[Scan]
initial_time=2016-01-18T23:32:36
final_time=2016-01-18T23:33:02
ip_count=19
run=1024
dataset=11
scan=858
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09495E0
qbias_imon=-1.08794E-4
ql1_vset=
ql1_vmon=-7.56407E-1
ql1_imon=1.41182E-8
ql2_vset=
ql2_vmon=-7.34854E-1
ql2_imon=2.00037E-9
ql3_vset=
ql3_vmon=-9.19473E0
ql3_imon=1.22476E-10
ql4_vset=
ql4_vmon=-9.18999E0
ql4_imon=-2.34592E-10
mult1=-9.85401E-9
mult2=-2.60567E-9
rf_tmon=-5.00499E-3
rf_agc=3.36159E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.62532E-3
ql5_imon=1.7699E-9
bslens_vset=-6.2E0
bslens_vmon=-6.77063E0
bslens_imon=2.17516E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.18173E1
lens5a_imon=1.90404E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1248E2
lens4a_imon=2.05964E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53795E1
cs_ef1b_imon=3.15698E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04782E2
lens23_imon=1.02528E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.03696E1
cs_ea1_imon=1.0068E-5
lens1_vset=-5.0E0
lens1_vmon=-5.31062E0
lens1_imon=2.99276E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64817E1
os_ef1alow_imon=2.97453E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.05507E1
cs_ea2_imon=1.4418E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84255E1
cs_ef1a_imon=3.04473E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.17367E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11291E1
os_restr1_imon=4.29686E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14987E1
os_ea1_imon=2.33585E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63618E1
os_ef1bup_imon=3.08469E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.07513E0
cs_ionrep_imon=8.91065E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91995E2
cs_nozzle_imon=1.94546E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01983E1
cs_anode1_imon=1.96427E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20403E0
olens4_imon=3.17483E-8
tplens_vset=1.4E-1
tplens_vmon=1.83315E0
tplens_imon=-1.89165E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26219E1
iondef3_imon=1.40782E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26679E1
iondef2_imon=1.63399E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03068E2
lens6_imon=2.98608E-4
ql6_vset=1.0E-1
ql6_vmon=9.4986E-2
ql6_imon=4.06212E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.22673E0
ionrepsh_imon=7.65062E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3256E1
lens5b_imon=2.19038E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74773E1
cs_ef2b_imon=3.13717E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.61371E0
os_ea2_imon=7.27508E-8
lens4b_vset=-4.05E2
lens4b_vmon=-4.06075E2
lens4b_imon=2.00081E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71345E1
cs_ef2a_imon=3.17331E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.01981E0
os_ef2alow_imon=-2.35217E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.86805E-1
os_ef2bup_imon=-5.10457E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11152E1
os_restr2_imon=3.39017E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.22882E2
cs_ionfoca_imon=6.24831E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01844E1
cs_anode2_imon=2.08521E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72968E1
iondef1_imon=1.18767E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68665E1
iondef4_imon=1.09442E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=4.74986E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81593E-1
olens1_imon=7.1109E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10871E0
cs_ionaccel_imon=-9.75966E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02042E2
cs_ionfocb_imon=1.47501E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56579E1
einzel_imon=7.89635E-6
window_vset=0.0E0
window_vmon=2.48384E-1
window_imon=-7.70926E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82632E2
mask1_imon=2.39185E-4
mask2_vset=0.0E0
mask2_vmon=-1.8639E1
mask2_imon=-5.58936E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92705E3
multa_neg_imon=8.59211E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93625E3
defgrida_imon=6.09328E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50157E3
multb_neg_imon=6.61004E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.71856E0
defgridb_imon=7.15865E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33247E1
os_fil1_imon=9.42507E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07706E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61518E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31846E1
cs_fil1_imon=6.73137E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.65638E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63732E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.47156E-2
os_fil2_imon=-2.37379E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.0282E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.28573E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31649E-1
cs_fil2_imon=-2.44329E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.33894E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21965E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29665E-3
inlet_lpb_pmon=3.01223E-1
chamber_ion_pmon=1.20311E-7
chamber_cvt_pmon=2.52276E-3
foreline_cvt_pmon=2.52276E-3
chamber_tmon=1.40037E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.32766E-1
res40_imon=-2.36607E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=154
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09518E0	-7.56502E-1	-7.34448E-1	-9.19478E0	-9.19003E0	4.57764E-3	9.51529E-2	2.73128E1	-3.25947E1	-3.25529E1	2.68244E1	1.20122E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.99E-1
2.0E0	2.7E1	0.0E0	3.16E2	1.6E2	-2.09627E0	-7.56502E-1	-7.34496E-1	-9.19495E0	-9.1902E0	4.62532E-3	9.48668E-2	2.73253E1	-3.26419E1	-3.26529E1	2.68004E1	1.19646E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.00966E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0958E0	-7.56764E-1	-7.34758E-1	-9.19485E0	-9.1902E0	4.52995E-3	9.48668E-2	2.73242E1	-3.27054E1	-3.26208E1	2.67885E1	1.20137E-7	2.51581E-3	2.51581E-3	6.29624E-3	2.99613E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09495E0	-7.56836E-1	-7.34758E-1	-9.19473E0	-9.19006E0	4.41074E-3	9.50336E-2	2.73204E1	-3.26832E1	-3.26467E1	2.68478E1	1.1969E-7	2.51393E-3	2.51393E-3	6.31798E-3	2.99845E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09449E0	-7.56502E-1	-7.34496E-1	-9.19468E0	-9.1898E0	4.3869E-3	9.47475E-2	2.73339E1	-3.26523E1	-3.26107E1	2.68214E1	1.20055E-7	2.51525E-3	2.51525E-3	6.36687E-3	3.00197E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09449E0	-7.56645E-1	-7.34353E-1	-9.19473E0	-9.18977E0	4.60148E-3	9.51052E-2	2.73532E1	-3.26879E1	-3.25803E1	2.68815E1	1.20069E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.97963E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09456E0	-7.56502E-1	-7.34806E-1	-9.19485E0	-9.1898E0	4.3869E-3	9.49383E-2	2.72923E1	-3.26425E1	-3.26499E1	2.67747E1	1.20174E-7	2.51334E-3	2.51334E-3	6.29098E-3	2.97963E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09387E0	-7.56621E-1	-7.3483E-1	-9.1949E0	-9.1897E0	4.36306E-3	9.50098E-2	2.73281E1	-3.26693E1	-3.26361E1	2.68555E1	1.20038E-7	2.51793E-3	2.51793E-3	6.31727E-3	2.98325E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09487E0	-7.56478E-1	-7.34735E-1	-9.1948E0	-9.18951E0	4.43459E-3	9.47714E-2	2.72847E1	-3.26891E1	-3.26254E1	2.68695E1	1.19933E-7	2.51744E-3	2.51744E-3	6.32592E-3	2.98967E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09456E0	-7.56454E-1	-7.34735E-1	-9.19478E0	-9.18992E0	4.3869E-3	9.4986E-2	2.73225E1	-3.26825E1	-3.26314E1	2.6792E1	1.20278E-7	2.52318E-3	2.52318E-3	6.32936E-3	3.00563E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09541E0	-7.56741E-1	-7.34925E-1	-9.19468E0	-9.1898E0	4.26769E-3	9.5129E-2	2.73346E1	-3.26526E1	-3.26319E1	2.68556E1	1.19965E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.00041E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09495E0	-7.56574E-1	-7.34639E-1	-9.1949E0	-9.18996E0	4.43459E-3	9.52482E-2	2.7288E1	-3.26487E1	-3.26162E1	2.68448E1	1.20466E-7	2.51954E-3	2.51954E-3	6.33436E-3	3.01223E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09426E0	-7.56335E-1	-7.34782E-1	-9.19495E0	-9.18994E0	4.31538E-3	9.5129E-2	2.73204E1	-3.26514E1	-3.26378E1	2.68238E1	1.20244E-7	2.51804E-3	2.51804E-3	6.3074E-3	3.04425E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09433E0	-7.5655E-1	-7.34878E-1	-9.19499E0	-9.18963E0	4.29153E-3	9.48191E-2	2.73207E1	-3.26603E1	-3.2617E1	2.68226E1	1.20055E-7	2.51632E-3	2.51632E-3	6.31817E-3	2.9892E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09433E0	-7.56288E-1	-7.35092E-1	-9.19456E0	-9.18965E0	4.43459E-3	9.50336E-2	2.73246E1	-3.26508E1	-3.26484E1	2.6834E1	1.2033E-7	2.52099E-3	2.52099E-3	6.30192E-3	3.01347E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09402E0	-7.56621E-1	-7.34854E-1	-9.19476E0	-9.18975E0	4.52995E-3	9.50336E-2	2.73045E1	-3.26717E1	-3.26296E1	2.6795E1	1.19646E-7	2.51954E-3	2.51954E-3	6.32356E-3	3.02253E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09495E0	-7.56693E-1	-7.34878E-1	-9.19476E0	-9.18989E0	4.43459E-3	9.49621E-2	2.73147E1	-3.26488E1	-3.26122E1	2.68454E1	1.19809E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.00041E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0948E0	-7.56359E-1	-7.34878E-1	-9.19464E0	-9.18968E0	4.17233E-3	9.48191E-2	2.73145E1	-3.26537E1	-3.25977E1	2.68377E1	1.20017E-7	2.5188E-3	2.5188E-3	6.28006E-3	3.00302E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09588E0	-7.56359E-1	-7.34854E-1	-9.19466E0	-9.19008E0	4.26769E-3	9.52244E-2	2.73117E1	-3.26561E1	-3.26482E1	2.68202E1	1.20004E-7	2.51417E-3	2.51417E-3	6.31817E-3	2.98665E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09495E0	-7.56407E-1	-7.34854E-1	-9.19473E0	-9.18999E0	4.62532E-3	9.4986E-2	2.72968E1	-3.26679E1	-3.26219E1	2.68665E1	1.20311E-7	2.52276E-3	2.52276E-3	6.29665E-3	3.01223E-1