[Scan]
initial_time=2016-01-18T23:34:56
final_time=2016-01-18T23:35:21
ip_count=19
run=1024
dataset=11
scan=862
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09441E0
qbias_imon=-1.08788E-4
ql1_vset=
ql1_vmon=-7.56598E-1
ql1_imon=1.41272E-8
ql2_vset=
ql2_vmon=-7.3483E-1
ql2_imon=2.04594E-9
ql3_vset=
ql3_vmon=-9.19502E0
ql3_imon=1.44708E-10
ql4_vset=
ql4_vmon=-9.18992E0
ql4_imon=-2.52044E-10
mult1=-9.77126E-9
mult2=-2.80557E-9
rf_tmon=-5.24095E-3
rf_agc=3.19405E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.33922E-3
ql5_imon=1.67053E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65972E0
bslens_imon=2.61405E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.2006E1
lens5a_imon=2.0074E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12477E2
lens4a_imon=2.0481E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5376E1
cs_ef1b_imon=3.16011E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04592E2
lens23_imon=1.02174E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04976E1
cs_ea1_imon=1.11015E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37905E0
lens1_imon=2.48663E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64927E1
os_ef1alow_imon=2.98217E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03354E1
cs_ea2_imon=1.33208E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8444E1
cs_ef1a_imon=3.04334E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=1.1706E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1161E1
os_restr1_imon=4.28922E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1553E1
os_ea1_imon=2.48132E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63629E1
os_ef1bup_imon=3.08886E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.28513E0
cs_ionrep_imon=9.44157E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91896E2
cs_nozzle_imon=1.93505E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01815E1
cs_anode1_imon=1.96358E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20434E0
olens4_imon=3.15807E-8
tplens_vset=1.4E-1
tplens_vmon=1.65736E0
tplens_imon=-1.39614E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25741E1
iondef3_imon=1.51577E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26826E1
iondef2_imon=1.56001E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02909E2
lens6_imon=2.98102E-4
ql6_vset=1.0E-1
ql6_vmon=9.44853E-2
ql6_imon=4.03506E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30932E0
ionrepsh_imon=8.66643E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33799E1
lens5b_imon=2.16171E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74368E1
cs_ef2b_imon=3.13439E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.41609E0
os_ea2_imon=-6.91762E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06098E2
lens4b_imon=2.00846E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71258E1
cs_ef2a_imon=3.17505E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09279E0
os_ef2alow_imon=-2.47728E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.89701E-1
os_ef2bup_imon=-5.04201E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11361E1
os_restr2_imon=3.39295E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23055E2
cs_ionfoca_imon=6.27592E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0189E1
cs_anode2_imon=2.08486E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73246E1
iondef1_imon=1.09777E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68279E1
iondef4_imon=1.1038E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=4.75023E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81712E-1
olens1_imon=7.07797E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.17937E0
cs_ionaccel_imon=-9.51639E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02054E2
cs_ionfocb_imon=1.47504E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56538E1
einzel_imon=7.75734E-6
window_vset=0.0E0
window_vmon=2.72131E-1
window_imon=-7.46599E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82659E2
mask1_imon=2.39293E-4
mask2_vset=0.0E0
mask2_vmon=-1.86547E1
mask2_imon=-5.38084E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92653E3
multa_neg_imon=7.36393E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93732E3
defgrida_imon=6.69498E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50138E3
multb_neg_imon=7.40641E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3465E0
defgridb_imon=5.93047E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33247E1
os_fil1_imon=9.42055E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0803E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6137E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31863E1
cs_fil1_imon=7.62915E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.69692E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63658E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.35759E-2
os_fil2_imon=-2.38537E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.15562E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.29965E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32149E-1
cs_fil2_imon=-2.34483E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.15938E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21773E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=2.98665E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.52492E-3
foreline_cvt_pmon=2.52492E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.15389E-1
res40_imon=-2.36954E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=150
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09526E0	-7.56621E-1	-7.34711E-1	-9.19511E0	-9.18992E0	4.64916E-3	9.52005E-2	2.73694E1	-3.26567E1	-3.26142E1	2.6828E1	1.20278E-7	2.52538E-3	2.52538E-3	6.32386E-3	2.9978E-1
2.0E0	4.1E1	0.0E0	3.16E2	1.6E2	-2.09487E0	-7.56741E-1	-7.34854E-1	-9.19559E0	-9.18989E0	4.36306E-3	9.52005E-2	2.73271E1	-3.26848E1	-3.26652E1	2.68106E1	1.20671E-7	2.52384E-3	2.52384E-3	6.31278E-3	3.0071E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09441E0	-7.56431E-1	-7.34901E-1	-9.1953E0	-9.19011E0	4.24385E-3	9.52721E-2	2.73063E1	-3.27304E1	-3.25824E1	2.6816E1	1.19965E-7	2.51662E-3	2.51662E-3	6.34037E-3	3.00302E-1
4.0E0	8.0E0	0.0E0	6.55E2	3.98E2	-2.09426E0	-7.5655E-1	-7.34711E-1	-9.19554E0	-9.18982E0	4.24385E-3	9.50575E-2	2.73021E1	-3.26408E1	-3.26266E1	2.68088E1	1.19902E-7	2.52169E-3	2.52169E-3	6.31278E-3	3.0071E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09472E0	-7.56574E-1	-7.34997E-1	-9.19523E0	-9.19025E0	4.36306E-3	9.49383E-2	2.73225E1	-3.26687E1	-3.2605E1	2.68623E1	1.19809E-7	2.5188E-3	2.5188E-3	6.29098E-3	3.00824E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09402E0	-7.56454E-1	-7.34496E-1	-9.19507E0	-9.1902E0	4.24385E-3	9.49144E-2	2.73357E1	-3.26368E1	-3.26458E1	2.68406E1	1.20055E-7	2.51417E-3	2.51417E-3	6.30202E-3	3.00197E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0941E0	-7.56383E-1	-7.34568E-1	-9.19487E0	-9.19006E0	4.3869E-3	9.50098E-2	2.73165E1	-3.26591E1	-3.26152E1	2.68094E1	1.20084E-7	2.51581E-3	2.51581E-3	6.32978E-3	3.02545E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0941E0	-7.56502E-1	-7.34901E-1	-9.19507E0	-9.18992E0	4.55379E-3	9.49383E-2	2.73081E1	-3.26254E1	-3.26206E1	2.68743E1	1.19851E-7	2.51954E-3	2.51954E-3	6.32356E-3	3.03027E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0934E0	-7.56764E-1	-7.34735E-1	-9.19523E0	-9.18975E0	4.41074E-3	9.50336E-2	2.72951E1	-3.26738E1	-3.26183E1	2.67788E1	1.20278E-7	2.52318E-3	2.52318E-3	6.31837E-3	3.00563E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09426E0	-7.56741E-1	-7.34806E-1	-9.1954E0	-9.18977E0	4.33922E-3	9.52244E-2	2.73558E1	-3.26537E1	-3.26726E1	2.68047E1	1.19902E-7	2.51632E-3	2.51632E-3	6.31278E-3	2.99941E-1
1.4E1	3.0E0	0.0E0	5.66E2	3.82E2	-2.09433E0	-7.56884E-1	-7.34758E-1	-9.1953E0	-9.18994E0	4.36306E-3	9.5129E-2	2.73351E1	-3.26627E1	-3.26122E1	2.68554E1	1.20174E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.01085E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0948E0	-7.56669E-1	-7.34758E-1	-9.19497E0	-9.19025E0	4.33922E-3	9.52959E-2	2.73556E1	-3.2653E1	-3.26573E1	2.68701E1	1.20069E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.01609E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09503E0	-7.56621E-1	-7.3514E-1	-9.1949E0	-9.19008E0	4.52995E-3	9.50813E-2	2.73333E1	-3.26957E1	-3.26212E1	2.6816E1	1.20106E-7	2.51096E-3	2.51096E-3	6.29128E-3	2.99941E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0951E0	-7.56478E-1	-7.35044E-1	-9.19485E0	-9.19008E0	4.41074E-3	9.51767E-2	2.73117E1	-3.26753E1	-3.26218E1	2.68526E1	1.20031E-7	2.51693E-3	2.51693E-3	6.33538E-3	3.00942E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09441E0	-7.56502E-1	-7.34568E-1	-9.19516E0	-9.19018E0	4.36306E-3	9.5129E-2	2.73257E1	-3.26885E1	-3.2606E1	2.67986E1	1.19851E-7	2.51847E-3	2.51847E-3	6.32356E-3	2.98156E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09487E0	-7.56431E-1	-7.34591E-1	-9.19487E0	-9.18992E0	4.24385E-3	9.51529E-2	2.7334E1	-3.26354E1	-3.26443E1	2.68117E1	1.19913E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.00302E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.0941E0	-7.5655E-1	-7.34496E-1	-9.19473E0	-9.18996E0	4.07696E-3	9.51529E-2	2.73279E1	-3.26549E1	-3.26002E1	2.68526E1	1.19941E-7	2.52131E-3	2.52131E-3	6.29684E-3	2.99594E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09449E0	-7.5655E-1	-7.3483E-1	-9.19459E0	-9.19003E0	4.14848E-3	9.50575E-2	2.73582E1	-3.26225E1	-3.26614E1	2.6801E1	1.20244E-7	2.51915E-3	2.51915E-3	6.32978E-3	2.99083E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09356E0	-7.56335E-1	-7.34854E-1	-9.19473E0	-9.18996E0	4.45843E-3	9.50098E-2	2.72931E1	-3.26518E1	-3.265E1	2.68322E1	1.19953E-7	2.51739E-3	2.51739E-3	6.31278E-3	2.9841E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09441E0	-7.56598E-1	-7.3483E-1	-9.19502E0	-9.18992E0	4.33922E-3	9.44853E-2	2.73246E1	-3.26826E1	-3.25741E1	2.68279E1	1.20055E-7	2.52492E-3	2.52492E-3	6.32896E-3	2.98665E-1