[Scan]
initial_time=2016-01-18T23:23:30
final_time=2016-01-18T23:23:50
ip_count=19
run=1024
dataset=11
scan=842
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09356E0
qbias_imon=-1.08755E-4
ql1_vset=
ql1_vmon=-7.56502E-1
ql1_imon=1.41196E-8
ql2_vset=
ql2_vmon=-7.35116E-1
ql2_imon=2.03319E-9
ql3_vset=
ql3_vmon=-9.19485E0
ql3_imon=1.75893E-10
ql4_vset=
ql4_vmon=-9.19018E0
ql4_imon=-2.35105E-10
mult1=-1.01732E-8
mult2=-2.8428E-9
rf_tmon=-3.778E-3
rf_agc=3.45656E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.74453E-3
ql5_imon=1.72294E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67635E0
bslens_imon=2.50891E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19562E1
lens5a_imon=1.98992E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12444E2
lens4a_imon=2.0496E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54007E1
cs_ef1b_imon=3.15245E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04604E2
lens23_imon=1.02226E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04916E1
cs_ea1_imon=1.09806E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35874E0
lens1_imon=2.65311E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64692E1
os_ef1alow_imon=2.97477E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0378E1
cs_ea2_imon=1.34824E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84232E1
cs_ef1a_imon=3.04973E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=1.1663E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11274E1
os_restr1_imon=4.30031E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14723E1
os_ea1_imon=2.43441E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63503E1
os_ef1bup_imon=3.07821E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22446E0
cs_ionrep_imon=9.43403E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91898E2
cs_nozzle_imon=1.93507E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02085E1
cs_anode1_imon=1.97467E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2042E0
olens4_imon=3.16661E-8
tplens_vset=1.4E-1
tplens_vmon=1.66426E0
tplens_imon=-4.33943E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26266E1
iondef3_imon=1.50902E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26644E1
iondef2_imon=1.54687E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02928E2
lens6_imon=2.98277E-4
ql6_vset=1.0E-1
ql6_vmon=9.52721E-2
ql6_imon=4.01726E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2563E0
ionrepsh_imon=8.51837E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33658E1
lens5b_imon=2.17846E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74585E1
cs_ef2b_imon=3.1283E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44496E0
os_ea2_imon=-6.85076E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06123E2
lens4b_imon=2.00579E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71264E1
cs_ef2a_imon=3.16578E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06837E0
os_ef2alow_imon=-2.48255E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.92619E-1
os_ef2bup_imon=-5.14228E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11328E1
os_restr2_imon=3.38923E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23055E2
cs_ionfoca_imon=6.26972E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01737E1
cs_anode2_imon=2.08567E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73169E1
iondef1_imon=1.11536E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68371E1
iondef4_imon=1.10936E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=4.77045E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81641E-1
olens1_imon=7.07641E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15116E0
cs_ionaccel_imon=-8.1752E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02053E2
cs_ionfocb_imon=1.47428E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56315E1
einzel_imon=7.85723E-6
window_vset=0.0E0
window_vmon=2.73204E-1
window_imon=-8.03104E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82651E2
mask1_imon=2.39203E-4
mask2_vset=0.0E0
mask2_vmon=-1.86362E1
mask2_imon=-5.7245E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92636E3
multa_neg_imon=7.28908E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93728E3
defgrida_imon=6.55727E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5012E3
multb_neg_imon=7.18093E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.35044E0
defgridb_imon=6.2869E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33251E1
os_fil1_imon=9.39957E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07966E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6117E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31864E1
cs_fil1_imon=6.83649E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.92989E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63317E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.59561E-2
os_fil2_imon=-2.55785E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.09727E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.57102E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30558E-1
cs_fil2_imon=-2.11937E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.46057E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21696E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=2.9978E-1
chamber_ion_pmon=1.19965E-7
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.47879E-1
res40_imon=-2.51499E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=214
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09464E0	-7.5686E-1	-7.34568E-1	-9.19495E0	-9.18982E0	4.57764E-3	9.49383E-2	2.73122E1	-3.26354E1	-3.26272E1	2.67932E1	1.20069E-7	2.51552E-3	2.51552E-3	6.31837E-3	2.99E-1
2.0E0	3.6E1	0.0E0	3.16E2	1.6E2	-2.0948E0	-7.56931E-1	-7.34806E-1	-9.19523E0	-9.18992E0	4.64916E-3	9.48429E-2	2.73198E1	-3.26487E1	-3.25979E1	2.68563E1	1.2026E-7	2.51739E-3	2.51739E-3	6.31817E-3	2.99686E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09533E0	-7.5686E-1	-7.34973E-1	-9.19499E0	-9.18992E0	4.52995E-3	9.47475E-2	2.73271E1	-3.26602E1	-3.26324E1	2.68209E1	1.19713E-7	2.51359E-3	2.51359E-3	6.31299E-3	2.99879E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09588E0	-7.56526E-1	-7.34854E-1	-9.19521E0	-9.18972E0	4.8399E-3	9.48906E-2	2.73598E1	-3.26573E1	-3.26248E1	2.6816E1	1.20042E-7	2.51498E-3	2.51498E-3	6.32858E-3	3.006E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09518E0	-7.56407E-1	-7.34806E-1	-9.19528E0	-9.1898E0	4.81606E-3	9.50336E-2	2.73183E1	-3.26759E1	-3.26374E1	2.67968E1	1.19861E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.00041E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09394E0	-7.56741E-1	-7.34591E-1	-9.19535E0	-9.19006E0	4.72069E-3	9.50336E-2	2.73051E1	-3.26356E1	-3.262E1	2.68713E1	1.19861E-7	2.52099E-3	2.52099E-3	6.33486E-3	3.00302E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09418E0	-7.56717E-1	-7.35164E-1	-9.19511E0	-9.18994E0	4.673E-3	9.5129E-2	2.73092E1	-3.26425E1	-3.26036E1	2.6807E1	1.20017E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.98481E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09449E0	-7.56836E-1	-7.35378E-1	-9.19485E0	-9.18994E0	4.673E-3	9.51052E-2	2.73522E1	-3.26725E1	-3.26266E1	2.68454E1	1.20106E-7	2.51954E-3	2.51954E-3	6.32896E-3	2.97901E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09449E0	-7.56836E-1	-7.34973E-1	-9.19487E0	-9.18987E0	4.98295E-3	9.49383E-2	2.7337E1	-3.26785E1	-3.26077E1	2.68292E1	1.20031E-7	2.52362E-3	2.52362E-3	6.31299E-3	3.01209E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09426E0	-7.56764E-1	-7.35235E-1	-9.19502E0	-9.18996E0	4.76837E-3	9.4986E-2	2.72883E1	-3.26482E1	-3.26086E1	2.68395E1	1.20004E-7	2.51417E-3	2.51417E-3	6.33977E-3	2.99686E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09518E0	-7.56454E-1	-7.35331E-1	-9.19483E0	-9.19015E0	4.48227E-3	9.50098E-2	2.73153E1	-3.26897E1	-3.26338E1	2.68545E1	1.19705E-7	2.52647E-3	2.52647E-3	6.29645E-3	3.01871E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09449E0	-7.56717E-1	-7.3483E-1	-9.19476E0	-9.19003E0	4.48227E-3	9.50336E-2	2.73281E1	-3.26555E1	-3.26284E1	2.68298E1	1.20017E-7	2.52318E-3	2.52318E-3	6.3074E-3	3.02133E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09394E0	-7.56907E-1	-7.35116E-1	-9.1949E0	-9.18996E0	4.41074E-3	9.48429E-2	2.73706E1	-3.26362E1	-3.26591E1	2.68106E1	1.20158E-7	2.52384E-3	2.52384E-3	6.31817E-3	2.9943E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09371E0	-7.56717E-1	-7.35331E-1	-9.1949E0	-9.19011E0	4.33922E-3	9.48668E-2	2.73472E1	-3.26765E1	-3.26092E1	2.68502E1	1.19809E-7	2.5188E-3	2.5188E-3	6.3074E-3	2.98222E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09387E0	-7.56407E-1	-7.35283E-1	-9.19483E0	-9.19015E0	4.33922E-3	9.46999E-2	2.73446E1	-3.26649E1	-3.26189E1	2.68001E1	1.19861E-7	2.52209E-3	2.52209E-3	6.31837E-3	2.97963E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09449E0	-7.56669E-1	-7.35211E-1	-9.19485E0	-9.1903E0	4.48227E-3	9.45568E-2	2.73448E1	-3.26482E1	-3.26266E1	2.68294E1	1.19953E-7	2.51417E-3	2.51417E-3	6.29665E-3	2.99175E-1
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-2.09402E0	-7.56288E-1	-7.35211E-1	-9.19478E0	-9.19025E0	4.29153E-3	9.47952E-2	2.73137E1	-3.26291E1	-3.26621E1	2.68256E1	1.20017E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.01085E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0934E0	-7.56454E-1	-7.35044E-1	-9.19514E0	-9.19013E0	4.48227E-3	9.46283E-2	2.73039E1	-3.267E1	-3.26069E1	2.68632E1	1.20137E-7	2.52362E-3	2.52362E-3	6.34661E-3	3.01209E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09356E0	-7.56359E-1	-7.3514E-1	-9.19509E0	-9.19027E0	4.62532E-3	9.50336E-2	2.73345E1	-3.2641E1	-3.26164E1	2.68094E1	1.19941E-7	2.52131E-3	2.52131E-3	6.33388E-3	3.00348E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09356E0	-7.56502E-1	-7.35116E-1	-9.19485E0	-9.19018E0	4.74453E-3	9.52721E-2	2.73169E1	-3.26644E1	-3.26266E1	2.68371E1	1.19965E-7	2.5199E-3	2.5199E-3	6.31288E-3	2.9978E-1