[Scan]
initial_time=2016-01-18T23:39:34
final_time=2016-01-18T23:40:02
ip_count=19
run=1024
dataset=11
scan=871
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09371E0
qbias_imon=-1.08728E-4
ql1_vset=
ql1_vmon=-7.56454E-1
ql1_imon=1.41381E-8
ql2_vset=
ql2_vmon=-7.34735E-1
ql2_imon=1.9787E-9
ql3_vset=
ql3_vmon=-9.19485E0
ql3_imon=1.40166E-10
ql4_vset=
ql4_vmon=-9.18975E0
ql4_imon=-2.42913E-10
mult1=-9.54849E-9
mult2=-2.8158E-9
rf_tmon=-3.59992E-3
rf_agc=3.45073E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.29153E-3
ql5_imon=1.70978E-9
bslens_vset=-6.2E0
bslens_vmon=-6.69999E0
bslens_imon=2.3002E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19236E1
lens5a_imon=1.99478E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12473E2
lens4a_imon=2.05053E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53921E1
cs_ef1b_imon=3.16589E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04604E2
lens23_imon=1.02175E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04183E1
cs_ea1_imon=1.11341E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42123E0
lens1_imon=2.63919E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64832E1
os_ef1alow_imon=2.97531E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03601E1
cs_ea2_imon=1.34298E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84327E1
cs_ef1a_imon=3.0357E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=1.16813E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11448E1
os_restr1_imon=4.28023E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15143E1
os_ea1_imon=2.45426E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63546E1
os_ef1bup_imon=3.08268E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24203E0
cs_ionrep_imon=9.23774E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91879E2
cs_nozzle_imon=1.93769E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01882E1
cs_anode1_imon=1.96398E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2042E0
olens4_imon=3.15449E-8
tplens_vset=1.4E-1
tplens_vmon=1.70185E0
tplens_imon=-1.63352E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26412E1
iondef3_imon=1.48462E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26752E1
iondef2_imon=1.57088E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02968E2
lens6_imon=2.98074E-4
ql6_vset=1.0E-1
ql6_vmon=9.47714E-2
ql6_imon=4.01239E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24539E0
ionrepsh_imon=8.47921E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33903E1
lens5b_imon=2.18408E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7458E1
cs_ef2b_imon=3.13469E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44285E0
os_ea2_imon=-7.47355E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06048E2
lens4b_imon=2.00737E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71163E1
cs_ef2a_imon=3.15717E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.01933E0
os_ef2alow_imon=-2.4321E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.88103E-1
os_ef2bup_imon=-5.17012E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1119E1
os_restr2_imon=3.38332E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23065E2
cs_ionfoca_imon=6.28284E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01815E1
cs_anode2_imon=2.09283E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73051E1
iondef1_imon=1.07716E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68437E1
iondef4_imon=1.1107E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=4.74386E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81736E-1
olens1_imon=7.10577E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15475E0
cs_ionaccel_imon=-8.71828E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02061E2
cs_ionfocb_imon=1.47498E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56573E1
einzel_imon=7.75495E-6
window_vset=0.0E0
window_vmon=2.3646E-1
window_imon=-7.84587E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8266E2
mask1_imon=2.39195E-4
mask2_vset=0.0E0
mask2_vmon=-1.86394E1
mask2_imon=-5.2622E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92615E3
multa_neg_imon=7.7039E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.15663E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50135E3
multb_neg_imon=7.35148E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.52311E0
defgridb_imon=6.54261E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33255E1
os_fil1_imon=9.41016E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07642E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61317E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31829E1
cs_fil1_imon=7.27104E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.40173E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63385E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.52134E-2
os_fil2_imon=-2.31427E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.11488E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.45137E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31098E-1
cs_fil2_imon=-2.54915E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.71782E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21778E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29286E-3
inlet_lpb_pmon=3.01261E-1
chamber_ion_pmon=1.20118E-7
chamber_cvt_pmon=2.52151E-3
foreline_cvt_pmon=2.52151E-3
chamber_tmon=1.40059E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.25675E-1
res40_imon=-2.36163E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=244
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.09495E0	-7.56884E-1	-7.34925E-1	-9.19478E0	-9.18982E0	4.69685E-3	9.50098E-2	2.73145E1	-3.26223E1	-3.26218E1	2.68228E1	1.19956E-7	2.51423E-3	2.51423E-3	6.32247E-3	3.00054E-1
2.0E0	3.6E1	0.0E0	3.16E2	1.6E2	-2.09464E0	-7.56431E-1	-7.35474E-1	-9.1953E0	-9.18987E0	4.64916E-3	9.48668E-2	2.73397E1	-3.26546E1	-3.26353E1	2.68464E1	1.20072E-7	2.51764E-3	2.51764E-3	6.31225E-3	3.01261E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0948E0	-7.56145E-1	-7.35092E-1	-9.19497E0	-9.19015E0	4.64916E-3	9.49383E-2	2.72793E1	-3.26777E1	-3.25863E1	2.67699E1	1.1995E-7	2.52006E-3	2.52006E-3	6.31238E-3	3.00126E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.09426E0	-7.5624E-1	-7.34973E-1	-9.19518E0	-9.18968E0	4.76837E-3	9.52244E-2	2.73124E1	-3.26668E1	-3.26307E1	2.68563E1	1.19862E-7	2.51588E-3	2.51588E-3	6.32555E-3	2.99738E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09456E0	-7.56454E-1	-7.35235E-1	-9.19504E0	-9.18989E0	4.43459E-3	9.47714E-2	2.73476E1	-3.26716E1	-3.26159E1	2.68389E1	1.2015E-7	2.51355E-3	2.51355E-3	6.3074E-3	3.00697E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09426E0	-7.56621E-1	-7.35307E-1	-9.19502E0	-9.18975E0	4.76837E-3	9.46283E-2	2.73349E1	-3.26615E1	-3.26031E1	2.68091E1	1.20048E-7	2.51617E-3	2.51617E-3	6.31941E-3	3.00654E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09487E0	-7.56574E-1	-7.35044E-1	-9.19497E0	-9.18992E0	4.64916E-3	9.46283E-2	2.72947E1	-3.2685E1	-3.264E1	2.69111E1	1.20028E-7	2.51964E-3	2.51964E-3	6.34646E-3	3.00679E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09518E0	-7.56669E-1	-7.35092E-1	-9.19499E0	-9.18984E0	4.55379E-3	9.46522E-2	2.73408E1	-3.26541E1	-3.26211E1	2.68314E1	1.19843E-7	2.52267E-3	2.52267E-3	6.31574E-3	3.00118E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09487E0	-7.5655E-1	-7.35283E-1	-9.19492E0	-9.19011E0	4.57764E-3	9.48906E-2	2.73265E1	-3.2647E1	-3.26428E1	2.68114E1	1.20179E-7	2.51793E-3	2.51793E-3	6.31234E-3	2.9926E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09402E0	-7.56454E-1	-7.34758E-1	-9.19528E0	-9.18987E0	4.55379E-3	9.49621E-2	2.73136E1	-3.26038E1	-3.26264E1	2.68551E1	1.20238E-7	2.52014E-3	2.52014E-3	6.32592E-3	2.98267E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09495E0	-7.56669E-1	-7.34758E-1	-9.19499E0	-9.18989E0	4.55379E-3	9.49621E-2	2.72821E1	-3.26648E1	-3.2594E1	2.68132E1	1.19954E-7	2.51808E-3	2.51808E-3	6.30351E-3	3.00308E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09456E0	-7.56311E-1	-7.34591E-1	-9.19497E0	-9.1898E0	4.36306E-3	9.48906E-2	2.73122E1	-3.26833E1	-3.26002E1	2.68402E1	1.2016E-7	2.51352E-3	2.51352E-3	6.33246E-3	3.00912E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09464E0	-7.56407E-1	-7.34448E-1	-9.19485E0	-9.18989E0	4.14848E-3	9.49383E-2	2.73354E1	-3.26501E1	-3.2648E1	2.68731E1	1.2029E-7	2.51882E-3	2.51882E-3	6.31958E-3	3.01512E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09426E0	-7.56478E-1	-7.34711E-1	-9.1948E0	-9.18987E0	4.24385E-3	9.4986E-2	2.73129E1	-3.26528E1	-3.26472E1	2.68347E1	1.20196E-7	2.51736E-3	2.51736E-3	6.32652E-3	2.99562E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0941E0	-7.56383E-1	-7.34758E-1	-9.19492E0	-9.18961E0	4.55379E-3	9.47714E-2	2.72992E1	-3.26491E1	-3.26422E1	2.68087E1	1.19851E-7	2.51675E-3	2.51675E-3	6.32716E-3	2.97766E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0941E0	-7.56335E-1	-7.34735E-1	-9.19495E0	-9.18975E0	4.43459E-3	9.47952E-2	2.73251E1	-3.26503E1	-3.26314E1	2.68396E1	1.19876E-7	2.51872E-3	2.51872E-3	6.31182E-3	2.99399E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09394E0	-7.56288E-1	-7.34663E-1	-9.19483E0	-9.1897E0	4.64916E-3	9.50575E-2	2.73219E1	-3.26685E1	-3.26244E1	2.68382E1	1.2032E-7	2.51793E-3	2.51793E-3	6.31727E-3	3.01138E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0948E0	-7.56288E-1	-7.34949E-1	-9.19502E0	-9.1898E0	4.52995E-3	9.49144E-2	2.7315E1	-3.26717E1	-3.26637E1	2.67907E1	1.19948E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.02571E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09449E0	-7.56717E-1	-7.34639E-1	-9.19487E0	-9.19001E0	4.17233E-3	9.48906E-2	2.73475E1	-3.26689E1	-3.26129E1	2.68255E1	1.20207E-7	2.5207E-3	2.5207E-3	6.31344E-3	3.02332E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09371E0	-7.56454E-1	-7.34735E-1	-9.19485E0	-9.18975E0	4.29153E-3	9.47714E-2	2.73051E1	-3.26752E1	-3.26412E1	2.68437E1	1.20118E-7	2.52151E-3	2.52151E-3	6.29286E-3	3.01261E-1