[Scan]
initial_time=2016-01-18T23:22:10
final_time=2016-01-18T23:22:30
ip_count=19
run=1024
dataset=11
scan=839
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0948E0
qbias_imon=-1.0883E-4
ql1_vset=
ql1_vmon=-7.56645E-1
ql1_imon=1.41453E-8
ql2_vset=
ql2_vmon=-7.34997E-1
ql2_imon=2.04294E-9
ql3_vset=
ql3_vmon=-9.19471E0
ql3_imon=2.18499E-10
ql4_vset=
ql4_vmon=-9.18992E0
ql4_imon=-2.53832E-10
mult1=-1.13779E-8
mult2=-2.76452E-9
rf_tmon=-4.74074E-3
rf_agc=3.2925E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.17233E-3
ql5_imon=1.69587E-9
bslens_vset=-6.2E0
bslens_vmon=-6.70699E0
bslens_imon=2.56659E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19707E1
lens5a_imon=2.00578E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12474E2
lens4a_imon=2.05324E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53923E1
cs_ef1b_imon=3.15857E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04651E2
lens23_imon=1.02247E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04459E1
cs_ea1_imon=1.09481E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40801E0
lens1_imon=2.91627E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64723E1
os_ef1alow_imon=2.96612E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03744E1
cs_ea2_imon=1.35293E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84382E1
cs_ef1a_imon=3.04361E-5
olens2_vset=9.7E-1
olens2_vmon=9.69744E-1
olens2_imon=1.16481E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11412E1
os_restr1_imon=4.28049E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14981E1
os_ea1_imon=2.44018E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63707E1
os_ef1bup_imon=3.09442E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21905E0
cs_ionrep_imon=9.50613E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91936E2
cs_nozzle_imon=1.93564E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01791E1
cs_anode1_imon=1.96098E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20451E0
olens4_imon=3.15262E-8
tplens_vset=1.4E-1
tplens_vmon=1.69971E0
tplens_imon=-7.94438E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.2644E1
iondef3_imon=1.49604E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26705E1
iondef2_imon=1.55156E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02927E2
lens6_imon=2.98194E-4
ql6_vset=1.0E-1
ql6_vmon=9.49144E-2
ql6_imon=3.9485E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29295E0
ionrepsh_imon=8.6842E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33568E1
lens5b_imon=2.17522E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74483E1
cs_ef2b_imon=3.14272E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48702E0
os_ea2_imon=-7.3194E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06069E2
lens4b_imon=2.00468E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71138E1
cs_ef2a_imon=3.15785E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04495E0
os_ef2alow_imon=-2.45012E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.8481E-1
os_ef2bup_imon=-5.12066E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11213E1
os_restr2_imon=3.38815E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2305E2
cs_ionfoca_imon=6.2946E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01917E1
cs_anode2_imon=2.09793E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73375E1
iondef1_imon=1.09806E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68202E1
iondef4_imon=1.11476E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=4.73635E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81617E-1
olens1_imon=7.06364E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14396E0
cs_ionaccel_imon=-8.21124E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02109E2
cs_ionfocb_imon=1.47475E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56681E1
einzel_imon=7.75271E-6
window_vset=0.0E0
window_vmon=2.5158E-1
window_imon=-8.7158E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82656E2
mask1_imon=2.3925E-4
mask2_vset=0.0E0
mask2_vmon=-1.86272E1
mask2_imon=-5.9047E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92567E3
multa_neg_imon=8.08938E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93723E3
defgrida_imon=6.55007E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50141E3
multb_neg_imon=7.33594E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.46472E0
defgridb_imon=6.26527E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33242E1
os_fil1_imon=9.39789E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08549E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61176E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31862E1
cs_fil1_imon=8.05583E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.88785E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63289E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.73748E-2
os_fil2_imon=-2.34762E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.09727E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.50013E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30688E-1
cs_fil2_imon=-2.04729E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.23232E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21847E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=3.01223E-1
chamber_ion_pmon=1.20106E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.31371E-1
res40_imon=-2.39606E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=198
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09533E0	-7.56598E-1	-7.3514E-1	-9.19466E0	-9.18975E0	4.17233E-3	9.50336E-2	2.73187E1	-3.2711E1	-3.25888E1	2.68586E1	1.19757E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.00563E-1
2.0E0	3.7E1	0.0E0	3.16E2	1.6E2	-2.09449E0	-7.56645E-1	-7.35116E-1	-9.19464E0	-9.19018E0	4.26769E-3	9.50336E-2	2.73105E1	-3.26446E1	-3.26356E1	2.68142E1	1.19882E-7	2.51701E-3	2.51701E-3	6.29655E-3	2.99732E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-2.09518E0	-7.56502E-1	-7.35307E-1	-9.19445E0	-9.19011E0	4.64916E-3	9.52005E-2	2.7288E1	-3.27027E1	-3.2593E1	2.68442E1					
4.0E0	8.0E0	0.0E0	6.55E2	3.98E2	-2.09526E0	-7.56764E-1	-7.34901E-1	-9.1948E0	-9.19001E0	4.72069E-3	9.4986E-2	2.73198E1	-3.26862E1	-3.26231E1	2.67984E1	1.19953E-7	2.51954E-3	2.51954E-3	6.32896E-3	3.0071E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09557E0	-7.56574E-1	-7.35283E-1	-9.19466E0	-9.1902E0	4.8399E-3	9.46999E-2	2.73159E1	-3.2653E1	-3.26368E1	2.6837E1	1.19851E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.0071E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09588E0	-7.56621E-1	-7.34973E-1	-9.19476E0	-9.19023E0	4.69685E-3	9.47952E-2	2.73261E1	-3.26639E1	-3.26212E1	2.6822E1	1.19861E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.00041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09518E0	-7.56693E-1	-7.35116E-1	-9.19495E0	-9.18999E0	4.62532E-3	9.52482E-2	2.73283E1	-3.26571E1	-3.26404E1	2.68136E1	1.20209E-7	2.51954E-3	2.51954E-3	6.32896E-3	2.99941E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09449E0	-7.56645E-1	-7.35092E-1	-9.19483E0	-9.19001E0	4.50611E-3	9.49144E-2	2.73237E1	-3.26699E1	-3.26332E1	2.67896E1	1.20295E-7	2.51451E-3	2.51451E-3	6.30429E-3	3.00791E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09526E0	-7.56621E-1	-7.35211E-1	-9.19452E0	-9.19008E0	4.72069E-3	9.48906E-2	2.73099E1	-3.26506E1	-3.26116E1	2.68172E1	1.20174E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.02396E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0948E0	-7.56574E-1	-7.35378E-1	-9.1948E0	-9.18984E0	4.45843E-3	9.4986E-2	2.73281E1	-3.26443E1	-3.26242E1	2.69145E1	1.20226E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.00563E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09495E0	-7.56693E-1	-7.35188E-1	-9.19473E0	-9.18984E0	4.33922E-3	9.48668E-2	2.73204E1	-3.26301E1	-3.26343E1	2.68017E1	1.19953E-7	2.51739E-3	2.51739E-3	6.30202E-3	2.9943E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09557E0	-7.56764E-1	-7.35211E-1	-9.19466E0	-9.18982E0	4.43459E-3	9.50098E-2	2.73484E1	-3.26801E1	-3.25876E1	2.68272E1	1.19697E-7	2.51525E-3	2.51525E-3	6.31278E-3	3.00197E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09526E0	-7.56669E-1	-7.35331E-1	-9.19464E0	-9.1898E0	4.55379E-3	9.47475E-2	2.73081E1	-3.26861E1	-3.26416E1	2.67884E1	1.19819E-7	2.51581E-3	2.51581E-3	6.3074E-3	3.00144E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09595E0	-7.56717E-1	-7.35331E-1	-9.19468E0	-9.19006E0	4.62532E-3	9.48429E-2	2.73063E1	-3.26585E1	-3.26488E1	2.68626E1	1.19913E-7	2.51771E-3	2.51771E-3	6.34588E-3	3.00563E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09603E0	-7.5655E-1	-7.35021E-1	-9.19476E0	-9.18994E0	4.22001E-3	9.48668E-2	2.72949E1	-3.26651E1	-3.26356E1	2.68768E1	1.20174E-7	2.52209E-3	2.52209E-3	6.3074E-3	3.00041E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09588E0	-7.56431E-1	-7.34973E-1	-9.19487E0	-9.1898E0	3.98159E-3	9.5129E-2	2.72853E1	-3.2641E1	-3.26386E1	2.68214E1	1.19861E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.00563E-1
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-2.09595E0	-7.56669E-1	-7.35044E-1	-9.19492E0	-9.18972E0	4.14848E-3	9.47714E-2	2.73016E1	-3.26744E1	-3.26071E1	2.68123E1	1.19953E-7	2.52492E-3	2.52492E-3	6.31278E-3	3.0071E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09533E0	-7.56645E-1	-7.34735E-1	-9.19507E0	-9.18972E0	4.14848E-3	9.4986E-2	2.73092E1	-3.26402E1	-3.26225E1	2.68435E1	1.20174E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.01347E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09541E0	-7.56574E-1	-7.35188E-1	-9.1949E0	-9.1897E0	4.02927E-3	9.49621E-2	2.73016E1	-3.2649E1	-3.26691E1	2.68587E1	1.20444E-7	2.51919E-3	2.51919E-3	6.33388E-3	3.01862E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0948E0	-7.56645E-1	-7.34997E-1	-9.19471E0	-9.18992E0	4.17233E-3	9.49144E-2	2.73375E1	-3.26705E1	-3.2644E1	2.68202E1	1.20106E-7	2.51632E-3	2.51632E-3	6.32356E-3	3.01223E-1