[Scan]
initial_time=2016-01-18T23:37:02
final_time=2016-01-18T23:37:24
ip_count=19
run=1024
dataset=11
scan=866
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09418E0
qbias_imon=-1.08773E-4
ql1_vset=
ql1_vmon=-7.56621E-1
ql1_imon=1.41608E-8
ql2_vset=
ql2_vmon=-7.34568E-1
ql2_imon=1.99168E-9
ql3_vset=
ql3_vmon=-9.19473E0
ql3_imon=1.33693E-10
ql4_vset=
ql4_vmon=-9.18996E0
ql4_imon=-2.29919E-10
mult1=-8.88463E-9
mult2=-2.63703E-9
rf_tmon=-5.48281E-3
rf_agc=3.1799E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.86374E-3
ql5_imon=1.72403E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6415E0
bslens_imon=2.29622E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19737E1
lens5a_imon=2.00686E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12483E2
lens4a_imon=2.05125E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53875E1
cs_ef1b_imon=3.13695E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04602E2
lens23_imon=1.02071E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04231E1
cs_ea1_imon=1.0876E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41522E0
lens1_imon=2.73242E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64915E1
os_ef1alow_imon=2.9672E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04033E1
cs_ea2_imon=1.35004E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83992E1
cs_ef1a_imon=3.05586E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.17163E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11886E1
os_restr1_imon=4.29454E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14879E1
os_ea1_imon=2.42756E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63641E1
os_ef1bup_imon=3.06992E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22987E0
cs_ionrep_imon=9.46287E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91965E2
cs_nozzle_imon=1.93532E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01797E1
cs_anode1_imon=1.97071E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2043E0
olens4_imon=3.16067E-8
tplens_vset=1.4E-1
tplens_vmon=1.67087E0
tplens_imon=-5.01223E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26089E1
iondef3_imon=1.49604E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26437E1
iondef2_imon=1.57715E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02938E2
lens6_imon=2.98122E-4
ql6_vset=1.0E-1
ql6_vmon=9.48429E-2
ql6_imon=4.01543E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26111E0
ionrepsh_imon=8.58326E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33766E1
lens5b_imon=2.17305E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74567E1
cs_ef2b_imon=3.10884E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45878E0
os_ea2_imon=-6.38212E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06077E2
lens4b_imon=2.0067E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71306E1
cs_ef2a_imon=3.20038E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05156E0
os_ef2alow_imon=-2.44651E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.2145E-1
os_ef2bup_imon=-5.15309E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11292E1
os_restr2_imon=3.35283E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23039E2
cs_ionfoca_imon=6.27188E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01791E1
cs_anode2_imon=2.08459E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73647E1
iondef1_imon=1.1049E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68496E1
iondef4_imon=1.09674E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=4.74266E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81736E-1
olens1_imon=7.0909E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.09951E0
cs_ionaccel_imon=-8.39144E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02114E2
cs_ionfocb_imon=1.47327E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56249E1
einzel_imon=7.82119E-6
window_vset=0.0E0
window_vmon=2.28755E-1
window_imon=-8.46352E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8263E2
mask1_imon=2.39019E-4
mask2_vset=0.0E0
mask2_vmon=-1.86356E1
mask2_imon=-2.04846E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92639E3
multa_neg_imon=7.7397E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93693E3
defgrida_imon=6.66182E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50119E3
multb_neg_imon=6.9394E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.52788E0
defgridb_imon=6.18957E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33247E1
os_fil1_imon=9.41501E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06849E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6152E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31891E1
cs_fil1_imon=6.50613E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=8.91478E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63662E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.49243E-2
os_fil2_imon=-2.64795E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.00117E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.32225E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33277E-1
cs_fil2_imon=-2.47976E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.92058E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22071E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29098E-3
inlet_lpb_pmon=3.00041E-1
chamber_ion_pmon=1.20069E-7
chamber_cvt_pmon=2.52318E-3
foreline_cvt_pmon=2.52318E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.28368E-1
res40_imon=-2.44291E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=149
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09487E0	-7.56574E-1	-7.34735E-1	-9.1949E0	-9.19003E0	4.81606E-3	9.49383E-2	2.72898E1	-3.26337E1	-3.26461E1	2.68117E1	1.20278E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.01347E-1
2.0E0	2.7E1	0.0E0	3.16E2	1.6E2	-2.0951E0	-7.56454E-1	-7.34901E-1	-9.19499E0	-9.19015E0	4.69685E-3	9.47952E-2	2.7332E1	-3.26823E1	-3.26303E1	2.68712E1	1.19902E-7	2.51847E-3	2.51847E-3	6.32356E-3	2.9943E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09487E0	-7.56431E-1	-7.3483E-1	-9.19504E0	-9.19018E0	4.31538E-3	9.47237E-2	2.73163E1	-3.26685E1	-3.26408E1	2.68175E1	1.20297E-7	2.51581E-3	2.51581E-3	6.34661E-3	3.02277E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-2.09565E0	-7.56407E-1	-7.34591E-1	-9.19468E0	-9.18999E0	4.36306E-3	9.45568E-2	2.73375E1	-3.26376E1	-3.26011E1	2.68209E1	1.20209E-7	2.51954E-3	2.51954E-3	6.3074E-3	3.00197E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09565E0	-7.56574E-1	-7.34925E-1	-9.19454E0	-9.18989E0	4.50611E-3	9.52482E-2	2.73369E1	-3.26682E1	-3.2637E1	2.68641E1	1.19841E-7	2.51814E-3	2.51814E-3	6.29157E-3	3.02875E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09549E0	-7.56478E-1	-7.34496E-1	-9.19487E0	-9.18946E0	4.673E-3	9.4986E-2	2.73216E1	-3.26685E1	-3.26343E1	2.68046E1	1.20297E-7	2.51804E-3	2.51804E-3	6.32418E-3	2.99613E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09449E0	-7.56431E-1	-7.34758E-1	-9.19468E0	-9.1898E0	4.52995E-3	9.48429E-2	2.73069E1	-3.26597E1	-3.25912E1	2.68076E1	1.19953E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.00197E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09487E0	-7.56359E-1	-7.34806E-1	-9.19466E0	-9.18958E0	4.48227E-3	9.47237E-2	2.73207E1	-3.26579E1	-3.26621E1	2.6816E1	1.20278E-7	2.52099E-3	2.52099E-3	6.31837E-3	2.9952E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09495E0	-7.56502E-1	-7.34925E-1	-9.19502E0	-9.18977E0	4.22001E-3	9.50336E-2	2.7351E1	-3.26695E1	-3.25979E1	2.68768E1	1.20122E-7	2.52209E-3	2.52209E-3	6.30192E-3	3.00824E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0958E0	-7.56097E-1	-7.34925E-1	-9.19495E0	-9.19001E0	4.52995E-3	9.48429E-2	2.73654E1	-3.26324E1	-3.26347E1	2.68325E1	1.19819E-7	2.51359E-3	2.51359E-3	6.32418E-3	2.98819E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09518E0	-7.56145E-1	-7.34591E-1	-9.19499E0	-9.19008E0	4.74453E-3	9.5129E-2	2.73253E1	-3.26768E1	-3.26383E1	2.68112E1	1.20106E-7	2.51847E-3	2.51847E-3	6.32356E-3	2.97394E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09449E0	-7.56001E-1	-7.3452E-1	-9.19502E0	-9.18956E0	4.64916E-3	9.50336E-2	2.73261E1	-3.26639E1	-3.26236E1	2.68514E1	1.19861E-7	2.5199E-3	2.5199E-3	6.29098E-3	2.96671E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09472E0	-7.55978E-1	-7.34615E-1	-9.1949E0	-9.18937E0	4.45843E-3	9.48191E-2	2.73234E1	-3.26773E1	-3.26408E1	2.67998E1	1.20017E-7	2.52647E-3	2.52647E-3	6.30192E-3	2.96929E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09464E0	-7.56216E-1	-7.34568E-1	-9.19468E0	-9.1898E0	4.45843E-3	9.47237E-2	2.73424E1	-3.26825E1	-3.265E1	2.68635E1	1.2026E-7	2.52061E-3	2.52061E-3	6.33436E-3	2.98665E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09426E0	-7.56407E-1	-7.34758E-1	-9.1948E0	-9.18965E0	4.29153E-3	9.45807E-2	2.73187E1	-3.2662E1	-3.26301E1	2.67804E1	1.19913E-7	2.51225E-3	2.51225E-3	6.30192E-3	3.00041E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09371E0	-7.56264E-1	-7.3483E-1	-9.19478E0	-9.18972E0	4.45843E-3	9.4533E-2	2.73159E1	-3.26687E1	-3.2608E1	2.68773E1	1.198E-7	2.51847E-3	2.51847E-3	6.29128E-3	3.0071E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09464E0	-7.56383E-1	-7.34806E-1	-9.1949E0	-9.18982E0	4.3869E-3	9.45568E-2	2.73328E1	-3.26372E1	-3.26284E1	2.68076E1	1.20174E-7	2.51443E-3	2.51443E-3	6.30192E-3	2.9952E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0948E0	-7.56216E-1	-7.34544E-1	-9.19468E0	-9.18989E0	4.3869E-3	9.47475E-2	2.73181E1	-3.26396E1	-3.26431E1	2.6858E1	1.2026E-7	2.51847E-3	2.51847E-3	6.30202E-3	2.99686E-1
2.2E1	2.0E0	0.0E0	8.89E2	6.17E2	-2.09433E0	-7.56383E-1	-7.3452E-1	-9.19487E0	-9.18975E0	4.673E-3	9.48906E-2	2.73502E1	-3.26699E1	-3.2608E1	2.68058E1	1.19953E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.00197E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09418E0	-7.56621E-1	-7.34568E-1	-9.19473E0	-9.18996E0	4.86374E-3	9.48429E-2	2.73647E1	-3.26437E1	-3.26089E1	2.68496E1	1.20069E-7	2.52318E-3	2.52318E-3	6.29098E-3	3.00041E-1