[Scan]
initial_time=2016-01-18T23:39:00
final_time=2016-01-18T23:39:25
ip_count=19
run=1024
dataset=11
scan=870
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09418E0
qbias_imon=-1.0881E-4
ql1_vset=
ql1_vmon=-7.56073E-1
ql1_imon=1.41287E-8
ql2_vset=
ql2_vmon=-7.35211E-1
ql2_imon=2.02576E-9
ql3_vset=
ql3_vmon=-9.19459E0
ql3_imon=1.39964E-10
ql4_vset=
ql4_vmon=-9.18987E0
ql4_imon=-2.30849E-10
mult1=-9.87E-9
mult2=-2.7839E-9
rf_tmon=-3.67745E-3
rf_agc=3.31996E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.69685E-3
ql5_imon=1.72827E-9
bslens_vset=-6.2E0
bslens_vmon=-6.69984E0
bslens_imon=2.53618E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19736E1
lens5a_imon=2.00527E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12427E2
lens4a_imon=2.04835E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53905E1
cs_ef1b_imon=3.15929E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04627E2
lens23_imon=1.02362E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04434E1
cs_ea1_imon=1.10308E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40795E0
lens1_imon=2.72377E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64993E1
os_ef1alow_imon=2.9809E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03909E1
cs_ea2_imon=1.35968E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84226E1
cs_ef1a_imon=3.04433E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.16777E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1149E1
os_restr1_imon=4.29382E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1514E1
os_ea1_imon=2.45265E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63803E1
os_ef1bup_imon=3.08037E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.18898E0
cs_ionrep_imon=9.36016E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91927E2
cs_nozzle_imon=1.93629E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01695E1
cs_anode1_imon=1.96062E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20411E0
olens4_imon=3.16508E-8
tplens_vset=1.4E-1
tplens_vmon=1.69452E0
tplens_imon=-3.23663E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26317E1
iondef3_imon=1.51436E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2637E1
iondef2_imon=1.56214E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02934E2
lens6_imon=2.98275E-4
ql6_vset=1.0E-1
ql6_vmon=9.52244E-2
ql6_imon=4.12257E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27392E0
ionrepsh_imon=8.4293E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3374E1
lens5b_imon=2.17162E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74621E1
cs_ef2b_imon=3.14596E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44972E0
os_ea2_imon=-8.93508E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06076E2
lens4b_imon=2.00637E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71156E1
cs_ef2a_imon=3.15857E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04975E0
os_ef2alow_imon=-2.41408E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.9382E-1
os_ef2bup_imon=-5.14228E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11165E1
os_restr2_imon=3.38634E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23017E2
cs_ionfoca_imon=6.28512E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01521E1
cs_anode2_imon=2.09432E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73084E1
iondef1_imon=1.11688E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68363E1
iondef4_imon=1.10359E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=4.76925E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81998E-1
olens1_imon=7.11391E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15177E0
cs_ionaccel_imon=-8.5356E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02076E2
cs_ionfocb_imon=1.4745E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56363E1
einzel_imon=7.82479E-6
window_vset=0.0E0
window_vmon=2.63593E-1
window_imon=-6.66154E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82643E2
mask1_imon=2.39113E-4
mask2_vset=0.0E0
mask2_vmon=-1.865E1
mask2_imon=-4.13876E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92665E3
multa_neg_imon=7.29314E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9371E3
defgrida_imon=6.51094E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50117E3
multb_neg_imon=7.3427E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.47643E0
defgridb_imon=6.06497E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33239E1
os_fil1_imon=9.42432E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07455E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61329E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31859E1
cs_fil1_imon=7.05873E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.7557E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63645E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.49689E-2
os_fil2_imon=-2.57587E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.19338E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.35913E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29522E-1
cs_fil2_imon=-2.27554E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.52064E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21834E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32483E-3
inlet_lpb_pmon=2.99329E-1
chamber_ion_pmon=1.20198E-7
chamber_cvt_pmon=2.51671E-3
foreline_cvt_pmon=2.51671E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.06744E-1
res40_imon=-2.47534E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=221
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09433E0	-7.56526E-1	-7.34544E-1	-9.19471E0	-9.18965E0	4.62532E-3	9.51052E-2	2.73027E1	-3.26627E1	-3.26416E1	2.68472E1	1.19851E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.01738E-1
2.0E0	3.7E1	0.0E0	3.16E2	1.6E2	-2.09472E0	-7.56454E-1	-7.34711E-1	-9.19483E0	-9.1897E0	4.55379E-3	9.5129E-2	2.73075E1	-3.26738E1	-3.2645E1	2.68166E1	1.20226E-7	2.51771E-3	2.51771E-3	6.33486E-3	3.00563E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09456E0	-7.56478E-1	-7.34544E-1	-9.19487E0	-9.18994E0	4.57764E-3	9.51529E-2	2.73134E1	-3.26242E1	-3.26048E1	2.68286E1	1.20017E-7	2.51935E-3	2.51935E-3	6.29919E-3	3.02396E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09379E0	-7.56454E-1	-7.34591E-1	-9.19504E0	-9.18953E0	4.48227E-3	9.50813E-2	2.72958E1	-3.26955E1	-3.25669E1	2.68373E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09371E0	-7.56097E-1	-7.34997E-1	-9.19528E0	-9.18953E0	4.22001E-3	9.50813E-2	2.7322E1	-3.2657E1	-3.26472E1	2.68278E1	1.20127E-7	2.51265E-3	2.51265E-3	6.31779E-3	3.00989E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09464E0	-7.56001E-1	-7.35021E-1	-9.19523E0	-9.18958E0	4.55379E-3	9.53197E-2	2.73011E1	-3.26778E1	-3.26129E1	2.68499E1	1.19826E-7	2.52454E-3	2.52454E-3	6.31611E-3	3.00778E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09379E0	-7.56311E-1	-7.34639E-1	-9.19518E0	-9.18968E0	4.36306E-3	9.50098E-2	2.73279E1	-3.26687E1	-3.26338E1	2.68262E1	1.20293E-7	2.52025E-3	2.52025E-3	6.31269E-3	2.99845E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09379E0	-7.56168E-1	-7.34544E-1	-9.19509E0	-9.18963E0	4.76837E-3	9.47475E-2	2.7267E1	-3.27084E1	-3.25923E1	2.68387E1	1.2005E-7	2.51512E-3	2.51512E-3	6.32125E-3	2.96171E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0941E0	-7.56216E-1	-7.3483E-1	-9.19502E0	-9.18951E0	4.76837E-3	9.50813E-2	2.73304E1	-3.26513E1	-3.2626E1	2.68127E1					
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09387E0	-7.56216E-1	-7.34615E-1	-9.19502E0	-9.18946E0	4.62532E-3	9.47714E-2	2.72977E1	-3.26636E1	-3.26575E1	2.68453E1	1.20073E-7	2.51738E-3	2.51738E-3	6.31084E-3	2.95905E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09387E0	-7.55978E-1	-7.3452E-1	-9.19485E0	-9.18977E0	4.74453E-3	9.48191E-2	2.73267E1	-3.26898E1	-3.26228E1	2.68493E1	1.20048E-7	2.51557E-3	2.51557E-3	6.31036E-3	2.9628E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09487E0	-7.5624E-1	-7.34687E-1	-9.19485E0	-9.18975E0	4.45843E-3	9.47237E-2	2.73499E1	-3.26469E1	-3.26214E1	2.68209E1					
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09549E0	-7.56359E-1	-7.34806E-1	-9.19483E0	-9.18963E0	4.64916E-3	9.47952E-2	2.7309E1	-3.26922E1	-3.2619E1	2.68341E1	1.20159E-7	2.51357E-3	2.51357E-3	6.32858E-3	2.97427E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09379E0	-7.56431E-1	-7.34663E-1	-9.19449E0	-9.18994E0	4.86374E-3	9.47714E-2	2.73283E1	-3.26561E1	-3.26464E1	2.68262E1	1.20038E-7	2.5199E-3	2.5199E-3	6.29164E-3	3.00197E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09456E0	-7.56478E-1	-7.34711E-1	-9.19473E0	-9.18984E0	4.673E-3	9.50575E-2	2.73021E1	-3.266E1	-3.2634E1	2.6829E1	1.20097E-7	2.51867E-3	2.51867E-3	6.32592E-3	3.02317E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09464E0	-7.56359E-1	-7.34997E-1	-9.19485E0	-9.18996E0	4.43459E-3	9.47714E-2	2.73352E1	-3.26483E1	-3.26135E1	2.68235E1	1.20067E-7	2.51384E-3	2.51384E-3	6.30285E-3	3.01936E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09503E0	-7.56264E-1	-7.34472E-1	-9.19487E0	-9.19025E0	4.57764E-3	9.50098E-2	2.73323E1	-3.26769E1	-3.26268E1	2.68035E1	1.19971E-7	2.5154E-3	2.5154E-3	6.3074E-3	2.98392E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09449E0	-7.5624E-1	-7.34949E-1	-9.19476E0	-9.18992E0	4.22001E-3	9.51052E-2	2.73044E1	-3.26492E1	-3.26459E1	2.68802E1	1.19948E-7	2.51771E-3	2.51771E-3	6.32203E-3	2.97876E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09387E0	-7.56288E-1	-7.34925E-1	-9.19485E0	-9.19018E0	4.45843E-3	9.52721E-2	2.73516E1	-3.26523E1	-3.26326E1	2.68268E1	1.20019E-7	2.52029E-3	2.52029E-3	6.32518E-3	2.98512E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09418E0	-7.56073E-1	-7.35211E-1	-9.19459E0	-9.18987E0	4.69685E-3	9.52244E-2	2.73084E1	-3.2637E1	-3.26317E1	2.68363E1	1.20198E-7	2.51671E-3	2.51671E-3	6.32483E-3	2.99329E-1