[Scan]
initial_time=2016-01-18T23:25:52
final_time=2016-01-18T23:26:20
ip_count=19
run=1024
dataset=11
scan=847
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09402E0
qbias_imon=-1.08817E-4
ql1_vset=
ql1_vmon=-7.56717E-1
ql1_imon=1.41701E-8
ql2_vset=
ql2_vmon=-7.34735E-1
ql2_imon=2.03215E-9
ql3_vset=
ql3_vmon=-9.19495E0
ql3_imon=1.32048E-10
ql4_vset=
ql4_vmon=-9.18999E0
ql4_imon=-2.68745E-10
mult1=-9.41661E-9
mult2=-2.78597E-9
rf_tmon=-4.76903E-3
rf_agc=3.30613E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.07696E-3
ql5_imon=1.71696E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68483E0
bslens_imon=2.46861E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19672E1
lens5a_imon=2.00721E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12479E2
lens4a_imon=2.04989E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5413E1
cs_ef1b_imon=3.17331E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04614E2
lens23_imon=1.02343E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04872E1
cs_ea1_imon=1.12738E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3685E0
lens1_imon=2.72933E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64718E1
os_ef1alow_imon=2.98287E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03511E1
cs_ea2_imon=1.36794E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84527E1
cs_ef1a_imon=3.03812E-5
olens2_vset=9.7E-1
olens2_vmon=9.6972E-1
olens2_imon=1.16273E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11274E1
os_restr1_imon=4.28574E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15514E1
os_ea1_imon=2.43409E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63328E1
os_ef1bup_imon=3.08886E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20517E0
cs_ionrep_imon=9.67826E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.919E2
cs_nozzle_imon=1.93406E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02018E1
cs_anode1_imon=1.96531E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20451E0
olens4_imon=3.16311E-8
tplens_vset=1.4E-1
tplens_vmon=1.65244E0
tplens_imon=-2.60206E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2613E1
iondef3_imon=1.51429E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26254E1
iondef2_imon=1.56643E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02966E2
lens6_imon=2.98249E-4
ql6_vset=1.0E-1
ql6_vmon=9.50098E-2
ql6_imon=4.04774E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24978E0
ionrepsh_imon=8.50331E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33866E1
lens5b_imon=2.18624E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74588E1
cs_ef2b_imon=3.14342E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45256E0
os_ea2_imon=-8.40733E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06112E2
lens4b_imon=2.00703E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71281E1
cs_ef2a_imon=3.16045E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03313E0
os_ef2alow_imon=-2.58501E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.78696E-1
os_ef2bup_imon=-5.2262E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11135E1
os_restr2_imon=3.37905E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23044E2
cs_ionfoca_imon=6.27182E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01757E1
cs_anode2_imon=2.09459E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73246E1
iondef1_imon=1.14616E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68545E1
iondef4_imon=1.10206E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=4.72214E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81498E-1
olens1_imon=7.05241E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16547E0
cs_ionaccel_imon=-8.16104E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0207E2
cs_ionfocb_imon=1.47508E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56359E1
einzel_imon=7.85813E-6
window_vset=0.0E0
window_vmon=2.5128E-1
window_imon=-8.47382E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82644E2
mask1_imon=2.39289E-4
mask2_vset=0.0E0
mask2_vmon=-1.86495E1
mask2_imon=-6.63193E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92639E3
multa_neg_imon=7.60297E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93697E3
defgrida_imon=6.41063E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=7.4674E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3166E0
defgridb_imon=6.06301E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3326E1
os_fil1_imon=9.4085E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07874E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61348E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31862E1
cs_fil1_imon=8.15044E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.59846E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63308E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.55093E-2
os_fil2_imon=-2.41433E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.11508E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.64827E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30151E-1
cs_fil2_imon=-2.33324E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.33315E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21738E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=3.00197E-1
chamber_ion_pmon=1.2026E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.38934E-1
res40_imon=-2.41472E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=278
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09418E0	-7.56407E-1	-7.34782E-1	-9.19495E0	-9.19006E0	4.55379E-3	9.52005E-2	2.7321E1	-3.26345E1	-3.26368E1	2.69072E1	1.20127E-7	2.52301E-3	2.52301E-3	6.29185E-3	3.02977E-1
2.0E0	3.4E1	0.0E0	3.16E2	1.6E2	-2.09356E0	-7.56097E-1	-7.3452E-1	-9.19497E0	-9.18982E0	4.22001E-3	9.5129E-2	2.7313E1	-3.26485E1	-3.26028E1	2.68698E1	1.1969E-7	2.51919E-3	2.51919E-3	6.32858E-3	3.01609E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09394E0	-7.56407E-1	-7.3452E-1	-9.19499E0	-9.18951E0	4.22001E-3	9.49383E-2	2.7334E1	-3.26649E1	-3.26083E1	2.68034E1	1.19977E-7	2.51829E-3	2.51829E-3	6.31344E-3	3.00025E-1
4.0E0	8.0E0	0.0E0	6.55E2	3.98E2	-2.09348E0	-7.56526E-1	-7.34615E-1	-9.19502E0	-9.18939E0	4.14848E-3	9.53197E-2	2.73381E1	-3.26667E1	-3.26071E1	2.68916E1	1.20142E-7	2.52131E-3	2.52131E-3	6.32858E-3	2.99343E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09472E0	-7.56359E-1	-7.34639E-1	-9.19504E0	-9.18975E0	3.93391E-3	9.51052E-2	2.73666E1	-3.2675E1	-3.26095E1	2.67063E1	1.20174E-7	2.5188E-3	2.5188E-3	6.33486E-3	2.97187E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09426E0	-7.56216E-1	-7.34854E-1	-9.19487E0	-9.19013E0	4.24385E-3	9.51767E-2	2.73161E1	-3.26413E1	-3.25991E1	2.68612E1	1.1993E-7	2.51783E-3	2.51783E-3	6.30221E-3	2.99014E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09495E0	-7.56288E-1	-7.34663E-1	-9.19476E0	-9.19018E0	4.64916E-3	9.51767E-2	2.73033E1	-3.26314E1	-3.26098E1	2.68575E1	1.20137E-7	2.5147E-3	2.5147E-3	6.30182E-3	3.01475E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09456E0	-7.56216E-1	-7.34854E-1	-9.19528E0	-9.19001E0	4.52995E-3	9.50813E-2	2.73131E1	-3.26522E1	-3.26095E1	2.6858E1	1.19757E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00563E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09495E0	-7.56359E-1	-7.34663E-1	-9.19507E0	-9.19013E0	4.22001E-3	9.51052E-2	2.72939E1	-3.26741E1	-3.25992E1	2.67963E1	1.19919E-7	2.51549E-3	2.51549E-3	6.31251E-3	3.00635E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09487E0	-7.56598E-1	-7.34639E-1	-9.19511E0	-9.19013E0	4.22001E-3	9.4986E-2	2.73369E1	-3.26512E1	-3.26044E1	2.68088E1	1.19895E-7	2.5199E-3	2.5199E-3	6.31321E-3	2.99811E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09526E0	-7.5655E-1	-7.34735E-1	-9.19518E0	-9.19006E0	4.45843E-3	9.49144E-2	2.7311E1	-3.2659E1	-3.26189E1	2.67966E1	1.20069E-7	2.51552E-3	2.51552E-3	6.29645E-3	2.9978E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09533E0	-7.56621E-1	-7.3483E-1	-9.19528E0	-9.1898E0	4.33922E-3	9.52244E-2	2.73476E1	-3.2652E1	-3.26178E1	2.68508E1	1.19991E-7	2.51393E-3	2.51393E-3	6.31269E-3	2.99093E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09533E0	-7.57051E-1	-7.34401E-1	-9.19504E0	-9.1897E0	4.14848E-3	9.49383E-2	2.73075E1	-3.26579E1	-3.26182E1	2.6986E1	1.20017E-7	2.51662E-3	2.51662E-3	6.32936E-3	2.9978E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09426E0	-7.56931E-1	-7.34544E-1	-9.19487E0	-9.19023E0	4.14848E-3	9.50336E-2	2.73429E1	-3.26633E1	-3.26338E1	2.67698E1	1.20592E-7	2.52209E-3	2.52209E-3	6.3074E-3	2.97445E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09472E0	-7.56836E-1	-7.34591E-1	-9.1949E0	-9.19023E0	4.3869E-3	9.50098E-2	2.73003E1	-3.26506E1	-3.26368E1	2.68875E1	1.19861E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.01609E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0948E0	-7.56741E-1	-7.34496E-1	-9.19497E0	-9.18984E0	4.26769E-3	9.49144E-2	2.7344E1	-3.26614E1	-3.26384E1	2.68472E1	1.19757E-7	2.51007E-3	2.51007E-3	6.31288E-3	2.98222E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09387E0	-7.56478E-1	-7.34615E-1	-9.19492E0	-9.18975E0	4.50611E-3	9.5129E-2	2.73345E1	-3.26524E1	-3.2614E1	2.67816E1	1.19749E-7	2.51954E-3	2.51954E-3	6.3074E-3	2.97647E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09364E0	-7.56741E-1	-7.34425E-1	-9.1949E0	-9.1897E0	4.57764E-3	9.50336E-2	2.73222E1	-3.26608E1	-3.26301E1	2.67818E1	1.20122E-7	2.52757E-3	2.52757E-3	6.30192E-3	3.00563E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09456E0	-7.56741E-1	-7.3452E-1	-9.19504E0	-9.18984E0	4.00543E-3	9.51052E-2	2.73116E1	-3.26549E1	-3.26225E1	2.68748E1	1.19841E-7	2.51393E-3	2.51393E-3	6.31269E-3	2.99845E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09402E0	-7.56717E-1	-7.34735E-1	-9.19495E0	-9.18999E0	4.07696E-3	9.50098E-2	2.73246E1	-3.26254E1	-3.2613E1	2.68545E1	1.2026E-7	2.51954E-3	2.51954E-3	6.32356E-3	3.00197E-1