[Scan]
initial_time=2016-01-18T23:29:06
final_time=2016-01-18T23:29:33
ip_count=19
run=1024
dataset=11
scan=852
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09487E0
qbias_imon=-1.08785E-4
ql1_vset=
ql1_vmon=-7.56979E-1
ql1_imon=1.414E-8
ql2_vset=
ql2_vmon=-7.34878E-1
ql2_imon=2.03099E-9
ql3_vset=
ql3_vmon=-9.19435E0
ql3_imon=1.50085E-10
ql4_vset=
ql4_vmon=-9.18996E0
ql4_imon=-2.65658E-10
mult1=-9.4755E-9
mult2=-2.81043E-9
rf_tmon=-5.5879E-3
rf_agc=3.31473E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.69685E-3
ql5_imon=1.67953E-9
bslens_vset=-6.2E0
bslens_vmon=-6.62829E0
bslens_imon=2.56659E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19815E1
lens5a_imon=1.98343E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12443E2
lens4a_imon=2.05255E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54079E1
cs_ef1b_imon=3.15281E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04653E2
lens23_imon=1.02312E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05054E1
cs_ea1_imon=1.09373E-5
lens1_vset=-5.0E0
lens1_vmon=-5.30407E0
lens1_imon=2.48728E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64668E1
os_ef1alow_imon=2.97802E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04195E1
cs_ea2_imon=1.37636E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8425E1
cs_ef1a_imon=3.04108E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=1.1702E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11484E1
os_restr1_imon=4.29238E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14855E1
os_ea1_imon=2.45027E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63515E1
os_ef1bup_imon=3.07965E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26532E0
cs_ionrep_imon=9.12761E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9189E2
cs_nozzle_imon=1.94123E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01767E1
cs_anode1_imon=1.96818E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20396E0
olens4_imon=3.17473E-8
tplens_vset=1.4E-1
tplens_vmon=1.65465E0
tplens_imon=-2.05617E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26014E1
iondef3_imon=1.50614E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26633E1
iondef2_imon=1.54363E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03004E2
lens6_imon=2.9818E-4
ql6_vset=1.0E-1
ql6_vmon=9.52005E-2
ql6_imon=4.04104E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26351E0
ionrepsh_imon=8.64454E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33568E1
lens5b_imon=2.14277E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74886E1
cs_ef2b_imon=3.14452E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42273E0
os_ea2_imon=-1.01074E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06066E2
lens4b_imon=2.00504E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71312E1
cs_ef2a_imon=3.16939E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06657E0
os_ef2alow_imon=-2.36362E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.87813E-1
os_ef2bup_imon=-5.23238E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11232E1
os_restr2_imon=3.37625E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23043E2
cs_ionfoca_imon=6.27873E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01713E1
cs_anode2_imon=2.09252E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73171E1
iondef1_imon=1.1031E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68112E1
iondef4_imon=1.10792E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=4.70387E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81855E-1
olens1_imon=7.0872E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11813E0
cs_ionaccel_imon=-9.04015E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.021E2
cs_ionfocb_imon=1.47446E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56501E1
einzel_imon=7.85002E-6
window_vset=0.0E0
window_vmon=2.47976E-1
window_imon=-8.42748E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82645E2
mask1_imon=2.39199E-4
mask2_vset=0.0E0
mask2_vmon=-1.86338E1
mask2_imon=-6.73362E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92659E3
multa_neg_imon=7.28908E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9371E3
defgrida_imon=6.02014E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50128E3
multb_neg_imon=7.58829E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39555E0
defgridb_imon=6.07061E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33224E1
os_fil1_imon=9.40792E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07768E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61427E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31866E1
cs_fil1_imon=6.43405E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.83379E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63507E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.51823E-2
os_fil2_imon=-2.43772E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.13932E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.62773E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31723E-1
cs_fil2_imon=-2.43772E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.59272E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21797E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31847E-3
inlet_lpb_pmon=3.00224E-1
chamber_ion_pmon=1.2005E-7
chamber_cvt_pmon=2.51622E-3
foreline_cvt_pmon=2.51622E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.47879E-1
res40_imon=-2.39606E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=149
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09441E0	-7.56502E-1	-7.34854E-1	-9.19476E0	-9.18996E0	4.48227E-3	9.48668E-2	2.73204E1	-3.26915E1	-3.26585E1	2.68352E1	1.20226E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.00824E-1
2.0E0	3.3E1	0.0E0	3.16E2	1.6E2	-2.09503E0	-7.56669E-1	-7.34806E-1	-9.19461E0	-9.19003E0	4.55379E-3	9.51767E-2	2.73532E1	-3.26464E1	-3.2626E1	2.6837E1	1.20004E-7	2.5131E-3	2.5131E-3	6.32896E-3	2.99941E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09333E0	-7.56454E-1	-7.34425E-1	-9.19454E0	-9.19006E0	4.33922E-3	9.47952E-2	2.72767E1	-3.26098E1	-3.26486E1	2.68574E1	1.19913E-7	2.52209E-3	2.52209E-3	6.30192E-3	3.00824E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09394E0	-7.56478E-1	-7.34878E-1	-9.19492E0	-9.19003E0	4.43459E-3	9.46283E-2	2.73016E1	-3.2639E1	-3.26384E1	2.68394E1	1.19841E-7	2.51393E-3	2.51393E-3	6.29684E-3	2.98592E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09356E0	-7.56693E-1	-7.34758E-1	-9.19487E0	-9.19023E0	4.36306E-3	9.50575E-2	2.7358E1	-3.26506E1	-3.26573E1	2.68221E1	1.20069E-7	2.51443E-3	2.51443E-3	6.31837E-3	2.97963E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09309E0	-7.56574E-1	-7.34854E-1	-9.19468E0	-9.18989E0	4.673E-3	9.51052E-2	2.73393E1	-3.26726E1	-3.25977E1	2.68376E1	1.20004E-7	2.51525E-3	2.51525E-3	6.31817E-3	2.9943E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09348E0	-7.56693E-1	-7.34663E-1	-9.19483E0	-9.19025E0	4.64916E-3	9.49144E-2	2.72991E1	-3.26747E1	-3.25894E1	2.68154E1	1.19953E-7	2.51632E-3	2.51632E-3	6.3074E-3	2.99941E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09394E0	-7.56621E-1	-7.34544E-1	-9.19464E0	-9.1902E0	4.88758E-3	9.51052E-2	2.72721E1	-3.26567E1	-3.26182E1	2.67938E1	1.20174E-7	2.51662E-3	2.51662E-3	6.34037E-3	2.9926E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09503E0	-7.56669E-1	-7.34711E-1	-9.19471E0	-9.19008E0	4.69685E-3	9.50098E-2	2.73261E1	-3.26633E1	-3.2593E1	2.68575E1	1.19809E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.00041E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09503E0	-7.56335E-1	-7.35044E-1	-9.19499E0	-9.18994E0	4.57764E-3	9.50098E-2	2.7301E1	-3.26649E1	-3.26048E1	2.68151E1	1.19757E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.00824E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.0951E0	-7.56478E-1	-7.35116E-1	-9.19497E0	-9.19018E0	4.52995E-3	9.50575E-2	2.73082E1	-3.26505E1	-3.26003E1	2.68057E1	1.19902E-7	2.50882E-3	2.50882E-3	6.30202E-3	3.00453E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09565E0	-7.56407E-1	-7.35021E-1	-9.19478E0	-9.19032E0	4.50611E-3	9.47952E-2	2.73228E1	-3.26773E1	-3.26107E1	2.68534E1	1.19766E-7	2.51693E-3	2.51693E-3	6.32978E-3	3.00676E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0965E0	-7.56502E-1	-7.34925E-1	-9.19504E0	-9.18999E0	4.62532E-3	9.51052E-2	2.73231E1	-3.26621E1	-3.26248E1	2.6831E1	1.20004E-7	2.5131E-3	2.5131E-3	6.34518E-3	3.00453E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09619E0	-7.56288E-1	-7.34639E-1	-9.19485E0	-9.19006E0	4.3869E-3	9.50098E-2	2.73339E1	-3.26813E1	-3.26344E1	2.68076E1	1.20122E-7	2.52977E-3	2.52977E-3	6.3074E-3	2.9952E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09627E0	-7.56645E-1	-7.34782E-1	-9.19471E0	-9.19013E0	4.3869E-3	9.52005E-2	2.73309E1	-3.2653E1	-3.26543E1	2.6822E1	1.20244E-7	2.52027E-3	2.52027E-3	6.31858E-3	2.98819E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09595E0	-7.56574E-1	-7.34735E-1	-9.19473E0	-9.19013E0	4.74453E-3	9.50336E-2	2.73306E1	-3.26295E1	-3.26428E1	2.68632E1	1.198E-7	2.51632E-3	2.51632E-3	6.32356E-3	2.98665E-1
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.09526E0	-7.56598E-1	-7.34639E-1	-9.19459E0	-9.18989E0	4.79221E-3	9.50813E-2	2.73276E1	-3.26447E1	-3.26035E1	2.68537E1	1.20142E-7	2.51919E-3	2.51919E-3	6.32328E-3	2.99093E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09456E0	-7.56669E-1	-7.34591E-1	-9.19468E0	-9.19018E0	4.64916E-3	9.5129E-2	2.72937E1	-3.26698E1	-3.26442E1	2.68296E1	1.19991E-7	2.51952E-3	2.51952E-3	6.31879E-3	2.9971E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0941E0	-7.56478E-1	-7.3483E-1	-9.19452E0	-9.18987E0	4.79221E-3	9.50575E-2	2.73045E1	-3.26376E1	-3.25966E1	2.67776E1	1.20028E-7	2.51886E-3	2.51886E-3	6.31779E-3	3.01733E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09487E0	-7.56979E-1	-7.34878E-1	-9.19435E0	-9.18996E0	4.69685E-3	9.52005E-2	2.73171E1	-3.26633E1	-3.26014E1	2.68112E1	1.2005E-7	2.51622E-3	2.51622E-3	6.31847E-3	3.00224E-1