[Scan]
initial_time=2016-01-18T23:37:31
final_time=2016-01-18T23:37:53
ip_count=19
run=1024
dataset=11
scan=867
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09449E0
qbias_imon=-1.08774E-4
ql1_vset=
ql1_vmon=-7.56621E-1
ql1_imon=1.41441E-8
ql2_vset=
ql2_vmon=-7.34997E-1
ql2_imon=2.03266E-9
ql3_vset=
ql3_vmon=-9.19454E0
ql3_imon=8.79169E-11
ql4_vset=
ql4_vmon=-9.18984E0
ql4_imon=-2.61104E-10
mult1=-9.74039E-9
mult2=-2.77849E-9
rf_tmon=-4.40428E-3
rf_agc=3.37421E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.81606E-3
ql5_imon=1.73386E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68837E0
bslens_imon=2.39716E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19364E1
lens5a_imon=1.98956E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12487E2
lens4a_imon=2.05158E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53802E1
cs_ef1b_imon=3.16146E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04632E2
lens23_imon=1.02107E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04327E1
cs_ea1_imon=1.09517E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39419E0
lens1_imon=2.75044E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6471E1
os_ef1alow_imon=2.97261E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03756E1
cs_ea2_imon=1.35473E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84208E1
cs_ef1a_imon=3.03856E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=1.16532E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11334E1
os_restr1_imon=4.29635E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14969E1
os_ea1_imon=2.44234E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63779E1
os_ef1bup_imon=3.08613E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.19622E0
cs_ionrep_imon=9.47729E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91955E2
cs_nozzle_imon=1.93748E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01773E1
cs_anode1_imon=1.96062E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20453E0
olens4_imon=3.16395E-8
tplens_vset=1.4E-1
tplens_vmon=1.66967E0
tplens_imon=-4.0389E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26104E1
iondef3_imon=1.50325E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26272E1
iondef2_imon=1.5685E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02932E2
lens6_imon=2.9809E-4
ql6_vset=1.0E-1
ql6_vmon=9.50336E-2
ql6_imon=4.01566E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28274E0
ionrepsh_imon=8.57244E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33568E1
lens5b_imon=2.17377E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74633E1
cs_ef2b_imon=3.13659E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45938E0
os_ea2_imon=-6.99496E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0605E2
lens4b_imon=2.00507E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71084E1
cs_ef2a_imon=3.16903E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08579E0
os_ef2alow_imon=-2.4357E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.01028E-1
os_ef2bup_imon=-5.17471E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11213E1
os_restr2_imon=3.38238E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23019E2
cs_ionfoca_imon=6.28306E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01785E1
cs_anode2_imon=2.08675E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72973E1
iondef1_imon=1.11356E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67968E1
iondef4_imon=1.10431E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=4.7402E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82022E-1
olens1_imon=7.08867E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15477E0
cs_ionaccel_imon=-8.42748E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02085E2
cs_ionfocb_imon=1.47482E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56309E1
einzel_imon=7.81398E-6
window_vset=0.0E0
window_vmon=2.38366E-1
window_imon=-7.45441E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82634E2
mask1_imon=2.39124E-4
mask2_vset=0.0E0
mask2_vmon=-1.86488E1
mask2_imon=-5.7245E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92637E3
multa_neg_imon=7.51259E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93691E3
defgrida_imon=6.38784E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50123E3
multb_neg_imon=7.25303E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.35344E0
defgridb_imon=6.38424E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33277E1
os_fil1_imon=9.42186E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07786E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61353E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31832E1
cs_fil1_imon=6.90857E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.53346E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63575E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.49243E-2
os_fil2_imon=-2.47976E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.04922E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.4099E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29263E-1
cs_fil2_imon=-2.25752E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.43655E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21748E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=3.00824E-1
chamber_ion_pmon=1.20174E-7
chamber_cvt_pmon=2.51334E-3
foreline_cvt_pmon=2.51334E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.68903E-1
res40_imon=-2.32037E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09356E0	-7.56383E-1	-7.3483E-1	-9.19483E0	-9.18975E0	4.43459E-3	9.48906E-2	2.73196E1	-3.26254E1	-3.26474E1	2.6847E1	1.19913E-7	2.51225E-3	2.51225E-3	6.31837E-3	3.01085E-1
2.0E0	4.4E1	0.0E0	3.16E2	1.6E2	-2.09456E0	-7.56335E-1	-7.34735E-1	-9.19499E0	-9.18972E0	4.41074E-3	9.48191E-2	2.7302E1	-3.26713E1	-3.26021E1	2.682E1	1.20092E-7	2.51814E-3	2.51814E-3	6.29684E-3	3.00348E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09364E0	-7.56431E-1	-7.3483E-1	-9.19511E0	-9.18982E0	4.22001E-3	9.47714E-2	2.73607E1	-3.26544E1	-3.26671E1	2.68163E1	1.20191E-7	2.52027E-3	2.52027E-3	6.31299E-3	2.99348E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-2.09426E0	-7.5655E-1	-7.34758E-1	-9.19483E0	-9.19015E0	4.26769E-3	9.52244E-2	2.73231E1	-3.26609E1	-3.262E1	2.68749E1	1.19941E-7	2.52342E-3	2.52342E-3	6.31269E-3	2.98592E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09456E0	-7.56216E-1	-7.34997E-1	-9.19509E0	-9.19003E0	4.22001E-3	9.50813E-2	2.7326E1	-3.26834E1	-3.25849E1	2.67902E1	1.20122E-7	2.51443E-3	2.51443E-3	6.29098E-3	3.00563E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0941E0	-7.56359E-1	-7.34901E-1	-9.19511E0	-9.1903E0	4.07696E-3	9.52005E-2	2.73137E1	-3.26499E1	-3.26119E1	2.68779E1	1.20243E-7	2.52342E-3	2.52342E-3	6.32858E-3	3.00852E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0941E0	-7.56454E-1	-7.34925E-1	-9.19523E0	-9.19006E0	4.45843E-3	9.50098E-2	2.73183E1	-3.26741E1	-3.2632E1	2.6801E1	1.19925E-7	2.51581E-3	2.51581E-3	6.31299E-3	3.00144E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09449E0	-7.56764E-1	-7.34711E-1	-9.19511E0	-9.18987E0	4.57764E-3	9.49144E-2	2.73171E1	-3.26651E1	-3.26104E1	2.67986E1	1.19861E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.01871E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09464E0	-7.56669E-1	-7.34782E-1	-9.1948E0	-9.19003E0	4.26769E-3	9.48429E-2	2.7358E1	-3.26511E1	-3.26539E1	2.68569E1	1.19913E-7	2.51225E-3	2.51225E-3	6.3074E-3	2.9926E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09441E0	-7.56812E-1	-7.34925E-1	-9.19471E0	-9.18975E0	4.36306E-3	9.48906E-2	2.73351E1	-3.26578E1	-3.26591E1	2.68232E1	1.20177E-7	2.51783E-3	2.51783E-3	6.3126E-3	2.99014E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09518E0	-7.56526E-1	-7.34639E-1	-9.19492E0	-9.18965E0	4.48227E-3	9.4986E-2	2.73135E1	-3.26494E1	-3.26308E1	2.68076E1	1.19991E-7	2.51384E-3	2.51384E-3	6.3074E-3	2.9863E-1
1.5E1	0.0E0	1.0E0	6.06E2	4.11E2	-2.0948E0	-7.56741E-1	-7.34973E-1	-9.19461E0	-9.18982E0	4.52995E-3	9.52244E-2	2.733E1	-3.26127E1	-3.26335E1	2.68001E1	1.20004E-7	2.52276E-3	2.52276E-3	6.31817E-3	2.99941E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09456E0	-7.5655E-1	-7.34854E-1	-9.19449E0	-9.18999E0	4.41074E-3	9.50336E-2	2.73249E1	-3.27143E1	-3.26152E1	2.68635E1	1.19902E-7	2.51417E-3	2.51417E-3	6.29665E-3	2.98665E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09456E0	-7.56598E-1	-7.34901E-1	-9.19464E0	-9.18987E0	4.36306E-3	9.50336E-2	2.73201E1	-3.26356E1	-3.26452E1	2.68202E1	1.2026E-7	2.53139E-3	2.53139E-3	6.31278E-3	3.00197E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09472E0	-7.56359E-1	-7.34854E-1	-9.19476E0	-9.18968E0	4.43459E-3	9.48668E-2	2.73141E1	-3.26392E1	-3.2632E1	2.681E1	1.20017E-7	2.51552E-3	2.51552E-3	6.29098E-3	3.01347E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0948E0	-7.56264E-1	-7.35021E-1	-9.1949E0	-9.18989E0	4.57764E-3	9.52005E-2	2.73508E1	-3.26506E1	-3.26494E1	2.6828E1	1.20122E-7	2.52209E-3	2.52209E-3	6.32936E-3	3.01347E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09503E0	-7.56264E-1	-7.34997E-1	-9.1948E0	-9.18984E0	4.93526E-3	9.48191E-2	2.73183E1	-3.26825E1	-3.26326E1	2.68569E1	1.19913E-7	2.52428E-3	2.52428E-3	6.31288E-3	2.99E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09371E0	-7.56288E-1	-7.34878E-1	-9.19483E0	-9.18944E0	4.60148E-3	9.44614E-2	2.7285E1	-3.26832E1	-3.25688E1	2.67932E1	1.20017E-7	2.51552E-3	2.51552E-3	6.32386E-3	2.98481E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09449E0	-7.5624E-1	-7.35021E-1	-9.19461E0	-9.18949E0	4.60148E-3	9.48429E-2	2.73117E1	-3.26705E1	-3.2599E1	2.68466E1	1.19902E-7	2.51847E-3	2.51847E-3	6.35059E-3	2.99941E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09449E0	-7.56621E-1	-7.34997E-1	-9.19454E0	-9.18984E0	4.81606E-3	9.50336E-2	2.72973E1	-3.26272E1	-3.26104E1	2.67968E1	1.20174E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.00824E-1