[Scan]
initial_time=2016-01-18T23:21:44
final_time=2016-01-18T23:22:03
ip_count=19
run=1024
dataset=11
scan=838
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09441E0
qbias_imon=-1.08754E-4
ql1_vset=
ql1_vmon=-7.56955E-1
ql1_imon=1.41966E-8
ql2_vset=
ql2_vmon=-7.35188E-1
ql2_imon=2.03856E-9
ql3_vset=
ql3_vmon=-9.19461E0
ql3_imon=2.40421E-10
ql4_vset=
ql4_vmon=-9.19003E0
ql4_imon=-2.64096E-10
mult1=-9.80672E-9
mult2=-2.74677E-9
rf_tmon=-6.05502E-3
rf_agc=3.2731E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.673E-3
ql5_imon=1.68967E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68381E0
bslens_imon=2.66059E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19382E1
lens5a_imon=1.99236E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12505E2
lens4a_imon=2.051E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53881E1
cs_ef1b_imon=3.15605E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04616E2
lens23_imon=1.02143E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04321E1
cs_ea1_imon=1.13104E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38358E0
lens1_imon=2.65325E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64741E1
os_ef1alow_imon=2.97297E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03635E1
cs_ea2_imon=1.35032E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84232E1
cs_ef1a_imon=3.05694E-5
olens2_vset=9.7E-1
olens2_vmon=9.6972E-1
olens2_imon=1.16503E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11664E1
os_restr1_imon=4.28373E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14436E1
os_ea1_imon=2.40777E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63695E1
os_ef1bup_imon=3.08253E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21782E0
cs_ionrep_imon=9.29398E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91976E2
cs_nozzle_imon=1.93508E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01977E1
cs_anode1_imon=1.95773E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2043E0
olens4_imon=3.14815E-8
tplens_vset=1.4E-1
tplens_vmon=1.62858E0
tplens_imon=-1.89633E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25918E1
iondef3_imon=1.52956E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26638E1
iondef2_imon=1.54499E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02942E2
lens6_imon=2.9825E-4
ql6_vset=1.0E-1
ql6_vmon=9.51529E-2
ql6_imon=4.0346E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28699E0
ionrepsh_imon=8.27289E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33664E1
lens5b_imon=2.18666E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74423E1
cs_ef2b_imon=3.12794E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42228E0
os_ea2_imon=-7.88327E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06067E2
lens4b_imon=2.00652E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71192E1
cs_ef2a_imon=3.16794E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04675E0
os_ef2alow_imon=-2.45372E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.96823E-1
os_ef2bup_imon=-5.16751E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11141E1
os_restr2_imon=3.38346E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23047E2
cs_ionfoca_imon=6.26916E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01839E1
cs_anode2_imon=2.07991E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73198E1
iondef1_imon=1.1248E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67866E1
iondef4_imon=1.10179E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=4.70893E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81569E-1
olens1_imon=7.08106E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12293E0
cs_ionaccel_imon=-7.88688E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02093E2
cs_ionfocb_imon=1.47388E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56423E1
einzel_imon=7.81398E-6
window_vset=0.0E0
window_vmon=2.58788E-1
window_imon=-7.70669E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82656E2
mask1_imon=2.39196E-4
mask2_vset=0.0E0
mask2_vmon=-1.86482E1
mask2_imon=-5.54431E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92644E3
multa_neg_imon=7.35465E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93731E3
defgrida_imon=6.62006E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=7.17835E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.34226E0
defgridb_imon=6.31887E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33224E1
os_fil1_imon=9.41723E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07587E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61061E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31828E1
cs_fil1_imon=7.40712E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.85781E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63491E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.46153E-2
os_fil2_imon=-2.54584E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.01919E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.53875E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30688E-1
cs_fil2_imon=-2.66597E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.25034E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21784E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=2.9874E-1
chamber_ion_pmon=1.20069E-7
chamber_cvt_pmon=2.52099E-3
foreline_cvt_pmon=2.52099E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.25365E-1
res40_imon=-2.42849E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=165
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09387E0	-7.56907E-1	-7.3514E-1	-9.19521E0	-9.19008E0	4.22001E-3	9.47714E-2	2.73145E1	-3.26301E1	-3.26313E1	2.6858E1	1.20122E-7	2.51662E-3	2.51662E-3	6.34588E-3	3.00041E-1
2.0E0	3.1E1	0.0E0	3.16E2	1.6E2	-2.09394E0	-7.57003E-1	-7.35068E-1	-9.19528E0	-9.19001E0	4.17233E-3	9.48429E-2	2.73143E1	-3.26731E1	-3.26174E1	2.67633E1	1.20004E-7	2.51525E-3	2.51525E-3	6.3074E-3	2.99941E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09402E0	-7.5686E-1	-7.34949E-1	-9.1948E0	-9.19001E0	4.52995E-3	9.48906E-2	2.73144E1	-3.26388E1	-3.26138E1	2.6913E1	1.19925E-7	2.5225E-3	2.5225E-3	6.32978E-3	3.00676E-1
4.0E0	1.1E1	0.0E0	6.55E2	3.98E2	-2.0941E0	-7.56741E-1	-7.35021E-1	-9.19487E0	-9.18999E0	4.57764E-3	9.48668E-2	2.73411E1	-3.26284E1	-3.26194E1	2.6771E1	1.20106E-7	2.52169E-3	2.52169E-3	6.3074E-3	2.9841E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09456E0	-7.56836E-1	-7.34782E-1	-9.19483E0	-9.19003E0	4.41074E-3	9.48906E-2	2.73207E1	-3.26549E1	-3.26164E1	2.68076E1	1.20017E-7	2.51771E-3	2.51771E-3	6.3074E-3	2.98481E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09464E0	-7.56955E-1	-7.35044E-1	-9.1949E0	-9.19001E0	4.48227E-3	9.48668E-2	2.73405E1	-3.26867E1	-3.26116E1	2.68983E1	1.20158E-7	2.51525E-3	2.51525E-3	6.29128E-3	2.99175E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09433E0	-7.56764E-1	-7.34854E-1	-9.19487E0	-9.1898E0	4.57764E-3	9.48906E-2	2.73039E1	-3.26236E1	-3.26158E1	2.68142E1	1.19913E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.01347E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09472E0	-7.56907E-1	-7.35021E-1	-9.19511E0	-9.19008E0	4.57764E-3	9.46283E-2	2.72967E1	-3.2644E1	-3.26026E1	2.68292E1	1.19965E-7	2.52099E-3	2.52099E-3	6.29645E-3	3.00824E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09394E0	-7.57265E-1	-7.35188E-1	-9.19499E0	-9.1897E0	4.24385E-3	9.49621E-2	2.73207E1	-3.26338E1	-3.26116E1	2.68448E1	1.19965E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.00302E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09441E0	-7.56979E-1	-7.34925E-1	-9.1949E0	-9.18941E0	4.33922E-3	9.5129E-2	2.73381E1	-3.26472E1	-3.26343E1	2.68279E1	1.19965E-7	2.52428E-3	2.52428E-3	6.30192E-3	2.99E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0948E0	-7.56931E-1	-7.35068E-1	-9.19495E0	-9.18972E0	4.22001E-3	9.50575E-2	2.73358E1	-3.26499E1	-3.26095E1	2.68319E1	1.20004E-7	2.5131E-3	2.5131E-3	6.33436E-3	2.9943E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09487E0	-7.57074E-1	-7.34711E-1	-9.19497E0	-9.18975E0	4.22001E-3	9.49383E-2	2.73244E1	-3.26865E1	-3.26622E1	2.68444E1	1.20177E-7	2.51783E-3	2.51783E-3	6.3126E-3	2.99753E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09441E0	-7.5717E-1	-7.3483E-1	-9.19485E0	-9.18996E0	4.07696E-3	9.48429E-2	2.73393E1	-3.26843E1	-3.26044E1	2.68532E1	1.20116E-7	2.51411E-3	2.51411E-3	6.29581E-3	3.00639E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09518E0	-7.56955E-1	-7.34973E-1	-9.19509E0	-9.18975E0	4.33922E-3	9.47475E-2	2.73258E1	-3.26467E1	-3.26394E1	2.68384E1	1.198E-7	2.52169E-3	2.52169E-3	6.31817E-3	3.00966E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09356E0	-7.5717E-1	-7.34711E-1	-9.19504E0	-9.18989E0	4.12464E-3	9.49383E-2	2.73137E1	-3.26315E1	-3.26021E1	2.68431E1	1.19979E-7	2.51162E-3	2.51162E-3	6.34385E-3	3.0E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09402E0	-7.56764E-1	-7.34997E-1	-9.19487E0	-9.18975E0	4.24385E-3	9.49621E-2	2.73464E1	-3.26797E1	-3.2603E1	2.68227E1	1.19925E-7	2.51581E-3	2.51581E-3	6.31858E-3	3.01209E-1
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-2.09418E0	-7.56884E-1	-7.35164E-1	-9.19487E0	-9.19008E0	4.36306E-3	9.49621E-2	2.73327E1	-3.26512E1	-3.2605E1	2.68845E1	1.198E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.00197E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09449E0	-7.56955E-1	-7.35068E-1	-9.19495E0	-9.19015E0	4.64916E-3	9.52005E-2	2.73104E1	-3.26555E1	-3.26272E1	2.68227E1	1.20106E-7	2.52061E-3	2.52061E-3	6.31278E-3	2.99175E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09503E0	-7.56979E-1	-7.35092E-1	-9.1949E0	-9.18982E0	4.52995E-3	9.48668E-2	2.73417E1	-3.26885E1	-3.26536E1	2.68214E1	1.19953E-7	2.52061E-3	2.52061E-3	6.31817E-3	2.98665E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09441E0	-7.56955E-1	-7.35188E-1	-9.19461E0	-9.19003E0	4.673E-3	9.51529E-2	2.73198E1	-3.26638E1	-3.25918E1	2.67866E1	1.20069E-7	2.52099E-3	2.52099E-3	6.32936E-3	2.9874E-1