[Scan]
initial_time=2016-01-18T23:29:42
final_time=2016-01-18T23:30:08
ip_count=19
run=1024
dataset=11
scan=853
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09503E0
qbias_imon=-1.08811E-4
ql1_vset=
ql1_vmon=-7.56907E-1
ql1_imon=1.41849E-8
ql2_vset=
ql2_vmon=-7.34544E-1
ql2_imon=1.99324E-9
ql3_vset=
ql3_vmon=-9.1949E0
ql3_imon=1.40011E-10
ql4_vset=
ql4_vmon=-9.19013E0
ql4_imon=-2.66707E-10
mult1=-9.86583E-9
mult2=-2.72522E-9
rf_tmon=-4.50948E-3
rf_agc=3.26248E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.50611E-3
ql5_imon=1.73059E-9
bslens_vset=-6.2E0
bslens_vmon=-6.69378E0
bslens_imon=2.58822E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19112E1
lens5a_imon=1.96216E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12448E2
lens4a_imon=2.05331E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53812E1
cs_ef1b_imon=3.17157E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04653E2
lens23_imon=1.02391E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04231E1
cs_ea1_imon=1.06849E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36715E0
lens1_imon=2.78649E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64724E1
os_ef1alow_imon=2.97279E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04237E1
cs_ea2_imon=1.38898E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84359E1
cs_ef1a_imon=3.03673E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=1.1706E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11419E1
os_restr1_imon=4.28644E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14855E1
os_ea1_imon=2.41783E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63531E1
os_ef1bup_imon=3.08608E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21064E0
cs_ionrep_imon=9.19971E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9193E2
cs_nozzle_imon=1.93799E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02029E1
cs_anode1_imon=1.9608E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20437E0
olens4_imon=3.16519E-8
tplens_vset=1.4E-1
tplens_vmon=1.69671E0
tplens_imon=-1.87592E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25906E1
iondef3_imon=1.48883E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2662E1
iondef2_imon=1.56562E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02967E2
lens6_imon=2.98504E-4
ql6_vset=1.0E-1
ql6_vmon=9.50336E-2
ql6_imon=4.05031E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.22566E0
ionrepsh_imon=8.29486E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3358E1
lens5b_imon=2.18315E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74623E1
cs_ef2b_imon=3.14169E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47921E0
os_ea2_imon=-5.33668E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06107E2
lens4b_imon=2.0054E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71055E1
cs_ef2a_imon=3.16462E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04529E0
os_ef2alow_imon=-2.40082E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.758E-1
os_ef2bup_imon=-5.11152E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11147E1
os_restr2_imon=3.37731E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23E2
cs_ionfoca_imon=6.27333E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01775E1
cs_anode2_imon=2.09981E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73222E1
iondef1_imon=1.11716E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6854E1
iondef4_imon=1.11422E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=4.73021E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81688E-1
olens1_imon=7.10129E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1452E0
cs_ionaccel_imon=-8.9951E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02102E2
cs_ionfocb_imon=1.47504E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56498E1
einzel_imon=7.81295E-6
window_vset=0.0E0
window_vmon=2.62285E-1
window_imon=-7.5355E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82642E2
mask1_imon=2.39181E-4
mask2_vset=0.0E0
mask2_vmon=-1.8646E1
mask2_imon=-7.01421E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92653E3
multa_neg_imon=7.93076E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93727E3
defgrida_imon=6.38784E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50122E3
multb_neg_imon=7.09802E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.52487E0
defgridb_imon=6.6474E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33272E1
os_fil1_imon=9.41279E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07989E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61339E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31886E1
cs_fil1_imon=7.66969E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.48262E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63721E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.51823E-2
os_fil2_imon=-2.42592E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.01661E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.42021E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31025E-1
cs_fil2_imon=-2.17107E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.36211E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21899E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=2.99E-1
chamber_ion_pmon=1.20226E-7
chamber_cvt_pmon=2.52318E-3
foreline_cvt_pmon=2.52318E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.63261E-1
res40_imon=-2.44252E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=159
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09526E0	-7.5686E-1	-7.35044E-1	-9.19492E0	-9.18999E0	4.19617E-3	9.51052E-2	2.72939E1	-3.2636E1	-3.26384E1	2.68064E1	1.20106E-7	2.51417E-3	2.51417E-3	6.30202E-3	3.00197E-1
2.0E0	3.9E1	0.0E0	3.16E2	1.6E2	-2.0941E0	-7.56741E-1	-7.34973E-1	-9.19487E0	-9.19011E0	4.36306E-3	9.47952E-2	2.73147E1	-3.26554E1	-3.26122E1	2.68328E1	1.20004E-7	2.51739E-3	2.51739E-3	6.3074E-3	2.99941E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09472E0	-7.56526E-1	-7.34901E-1	-9.19518E0	-9.18999E0	4.41074E-3	9.4986E-2	2.73364E1	-3.27021E1	-3.258E1	2.68076E1	1.19861E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.02133E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-2.09441E0	-7.56383E-1	-7.34901E-1	-9.19528E0	-9.1898E0	4.12464E-3	9.50336E-2	2.72817E1	-3.26368E1	-3.26278E1	2.6846E1	1.19965E-7	2.52209E-3	2.52209E-3	6.34588E-3	3.00824E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09456E0	-7.56478E-1	-7.34615E-1	-9.19535E0	-9.18984E0	4.31538E-3	9.51052E-2	2.73222E1	-3.26915E1	-3.25838E1	2.68107E1	1.20106E-7	2.51417E-3	2.51417E-3	6.31278E-3	2.9892E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09433E0	-7.56621E-1	-7.3483E-1	-9.1953E0	-9.19001E0	4.48227E-3	9.51529E-2	2.73517E1	-3.26419E1	-3.26065E1	2.684E1	1.20084E-7	2.52027E-3	2.52027E-3	6.3074E-3	2.99613E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09387E0	-7.56621E-1	-7.34639E-1	-9.19514E0	-9.18977E0	4.33922E-3	9.50098E-2	2.73231E1	-3.26398E1	-3.26146E1	2.68064E1	1.20174E-7	2.51225E-3	2.51225E-3	6.32386E-3	2.98222E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09309E0	-7.56621E-1	-7.34472E-1	-9.19535E0	-9.18963E0	4.31538E-3	9.50813E-2	2.73183E1	-3.26458E1	-3.25966E1	2.68617E1	1.20158E-7	2.51739E-3	2.51739E-3	6.32896E-3	2.9892E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09348E0	-7.56478E-1	-7.34735E-1	-9.19518E0	-9.18975E0	4.57764E-3	9.50575E-2	2.73333E1	-3.265E1	-3.2632E1	2.67914E1	1.19809E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.01347E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09426E0	-7.56288E-1	-7.34687E-1	-9.19504E0	-9.18989E0	4.31538E-3	9.48429E-2	2.73213E1	-3.26573E1	-3.26302E1	2.68707E1	1.2033E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.00563E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.0948E0	-7.56335E-1	-7.34282E-1	-9.19509E0	-9.19027E0	4.45843E-3	9.46283E-2	2.73387E1	-3.26413E1	-3.26183E1	2.68412E1	1.19809E-7	2.51225E-3	2.51225E-3	6.31288E-3	3.00041E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09456E0	-7.56574E-1	-7.3452E-1	-9.19495E0	-9.18989E0	4.36306E-3	9.4986E-2	2.73051E1	-3.26567E1	-3.26086E1	2.6822E1	1.19861E-7	2.51225E-3	2.51225E-3	6.30192E-3	2.9952E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09441E0	-7.56764E-1	-7.34806E-1	-9.19511E0	-9.18977E0	4.52995E-3	9.50098E-2	2.73357E1	-3.26765E1	-3.26368E1	2.68298E1	1.20363E-7	2.51525E-3	2.51525E-3	6.32896E-3	2.98156E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09456E0	-7.56764E-1	-7.34758E-1	-9.19509E0	-9.18994E0	4.43459E-3	9.48191E-2	2.73153E1	-3.26621E1	-3.262E1	2.68304E1	1.20174E-7	2.51771E-3	2.51771E-3	6.30192E-3	2.9926E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09379E0	-7.56812E-1	-7.34496E-1	-9.1949E0	-9.18994E0	4.64916E-3	9.50575E-2	2.73574E1	-3.26446E1	-3.26164E1	2.68064E1	1.20017E-7	2.51225E-3	2.51225E-3	6.31837E-3	3.00041E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09449E0	-7.56621E-1	-7.34949E-1	-9.1948E0	-9.1902E0	4.57764E-3	9.50575E-2	2.73099E1	-3.26488E1	-3.26434E1	2.68436E1	1.20122E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.00563E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.0948E0	-7.56454E-1	-7.34973E-1	-9.19487E0	-9.18999E0	4.31538E-3	9.48429E-2	2.72833E1	-3.26644E1	-3.26172E1	2.67972E1	1.19809E-7	2.51225E-3	2.51225E-3	6.29098E-3	3.00824E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09456E0	-7.56383E-1	-7.34925E-1	-9.1948E0	-9.19018E0	4.41074E-3	9.52244E-2	2.73161E1	-3.26567E1	-3.26335E1	2.68154E1	1.2026E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.00453E-1
2.2E1	1.0E0	1.0E0	8.89E2	6.17E2	-2.0948E0	-7.56645E-1	-7.34878E-1	-9.19509E0	-9.18989E0	4.43459E-3	9.49621E-2	2.73345E1	-3.26621E1	-3.25942E1	2.68683E1	1.19902E-7	2.51954E-3	2.51954E-3	6.3074E-3	2.98665E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09503E0	-7.56907E-1	-7.34544E-1	-9.1949E0	-9.19013E0	4.50611E-3	9.50336E-2	2.73222E1	-3.2662E1	-3.25906E1	2.6854E1	1.20226E-7	2.52318E-3	2.52318E-3	6.31837E-3	2.99E-1