[Scan]
initial_time=2016-01-18T23:44:07
final_time=2016-01-18T23:44:27
ip_count=19
run=1024
dataset=11
scan=880
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09426E0
qbias_imon=-1.08826E-4
ql1_vset=
ql1_vmon=-7.56669E-1
ql1_imon=1.41635E-8
ql2_vset=
ql2_vmon=-7.35021E-1
ql2_imon=2.03009E-9
ql3_vset=
ql3_vmon=-9.19499E0
ql3_imon=1.15299E-10
ql4_vset=
ql4_vmon=-9.18984E0
ql4_imon=-2.42305E-10
mult1=-9.90129E-9
mult2=-2.8918E-9
rf_tmon=-3.35917E-3
rf_agc=3.45243E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.02927E-3
ql5_imon=1.70296E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65172E0
bslens_imon=2.49089E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19755E1
lens5a_imon=2.00614E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12477E2
lens4a_imon=2.051E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53784E1
cs_ef1b_imon=3.15533E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04595E2
lens23_imon=1.02175E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0488E1
cs_ea1_imon=1.10202E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41582E0
lens1_imon=2.75765E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65017E1
os_ef1alow_imon=2.98162E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03798E1
cs_ea2_imon=1.34752E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8431E1
cs_ef1a_imon=3.0519E-5
olens2_vset=9.7E-1
olens2_vmon=9.70006E-1
olens2_imon=1.16995E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1161E1
os_restr1_imon=4.28013E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15468E1
os_ea1_imon=2.46577E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63659E1
os_ef1bup_imon=3.09623E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24068E0
cs_ionrep_imon=9.50252E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91935E2
cs_nozzle_imon=1.93517E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01773E1
cs_anode1_imon=1.95593E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20427E0
olens4_imon=3.16818E-8
tplens_vset=1.4E-1
tplens_vmon=1.6204E0
tplens_imon=-2.09222E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25859E1
iondef3_imon=1.50866E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26585E1
iondef2_imon=1.56958E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02927E2
lens6_imon=2.98357E-4
ql6_vset=1.0E-1
ql6_vmon=9.48191E-2
ql6_imon=4.04745E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.32239E0
ionrepsh_imon=8.64815E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3376E1
lens5b_imon=2.16765E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74796E1
cs_ef2b_imon=3.13911E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.40291E0
os_ea2_imon=-8.43694E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06086E2
lens4b_imon=2.00713E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71216E1
cs_ef2a_imon=3.17263E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03474E0
os_ef2alow_imon=-2.50057E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.79404E-1
os_ef2bup_imon=-5.09903E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11099E1
os_restr2_imon=3.38346E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23064E2
cs_ionfoca_imon=6.28522E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01791E1
cs_anode2_imon=2.07955E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73322E1
iondef1_imon=1.12437E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68154E1
iondef4_imon=1.11224E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=4.75589E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81402E-1
olens1_imon=7.09187E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14336E0
cs_ionaccel_imon=-9.32847E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02056E2
cs_ionfocb_imon=1.47482E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56309E1
einzel_imon=7.85723E-6
window_vset=0.0E0
window_vmon=2.61792E-1
window_imon=-7.95896E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82649E2
mask1_imon=2.39185E-4
mask2_vset=0.0E0
mask2_vmon=-1.86446E1
mask2_imon=-7.63461E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92654E3
multa_neg_imon=7.61713E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93739E3
defgrida_imon=6.73031E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50139E3
multb_neg_imon=7.01871E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39856E0
defgridb_imon=6.12468E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33272E1
os_fil1_imon=9.42678E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0769E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61243E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31861E1
cs_fil1_imon=6.73438E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.53946E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63498E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.6343E-2
os_fil2_imon=-2.37164E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.09127E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.38025E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31464E-1
cs_fil2_imon=-2.17943E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.20229E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21834E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29098E-3
inlet_lpb_pmon=2.9952E-1
chamber_ion_pmon=1.20069E-7
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.52685E-1
res40_imon=-2.42849E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09541E0	-7.56073E-1	-7.34711E-1	-9.19499E0	-9.18987E0	4.22001E-3	9.50098E-2	2.73423E1	-3.26938E1	-3.26413E1	2.68989E1	1.19757E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.9952E-1
2.0E0	4.0E1	0.0E0	3.16E2	1.6E2	-2.09611E0	-7.56454E-1	-7.34782E-1	-9.1948E0	-9.19003E0	4.45843E-3	9.48429E-2	2.73369E1	-3.26309E1	-3.26113E1	2.68334E1	1.19851E-7	2.51954E-3	2.51954E-3	6.31278E-3	2.99686E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09572E0	-7.5624E-1	-7.34806E-1	-9.19497E0	-9.19039E0	4.48227E-3	9.46999E-2	2.73057E1	-3.26644E1	-3.2639E1	2.68209E1	1.19819E-7	2.51915E-3	2.51915E-3	6.30182E-3	2.99613E-1
4.0E0	8.0E0	0.0E0	6.55E2	3.98E2	-2.09472E0	-7.56621E-1	-7.34687E-1	-9.19476E0	-9.19049E0	4.57764E-3	9.47952E-2	2.73163E1	-3.26661E1	-3.2626E1	2.68623E1	1.20055E-7	2.52169E-3	2.52169E-3	6.30202E-3	2.98156E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09441E0	-7.56669E-1	-7.34806E-1	-9.1949E0	-9.18994E0	4.55379E-3	9.48429E-2	2.73129E1	-3.26759E1	-3.26188E1	2.68418E1	1.20055E-7	2.52169E-3	2.52169E-3	6.31817E-3	2.99175E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09518E0	-7.5655E-1	-7.34735E-1	-9.19478E0	-9.19001E0	4.57764E-3	9.48906E-2	2.73171E1	-3.26765E1	-3.26458E1	2.67848E1	1.2033E-7	2.51225E-3	2.51225E-3	6.31288E-3	2.97963E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09472E0	-7.56693E-1	-7.35021E-1	-9.19502E0	-9.18982E0	4.64916E-3	9.48668E-2	2.73181E1	-3.26148E1	-3.26148E1	2.67986E1	1.20069E-7	2.52099E-3	2.52099E-3	6.32936E-3	3.00563E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09533E0	-7.56526E-1	-7.35211E-1	-9.19499E0	-9.18982E0	4.69685E-3	9.50336E-2	2.73363E1	-3.27059E1	-3.26122E1	2.68478E1	1.20209E-7	2.52492E-3	2.52492E-3	6.32896E-3	3.0071E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0951E0	-7.56431E-1	-7.35021E-1	-9.19499E0	-9.18984E0	4.33922E-3	9.51767E-2	2.73027E1	-3.26795E1	-3.26032E1	2.68112E1	1.19965E-7	2.51552E-3	2.51552E-3	6.31837E-3	2.9874E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09518E0	-7.56478E-1	-7.34854E-1	-9.19509E0	-9.1898E0	4.50611E-3	9.50098E-2	2.73333E1	-3.26819E1	-3.25882E1	2.68611E1	1.19809E-7	2.51334E-3	2.51334E-3	6.34588E-3	2.99E-1
1.4E1	4.0E0	0.0E0	5.66E2	3.82E2	-2.09487E0	-7.56311E-1	-7.35092E-1	-9.19509E0	-9.18999E0	4.50611E-3	9.50336E-2	2.73411E1	-3.26663E1	-3.26278E1	2.68214E1	1.20174E-7	2.51552E-3	2.51552E-3	6.3074E-3	2.98481E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09518E0	-7.56264E-1	-7.35021E-1	-9.19487E0	-9.19003E0	4.50611E-3	9.48429E-2	2.73183E1	-3.26663E1	-3.26416E1	2.68215E1	1.20122E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.00041E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09503E0	-7.56502E-1	-7.35092E-1	-9.19495E0	-9.1897E0	4.12464E-3	9.49383E-2	2.73111E1	-3.26645E1	-3.2632E1	2.68469E1	1.20017E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.9952E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09449E0	-7.56693E-1	-7.34901E-1	-9.19485E0	-9.18989E0	4.17233E-3	9.4676E-2	2.73273E1	-3.26669E1	-3.25948E1	2.67821E1	1.19965E-7	2.51443E-3	2.51443E-3	6.33486E-3	3.00041E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0941E0	-7.56431E-1	-7.35044E-1	-9.19466E0	-9.19034E0	4.00543E-3	9.50098E-2	2.73086E1	-3.26602E1	-3.26349E1	2.68538E1	1.19965E-7	2.52209E-3	2.52209E-3	6.30192E-3	3.02922E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09418E0	-7.56764E-1	-7.34687E-1	-9.19473E0	-9.18989E0	4.17233E-3	9.4986E-2	2.73357E1	-3.27023E1	-3.26795E1	2.67854E1	1.20004E-7	2.52061E-3	2.52061E-3	6.32896E-3	3.02253E-1
2.0E1	1.2E1	0.0E0	8.08E2	5.58E2	-2.09503E0	-7.56574E-1	-7.35092E-1	-9.19471E0	-9.18987E0	4.31538E-3	9.47714E-2	2.73357E1	-3.26487E1	-3.26376E1	2.6816E1	1.20069E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.00824E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09495E0	-7.56693E-1	-7.35188E-1	-9.19483E0	-9.18989E0	4.22001E-3	9.47237E-2	2.72957E1	-3.26697E1	-3.26178E1	2.68406E1	1.20278E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.98481E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09487E0	-7.56574E-1	-7.34997E-1	-9.1948E0	-9.18975E0	4.33922E-3	9.48191E-2	2.73429E1	-3.26693E1	-3.26272E1	2.68094E1	1.20017E-7	2.51116E-3	2.51116E-3	6.34588E-3	2.9926E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09426E0	-7.56669E-1	-7.35021E-1	-9.19499E0	-9.18984E0	4.02927E-3	9.48191E-2	2.73322E1	-3.26585E1	-3.25859E1	2.68154E1	1.20069E-7	2.5188E-3	2.5188E-3	6.29098E-3	2.9952E-1