[Scan]
initial_time=2016-01-18T23:28:28
final_time=2016-01-18T23:28:56
ip_count=19
run=1024
dataset=11
scan=851
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09433E0
qbias_imon=-1.08815E-4
ql1_vset=
ql1_vmon=-7.56502E-1
ql1_imon=1.41272E-8
ql2_vset=
ql2_vmon=-7.34878E-1
ql2_imon=2.04389E-9
ql3_vset=
ql3_vmon=-9.1949E0
ql3_imon=1.50132E-10
ql4_vset=
ql4_vmon=-9.18977E0
ql4_imon=-2.3607E-10
mult1=-1.07525E-8
mult2=-2.72914E-9
rf_tmon=-4.29711E-3
rf_agc=3.44358E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.22001E-3
ql5_imon=1.72185E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65652E0
bslens_imon=2.51973E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19316E1
lens5a_imon=2.00867E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12459E2
lens4a_imon=2.05042E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53708E1
cs_ef1b_imon=3.15872E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04597E2
lens23_imon=1.02344E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04243E1
cs_ea1_imon=1.09842E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39058E0
lens1_imon=2.75044E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64956E1
os_ef1alow_imon=2.96897E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0372E1
cs_ea2_imon=1.36554E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84313E1
cs_ef1a_imon=3.05828E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.16808E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11529E1
os_restr1_imon=4.28365E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14489E1
os_ea1_imon=2.44234E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63705E1
os_ef1bup_imon=3.08991E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23107E0
cs_ionrep_imon=9.49171E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91946E2
cs_nozzle_imon=1.93528E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02E1
cs_anode1_imon=1.95697E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20461E0
olens4_imon=3.16749E-8
tplens_vset=1.4E-1
tplens_vmon=1.63903E0
tplens_imon=-2.66901E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26974E1
iondef3_imon=1.51947E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26449E1
iondef2_imon=1.55985E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02915E2
lens6_imon=2.98306E-4
ql6_vset=1.0E-1
ql6_vmon=9.49621E-2
ql6_imon=4.07906E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27493E0
ionrepsh_imon=8.63373E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33501E1
lens5b_imon=2.17413E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74536E1
cs_ef2b_imon=3.13439E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44797E0
os_ea2_imon=-6.63446E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06072E2
lens4b_imon=2.00634E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71107E1
cs_ef2a_imon=3.16601E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06672E0
os_ef2alow_imon=-2.30699E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.89122E-1
os_ef2bup_imon=-5.21925E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10984E1
os_restr2_imon=3.38808E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2304E2
cs_ionfoca_imon=6.29532E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01705E1
cs_anode2_imon=2.10328E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7321E1
iondef1_imon=1.09157E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6825E1
iondef4_imon=1.10449E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=4.76127E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81236E-1
olens1_imon=7.08722E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11914E0
cs_ionaccel_imon=-9.82917E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02091E2
cs_ionfocb_imon=1.47459E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56417E1
einzel_imon=7.75039E-6
window_vset=0.0E0
window_vmon=2.46067E-1
window_imon=-7.5355E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8265E2
mask1_imon=2.39202E-4
mask2_vset=0.0E0
mask2_vmon=-1.86744E1
mask2_imon=-5.41559E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92654E3
multa_neg_imon=7.46572E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93709E3
defgrida_imon=6.52844E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50137E3
multb_neg_imon=7.3792E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.32938E0
defgridb_imon=6.15712E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33238E1
os_fil1_imon=9.39999E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08337E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61383E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31848E1
cs_fil1_imon=8.38791E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.37257E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63622E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.51823E-2
os_fil2_imon=-2.46646E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.98186E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.4563E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29152E-1
cs_fil2_imon=-2.25795E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.00879E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21646E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=3.0071E-1
chamber_ion_pmon=1.19902E-7
chamber_cvt_pmon=2.51096E-3
foreline_cvt_pmon=2.51096E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.60944E-1
res40_imon=-2.36607E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=176
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09557E0	-7.56598E-1	-7.34973E-1	-9.1949E0	-9.18984E0	4.43459E-3	9.50098E-2	2.73265E1	-3.26567E1	-3.26341E1	2.6869E1	1.20055E-7	2.51417E-3	2.51417E-3	6.31817E-3	2.99686E-1
2.0E0	3.6E1	0.0E0	3.16E2	1.6E2	-2.09572E0	-7.56788E-1	-7.35068E-1	-9.19478E0	-9.19011E0	4.64916E-3	9.48668E-2	2.73027E1	-3.26731E1	-3.25905E1	2.67926E1	1.19851E-7	2.51417E-3	2.51417E-3	6.32896E-3	3.00966E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09541E0	-7.56335E-1	-7.34735E-1	-9.19502E0	-9.19008E0	4.31538E-3	9.48906E-2	2.73312E1	-3.26364E1	-3.26434E1	2.67821E1	1.20457E-7	2.52139E-3	2.52139E-3	6.30182E-3	3.01209E-1
4.0E0	6.0E0	1.0E0	6.55E2	3.98E2	-2.09526E0	-7.56526E-1	-7.35211E-1	-9.19473E0	-9.19008E0	4.24385E-3	9.50575E-2	2.73225E1	-3.26591E1	-3.25707E1	2.68232E1	1.20042E-7	2.52236E-3	2.52236E-3	6.30212E-3	2.98842E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0958E0	-7.56598E-1	-7.35283E-1	-9.19487E0	-9.19032E0	4.1008E-3	9.48668E-2	2.73099E1	-3.26176E1	-3.26392E1	2.68142E1	1.20069E-7	2.5199E-3	2.5199E-3	6.34037E-3	2.9978E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0948E0	-7.56431E-1	-7.3483E-1	-9.19511E0	-9.19003E0	4.43459E-3	9.47237E-2	2.73021E1	-3.26464E1	-3.26188E1	2.68166E1	1.19851E-7	2.51525E-3	2.51525E-3	6.29665E-3	3.02253E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09557E0	-7.56574E-1	-7.34997E-1	-9.19504E0	-9.19001E0	4.33922E-3	9.45568E-2	2.73087E1	-3.26543E1	-3.26236E1	2.68953E1	1.19939E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.9939E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0948E0	-7.56073E-1	-7.34901E-1	-9.19499E0	-9.18987E0	4.72069E-3	9.48906E-2	2.73195E1	-3.26398E1	-3.26104E1	2.68184E1					
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0951E0	-7.56359E-1	-7.34758E-1	-9.19509E0	-9.19011E0	4.673E-3	9.48429E-2	2.73134E1	-3.26644E1	-3.26006E1	2.67992E1	1.19549E-7	2.51334E-3	2.51334E-3	6.31288E-3	2.9926E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09472E0	-7.56645E-1	-7.34663E-1	-9.19523E0	-9.19023E0	4.45843E-3	9.45807E-2	2.73171E1	-3.26368E1	-3.25906E1	2.68442E1	1.20278E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.9952E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09472E0	-7.56335E-1	-7.34758E-1	-9.19504E0	-9.18992E0	4.673E-3	9.49383E-2	2.73231E1	-3.26561E1	-3.26194E1	2.68256E1	1.20017E-7	2.52538E-3	2.52538E-3	6.33486E-3	3.00302E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09565E0	-7.56454E-1	-7.34806E-1	-9.19497E0	-9.19013E0	4.33922E-3	9.48668E-2	2.73051E1	-3.26512E1	-3.2635E1	2.68563E1	1.20004E-7	2.51739E-3	2.51739E-3	6.32356E-3	2.99941E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09549E0	-7.56502E-1	-7.35068E-1	-9.19495E0	-9.18977E0	4.48227E-3	9.50098E-2	2.73183E1	-3.26416E1	-3.26026E1	2.67091E1	1.20122E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.01085E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09549E0	-7.56478E-1	-7.34949E-1	-9.19516E0	-9.18994E0	4.3869E-3	9.49621E-2	2.73293E1	-3.26856E1	-3.26036E1	2.6956E1	1.20174E-7	2.50898E-3	2.50898E-3	6.31837E-3	2.9978E-1
1.8E1	4.0E0	0.0E0	7.27E2	5.0E2	-2.09526E0	-7.56645E-1	-7.34854E-1	-9.19514E0	-9.18989E0	4.52995E-3	9.49383E-2	2.73069E1	-3.26921E1	-3.2587E1	2.67121E1	1.20174E-7	2.52647E-3	2.52647E-3	6.29098E-3	2.99E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09549E0	-7.56526E-1	-7.34973E-1	-9.1953E0	-9.19013E0	4.24385E-3	9.50336E-2	2.73183E1	-3.26729E1	-3.26332E1	2.68478E1	1.2026E-7	2.52061E-3	2.52061E-3	6.30202E-3	2.9892E-1
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-2.09595E0	-7.56454E-1	-7.34997E-1	-9.19497E0	-9.18994E0	4.33922E-3	9.50098E-2	2.73411E1	-3.26777E1	-3.26272E1	2.68448E1	1.19757E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.9952E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0941E0	-7.56097E-1	-7.34806E-1	-9.19526E0	-9.19001E0	4.62532E-3	9.51529E-2	2.73381E1	-3.26667E1	-3.26183E1	2.68106E1	1.19913E-7	2.52099E-3	2.52099E-3	6.30192E-3	3.00563E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09441E0	-7.56335E-1	-7.34925E-1	-9.19518E0	-9.19013E0	4.55379E-3	9.51529E-2	2.73472E1	-3.26524E1	-3.2641E1	2.68372E1	1.19965E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.00302E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09433E0	-7.56502E-1	-7.34878E-1	-9.1949E0	-9.18977E0	4.22001E-3	9.49621E-2	2.7321E1	-3.26449E1	-3.26974E1	2.6825E1	1.19902E-7	2.51096E-3	2.51096E-3	6.32356E-3	3.0071E-1