[Scan]
initial_time=2016-01-18T23:27:10
final_time=2016-01-18T23:27:38
ip_count=19
run=1024
dataset=11
scan=849
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09503E0
qbias_imon=-1.08815E-4
ql1_vset=
ql1_vmon=-7.56407E-1
ql1_imon=1.41369E-8
ql2_vset=
ql2_vmon=-7.34544E-1
ql2_imon=2.03758E-9
ql3_vset=
ql3_vmon=-9.19437E0
ql3_imon=2.06685E-10
ql4_vset=
ql4_vmon=-9.19032E0
ql4_imon=-2.30682E-10
mult1=-1.01614E-8
mult2=-2.61743E-9
rf_tmon=-5.61849E-3
rf_agc=3.24714E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.98159E-3
ql5_imon=1.72414E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66562E0
bslens_imon=2.50432E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.195E1
lens5a_imon=2.00244E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12468E2
lens4a_imon=2.05228E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54013E1
cs_ef1b_imon=3.16398E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04608E2
lens23_imon=1.02015E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04652E1
cs_ea1_imon=1.09564E-5
lens1_vset=-5.0E0
lens1_vmon=-5.382E0
lens1_imon=2.67068E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64759E1
os_ef1alow_imon=2.97513E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03407E1
cs_ea2_imon=1.34128E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84442E1
cs_ef1a_imon=3.03784E-5
olens2_vset=9.7E-1
olens2_vmon=9.69863E-1
olens2_imon=1.16907E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.114E1
os_restr1_imon=4.29707E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14946E1
os_ea1_imon=2.4569E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63695E1
os_ef1bup_imon=3.07821E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23263E0
cs_ionrep_imon=9.56191E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9193E2
cs_nozzle_imon=1.93434E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01893E1
cs_anode1_imon=1.96026E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20456E0
olens4_imon=3.153E-8
tplens_vset=1.4E-1
tplens_vmon=1.65441E0
tplens_imon=-4.26306E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26484E1
iondef3_imon=1.51152E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26331E1
iondef2_imon=1.57417E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02936E2
lens6_imon=2.9842E-4
ql6_vset=1.0E-1
ql6_vmon=9.48668E-2
ql6_imon=4.02158E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30342E0
ionrepsh_imon=8.78324E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33693E1
lens5b_imon=2.17799E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7473E1
cs_ef2b_imon=3.13371E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.41786E0
os_ea2_imon=-8.65193E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0605E2
lens4b_imon=2.00669E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7127E1
cs_ef2a_imon=3.17299E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07018E0
os_ef2alow_imon=-2.39966E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.01629E-1
os_ef2bup_imon=-5.27923E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11117E1
os_restr2_imon=3.37878E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23053E2
cs_ionfoca_imon=6.29503E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01755E1
cs_anode2_imon=2.08567E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73063E1
iondef1_imon=1.09423E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68777E1
iondef4_imon=1.10503E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=4.75104E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81665E-1
olens1_imon=7.07991E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15237E0
cs_ionaccel_imon=-8.75184E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02071E2
cs_ionfocb_imon=1.4745E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56549E1
einzel_imon=7.73109E-6
window_vset=0.0E0
window_vmon=2.68999E-1
window_imon=-6.40926E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82644E2
mask1_imon=2.39297E-4
mask2_vset=0.0E0
mask2_vmon=-1.86602E1
mask2_imon=-5.97678E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92633E3
multa_neg_imon=7.60815E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9372E3
defgrida_imon=6.64189E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.501E3
multb_neg_imon=7.18342E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.48233E0
defgridb_imon=6.10744E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3326E1
os_fil1_imon=9.40894E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08597E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61344E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31848E1
cs_fil1_imon=6.44606E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.77973E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6349E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.47156E-2
os_fil2_imon=-2.54584E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.00117E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.52239E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30558E-1
cs_fil2_imon=-2.45574E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.36447E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2187E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=3.0071E-1
chamber_ion_pmon=1.19902E-7
chamber_cvt_pmon=2.52384E-3
foreline_cvt_pmon=2.52384E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.88724E-1
res40_imon=-2.46453E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=203
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.0941E0	-7.56717E-1	-7.3452E-1	-9.19478E0	-9.19001E0	4.36306E-3	9.4986E-2	2.73181E1	-3.26402E1	-3.26006E1	2.68635E1	1.20069E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.00563E-1
2.0E0	2.9E1	0.0E0	3.16E2	1.6E2	-2.09464E0	-7.56836E-1	-7.34663E-1	-9.19495E0	-9.18975E0	4.76837E-3	9.51767E-2	2.73135E1	-3.26488E1	-3.26416E1	2.68169E1	1.19851E-7	2.51632E-3	2.51632E-3	6.3074E-3	3.0148E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09456E0	-7.56907E-1	-7.34568E-1	-9.19511E0	-9.18953E0	4.50611E-3	9.50336E-2	2.73369E1	-3.26825E1	-3.26212E1	2.67896E1	1.19965E-7	2.5188E-3	2.5188E-3	6.3514E-3	2.9926E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09503E0	-7.56693E-1	-7.34758E-1	-9.19518E0	-9.18975E0	4.64916E-3	9.51052E-2	2.73417E1	-3.26508E1	-3.26225E1	2.6804E1	1.20209E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.01223E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0951E0	-7.56359E-1	-7.34735E-1	-9.19518E0	-9.18977E0	4.33922E-3	9.48906E-2	2.73189E1	-3.26482E1	-3.26434E1	2.68599E1	1.20004E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.00197E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09472E0	-7.56502E-1	-7.34639E-1	-9.19502E0	-9.18972E0	4.22001E-3	9.49383E-2	2.73243E1	-3.26783E1	-3.26518E1	2.68364E1	1.20017E-7	2.5188E-3	2.5188E-3	6.3074E-3	2.98481E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09526E0	-7.56383E-1	-7.34663E-1	-9.19502E0	-9.18972E0	4.55379E-3	9.54151E-2	2.73201E1	-3.26615E1	-3.26176E1	2.68394E1	1.20122E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00302E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09418E0	-7.56574E-1	-7.34591E-1	-9.19511E0	-9.18982E0	4.36306E-3	9.50575E-2	2.73189E1	-3.2641E1	-3.26014E1	2.68316E1	1.20122E-7	2.51552E-3	2.51552E-3	6.30192E-3	3.02922E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09426E0	-7.56431E-1	-7.34639E-1	-9.19495E0	-9.19011E0	4.45843E-3	9.51529E-2	2.73087E1	-3.26482E1	-3.2611E1	2.68665E1	1.19965E-7	2.5188E-3	2.5188E-3	6.34588E-3	3.02396E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0948E0	-7.56407E-1	-7.34878E-1	-9.19478E0	-9.18992E0	4.43459E-3	9.50575E-2	2.73345E1	-3.26621E1	-3.2626E1	2.67704E1	1.19861E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00302E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09402E0	-7.56359E-1	-7.34639E-1	-9.19518E0	-9.19003E0	4.74453E-3	9.51052E-2	2.73333E1	-3.26765E1	-3.26506E1	2.68376E1	1.19965E-7	2.5199E-3	2.5199E-3	6.32936E-3	2.9874E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09449E0	-7.5655E-1	-7.34711E-1	-9.19514E0	-9.19003E0	4.48227E-3	9.50098E-2	2.73092E1	-3.26585E1	-3.26337E1	2.67862E1	1.20069E-7	2.51116E-3	2.51116E-3	6.32386E-3	2.9926E-1
1.6E1	2.0E0	0.0E0	6.47E2	4.41E2	-2.09441E0	-7.56407E-1	-7.34544E-1	-9.19507E0	-9.1903E0	4.36306E-3	9.48429E-2	2.72853E1	-3.26615E1	-3.26314E1	2.68468E1	1.20226E-7	2.5199E-3	2.5199E-3	6.3074E-3	2.9874E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09503E0	-7.56502E-1	-7.34496E-1	-9.19492E0	-9.18999E0	4.14848E-3	9.49383E-2	2.72997E1	-3.26609E1	-3.25912E1	2.6843E1	1.20122E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.9952E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.0941E0	-7.56884E-1	-7.34568E-1	-9.19471E0	-9.19032E0	3.98159E-3	9.50336E-2	2.73243E1	-3.26224E1	-3.26212E1	2.68286E1	1.20055E-7	2.52384E-3	2.52384E-3	6.35059E-3	2.99941E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09541E0	-7.56741E-1	-7.34425E-1	-9.19492E0	-9.19023E0	4.36306E-3	9.51529E-2	2.73231E1	-3.26494E1	-3.26476E1	2.68665E1	1.19913E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.00302E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.0948E0	-7.56645E-1	-7.34329E-1	-9.19476E0	-9.19023E0	4.33922E-3	9.50575E-2	2.73104E1	-3.26832E1	-3.25953E1	2.68478E1	1.19913E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.02659E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09503E0	-7.56931E-1	-7.34305E-1	-9.19487E0	-9.1903E0	4.02927E-3	9.5129E-2	2.72809E1	-3.26573E1	-3.26178E1	2.67485E1	1.19913E-7	2.51334E-3	2.51334E-3	6.32386E-3	3.02396E-1
2.2E1	3.0E0	0.0E0	8.89E2	6.17E2	-2.09449E0	-7.56741E-1	-7.34782E-1	-9.19449E0	-9.19015E0	4.33922E-3	9.51052E-2	2.73352E1	-3.26897E1	-3.26526E1	2.68118E1	1.20042E-7	2.51393E-3	2.51393E-3	6.3074E-3	3.00097E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09503E0	-7.56407E-1	-7.34544E-1	-9.19437E0	-9.19032E0	3.98159E-3	9.48668E-2	2.73063E1	-3.26331E1	-3.26484E1	2.68777E1	1.19902E-7	2.52384E-3	2.52384E-3	6.30202E-3	3.0071E-1