[Scan]
initial_time=2016-01-18T23:23:57
final_time=2016-01-18T23:24:16
ip_count=19
run=1024
dataset=11
scan=843
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0948E0
qbias_imon=-1.08771E-4
ql1_vset=
ql1_vmon=-7.56741E-1
ql1_imon=1.41596E-8
ql2_vset=
ql2_vmon=-7.35021E-1
ql2_imon=2.04835E-9
ql3_vset=
ql3_vmon=-9.19492E0
ql3_imon=1.91689E-10
ql4_vset=
ql4_vmon=-9.19013E0
ql4_imon=-2.80249E-10
mult1=-9.46389E-9
mult2=-2.76441E-9
rf_tmon=-7.06965E-3
rf_agc=3.18933E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.19617E-3
ql5_imon=1.69578E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68332E0
bslens_imon=2.34151E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19624E1
lens5a_imon=1.99642E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12505E2
lens4a_imon=2.0522E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54031E1
cs_ef1b_imon=3.15569E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04644E2
lens23_imon=1.02181E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04534E1
cs_ea1_imon=1.08644E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35309E0
lens1_imon=2.62466E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64524E1
os_ef1alow_imon=2.98486E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03861E1
cs_ea2_imon=1.36641E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8446E1
cs_ef1a_imon=3.04505E-5
olens2_vset=9.7E-1
olens2_vmon=9.70435E-1
olens2_imon=1.1697E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11406E1
os_restr1_imon=4.29454E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15724E1
os_ea1_imon=2.45867E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63707E1
os_ef1bup_imon=3.08433E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.1996E0
cs_ionrep_imon=9.29291E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9194E2
cs_nozzle_imon=1.93632E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02001E1
cs_anode1_imon=1.9617E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2042E0
olens4_imon=3.15951E-8
tplens_vset=1.4E-1
tplens_vmon=1.66975E0
tplens_imon=-1.28996E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26396E1
iondef3_imon=1.49453E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27015E1
iondef2_imon=1.57983E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02935E2
lens6_imon=2.98077E-4
ql6_vset=1.0E-1
ql6_vmon=9.51052E-2
ql6_imon=4.04617E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28218E0
ionrepsh_imon=8.55671E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33805E1
lens5b_imon=2.17764E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74477E1
cs_ef2b_imon=3.13299E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46741E0
os_ea2_imon=-4.82936E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06104E2
lens4b_imon=2.00591E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71228E1
cs_ef2a_imon=3.16722E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04675E0
os_ef2alow_imon=-2.45372E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.86612E-1
os_ef2bup_imon=-5.11705E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11244E1
os_restr2_imon=3.38743E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23044E2
cs_ionfoca_imon=6.27274E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01821E1
cs_anode2_imon=2.09793E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73027E1
iondef1_imon=1.11334E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68621E1
iondef4_imon=1.10143E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=4.68725E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81832E-1
olens1_imon=7.08385E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.17099E0
cs_ionaccel_imon=-8.06708E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.47342E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56399E1
einzel_imon=7.89687E-6
window_vset=0.0E0
window_vmon=2.65395E-1
window_imon=-8.5356E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82644E2
mask1_imon=2.39275E-4
mask2_vset=0.0E0
mask2_vmon=-1.86386E1
mask2_imon=-6.48134E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92647E3
multa_neg_imon=7.31438E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93715E3
defgrida_imon=6.29503E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50133E3
multb_neg_imon=7.27899E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38784E0
defgridb_imon=6.29857E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33242E1
os_fil1_imon=9.41147E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07629E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61286E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31885E1
cs_fil1_imon=6.86052E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=8.95682E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63304E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.52221E-2
os_fil2_imon=-2.47376E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.16935E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.50214E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31335E-1
cs_fil2_imon=-2.31758E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.50863E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21749E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=3.00453E-1
chamber_ion_pmon=1.20106E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.26256E-1
res40_imon=-2.41408E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=206
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09402E0	-7.56717E-1	-7.34949E-1	-9.19468E0	-9.19023E0	4.45843E-3	9.49144E-2	2.734E1	-3.26774E1	-3.26058E1	2.68653E1	1.20055E-7	2.51632E-3	2.51632E-3	6.33977E-3	2.99941E-1
2.0E0	4.2E1	0.0E0	3.16E2	1.6E2	-2.09364E0	-7.56598E-1	-7.34925E-1	-9.19485E0	-9.19027E0	4.57764E-3	9.47714E-2	2.72697E1	-3.26579E1	-3.26372E1	2.67956E1	1.19978E-7	2.51581E-3	2.51581E-3	6.31299E-3	2.99348E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09456E0	-7.56359E-1	-7.3514E-1	-9.19487E0	-9.1903E0	4.76837E-3	9.4986E-2	2.73004E1	-3.26431E1	-3.26036E1	2.67821E1	1.20106E-7	2.5131E-3	2.5131E-3	6.31278E-3	2.99175E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09449E0	-7.56574E-1	-7.35068E-1	-9.19504E0	-9.19015E0	4.79221E-3	9.49144E-2	2.73189E1	-3.26945E1	-3.26026E1	2.68647E1	1.19902E-7	2.51525E-3	2.51525E-3	6.32896E-3	2.98665E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09379E0	-7.56431E-1	-7.35068E-1	-9.19492E0	-9.1898E0	5.03063E-3	9.49383E-2	2.73299E1	-3.2682E1	-3.26172E1	2.68226E1	1.20069E-7	2.5188E-3	2.5188E-3	6.3074E-3	2.97704E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09379E0	-7.56741E-1	-7.34806E-1	-9.19495E0	-9.18992E0	4.79221E-3	9.54151E-2	2.73057E1	-3.26813E1	-3.26597E1	2.68448E1	1.19902E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.00197E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09426E0	-7.5686E-1	-7.34949E-1	-9.19449E0	-9.18992E0	4.673E-3	9.51767E-2	2.73352E1	-3.26608E1	-3.26254E1	2.67937E1	1.20122E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.00824E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09472E0	-7.56645E-1	-7.34687E-1	-9.19487E0	-9.19008E0	4.36306E-3	9.5129E-2	2.73193E1	-3.26331E1	-3.26148E1	2.68575E1	1.20106E-7	2.51417E-3	2.51417E-3	6.32356E-3	3.00453E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09402E0	-7.56598E-1	-7.34973E-1	-9.19497E0	-9.19008E0	4.31538E-3	9.51052E-2	2.73243E1	-3.26554E1	-3.26194E1	2.68466E1	1.20158E-7	2.51847E-3	2.51847E-3	6.3074E-3	2.99941E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09286E0	-7.56884E-1	-7.34901E-1	-9.19502E0	-9.19013E0	4.52995E-3	9.52005E-2	2.73339E1	-3.265E1	-3.26536E1	2.6804E1	1.20122E-7	2.5199E-3	2.5199E-3	6.30192E-3	3.00563E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09248E0	-7.5686E-1	-7.34925E-1	-9.19516E0	-9.19025E0	4.57764E-3	9.48191E-2	2.73181E1	-3.26443E1	-3.26307E1	2.69193E1	1.20004E-7	2.51417E-3	2.51417E-3	6.30202E-3	2.99175E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09279E0	-7.56669E-1	-7.3514E-1	-9.19478E0	-9.19008E0	4.72069E-3	9.50336E-2	2.73134E1	-3.26467E1	-3.26337E1	2.68592E1	1.20174E-7	2.51334E-3	2.51334E-3	6.3074E-3	2.99E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09348E0	-7.56717E-1	-7.35164E-1	-9.19478E0	-9.1903E0	5.05447E-3	9.48429E-2	2.73333E1	-3.26615E1	-3.26303E1	2.6774E1	1.20004E-7	2.52061E-3	2.52061E-3	6.32896E-3	2.9943E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09364E0	-7.56717E-1	-7.35021E-1	-9.19485E0	-9.1902E0	4.81606E-3	9.51052E-2	2.73193E1	-3.26803E1	-3.2629E1	2.68556E1	1.20137E-7	2.51804E-3	2.51804E-3	6.30182E-3	2.9829E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09325E0	-7.56598E-1	-7.34782E-1	-9.19478E0	-9.19015E0	4.81606E-3	9.53197E-2	2.73369E1	-3.26885E1	-3.26212E1	2.69109E1	1.20209E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.9943E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09294E0	-7.56907E-1	-7.34925E-1	-9.1949E0	-9.19023E0	4.95911E-3	9.51529E-2	2.72962E1	-3.26626E1	-3.2626E1	2.68436E1	1.20017E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.00041E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09441E0	-7.56669E-1	-7.35044E-1	-9.19454E0	-9.19025E0	4.79221E-3	9.5439E-2	2.7332E1	-3.26432E1	-3.26303E1	2.67974E1	1.20055E-7	2.52384E-3	2.52384E-3	6.32356E-3	3.01738E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09433E0	-7.56741E-1	-7.34949E-1	-9.19485E0	-9.19011E0	4.673E-3	9.51052E-2	2.73236E1	-3.26799E1	-3.26011E1	2.68238E1	1.2035E-7	2.5225E-3	2.5225E-3	6.33538E-3	3.03081E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09364E0	-7.56931E-1	-7.34878E-1	-9.19514E0	-9.19015E0	4.41074E-3	9.5129E-2	2.73511E1	-3.26614E1	-3.26213E1	2.68004E1	1.20142E-7	2.52025E-3	2.52025E-3	6.32328E-3	3.00852E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0948E0	-7.56741E-1	-7.35021E-1	-9.19492E0	-9.19013E0	4.19617E-3	9.51052E-2	2.73027E1	-3.27015E1	-3.26396E1	2.68621E1	1.20106E-7	2.51525E-3	2.51525E-3	6.31278E-3	3.00453E-1