[Scan]
initial_time=2016-01-18T23:38:01
final_time=2016-01-18T23:38:23
ip_count=19
run=1024
dataset=11
scan=868
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0948E0
qbias_imon=-1.08812E-4
ql1_vset=
ql1_vmon=-7.56264E-1
ql1_imon=1.41107E-8
ql2_vset=
ql2_vmon=-7.34711E-1
ql2_imon=2.06671E-9
ql3_vset=
ql3_vmon=-9.19504E0
ql3_imon=1.06621E-10
ql4_vset=
ql4_vmon=-9.1902E0
ql4_imon=-2.67828E-10
mult1=-9.93676E-9
mult2=-2.74873E-9
rf_tmon=-4.12014E-3
rf_agc=3.46423E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.43459E-3
ql5_imon=1.69586E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6881E0
bslens_imon=2.64223E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19743E1
lens5a_imon=1.98685E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12478E2
lens4a_imon=2.04861E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5376E1
cs_ef1b_imon=3.15605E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04641E2
lens23_imon=1.02117E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04517E1
cs_ea1_imon=1.10093E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36766E0
lens1_imon=2.65692E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64644E1
os_ef1alow_imon=2.97982E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0388E1
cs_ea2_imon=1.36207E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84376E1
cs_ef1a_imon=3.04253E-5
olens2_vset=9.7E-1
olens2_vmon=9.69839E-1
olens2_imon=1.16947E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11604E1
os_restr1_imon=4.29238E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15134E1
os_ea1_imon=2.43899E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63575E1
os_ef1bup_imon=3.08001E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22516E0
cs_ionrep_imon=9.55476E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9194E2
cs_nozzle_imon=1.93684E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01767E1
cs_anode1_imon=1.96134E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20415E0
olens4_imon=3.16358E-8
tplens_vset=1.4E-1
tplens_vmon=1.64572E0
tplens_imon=-1.63922E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2649E1
iondef3_imon=1.48769E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26779E1
iondef2_imon=1.56445E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02929E2
lens6_imon=2.98287E-4
ql6_vset=1.0E-1
ql6_vmon=9.48429E-2
ql6_imon=4.0194E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28944E0
ionrepsh_imon=8.48225E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3356E1
lens5b_imon=2.17307E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74249E1
cs_ef2b_imon=3.12974E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47799E0
os_ea2_imon=-6.48754E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06084E2
lens4b_imon=2.00689E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71342E1
cs_ef2a_imon=3.17119E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06537E0
os_ef2alow_imon=-2.25911E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.92619E-1
os_ef2bup_imon=-5.08101E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11208E1
os_restr2_imon=3.38851E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23061E2
cs_ionfoca_imon=6.2912E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01743E1
cs_anode2_imon=2.09468E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72951E1
iondef1_imon=1.0888E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68569E1
iondef4_imon=1.09314E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=4.71474E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81665E-1
olens1_imon=7.0992E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15537E0
cs_ionaccel_imon=-8.24728E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02063E2
cs_ionfocb_imon=1.47442E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56537E1
einzel_imon=7.79236E-6
window_vset=0.0E0
window_vmon=2.57587E-1
window_imon=-7.85084E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82657E2
mask1_imon=2.39178E-4
mask2_vset=0.0E0
mask2_vmon=-1.86296E1
mask2_imon=-5.9047E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92615E3
multa_neg_imon=7.44647E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93737E3
defgrida_imon=6.396E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50138E3
multb_neg_imon=7.23344E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.425E0
defgridb_imon=6.05075E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33246E1
os_fil1_imon=9.4197E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08561E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61421E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3185E1
cs_fil1_imon=7.10078E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.68362E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63548E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.47467E-2
os_fil2_imon=-2.43772E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.06724E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.31155E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28875E-1
cs_fil2_imon=-2.44973E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.45457E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21833E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.97901E-1
chamber_ion_pmon=1.19851E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.60493E-1
res40_imon=-2.44651E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=154
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09464E0	-7.56216E-1	-7.34925E-1	-9.19499E0	-9.18972E0	4.45843E-3	9.50575E-2	2.73269E1	-3.26413E1	-3.26443E1	2.68184E1	1.20244E-7	2.51804E-3	2.51804E-3	6.3074E-3	3.0041E-1
2.0E0	2.3E1	0.0E0	3.16E2	1.6E2	-2.09426E0	-7.56121E-1	-7.34949E-1	-9.19509E0	-9.18984E0	4.3869E-3	9.50336E-2	2.73231E1	-3.26573E1	-3.2638E1	2.6855E1	1.19902E-7	2.51954E-3	2.51954E-3	6.30202E-3	2.99686E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09394E0	-7.5655E-1	-7.34806E-1	-9.19516E0	-9.18989E0	4.52995E-3	9.48906E-2	2.72968E1	-3.26608E1	-3.26242E1	2.68178E1	1.20069E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.9978E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09487E0	-7.56383E-1	-7.35044E-1	-9.1948E0	-9.18987E0	4.50611E-3	9.51052E-2	2.7288E1	-3.26762E1	-3.26378E1	2.68308E1	1.20158E-7	2.52061E-3	2.52061E-3	6.33436E-3	3.01738E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09464E0	-7.56478E-1	-7.34997E-1	-9.19452E0	-9.18987E0	4.29153E-3	9.50336E-2	2.73658E1	-3.26404E1	-3.26488E1	2.68496E1	1.19902E-7	2.51739E-3	2.51739E-3	6.33436E-3	2.99941E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09541E0	-7.56407E-1	-7.34973E-1	-9.19476E0	-9.18992E0	4.64916E-3	9.48906E-2	2.73117E1	-3.26597E1	-3.26074E1	2.68046E1	1.20226E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.9952E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09572E0	-7.56526E-1	-7.34901E-1	-9.19492E0	-9.19008E0	4.60148E-3	9.51052E-2	2.73499E1	-3.26543E1	-3.26296E1	2.68635E1	1.19809E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.98481E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09526E0	-7.5655E-1	-7.34878E-1	-9.19499E0	-9.19008E0	4.64916E-3	9.50575E-2	2.73394E1	-3.26535E1	-3.26404E1	2.68288E1	1.20106E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.99941E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09572E0	-7.56478E-1	-7.34878E-1	-9.19504E0	-9.18992E0	4.29153E-3	9.50575E-2	2.73128E1	-3.26384E1	-3.26455E1	2.68569E1	1.20154E-7	2.51498E-3	2.51498E-3	6.33021E-3	3.00522E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09572E0	-7.56001E-1	-7.34377E-1	-9.19511E0	-9.18992E0	4.41074E-3	9.48429E-2	2.73135E1	-3.26813E1	-3.26086E1	2.681E1	1.20106E-7	2.51632E-3	2.51632E-3	6.30202E-3	2.97901E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09642E0	-7.56311E-1	-7.34758E-1	-9.1948E0	-9.18999E0	4.41074E-3	9.50336E-2	2.73075E1	-3.26705E1	-3.26554E1	2.68556E1	1.19757E-7	2.51552E-3	2.51552E-3	6.31288E-3	2.96414E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0958E0	-7.56097E-1	-7.34735E-1	-9.19485E0	-9.19008E0	4.93526E-3	9.53197E-2	2.73505E1	-3.26496E1	-3.26756E1	2.68394E1	1.20435E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.97704E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09487E0	-7.56574E-1	-7.34711E-1	-9.19459E0	-9.18999E0	4.93526E-3	9.51052E-2	2.73526E1	-3.26434E1	-3.26591E1	2.68274E1	1.20158E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.99175E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09503E0	-7.56359E-1	-7.34401E-1	-9.19468E0	-9.19025E0	4.88758E-3	9.50336E-2	2.73405E1	-3.26537E1	-3.2626E1	2.68563E1	1.20069E-7	2.52318E-3	2.52318E-3	6.30192E-3	2.9978E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09526E0	-7.56478E-1	-7.34591E-1	-9.19483E0	-9.19001E0	4.64916E-3	9.50098E-2	2.734E1	-3.26897E1	-3.26309E1	2.68668E1	1.20158E-7	2.51632E-3	2.51632E-3	6.3074E-3	3.01223E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09487E0	-7.56383E-1	-7.34639E-1	-9.19497E0	-9.18972E0	4.57764E-3	9.46522E-2	2.73153E1	-3.26422E1	-3.26464E1	2.68334E1	1.20084E-7	2.52809E-3	2.52809E-3	6.31299E-3	3.01742E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09472E0	-7.56073E-1	-7.34639E-1	-9.19499E0	-9.18996E0	4.55379E-3	9.53197E-2	2.73275E1	-3.26708E1	-3.26266E1	2.68603E1	1.19965E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.00824E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09418E0	-7.56168E-1	-7.34496E-1	-9.19483E0	-9.1898E0	4.673E-3	9.49144E-2	2.73153E1	-3.26819E1	-3.26176E1	2.68208E1	1.19902E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.00966E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0948E0	-7.56121E-1	-7.34735E-1	-9.19476E0	-9.18994E0	4.76837E-3	9.51529E-2	2.73104E1	-3.26779E1	-3.26107E1	2.6795E1	1.19809E-7	2.51771E-3	2.51771E-3	6.28006E-3	2.9874E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0948E0	-7.56264E-1	-7.34711E-1	-9.19504E0	-9.1902E0	4.43459E-3	9.48429E-2	2.72951E1	-3.26779E1	-3.2649E1	2.68569E1	1.19851E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.97901E-1