[Scan]
initial_time=2016-01-18T23:23:04
final_time=2016-01-18T23:23:23
ip_count=19
run=1024
dataset=11
scan=841
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09472E0
qbias_imon=-1.08819E-4
ql1_vset=
ql1_vmon=-7.56884E-1
ql1_imon=1.41314E-8
ql2_vset=
ql2_vmon=-7.35044E-1
ql2_imon=2.05717E-9
ql3_vset=
ql3_vmon=-9.19478E0
ql3_imon=2.23053E-10
ql4_vset=
ql4_vmon=-9.18987E0
ql4_imon=-2.87282E-10
mult1=-1.00332E-8
mult2=-2.74121E-9
rf_tmon=-3.81139E-3
rf_agc=3.38301E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.45843E-3
ql5_imon=1.71608E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67329E0
bslens_imon=2.55034E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19842E1
lens5a_imon=2.01058E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12466E2
lens4a_imon=2.05167E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53923E1
cs_ef1b_imon=3.16362E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04626E2
lens23_imon=1.02209E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04776E1
cs_ea1_imon=1.09069E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38495E0
lens1_imon=2.68483E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6468E1
os_ef1alow_imon=2.98162E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03897E1
cs_ea2_imon=1.36181E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84172E1
cs_ef1a_imon=3.03676E-5
olens2_vset=9.7E-1
olens2_vmon=9.70435E-1
olens2_imon=1.16646E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11406E1
os_restr1_imon=4.28662E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14928E1
os_ea1_imon=2.44734E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63731E1
os_ef1bup_imon=3.08145E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23204E0
cs_ionrep_imon=9.62208E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91927E2
cs_nozzle_imon=1.93608E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01833E1
cs_anode1_imon=1.96422E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2043E0
olens4_imon=3.15118E-8
tplens_vset=1.4E-1
tplens_vmon=1.66149E0
tplens_imon=-3.30742E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26446E1
iondef3_imon=1.51471E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2644E1
iondef2_imon=1.55435E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0291E2
lens6_imon=2.98314E-4
ql6_vset=1.0E-1
ql6_vmon=9.49383E-2
ql6_imon=4.09816E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28867E0
ionrepsh_imon=8.73722E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33445E1
lens5b_imon=2.18791E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74717E1
cs_ef2b_imon=3.13515E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46623E0
os_ea2_imon=-6.52828E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06076E2
lens4b_imon=2.00658E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71246E1
cs_ef2a_imon=3.16903E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06477E0
os_ef2alow_imon=-2.47895E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.87213E-1
os_ef2bup_imon=-5.11345E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11111E1
os_restr2_imon=3.38238E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23043E2
cs_ionfoca_imon=6.28654E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01839E1
cs_anode2_imon=2.08892E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73092E1
iondef1_imon=1.10237E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68215E1
iondef4_imon=1.10864E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=4.7668E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81545E-1
olens1_imon=7.07841E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15297E0
cs_ionaccel_imon=-9.36451E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02091E2
cs_ionfocb_imon=1.47442E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56465E1
einzel_imon=7.87164E-6
window_vset=0.0E0
window_vmon=2.4257E-1
window_imon=-7.77877E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82652E2
mask1_imon=2.39308E-4
mask2_vset=0.0E0
mask2_vmon=-1.86146E1
mask2_imon=-6.40926E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92633E3
multa_neg_imon=7.56214E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93713E3
defgrida_imon=6.98168E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50122E3
multb_neg_imon=7.45596E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42032E0
defgridb_imon=5.97648E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33237E1
os_fil1_imon=9.42102E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07972E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61293E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31846E1
cs_fil1_imon=6.73438E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.39531E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63495E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.53488E-2
os_fil2_imon=-2.46174E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.15734E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.47683E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31076E-1
cs_fil2_imon=-2.10735E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.55067E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21736E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29665E-3
inlet_lpb_pmon=2.98665E-1
chamber_ion_pmon=1.19953E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.65609E-1
res40_imon=-2.31677E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=175
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09472E0	-7.56645E-1	-7.34735E-1	-9.19478E0	-9.18989E0	4.26769E-3	9.50336E-2	2.73128E1	-3.2652E1	-3.26307E1	2.67792E1	1.20055E-7	2.51525E-3	2.51525E-3	6.32896E-3	2.98665E-1
2.0E0	3.5E1	0.0E0	3.16E2	1.6E2	-2.09433E0	-7.56645E-1	-7.35068E-1	-9.19466E0	-9.18996E0	4.05312E-3	9.51052E-2	2.73147E1	-3.26543E1	-3.26164E1	2.684E1	1.198E-7	2.52061E-3	2.52061E-3	6.31278E-3	3.00453E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09426E0	-7.56907E-1	-7.35259E-1	-9.19473E0	-9.18982E0	4.3869E-3	9.50575E-2	2.73039E1	-3.26579E1	-3.2626E1	2.68319E1	1.19978E-7	2.51804E-3	2.51804E-3	6.31858E-3	2.99348E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-2.09348E0	-7.57146E-1	-7.35092E-1	-9.19492E0	-9.18999E0	4.24385E-3	9.5129E-2	2.7352E1	-3.26482E1	-3.26549E1	2.68175E1	1.19941E-7	2.51814E-3	2.51814E-3	6.26002E-3	2.99594E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09402E0	-7.56907E-1	-7.34925E-1	-9.19504E0	-9.19013E0	4.33922E-3	9.49144E-2	2.73285E1	-3.26723E1	-3.26284E1	2.68316E1	1.19544E-7	2.51203E-3	2.51203E-3	6.30202E-3	3.02511E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09418E0	-7.57194E-1	-7.34997E-1	-9.1948E0	-9.19015E0	4.55379E-3	9.50336E-2	2.73117E1	-3.26512E1	-3.25743E1	2.68532E1	1.19965E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.00563E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09418E0	-7.56764E-1	-7.34854E-1	-9.1948E0	-9.19023E0	4.3869E-3	9.4986E-2	2.73417E1	-3.26368E1	-3.25936E1	2.68965E1	1.20069E-7	2.5188E-3	2.5188E-3	6.29645E-3	3.00563E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09356E0	-7.56764E-1	-7.34997E-1	-9.19485E0	-9.18992E0	4.43459E-3	9.50575E-2	2.72841E1	-3.26296E1	-3.2632E1	2.68082E1	1.19757E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.00824E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0941E0	-7.56955E-1	-7.34901E-1	-9.19497E0	-9.19015E0	4.45843E-3	9.45807E-2	2.73328E1	-3.26655E1	-3.26531E1	2.68719E1	1.20017E-7	2.5188E-3	2.5188E-3	6.3074E-3	2.99E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09418E0	-7.56979E-1	-7.34806E-1	-9.19464E0	-9.19013E0	4.50611E-3	9.49144E-2	2.72847E1	-3.26873E1	-3.26543E1	2.68695E1	1.20106E-7	2.52061E-3	2.52061E-3	6.34518E-3	2.9841E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09433E0	-7.56884E-1	-7.35044E-1	-9.19466E0	-9.19003E0	4.673E-3	9.50813E-2	2.73105E1	-3.26621E1	-3.25984E1	2.68316E1	1.19965E-7	2.5188E-3	2.5188E-3	6.3074E-3	2.9926E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09495E0	-7.5686E-1	-7.35164E-1	-9.19497E0	-9.19008E0	4.69685E-3	9.48191E-2	2.7321E1	-3.26384E1	-3.26089E1	2.68058E1	1.19861E-7	2.51334E-3	2.51334E-3	6.31288E-3	2.9952E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09418E0	-7.56907E-1	-7.35116E-1	-9.19502E0	-9.18984E0	4.55379E-3	9.47475E-2	2.73417E1	-3.26452E1	-3.26524E1	2.68308E1	1.19953E-7	2.52061E-3	2.52061E-3	6.29128E-3	3.02511E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09526E0	-7.56693E-1	-7.35235E-1	-9.19526E0	-9.18975E0	4.3869E-3	9.47952E-2	2.73045E1	-3.26777E1	-3.26182E1	2.68308E1	1.19705E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.03712E-1
1.8E1	4.0E0	0.0E0	7.27E2	5.0E2	-2.0948E0	-7.56907E-1	-7.35092E-1	-9.19478E0	-9.1897E0	4.3869E-3	9.50098E-2	2.73562E1	-3.26573E1	-3.26008E1	2.67962E1	1.19913E-7	2.51443E-3	2.51443E-3	6.33486E-3	3.01085E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09557E0	-7.56836E-1	-7.35283E-1	-9.19495E0	-9.19008E0	4.55379E-3	9.50098E-2	2.73328E1	-3.26431E1	-3.26148E1	2.68466E1	1.19861E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.00563E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09418E0	-7.57051E-1	-7.35378E-1	-9.19504E0	-9.18992E0	4.26769E-3	9.48191E-2	2.73151E1	-3.26809E1	-3.25983E1	2.67824E1	1.19697E-7	2.52384E-3	2.52384E-3	6.3074E-3	2.99941E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09487E0	-7.56979E-1	-7.35283E-1	-9.19466E0	-9.18972E0	4.33922E-3	9.47714E-2	2.73234E1	-3.26573E1	-3.2659E1	2.68198E1	1.20122E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.00302E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.0951E0	-7.56955E-1	-7.35092E-1	-9.19507E0	-9.18987E0	4.45843E-3	9.47237E-2	2.73327E1	-3.26669E1	-3.26194E1	2.68424E1	1.20106E-7	2.51525E-3	2.51525E-3	6.32356E-3	2.9892E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09472E0	-7.56884E-1	-7.35044E-1	-9.19478E0	-9.18987E0	4.45843E-3	9.49383E-2	2.73092E1	-3.2644E1	-3.26446E1	2.68215E1	1.19953E-7	2.51417E-3	2.51417E-3	6.29665E-3	2.98665E-1