[Scan]
initial_time=2016-01-18T23:30:17
final_time=2016-01-18T23:30:42
ip_count=19
run=1024
dataset=11
scan=854
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09503E0
qbias_imon=-1.08834E-4
ql1_vset=
ql1_vmon=-7.55954E-1
ql1_imon=1.41105E-8
ql2_vset=
ql2_vmon=-7.34663E-1
ql2_imon=2.00868E-9
ql3_vset=
ql3_vmon=-9.19478E0
ql3_imon=1.58393E-10
ql4_vset=
ql4_vmon=-9.19001E0
ql4_imon=-2.32911E-10
mult1=-9.18566E-9
mult2=-2.81243E-9
rf_tmon=-5.79283E-3
rf_agc=3.26482E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.8399E-3
ql5_imon=1.73379E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65652E0
bslens_imon=2.29622E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19322E1
lens5a_imon=2.01119E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12486E2
lens4a_imon=2.05057E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54073E1
cs_ef1b_imon=3.16975E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04629E2
lens23_imon=1.02236E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04351E1
cs_ea1_imon=1.09517E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38878E0
lens1_imon=3.04245E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64813E1
os_ef1alow_imon=2.9636E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03768E1
cs_ea2_imon=1.36518E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84184E1
cs_ef1a_imon=3.04793E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=1.17128E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1128E1
os_restr1_imon=4.28409E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15203E1
os_ea1_imon=2.4391E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63395E1
os_ef1bup_imon=3.07136E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23467E0
cs_ionrep_imon=9.59625E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91934E2
cs_nozzle_imon=1.93662E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01959E1
cs_anode1_imon=1.96746E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20451E0
olens4_imon=3.16419E-8
tplens_vset=1.4E-1
tplens_vmon=1.66907E0
tplens_imon=-2.38062E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26173E1
iondef3_imon=1.51226E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26753E1
iondef2_imon=1.57896E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02942E2
lens6_imon=2.97935E-4
ql6_vset=1.0E-1
ql6_vmon=9.50813E-2
ql6_imon=4.02879E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28875E0
ionrepsh_imon=8.53639E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33916E1
lens5b_imon=2.1936E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74675E1
cs_ef2b_imon=3.14091E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48522E0
os_ea2_imon=-7.10311E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06092E2
lens4b_imon=2.00533E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71234E1
cs_ef2a_imon=3.16434E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06417E0
os_ef2alow_imon=-2.38525E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.74599E-1
os_ef2bup_imon=-5.09182E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11057E1
os_restr2_imon=3.37085E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23012E2
cs_ionfoca_imon=6.29496E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01905E1
cs_anode2_imon=2.08928E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73555E1
iondef1_imon=1.09409E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68376E1
iondef4_imon=1.11801E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=4.74169E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81617E-1
olens1_imon=7.10249E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15056E0
cs_ionaccel_imon=-8.24728E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02056E2
cs_ionfocb_imon=1.4737E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56633E1
einzel_imon=8.00499E-6
window_vset=0.0E0
window_vmon=2.54584E-1
window_imon=-8.49956E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8266E2
mask1_imon=2.39156E-4
mask2_vset=0.0E0
mask2_vmon=-1.86704E1
mask2_imon=-5.9047E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92658E3
multa_neg_imon=7.44049E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93713E3
defgrida_imon=6.41308E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5014E3
multb_neg_imon=7.24943E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.41059E0
defgridb_imon=6.15712E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33242E1
os_fil1_imon=9.41141E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0823E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61491E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31841E1
cs_fil1_imon=7.19689E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.95993E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63517E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.38925E-2
os_fil2_imon=-2.54584E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.16935E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.31065E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.325E-1
cs_fil2_imon=-2.50379E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.10618E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21728E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=2.99E-1
chamber_ion_pmon=1.20122E-7
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.27767E-1
res40_imon=-2.47174E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=150
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09541E0	-7.56931E-1	-7.35211E-1	-9.19526E0	-9.18999E0	4.673E-3	9.50336E-2	2.73228E1	-3.26856E1	-3.26431E1	2.6801E1	1.20226E-7	2.51552E-3	2.51552E-3	6.29098E-3	2.99E-1
2.0E0	2.9E1	0.0E0	3.16E2	1.6E2	-2.0951E0	-7.56645E-1	-7.34854E-1	-9.19504E0	-9.18994E0	4.64916E-3	9.48906E-2	2.73008E1	-3.2664E1	-3.26309E1	2.68599E1	1.20106E-7	2.51632E-3	2.51632E-3	6.3074E-3	3.03027E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0951E0	-7.56645E-1	-7.34735E-1	-9.1948E0	-9.19003E0	4.74453E-3	9.46522E-2	2.73138E1	-3.26138E1	-3.26266E1	2.67972E1	1.19978E-7	2.5147E-3	2.5147E-3	6.31858E-3	3.00676E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09526E0	-7.56645E-1	-7.34925E-1	-9.19492E0	-9.18999E0	4.45843E-3	9.49383E-2	2.7337E1	-3.26544E1	-3.26237E1	2.68111E1	1.20344E-7	2.52131E-3	2.52131E-3	6.32858E-3	2.98842E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0948E0	-7.56574E-1	-7.34973E-1	-9.19487E0	-9.18984E0	4.673E-3	9.49621E-2	2.73131E1	-3.26536E1	-3.26413E1	2.68356E1	1.1974E-7	2.51814E-3	2.51814E-3	6.32858E-3	2.98092E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09402E0	-7.56836E-1	-7.34711E-1	-9.19483E0	-9.1897E0	4.91142E-3	9.51052E-2	2.73327E1	-3.26711E1	-3.26152E1	2.68268E1	1.19766E-7	2.52473E-3	2.52473E-3	6.29624E-3	2.98554E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09464E0	-7.56955E-1	-7.35188E-1	-9.19485E0	-9.18992E0	4.79221E-3	9.50336E-2	2.7288E1	-3.26467E1	-3.25759E1	2.67988E1	1.19965E-7	2.51443E-3	2.51443E-3	6.34037E-3	2.9952E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09503E0	-7.56788E-1	-7.35092E-1	-9.19514E0	-9.1897E0	4.69685E-3	9.49621E-2	2.73412E1	-3.26309E1	-3.26009E1	2.68755E1	1.19902E-7	2.51739E-3	2.51739E-3	6.32896E-3	3.00197E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0951E0	-7.56931E-1	-7.34878E-1	-9.19499E0	-9.18982E0	4.33922E-3	9.50575E-2	2.73285E1	-3.26152E1	-3.26458E1	2.68322E1	1.20191E-7	2.5147E-3	2.5147E-3	6.3074E-3	3.00942E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09441E0	-7.56478E-1	-7.34615E-1	-9.19499E0	-9.18982E0	4.57764E-3	9.4986E-2	2.73157E1	-3.26183E1	-3.26449E1	2.68319E1	1.19861E-7	2.52099E-3	2.52099E-3	6.30192E-3	3.00302E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09449E0	-7.56359E-1	-7.34568E-1	-9.19509E0	-9.18968E0	4.55379E-3	9.49621E-2	2.7352E1	-3.2653E1	-3.26194E1	2.68424E1	1.20158E-7	2.51847E-3	2.51847E-3	6.30202E-3	3.0071E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09464E0	-7.56288E-1	-7.34425E-1	-9.19485E0	-9.18968E0	4.45843E-3	9.52244E-2	2.73069E1	-3.26621E1	-3.26212E1	2.68148E1	1.19913E-7	2.52099E-3	2.52099E-3	6.32936E-3	2.9874E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09533E0	-7.56335E-1	-7.34591E-1	-9.19516E0	-9.18996E0	4.43459E-3	9.51529E-2	2.73405E1	-3.2649E1	-3.26042E1	2.6813E1	1.19913E-7	2.51662E-3	2.51662E-3	6.3074E-3	2.98222E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09503E0	-7.56502E-1	-7.34615E-1	-9.19499E0	-9.18984E0	4.36306E-3	9.54866E-2	2.73051E1	-3.26474E1	-3.26237E1	2.68383E1	1.20226E-7	2.51883E-3	2.51883E-3	6.31541E-3	3.01163E-1
1.8E1	4.0E0	0.0E0	7.27E2	5.0E2	-2.09456E0	-7.56431E-1	-7.34949E-1	-9.19502E0	-9.18992E0	4.64916E-3	9.49383E-2	2.73312E1	-3.26343E1	-3.26451E1	2.68257E1					
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09549E0	-7.56288E-1	-7.34568E-1	-9.1948E0	-9.18977E0	4.86374E-3	9.50098E-2	2.73003E1	-3.26524E1	-3.26296E1	2.68773E1	1.1995E-7	2.52454E-3	2.52454E-3	6.33065E-3	3.00087E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09533E0	-7.56359E-1	-7.34735E-1	-9.19476E0	-9.18972E0	4.79221E-3	9.49621E-2	2.73333E1	-3.26681E1	-3.25846E1	2.6849E1	1.19705E-7	2.52318E-3	2.52318E-3	6.31837E-3	3.00824E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09518E0	-7.56216E-1	-7.34782E-1	-9.19468E0	-9.1898E0	4.86374E-3	9.5129E-2	2.73057E1	-3.26657E1	-3.2602E1	2.6798E1	1.19913E-7	2.51498E-3	2.51498E-3	6.31563E-3	2.9874E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09549E0	-7.56097E-1	-7.34544E-1	-9.19485E0	-9.18977E0	4.74453E-3	9.51767E-2	2.73039E1	-3.26356E1	-3.26512E1	2.6822E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09503E0	-7.55954E-1	-7.34663E-1	-9.19478E0	-9.19001E0	4.8399E-3	9.50813E-2	2.73555E1	-3.26753E1	-3.26173E1	2.68376E1	1.20122E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.99E-1