[Scan]
initial_time=2016-01-18T23:33:11
final_time=2016-01-18T23:33:37
ip_count=19
run=1024
dataset=11
scan=859
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09433E0
qbias_imon=-1.0878E-4
ql1_vset=
ql1_vmon=-7.56621E-1
ql1_imon=1.41368E-8
ql2_vset=
ql2_vmon=-7.34544E-1
ql2_imon=2.02111E-9
ql3_vset=
ql3_vmon=-9.19449E0
ql3_imon=1.05965E-10
ql4_vset=
ql4_vmon=-9.18977E0
ql4_imon=-2.6691E-10
mult1=-1.00195E-8
mult2=-2.88396E-9
rf_tmon=-5.51231E-3
rf_agc=3.32088E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.26769E-3
ql5_imon=1.75897E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65112E0
bslens_imon=1.66535E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.18186E1
lens5a_imon=1.99389E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12584E2
lens4a_imon=2.05857E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54004E1
cs_ef1b_imon=3.17751E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04693E2
lens23_imon=1.018E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.03204E1
cs_ea1_imon=1.04398E-5
lens1_vset=-5.0E0
lens1_vmon=-5.43685E0
lens1_imon=3.48946E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64665E1
os_ef1alow_imon=2.98364E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04916E1
cs_ea2_imon=1.37311E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84238E1
cs_ef1a_imon=3.04315E-5
olens2_vset=9.7E-1
olens2_vmon=9.70006E-1
olens2_imon=1.17122E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11404E1
os_restr1_imon=4.28905E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1432E1
os_ea1_imon=2.3533E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63673E1
os_ef1bup_imon=3.07608E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.14876E0
cs_ionrep_imon=9.68998E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92068E2
cs_nozzle_imon=1.94228E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0194E1
cs_anode1_imon=1.96978E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20422E0
olens4_imon=3.16202E-8
tplens_vset=1.4E-1
tplens_vmon=1.71654E0
tplens_imon=-8.11249E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26378E1
iondef3_imon=1.47982E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26921E1
iondef2_imon=1.62654E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03003E2
lens6_imon=2.97805E-4
ql6_vset=1.0E-1
ql6_vmon=9.50336E-2
ql6_imon=4.02645E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.15777E0
ionrepsh_imon=7.93437E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33598E1
lens5b_imon=2.26282E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74626E1
cs_ef2b_imon=3.13073E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.59457E0
os_ea2_imon=-5.69717E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.05993E2
lens4b_imon=1.99923E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71283E1
cs_ef2a_imon=3.17489E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07078E0
os_ef2alow_imon=-2.50695E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.99503E-1
os_ef2bup_imon=-5.09681E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11204E1
os_restr2_imon=3.37998E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.22976E2
cs_ionfoca_imon=6.30902E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01815E1
cs_anode2_imon=2.08991E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73653E1
iondef1_imon=1.16655E-5
iondef4_vset=2.691E1
iondef4_vmon=2.69109E1
iondef4_imon=1.09738E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=4.78475E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81855E-1
olens1_imon=7.1203E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15447E0
cs_ionaccel_imon=-8.82669E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02113E2
cs_ionfocb_imon=1.47499E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56355E1
einzel_imon=7.83006E-6
window_vset=0.0E0
window_vmon=2.35686E-1
window_imon=-7.36708E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82648E2
mask1_imon=2.39204E-4
mask2_vset=0.0E0
mask2_vmon=-1.86369E1
mask2_imon=-6.58114E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92712E3
multa_neg_imon=7.92355E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9368E3
defgrida_imon=6.88172E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5008E3
multb_neg_imon=6.73752E-5
defgridb_vset=0.0E0
defgridb_vmon=-2.0512E0
defgridb_imon=6.94301E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33272E1
os_fil1_imon=9.4204E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07772E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61401E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31872E1
cs_fil1_imon=7.05573E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.31999E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63649E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.56982E-2
os_fil2_imon=-2.48161E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.19038E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.31709E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3261E-1
cs_fil2_imon=-2.15102E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.14869E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21772E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.9714E-1
chamber_ion_pmon=1.19544E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.71662E-1
res40_imon=-2.38719E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=164
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09472E0	-7.5655E-1	-7.3514E-1	-9.19447E0	-9.18992E0	4.3869E-3	9.49144E-2	2.72745E1	-3.26681E1	-3.27522E1	2.68366E1	1.19757E-7	2.51662E-3	2.51662E-3	6.32936E-3	2.9952E-1
2.0E0	2.4E1	0.0E0	3.16E2	1.6E2	-2.09487E0	-7.56788E-1	-7.34901E-1	-9.19476E0	-9.19011E0	4.74453E-3	9.51052E-2	2.72745E1	-3.26807E1	-3.2644E1	2.68689E1	1.19913E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00041E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09402E0	-7.56907E-1	-7.34925E-1	-9.19492E0	-9.19008E0	4.3869E-3	9.47952E-2	2.736E1	-3.26803E1	-3.25883E1	2.67607E1	1.19705E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.02396E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09426E0	-7.56788E-1	-7.35092E-1	-9.19483E0	-9.19011E0	4.45843E-3	9.46283E-2	2.73231E1	-3.26807E1	-3.26308E1	2.68635E1	1.20004E-7	2.51417E-3	2.51417E-3	6.31278E-3	3.01223E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09426E0	-7.57003E-1	-7.35092E-1	-9.19478E0	-9.19013E0	4.69685E-3	9.46283E-2	2.73257E1	-3.26602E1	-3.26183E1	2.68233E1	1.20383E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.00563E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09294E0	-7.56574E-1	-7.34615E-1	-9.19473E0	-9.19015E0	4.43459E-3	9.49383E-2	2.73039E1	-3.26554E1	-3.26217E1	2.67789E1	1.20192E-7	2.51919E-3	2.51919E-3	6.33388E-3	3.01356E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09325E0	-7.56693E-1	-7.34377E-1	-9.19485E0	-9.18977E0	4.52995E-3	9.46283E-2	2.73417E1	-3.26555E1	-3.26124E1	2.68794E1	1.20084E-7	2.52027E-3	2.52027E-3	6.33538E-3	3.02813E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09325E0	-7.56359E-1	-7.34496E-1	-9.19476E0	-9.18982E0	4.45843E-3	9.46999E-2	2.72889E1	-3.26561E1	-3.26092E1	2.68587E1	1.20278E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.00563E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09348E0	-7.56383E-1	-7.3452E-1	-9.19468E0	-9.18977E0	4.3869E-3	9.49383E-2	2.73169E1	-3.26655E1	-3.26183E1	2.68388E1	1.19965E-7	2.51552E-3	2.51552E-3	6.30192E-3	2.9978E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09426E0	-7.56502E-1	-7.34687E-1	-9.19454E0	-9.18984E0	4.48227E-3	9.48429E-2	2.73105E1	-3.26506E1	-3.26278E1	2.68406E1	1.19953E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.00197E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.0941E0	-7.56383E-1	-7.34711E-1	-9.19466E0	-9.18996E0	4.72069E-3	9.4986E-2	2.73225E1	-3.26807E1	-3.26284E1	2.68382E1	1.20069E-7	2.52099E-3	2.52099E-3	6.31288E-3	2.9952E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0941E0	-7.56598E-1	-7.34448E-1	-9.19499E0	-9.1897E0	4.43459E-3	9.48906E-2	2.73183E1	-3.26639E1	-3.2614E1	2.68382E1	1.19809E-7	2.52209E-3	2.52209E-3	6.31837E-3	2.9978E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09418E0	-7.56741E-1	-7.34925E-1	-9.19478E0	-9.18965E0	4.43459E-3	9.48668E-2	2.7324E1	-3.26767E1	-3.26012E1	2.68395E1	1.20363E-7	2.51739E-3	2.51739E-3	6.32896E-3	2.99686E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09472E0	-7.56717E-1	-7.34782E-1	-9.19478E0	-9.18984E0	4.673E-3	9.52482E-2	2.73143E1	-3.26866E1	-3.26334E1	2.67708E1	1.20069E-7	2.51552E-3	2.51552E-3	6.3074E-3	2.98222E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09518E0	-7.56621E-1	-7.34758E-1	-9.19471E0	-9.18972E0	4.62532E-3	9.4986E-2	2.73594E1	-3.26543E1	-3.2626E1	2.68011E1	1.20069E-7	2.5199E-3	2.5199E-3	6.32936E-3	2.9978E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0951E0	-7.56288E-1	-7.34878E-1	-9.1949E0	-9.18992E0	4.60148E-3	9.53436E-2	2.73305E1	-3.26644E1	-3.26201E1	2.68589E1	1.19861E-7	2.51552E-3	2.51552E-3	6.31837E-3	2.9978E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09541E0	-7.56383E-1	-7.34496E-1	-9.19461E0	-9.18999E0	4.52995E-3	9.50336E-2	2.73544E1	-3.26579E1	-3.26218E1	2.684E1	1.19851E-7	2.51525E-3	2.51525E-3	6.3074E-3	3.00453E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09456E0	-7.56478E-1	-7.34496E-1	-9.19495E0	-9.18982E0	4.45843E-3	9.49621E-2	2.73165E1	-3.26603E1	-3.26332E1	2.68623E1	1.20017E-7	2.52209E-3	2.52209E-3	6.3074E-3	2.9926E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09487E0	-7.5655E-1	-7.34568E-1	-9.19459E0	-9.1898E0	4.48227E-3	9.51052E-2	2.73098E1	-3.26638E1	-3.26201E1	2.67584E1	1.20383E-7	2.50571E-3	2.50571E-3	6.32386E-3	2.9952E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09433E0	-7.56621E-1	-7.34544E-1	-9.19449E0	-9.18977E0	4.26769E-3	9.50336E-2	2.73653E1	-3.26921E1	-3.26378E1	2.69109E1	1.19544E-7	2.51525E-3	2.51525E-3	6.32356E-3	2.9714E-1