[Scan]
initial_time=2016-01-18T23:43:39
final_time=2016-01-18T23:44:00
ip_count=19
run=1024
dataset=11
scan=879
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09565E0
qbias_imon=-1.08815E-4
ql1_vset=
ql1_vmon=-7.56001E-1
ql1_imon=1.41649E-8
ql2_vset=
ql2_vmon=-7.34663E-1
ql2_imon=2.03257E-9
ql3_vset=
ql3_vmon=-9.19511E0
ql3_imon=7.89166E-11
ql4_vset=
ql4_vmon=-9.1902E0
ql4_imon=-2.65634E-10
mult1=-9.2511E-9
mult2=-2.74733E-9
rf_tmon=-4.17323E-3
rf_agc=3.37153E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.86374E-3
ql5_imon=1.68967E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65014E0
bslens_imon=2.62754E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19701E1
lens5a_imon=2.00558E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12461E2
lens4a_imon=2.04975E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5379E1
cs_ef1b_imon=3.13983E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04597E2
lens23_imon=1.02242E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.044E1
cs_ea1_imon=1.07852E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38603E0
lens1_imon=2.44756E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64698E1
os_ef1alow_imon=2.99387E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.038E1
cs_ea2_imon=1.36648E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84574E1
cs_ef1a_imon=3.04937E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=1.16933E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11183E1
os_restr1_imon=4.27977E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14798E1
os_ea1_imon=2.45735E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63653E1
os_ef1bup_imon=3.09082E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23373E0
cs_ionrep_imon=9.58782E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91965E2
cs_nozzle_imon=1.93662E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01941E1
cs_anode1_imon=1.94836E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20461E0
olens4_imon=3.16875E-8
tplens_vset=1.4E-1
tplens_vmon=1.67633E0
tplens_imon=-2.37382E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26332E1
iondef3_imon=1.51193E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26762E1
iondef2_imon=1.54829E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02944E2
lens6_imon=2.98199E-4
ql6_vset=1.0E-1
ql6_vmon=9.53197E-2
ql6_imon=4.02353E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28944E0
ionrepsh_imon=8.6659E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33915E1
lens5b_imon=2.17674E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74387E1
cs_ef2b_imon=3.14344E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.43146E0
os_ea2_imon=-7.03849E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06079E2
lens4b_imon=2.00579E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71492E1
cs_ef2a_imon=3.17551E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03534E0
os_ef2alow_imon=-2.57265E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.1184E-1
os_ef2bup_imon=-5.14228E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11189E1
os_restr2_imon=3.37121E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23043E2
cs_ionfoca_imon=6.28826E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02121E1
cs_anode2_imon=2.06765E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7308E1
iondef1_imon=1.11305E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67933E1
iondef4_imon=1.09891E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=4.72484E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81665E-1
olens1_imon=7.08773E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.0971E0
cs_ionaccel_imon=-9.50867E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02082E2
cs_ionfocb_imon=1.47601E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56417E1
einzel_imon=7.63018E-6
window_vset=0.0E0
window_vmon=2.76808E-1
window_imon=-6.84173E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82684E2
mask1_imon=2.39253E-4
mask2_vset=0.0E0
mask2_vmon=-1.86014E1
mask2_imon=-7.56253E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92631E3
multa_neg_imon=7.52728E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93707E3
defgrida_imon=6.73024E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50136E3
multb_neg_imon=7.28486E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.45564E0
defgridb_imon=6.19766E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3324E1
os_fil1_imon=9.39969E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08242E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61507E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31823E1
cs_fil1_imon=7.43114E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.40131E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6353E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.51409E-2
os_fil2_imon=-2.37765E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.89906E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.24457E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32241E-1
cs_fil2_imon=-1.783E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.6708E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2191E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31357E-3
inlet_lpb_pmon=3.00873E-1
chamber_ion_pmon=1.20021E-7
chamber_cvt_pmon=2.51928E-3
foreline_cvt_pmon=2.51928E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.47879E-1
res40_imon=-2.20865E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=185
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09402E0	-7.56478E-1	-7.34854E-1	-9.19447E0	-9.1897E0	4.29153E-3	9.49144E-2	2.73293E1	-3.26803E1	-3.26012E1	2.68364E1	1.20278E-7	2.51662E-3	2.51662E-3	6.31288E-3	2.98481E-1
2.0E0	3.7E1	0.0E0	3.16E2	1.6E2	-2.09402E0	-7.56359E-1	-7.35164E-1	-9.19461E0	-9.18963E0	4.36306E-3	9.45807E-2	2.73167E1	-3.26425E1	-3.26334E1	2.67235E1	1.19902E-7	2.51954E-3	2.51954E-3	6.31278E-3	2.9714E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0941E0	-7.56454E-1	-7.35092E-1	-9.19466E0	-9.19011E0	4.33922E-3	9.4676E-2	2.73246E1	-3.26797E1	-3.26313E1	2.68629E1	1.19925E-7	2.51804E-3	2.51804E-3	6.34099E-3	3.00676E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09418E0	-7.56216E-1	-7.35068E-1	-9.19487E0	-9.18994E0	4.31538E-3	9.47952E-2	2.73329E1	-3.26614E1	-3.26347E1	2.68528E1	1.20055E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.01995E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09503E0	-7.56216E-1	-7.3483E-1	-9.19476E0	-9.18989E0	4.33922E-3	9.47237E-2	2.73204E1	-3.26468E1	-3.26627E1	2.67049E1	1.20106E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.99686E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09526E0	-7.56168E-1	-7.34758E-1	-9.19499E0	-9.18977E0	4.50611E-3	9.46283E-2	2.73145E1	-3.26697E1	-3.26083E1	2.68737E1	1.20017E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.00041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09526E0	-7.56097E-1	-7.34854E-1	-9.19468E0	-9.18989E0	4.45843E-3	9.48429E-2	2.73259E1	-3.26193E1	-3.26021E1	2.6813E1	1.19861E-7	2.52538E-3	2.52538E-3	6.28006E-3	3.00302E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09603E0	-7.56407E-1	-7.34735E-1	-9.19492E0	-9.18987E0	4.24385E-3	9.48191E-2	2.73157E1	-3.2662E1	-3.25924E1	2.6889E1	1.20017E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.01347E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0951E0	-7.56288E-1	-7.34806E-1	-9.19492E0	-9.18968E0	4.31538E-3	9.48429E-2	2.72927E1	-3.26691E1	-3.26166E1	2.68831E1	1.20055E-7	2.51739E-3	2.51739E-3	6.32896E-3	3.0071E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09572E0	-7.56145E-1	-7.34806E-1	-9.1949E0	-9.18996E0	4.3869E-3	9.47714E-2	2.72985E1	-3.26206E1	-3.2638E1	2.66478E1	1.20174E-7	2.51443E-3	2.51443E-3	6.32936E-3	3.01347E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09565E0	-7.56121E-1	-7.34997E-1	-9.19497E0	-9.19001E0	4.57764E-3	9.47952E-2	2.73541E1	-3.26223E1	-3.2593E1	2.69085E1	1.20158E-7	2.52061E-3	2.52061E-3	6.29128E-3	2.99686E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09588E0	-7.56192E-1	-7.34949E-1	-9.19483E0	-9.18992E0	4.33922E-3	9.50098E-2	2.73442E1	-3.26585E1	-3.26314E1	2.68163E1	1.19925E-7	2.5147E-3	2.5147E-3	6.36912E-3	2.99083E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0951E0	-7.55954E-1	-7.34925E-1	-9.19471E0	-9.18989E0	4.50611E-3	9.51052E-2	2.73393E1	-3.26741E1	-3.26224E1	2.67499E1	1.19861E-7	2.51334E-3	2.51334E-3	6.32936E-3	2.9952E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09541E0	-7.56192E-1	-7.35021E-1	-9.19487E0	-9.18996E0	4.48227E-3	9.50336E-2	2.73099E1	-3.26729E1	-3.26651E1	2.69304E1	1.19965E-7	2.51443E-3	2.51443E-3	6.34588E-3	2.9978E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09495E0	-7.5624E-1	-7.3483E-1	-9.19483E0	-9.18982E0	4.48227E-3	9.4986E-2	2.73466E1	-3.26741E1	-3.26476E1	2.68316E1	1.19601E-7	2.52209E-3	2.52209E-3	6.31837E-3	2.9978E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09487E0	-7.56097E-1	-7.34615E-1	-9.1949E0	-9.1898E0	4.62532E-3	9.4676E-2	2.73574E1	-3.26476E1	-3.25545E1	2.68319E1	1.19809E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.9952E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09487E0	-7.56121E-1	-7.34782E-1	-9.19521E0	-9.18996E0	4.69685E-3	9.50575E-2	2.73339E1	-3.26188E1	-3.26302E1	2.68635E1	1.19757E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00563E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0948E0	-7.56145E-1	-7.34758E-1	-9.19523E0	-9.18977E0	4.52995E-3	9.48191E-2	2.7321E1	-3.26472E1	-3.26378E1	2.68076E1	1.19913E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.00824E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09503E0	-7.56001E-1	-7.3483E-1	-9.19509E0	-9.19013E0	4.24385E-3	9.52482E-2	2.73203E1	-3.26284E1	-3.26213E1	2.68643E1	1.20004E-7	2.51632E-3	2.51632E-3	6.31817E-3	2.99941E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09565E0	-7.56001E-1	-7.34663E-1	-9.19511E0	-9.1902E0	4.86374E-3	9.53197E-2	2.7308E1	-3.26762E1	-3.26332E1	2.67933E1	1.20021E-7	2.51928E-3	2.51928E-3	6.31357E-3	3.00873E-1