[Scan]
initial_time=2016-01-18T23:43:11
final_time=2016-01-18T23:43:31
ip_count=19
run=1024
dataset=11
scan=878
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09472E0
qbias_imon=-1.08799E-4
ql1_vset=
ql1_vmon=-7.56049E-1
ql1_imon=1.4116E-8
ql2_vset=
ql2_vmon=-7.35307E-1
ql2_imon=2.055E-9
ql3_vset=
ql3_vmon=-9.19509E0
ql3_imon=1.33502E-10
ql4_vset=
ql4_vmon=-9.18994E0
ql4_imon=-2.54428E-10
mult1=-9.25877E-9
mult2=-2.73059E-9
rf_tmon=-5.53383E-3
rf_agc=3.28229E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.72069E-3
ql5_imon=1.69084E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65532E0
bslens_imon=2.47647E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19352E1
lens5a_imon=1.97838E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12472E2
lens4a_imon=2.05179E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54037E1
cs_ef1b_imon=3.14308E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04641E2
lens23_imon=1.02139E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04676E1
cs_ea1_imon=1.10887E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38698E0
lens1_imon=2.89464E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64825E1
os_ef1alow_imon=2.99351E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03636E1
cs_ea2_imon=1.35329E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84574E1
cs_ef1a_imon=3.04397E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=1.16816E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11478E1
os_restr1_imon=4.29418E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15264E1
os_ea1_imon=2.43838E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63749E1
os_ef1bup_imon=3.08037E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23047E0
cs_ionrep_imon=9.40158E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91937E2
cs_nozzle_imon=1.93636E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01911E1
cs_anode1_imon=1.96242E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20384E0
olens4_imon=3.15612E-8
tplens_vset=1.4E-1
tplens_vmon=1.66727E0
tplens_imon=-2.09222E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26585E1
iondef3_imon=1.50073E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26326E1
iondef2_imon=1.55913E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02938E2
lens6_imon=2.98241E-4
ql6_vset=1.0E-1
ql6_vmon=9.5129E-2
ql6_imon=4.00492E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27433E0
ionrepsh_imon=8.41022E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33387E1
lens5b_imon=2.17197E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74561E1
cs_ef2b_imon=3.12506E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42994E0
os_ea2_imon=-5.80532E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06065E2
lens4b_imon=2.00497E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71348E1
cs_ef2a_imon=3.17515E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04315E0
os_ef2alow_imon=-2.41047E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.81807E-1
os_ef2bup_imon=-5.04858E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11232E1
os_restr2_imon=3.37517E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23035E2
cs_ionfoca_imon=6.2982E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01869E1
cs_anode2_imon=2.08531E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73297E1
iondef1_imon=1.10418E-5
iondef4_vset=2.691E1
iondef4_vmon=2.69998E1
iondef4_imon=1.0899E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=4.72772E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81259E-1
olens1_imon=7.08597E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14636E0
cs_ionaccel_imon=-7.31025E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02081E2
cs_ionfocb_imon=1.47334E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56453E1
einzel_imon=7.78875E-6
window_vset=0.0E0
window_vmon=2.43772E-1
window_imon=-8.96807E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82666E2
mask1_imon=2.39394E-4
mask2_vset=0.0E0
mask2_vmon=-1.86314E1
mask2_imon=-6.48134E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92655E3
multa_neg_imon=7.51619E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93708E3
defgrida_imon=6.51041E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50133E3
multb_neg_imon=7.33234E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.48878E0
defgridb_imon=5.95525E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33241E1
os_fil1_imon=9.42102E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07437E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61337E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31835E1
cs_fil1_imon=7.90567E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.32923E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63313E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.45374E-2
os_fil2_imon=-2.49178E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.07925E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.55942E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3004E-1
cs_fil2_imon=-2.40168E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.47259E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21864E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=3.00824E-1
chamber_ion_pmon=1.20017E-7
chamber_cvt_pmon=2.51007E-3
foreline_cvt_pmon=2.51007E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.17556E-1
res40_imon=-2.4357E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=216
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09541E0	-7.56168E-1	-7.34854E-1	-9.19492E0	-9.18982E0	4.33922E-3	9.50098E-2	2.73198E1	-3.26456E1	-3.26321E1	2.66436E1	1.20226E-7	2.51771E-3	2.51771E-3	6.32936E-3	2.9926E-1
2.0E0	3.6E1	0.0E0	3.16E2	1.6E2	-2.09503E0	-7.56145E-1	-7.34687E-1	-9.19487E0	-9.19011E0	4.72069E-3	9.50575E-2	2.73195E1	-3.26603E1	-3.26494E1	2.68319E1	1.19861E-7	2.52318E-3	2.52318E-3	6.3074E-3	2.9952E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0948E0	-7.56335E-1	-7.34901E-1	-9.19504E0	-9.18984E0	4.52995E-3	9.52005E-2	2.73311E1	-3.26384E1	-3.26307E1	2.69304E1	1.19913E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.9952E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09418E0	-7.55954E-1	-7.34806E-1	-9.19518E0	-9.1903E0	4.91142E-3	9.51529E-2	2.73323E1	-3.26631E1	-3.26144E1	2.67358E1	1.20158E-7	2.52169E-3	2.52169E-3	6.29665E-3	3.0148E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09456E0	-7.56145E-1	-7.34496E-1	-9.19523E0	-9.18992E0	4.673E-3	9.50575E-2	2.73027E1	-3.26711E1	-3.26206E1	2.6658E1	1.20055E-7	2.51739E-3	2.51739E-3	6.34518E-3	2.9943E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09402E0	-7.56192E-1	-7.34901E-1	-9.19497E0	-9.18989E0	4.62532E-3	9.52959E-2	2.73243E1	-3.26843E1	-3.26116E1	2.68106E1	1.19953E-7	2.52384E-3	2.52384E-3	6.29665E-3	3.00197E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09348E0	-7.5624E-1	-7.34639E-1	-9.19504E0	-9.19032E0	4.52995E-3	9.53913E-2	2.73357E1	-3.26639E1	-3.25966E1	2.68683E1	1.20174E-7	2.51334E-3	2.51334E-3	6.31837E-3	2.9874E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09456E0	-7.56359E-1	-7.34663E-1	-9.1949E0	-9.18996E0	4.48227E-3	9.48906E-2	2.73099E1	-3.26488E1	-3.25906E1	2.67734E1	1.20226E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.9874E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09472E0	-7.56335E-1	-7.35021E-1	-9.19514E0	-9.19003E0	4.02927E-3	9.51052E-2	2.73131E1	-3.26652E1	-3.26395E1	2.68292E1	1.20226E-7	2.5188E-3	2.5188E-3	6.3074E-3	2.99E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09472E0	-7.56216E-1	-7.34854E-1	-9.1948E0	-9.19003E0	4.00543E-3	9.53436E-2	2.73523E1	-3.26738E1	-3.26018E1	2.69494E1	1.20137E-7	2.51359E-3	2.51359E-3	6.30182E-3	3.0041E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09356E0	-7.56192E-1	-7.34735E-1	-9.19499E0	-9.19023E0	4.24385E-3	9.50098E-2	2.73273E1	-3.2644E1	-3.26338E1	2.68875E1	1.19749E-7	2.52384E-3	2.52384E-3	6.28592E-3	2.99686E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09371E0	-7.56311E-1	-7.34782E-1	-9.19521E0	-9.19013E0	4.17233E-3	9.48668E-2	2.73219E1	-3.26458E1	-3.26104E1	2.67583E1	1.19861E-7	2.51552E-3	2.51552E-3	6.28552E-3	3.00824E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09379E0	-7.56478E-1	-7.35021E-1	-9.19485E0	-9.19037E0	4.48227E-3	9.49144E-2	2.73423E1	-3.26455E1	-3.26543E1	2.68701E1	1.20174E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.03185E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09371E0	-7.56192E-1	-7.3483E-1	-9.1949E0	-9.19018E0	4.48227E-3	9.48191E-2	2.73596E1	-3.26933E1	-3.25899E1	2.68232E1	1.20158E-7	2.51096E-3	2.51096E-3	6.29128E-3	3.04063E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09371E0	-7.56407E-1	-7.34782E-1	-9.19487E0	-9.18994E0	4.3869E-3	9.47475E-2	2.73423E1	-3.26484E1	-3.26425E1	2.69013E1	1.20084E-7	2.51693E-3	2.51693E-3	6.31299E-3	2.99348E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09402E0	-7.56359E-1	-7.34878E-1	-9.19509E0	-9.18996E0	4.31538E-3	9.50098E-2	2.72721E1	-3.25858E1	-3.26747E1	2.67049E1	1.20004E-7	2.5131E-3	2.5131E-3	6.31817E-3	2.9841E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09325E0	-7.56383E-1	-7.34854E-1	-9.19514E0	-9.18994E0	4.52995E-3	9.48429E-2	2.73234E1	-3.2662E1	-3.26408E1	2.70289E1	1.2033E-7	2.51334E-3	2.51334E-3	6.31837E-3	2.97187E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09309E0	-7.5624E-1	-7.34997E-1	-9.19495E0	-9.19025E0	4.36306E-3	9.48668E-2	2.73171E1	-3.26302E1	-3.26308E1	2.68935E1	1.19953E-7	2.51525E-3	2.51525E-3	6.33977E-3	2.98665E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09433E0	-7.56097E-1	-7.35021E-1	-9.19483E0	-9.18999E0	4.673E-3	9.49144E-2	2.73213E1	-3.26765E1	-3.26296E1	2.67704E1	1.20017E-7	2.5199E-3	2.5199E-3	6.29645E-3	3.00824E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09472E0	-7.56049E-1	-7.35307E-1	-9.19509E0	-9.18994E0	4.72069E-3	9.5129E-2	2.73297E1	-3.26326E1	-3.26585E1	2.69998E1	1.20017E-7	2.51007E-3	2.51007E-3	6.30192E-3	3.00824E-1