip_count=19
run=1024
dataset=11
scan=837
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09402E0
qbias_imon=-1.0874E-4
ql1_vset=
ql1_vmon=-7.57289E-1
ql1_imon=1.41796E-8
ql2_vset=
ql2_vmon=-7.35092E-1
ql2_imon=2.03146E-9
ql3_vset=
ql3_vmon=-9.19502E0
ql3_imon=2.38693E-10
ql4_vset=
ql4_vmon=-9.19001E0
ql4_imon=-2.37072E-10
mult1=-9.74761E-9
mult2=-2.71738E-9
rf_tmon=-4.09065E-3
rf_agc=3.34684E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.45843E-3
ql5_imon=1.77413E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68565E0
bslens_imon=2.38512E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19284E1
lens5a_imon=2.02174E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12472E2
lens4a_imon=2.05016E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53857E1
cs_ef1b_imon=3.17191E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0457E2
lens23_imon=1.02316E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04853E1
cs_ea1_imon=1.09725E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37746E0
lens1_imon=2.64223E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64656E1
os_ef1alow_imon=2.97333E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03874E1
cs_ea2_imon=1.36244E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84388E1
cs_ef1a_imon=3.03604E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.1679E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11346E1
os_restr1_imon=4.29238E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15134E1
os_ea1_imon=2.43972E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63803E1
os_ef1bup_imon=3.07316E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22516E0
cs_ionrep_imon=9.89267E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.919E2
cs_nozzle_imon=1.93508E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01977E1
cs_anode1_imon=1.97287E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20422E0
olens4_imon=3.16013E-8
tplens_vset=1.4E-1
tplens_vmon=1.68306E0
tplens_imon=-3.18187E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26154E1
iondef3_imon=1.48218E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2652E1
iondef2_imon=1.57511E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02931E2
lens6_imon=2.98228E-4
ql6_vset=1.0E-1
ql6_vmon=9.52482E-2
ql6_imon=4.03099E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29189E0
ionrepsh_imon=8.62917E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.34019E1
lens5b_imon=2.16535E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74369E1
cs_ef2b_imon=3.13911E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42656E0
os_ea2_imon=-7.62616E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06122E2
lens4b_imon=2.00626E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71234E1
cs_ef2a_imon=3.1856E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05456E0
os_ef2alow_imon=-2.5258E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.70394E-1
os_ef2bup_imon=-4.99812E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11448E1
os_restr2_imon=3.39896E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23041E2
cs_ionfoca_imon=6.29451E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01833E1
cs_anode2_imon=2.10297E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72927E1
iondef1_imon=1.13435E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68707E1
iondef4_imon=1.10143E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=4.78169E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81569E-1
olens1_imon=7.09191E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15116E0
cs_ionaccel_imon=-8.24728E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02041E2
cs_ionfocb_imon=1.47533E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56309E1
einzel_imon=7.70586E-6
window_vset=0.0E0
window_vmon=2.49178E-1
window_imon=-6.84173E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82642E2
mask1_imon=2.39253E-4
mask2_vset=0.0E0
mask2_vmon=-1.86452E1
mask2_imon=-7.81481E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92637E3
multa_neg_imon=7.12693E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93717E3
defgrida_imon=6.70453E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50133E3
multb_neg_imon=7.76235E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44645E0
defgridb_imon=6.14257E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33215E1
os_fil1_imon=9.42294E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07996E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61251E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31839E1
cs_fil1_imon=8.21801E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=8.99286E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63402E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.50095E-2
os_fil2_imon=-2.35362E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.04922E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.53218E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29004E-1
cs_fil2_imon=-2.2395E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.14222E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2177E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=3.01223E-1
chamber_ion_pmon=1.2026E-7
chamber_cvt_pmon=2.52276E-3
foreline_cvt_pmon=2.52276E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=2.69193E-1
res40_imon=-2.32758E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09418E0	-7.56836E-1	-7.35068E-1	-9.19499E0	-9.19018E0	4.48227E-3	9.47714E-2	2.73027E1	-3.2731E1	-3.26036E1	2.6854E1	1.19601E-7	2.51116E-3	2.51116E-3	6.30192E-3	3.02133E-1
2.0E0	3.2E1	0.0E0	3.16E2	1.6E2	-2.0941E0	-7.57074E-1	-7.35116E-1	-9.19492E0	-9.19027E0	4.36306E-3	9.48906E-2	2.73165E1	-3.26771E1	-3.26206E1	2.68088E1	1.20055E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.02253E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09449E0	-7.57051E-1	-7.35235E-1	-9.19504E0	-9.1902E0	4.673E-3	9.49144E-2	2.73157E1	-3.26296E1	-3.25959E1	2.68807E1	1.19766E-7	2.52027E-3	2.52027E-3	6.32978E-3	3.01475E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09503E0	-7.56884E-1	-7.34758E-1	-9.19502E0	-9.19023E0	4.673E-3	9.49383E-2	2.7308E1	-3.26579E1	-3.26231E1	2.68551E1	1.20042E-7	2.52025E-3	2.52025E-3	6.32858E-3	3.02621E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09557E0	-7.57074E-1	-7.3514E-1	-9.19471E0	-9.18992E0	4.52995E-3	9.53674E-2	2.73063E1	-3.26567E1	-3.26446E1	2.68016E1	1.20106E-7	2.51417E-3	2.51417E-3	6.29128E-3	3.02769E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09487E0	-7.57289E-1	-7.35164E-1	-9.19487E0	-9.19013E0	4.33922E-3	9.52005E-2	2.72871E1	-3.26801E1	-3.2614E1	2.68605E1	1.19913E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.01347E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09533E0	-7.57241E-1	-7.34878E-1	-9.1949E0	-9.18984E0	4.45843E-3	9.48191E-2	2.73257E1	-3.26644E1	-3.26272E1	2.67956E1	1.20069E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.00563E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09588E0	-7.56931E-1	-7.34758E-1	-9.19468E0	-9.19001E0	4.60148E-3	9.47475E-2	2.73021E1	-3.26614E1	-3.26207E1	2.68198E1	1.19953E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.00453E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0951E0	-7.56955E-1	-7.34663E-1	-9.19487E0	-9.19025E0	4.14848E-3	9.53436E-2	2.72859E1	-3.26663E1	-3.26296E1	2.68466E1	1.19965E-7	2.50789E-3	2.50789E-3	6.32386E-3	2.9926E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09487E0	-7.57074E-1	-7.34615E-1	-9.19492E0	-9.18987E0	4.3869E-3	9.50575E-2	2.73151E1	-3.26472E1	-3.26461E1	2.68917E1	1.19851E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.0148E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.0948E0	-7.56741E-1	-7.3483E-1	-9.19468E0	-9.18994E0	4.48227E-3	9.53436E-2	2.73417E1	-3.26945E1	-3.26188E1	2.67818E1	1.19861E-7	2.52318E-3	2.52318E-3	6.3074E-3	3.00302E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0951E0	-7.56669E-1	-7.34925E-1	-9.19466E0	-9.18982E0	4.50611E-3	9.55343E-2	2.72931E1	-3.26597E1	-3.26086E1	2.68502E1	1.19544E-7	2.51632E-3	2.51632E-3	6.32356E-3	3.00197E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09541E0	-7.5686E-1	-7.3452E-1	-9.19502E0	-9.18992E0	4.55379E-3	9.52721E-2	2.73399E1	-3.26579E1	-3.26272E1	2.684E1	1.20069E-7	2.51552E-3	2.51552E-3	6.31288E-3	2.99E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09526E0	-7.56669E-1	-7.34782E-1	-9.19492E0	-9.18994E0	4.43459E-3	9.48906E-2	2.73105E1	-3.26182E1	-3.262E1	2.68773E1	1.20069E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.9952E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09495E0	-7.56764E-1	-7.34711E-1	-9.19473E0	-9.18992E0	4.60148E-3	9.53674E-2	2.73458E1	-3.26732E1	-3.26089E1	2.68117E1	1.20069E-7	2.5188E-3	2.5188E-3	6.32936E-3	2.9926E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09549E0	-7.57051E-1	-7.3483E-1	-9.19502E0	-9.19006E0	4.69685E-3	9.51052E-2	2.72985E1	-3.26987E1	-3.2632E1	2.67872E1	1.20106E-7	2.52169E-3	2.52169E-3	6.32356E-3	3.00966E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09495E0	-7.5686E-1	-7.34806E-1	-9.19485E0	-9.19003E0	4.64916E-3	9.50813E-2	2.73231E1	-3.26242E1	-3.26573E1	2.68082E1	1.19913E-7	2.51334E-3	2.51334E-3	6.34037E-3	2.9978E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09426E0	-7.57241E-1	-7.3483E-1	-9.19497E0	-9.18984E0	4.43459E-3	9.50813E-2	2.73027E1	-3.26554E1	-3.26314E1	2.68364E1	1.20122E-7	2.5199E-3	2.5199E-3	6.29645E-3	3.02922E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09426E0	-7.57217E-1	-7.34878E-1	-9.19511E0	-9.19006E0	4.74453E-3	9.50336E-2	2.73246E1	-3.26732E1	-3.26183E1	2.68534E1	1.19953E-7	2.51847E-3	2.51847E-3	6.32896E-3	3.02511E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09402E0	-7.57289E-1	-7.35092E-1	-9.19502E0	-9.19001E0	4.45843E-3	9.52482E-2	2.72927E1	-3.2652E1	-3.26154E1	2.68707E1	1.2026E-7	2.52276E-3	2.52276E-3	6.32356E-3	3.01223E-1