[Scan]
initial_time=2016-01-18T23:40:40
final_time=2016-01-18T23:41:05
ip_count=19
run=1024
dataset=11
scan=873
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09549E0
qbias_imon=-1.08773E-4
ql1_vset=
ql1_vmon=-7.56764E-1
ql1_imon=1.4131E-8
ql2_vset=
ql2_vmon=-7.34925E-1
ql2_imon=2.00423E-9
ql3_vset=
ql3_vmon=-9.19497E0
ql3_imon=1.19698E-10
ql4_vset=
ql4_vmon=-9.18984E0
ql4_imon=-2.45667E-10
mult1=-9.88331E-9
mult2=-2.6773E-9
rf_tmon=-4.05397E-3
rf_agc=3.47055E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.41074E-3
ql5_imon=1.73939E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66024E0
bslens_imon=2.40975E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19435E1
lens5a_imon=1.98756E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12509E2
lens4a_imon=2.05343E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5385E1
cs_ef1b_imon=3.16351E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04612E2
lens23_imon=1.0215E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04446E1
cs_ea1_imon=1.10677E-5
lens1_vset=-5.0E0
lens1_vmon=-5.43107E0
lens1_imon=2.7544E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64743E1
os_ef1alow_imon=2.98025E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03499E1
cs_ea2_imon=1.34356E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84481E1
cs_ef1a_imon=3.04901E-5
olens2_vset=9.7E-1
olens2_vmon=9.69887E-1
olens2_imon=1.17353E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11318E1
os_restr1_imon=4.29292E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1505E1
os_ea1_imon=2.4538E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63506E1
os_ef1bup_imon=3.08275E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26274E0
cs_ionrep_imon=9.53585E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91924E2
cs_nozzle_imon=1.93513E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01875E1
cs_anode1_imon=1.97085E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20408E0
olens4_imon=3.1628E-8
tplens_vset=1.4E-1
tplens_vmon=1.69728E0
tplens_imon=-2.61346E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26345E1
iondef3_imon=1.49546E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26396E1
iondef2_imon=1.57014E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02927E2
lens6_imon=2.98094E-4
ql6_vset=1.0E-1
ql6_vmon=9.4676E-2
ql6_imon=4.01255E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27178E0
ionrepsh_imon=8.59443E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33625E1
lens5b_imon=2.19818E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74653E1
cs_ef2b_imon=3.13108E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47602E0
os_ea2_imon=-6.37916E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06082E2
lens4b_imon=2.00629E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71317E1
cs_ef2a_imon=3.16513E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05131E0
os_ef2alow_imon=-2.45805E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.97424E-1
os_ef2bup_imon=-5.09831E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11026E1
os_restr2_imon=3.38926E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23066E2
cs_ionfoca_imon=6.29386E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01702E1
cs_anode2_imon=2.09476E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73446E1
iondef1_imon=1.09943E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68494E1
iondef4_imon=1.10352E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=4.71547E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81164E-1
olens1_imon=7.10827E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13933E0
cs_ionaccel_imon=-7.94094E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02064E2
cs_ionfocb_imon=1.47482E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56486E1
einzel_imon=7.86299E-6
window_vset=0.0E0
window_vmon=2.48577E-1
window_imon=-8.03825E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82649E2
mask1_imon=2.39253E-4
mask2_vset=0.0E0
mask2_vmon=-1.86512E1
mask2_imon=-6.05967E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92619E3
multa_neg_imon=7.65619E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93707E3
defgrida_imon=6.65094E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50131E3
multb_neg_imon=7.22218E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.30961E0
defgridb_imon=6.19778E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33248E1
os_fil1_imon=9.41069E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08064E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61429E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3184E1
cs_fil1_imon=7.03951E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.5749E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6375E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.44063E-2
os_fil2_imon=-2.43171E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.09307E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.42727E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30468E-1
cs_fil2_imon=-2.08032E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.32542E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21777E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32134E-3
inlet_lpb_pmon=3.00032E-1
chamber_ion_pmon=1.20248E-7
chamber_cvt_pmon=2.52036E-3
foreline_cvt_pmon=2.52036E-3
chamber_tmon=1.40094E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.69874E-1
res40_imon=-2.4029E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=224
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.0941E0	-7.56454E-1	-7.34591E-1	-9.19526E0	-9.18994E0	4.57764E-3	9.50098E-2	2.73454E1	-3.26074E1	-3.2653E1	2.68322E1	1.1971E-7	2.51891E-3	2.51891E-3	6.32716E-3	2.99728E-1
2.0E0	4.7E1	0.0E0	3.16E2	1.6E2	-2.09441E0	-7.56502E-1	-7.34711E-1	-9.19528E0	-9.18965E0	4.43459E-3	9.50813E-2	2.7291E1	-3.26774E1	-3.26181E1	2.67908E1	1.20017E-7	2.51334E-3	2.51334E-3	6.33486E-3	2.9978E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09533E0	-7.56335E-1	-7.34591E-1	-9.19487E0	-9.18982E0	4.26769E-3	9.47952E-2	2.73225E1	-3.2706E1	-3.25907E1	2.68644E1	1.19872E-7	2.51804E-3	2.51804E-3	6.32978E-3	2.99613E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09533E0	-7.56097E-1	-7.34854E-1	-9.1948E0	-9.18977E0	4.17233E-3	9.47714E-2	2.73087E1	-3.26663E1	-3.2623E1	2.68166E1	1.20293E-7	2.52025E-3	2.52025E-3	6.32328E-3	2.99093E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09603E0	-7.56264E-1	-7.34735E-1	-9.19466E0	-9.18987E0	4.33922E-3	9.47952E-2	2.73171E1	-3.26446E1	-3.26464E1	2.68286E1	1.20122E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.01085E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09456E0	-7.5624E-1	-7.34663E-1	-9.19499E0	-9.18999E0	4.57764E-3	9.44614E-2	2.72919E1	-3.26603E1	-3.26176E1	2.6816E1	1.19697E-7	2.51847E-3	2.51847E-3	6.3074E-3	3.01223E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09394E0	-7.56264E-1	-7.34925E-1	-9.19483E0	-9.18977E0	4.76837E-3	9.4676E-2	2.7285E1	-3.26779E1	-3.25711E1	2.68743E1	1.19913E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.00563E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09379E0	-7.56359E-1	-7.34973E-1	-9.19487E0	-9.18972E0	4.81606E-3	9.48191E-2	2.73141E1	-3.26152E1	-3.26188E1	2.67986E1	1.19646E-7	2.51203E-3	2.51203E-3	6.31817E-3	3.01995E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09449E0	-7.5624E-1	-7.34854E-1	-9.1948E0	-9.18987E0	4.48227E-3	9.51529E-2	2.72964E1	-3.26574E1	-3.26033E1	2.68455E1	1.19809E-7	2.52318E-3	2.52318E-3	6.3074E-3	2.9978E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09356E0	-7.56621E-1	-7.3514E-1	-9.19487E0	-9.18984E0	4.48227E-3	9.47952E-2	2.7333E1	-3.26215E1	-3.26007E1	2.68659E1	1.19956E-7	2.51523E-3	2.51523E-3	6.33253E-3	3.00293E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09394E0	-7.56288E-1	-7.35044E-1	-9.19471E0	-9.18984E0	4.673E-3	9.4676E-2	2.73263E1	-3.26773E1	-3.26113E1	2.68441E1	1.20019E-7	2.51793E-3	2.51793E-3	6.27788E-3	2.99353E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09472E0	-7.56598E-1	-7.35116E-1	-9.19499E0	-9.18968E0	4.45843E-3	9.48429E-2	2.73265E1	-3.26548E1	-3.26327E1	2.67914E1	1.20158E-7	2.51739E-3	2.51739E-3	6.32896E-3	2.97901E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09433E0	-7.56097E-1	-7.35211E-1	-9.1948E0	-9.19006E0	4.31538E-3	9.4676E-2	2.73282E1	-3.26558E1	-3.2628E1	2.68403E1	1.20017E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.00302E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09503E0	-7.56168E-1	-7.34472E-1	-9.19483E0	-9.18984E0	4.43459E-3	9.50336E-2	2.73105E1	-3.26458E1	-3.2635E1	2.67878E1	1.19933E-7	2.51682E-3	2.51682E-3	6.31357E-3	3.01167E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09495E0	-7.56383E-1	-7.3452E-1	-9.19485E0	-9.1897E0	4.48227E-3	9.4533E-2	2.73141E1	-3.26476E1	-3.26427E1	2.68487E1	1.20158E-7	2.51632E-3	2.51632E-3	6.32356E-3	2.9943E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09495E0	-7.56598E-1	-7.34615E-1	-9.19492E0	-9.18977E0	4.62532E-3	9.49144E-2	2.73169E1	-3.26644E1	-3.25948E1	2.68049E1	1.20109E-7	2.52565E-3	2.52565E-3	6.31563E-3	2.99455E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09495E0	-7.56359E-1	-7.34615E-1	-9.19518E0	-9.18992E0	4.31538E-3	9.4986E-2	2.73233E1	-3.26767E1	-3.26224E1	2.68218E1	1.20128E-7	2.52169E-3	2.52169E-3	6.32665E-3	3.0115E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09526E0	-7.56502E-1	-7.34997E-1	-9.19504E0	-9.18972E0	4.26769E-3	9.48668E-2	2.73172E1	-3.26604E1	-3.2605E1	2.68692E1	1.20151E-7	2.52102E-3	2.52102E-3	6.3175E-3	2.99845E-1
2.2E1	2.0E0	0.0E0	8.89E2	6.17E2	-2.0948E0	-7.56741E-1	-7.34615E-1	-9.19511E0	-9.18972E0	4.31538E-3	9.49383E-2	2.73116E1	-3.26993E1	-3.26065E1	2.6815E1	1.19895E-7	2.51758E-3	2.51758E-3	6.31902E-3	3.00087E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09549E0	-7.56764E-1	-7.34925E-1	-9.19497E0	-9.18984E0	4.41074E-3	9.4676E-2	2.73446E1	-3.26396E1	-3.26345E1	2.68494E1	1.20248E-7	2.52036E-3	2.52036E-3	6.32134E-3	3.00032E-1