[Scan]
initial_time=2016-01-18T23:25:17
final_time=2016-01-18T23:25:41
ip_count=19
run=1024
dataset=11
scan=846
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09418E0
qbias_imon=-1.08773E-4
ql1_vset=
ql1_vmon=-7.56574E-1
ql1_imon=1.41184E-8
ql2_vset=
ql2_vmon=-7.34568E-1
ql2_imon=1.99213E-9
ql3_vset=
ql3_vmon=-9.19473E0
ql3_imon=1.50061E-10
ql4_vset=
ql4_vmon=-9.18987E0
ql4_imon=-2.26128E-10
mult1=-9.99052E-9
mult2=-2.84192E-9
rf_tmon=-4.11758E-3
rf_agc=3.38365E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.33922E-3
ql5_imon=1.74834E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66494E0
bslens_imon=2.44042E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19574E1
lens5a_imon=2.022E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12482E2
lens4a_imon=2.05053E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54055E1
cs_ef1b_imon=3.15641E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04609E2
lens23_imon=1.02344E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04598E1
cs_ea1_imon=1.10346E-5
lens1_vset=-5.0E0
lens1_vmon=-5.4032E0
lens1_imon=2.72881E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64891E1
os_ef1alow_imon=2.9845E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03624E1
cs_ea2_imon=1.3504E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84412E1
cs_ef1a_imon=3.04072E-5
olens2_vset=9.7E-1
olens2_vmon=9.69601E-1
olens2_imon=1.16906E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1164E1
os_restr1_imon=4.29815E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15125E1
os_ea1_imon=2.44559E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63671E1
os_ef1bup_imon=3.08037E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23527E0
cs_ionrep_imon=9.55299E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91902E2
cs_nozzle_imon=1.93626E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01989E1
cs_anode1_imon=1.96782E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20468E0
olens4_imon=3.16726E-8
tplens_vset=1.4E-1
tplens_vmon=1.67147E0
tplens_imon=-1.83987E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26572E1
iondef3_imon=1.49893E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26609E1
iondef2_imon=1.56201E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02924E2
lens6_imon=2.98277E-4
ql6_vset=1.0E-1
ql6_vmon=9.49621E-2
ql6_imon=4.03538E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28394E0
ionrepsh_imon=8.4643E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3373E1
lens5b_imon=2.17666E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74441E1
cs_ef2b_imon=3.13263E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.41612E0
os_ea2_imon=-7.49965E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06108E2
lens4b_imon=2.00598E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7145E1
cs_ef2a_imon=3.17299E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07618E0
os_ef2alow_imon=-2.27352E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.80605E-1
os_ef2bup_imon=-5.10624E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1125E1
os_restr2_imon=3.39031E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23029E2
cs_ionfoca_imon=6.28558E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01821E1
cs_anode2_imon=2.08531E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73669E1
iondef1_imon=1.12113E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68322E1
iondef4_imon=1.11404E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=4.74494E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81402E-1
olens1_imon=7.09677E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14396E0
cs_ionaccel_imon=-8.57164E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02085E2
cs_ionfocb_imon=1.47457E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56453E1
einzel_imon=7.9257E-6
window_vset=0.0E0
window_vmon=2.5098E-1
window_imon=-7.92292E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82661E2
mask1_imon=2.393E-4
mask2_vset=0.0E0
mask2_vmon=-1.86428E1
mask2_imon=-6.30114E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92607E3
multa_neg_imon=7.86948E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.78439E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50137E3
multb_neg_imon=7.09802E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.46773E0
defgridb_imon=6.09584E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33234E1
os_fil1_imon=9.40096E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07876E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61307E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3184E1
cs_fil1_imon=7.31101E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.5695E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63401E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.46664E-2
os_fil2_imon=-2.44973E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.10328E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.5736E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3004E-1
cs_fil2_imon=-2.37765E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.49061E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21768E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=3.01223E-1
chamber_ion_pmon=1.2026E-7
chamber_cvt_pmon=2.5131E-3
foreline_cvt_pmon=2.5131E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.29569E-1
res40_imon=-2.47174E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=212
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09456E0	-7.56955E-1	-7.34735E-1	-9.19478E0	-9.18994E0	4.36306E-3	9.50813E-2	2.73381E1	-3.26467E1	-3.25989E1	2.68436E1	1.19965E-7	2.51771E-3	2.51771E-3	6.34037E-3	3.00824E-1
2.0E0	3.7E1	0.0E0	3.16E2	1.6E2	-2.09526E0	-7.56836E-1	-7.34472E-1	-9.19483E0	-9.1898E0	4.52995E-3	9.53436E-2	2.73231E1	-3.26783E1	-3.26158E1	2.68442E1	1.20414E-7	2.5131E-3	2.5131E-3	6.32356E-3	3.01738E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09441E0	-7.56788E-1	-7.34448E-1	-9.19449E0	-9.19006E0	4.48227E-3	9.52959E-2	2.73228E1	-3.26697E1	-3.26496E1	2.68175E1	1.20122E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.01871E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09495E0	-7.56574E-1	-7.34663E-1	-9.19492E0	-9.19018E0	4.43459E-3	9.52721E-2	2.73123E1	-3.26615E1	-3.26176E1	2.68472E1	1.19851E-7	2.51739E-3	2.51739E-3	6.32896E-3	3.01995E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09418E0	-7.56478E-1	-7.34806E-1	-9.19485E0	-9.18996E0	4.48227E-3	9.54628E-2	2.73333E1	-3.26675E1	-3.26038E1	2.68376E1	1.20004E-7	2.52061E-3	2.52061E-3	6.32896E-3	3.01995E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09441E0	-7.56502E-1	-7.34448E-1	-9.19464E0	-9.19003E0	4.55379E-3	9.54628E-2	2.72943E1	-3.26681E1	-3.26344E1	2.68695E1	1.19965E-7	2.52428E-3	2.52428E-3	6.34037E-3	3.02396E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09441E0	-7.56264E-1	-7.34425E-1	-9.1949E0	-9.18992E0	4.43459E-3	9.51052E-2	2.73399E1	-3.26697E1	-3.26012E1	2.68034E1	1.20244E-7	2.52139E-3	2.52139E-3	6.31299E-3	3.00144E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09526E0	-7.56359E-1	-7.34735E-1	-9.19518E0	-9.1902E0	4.55379E-3	9.50575E-2	2.73267E1	-3.26771E1	-3.26266E1	2.68196E1	1.20004E-7	2.52384E-3	2.52384E-3	6.31817E-3	2.9841E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.09503E0	-7.56454E-1	-7.34496E-1	-9.19511E0	-9.19042E0	4.29153E-3	9.50098E-2	2.73263E1	-3.26567E1	-3.25788E1	2.68659E1	1.20122E-7	2.51771E-3	2.51771E-3	6.33486E-3	2.98481E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09379E0	-7.56311E-1	-7.34305E-1	-9.19504E0	-9.18984E0	4.33922E-3	9.47475E-2	2.73297E1	-3.26398E1	-3.26218E1	2.68194E1	1.19749E-7	2.51525E-3	2.51525E-3	6.33436E-3	2.99175E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09526E0	-7.56431E-1	-7.34854E-1	-9.19507E0	-9.18963E0	4.24385E-3	9.50098E-2	2.73321E1	-3.26512E1	-3.25954E1	2.68359E1	1.19809E-7	2.52209E-3	2.52209E-3	6.31837E-3	3.01085E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.0948E0	-7.56669E-1	-7.34568E-1	-9.1949E0	-9.18987E0	4.673E-3	9.51052E-2	2.73249E1	-3.26789E1	-3.26128E1	2.68388E1	1.19965E-7	2.51771E-3	2.51771E-3	6.32936E-3	2.9952E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09472E0	-7.56574E-1	-7.34663E-1	-9.19478E0	-9.18972E0	4.26769E-3	9.51767E-2	2.73243E1	-3.26741E1	-3.26344E1	2.6819E1	1.20435E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.01871E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09387E0	-7.56645E-1	-7.34735E-1	-9.1949E0	-9.1898E0	4.3869E-3	9.5129E-2	2.73063E1	-3.26419E1	-3.26119E1	2.68052E1	1.19913E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.01347E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09456E0	-7.56669E-1	-7.34782E-1	-9.19447E0	-9.18987E0	4.72069E-3	9.4986E-2	2.73345E1	-3.26633E1	-3.26512E1	2.68556E1	1.19851E-7	2.51954E-3	2.51954E-3	6.29665E-3	3.0148E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09387E0	-7.56502E-1	-7.34735E-1	-9.19466E0	-9.18982E0	4.69685E-3	9.48906E-2	2.72835E1	-3.26711E1	-3.26032E1	2.68058E1	1.20174E-7	2.52318E-3	2.52318E-3	6.32386E-3	2.9978E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09433E0	-7.56717E-1	-7.34615E-1	-9.1949E0	-9.19003E0	4.95911E-3	9.47475E-2	2.73175E1	-3.26384E1	-3.26042E1	2.68441E1	1.20226E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.9952E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09394E0	-7.56359E-1	-7.34401E-1	-9.19471E0	-9.18999E0	5.07832E-3	9.49383E-2	2.73357E1	-3.26452E1	-3.25846E1	2.68394E1	1.19941E-7	2.51919E-3	2.51919E-3	6.31798E-3	3.00852E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.0948E0	-7.56598E-1	-7.34138E-1	-9.19485E0	-9.18999E0	4.24385E-3	9.50098E-2	2.73051E1	-3.26685E1	-3.2613E1	2.68743E1	1.19978E-7	2.52027E-3	2.52027E-3	6.31299E-3	2.99348E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09418E0	-7.56574E-1	-7.34568E-1	-9.19473E0	-9.18987E0	4.33922E-3	9.49621E-2	2.73669E1	-3.26609E1	-3.26572E1	2.68322E1	1.2026E-7	2.5131E-3	2.5131E-3	6.31817E-3	3.01223E-1