[Scan]
initial_time=2016-01-27T18:35:39
final_time=2016-01-27T18:35:59
ip_count=19
run=1025
dataset=1
scan=2
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.24736E-2
qbias_imon=-3.80771E-6
ql1_vset=
ql1_vmon=-8.80021E1
ql1_imon=-6.14774E-10
ql2_vset=
ql2_vmon=-8.82149E-4
ql2_imon=4.0561E-10
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.73701E-9
ql4_vset=
ql4_vmon=1.43051E-4
ql4_imon=8.61478E-10
mult1=-9.80672E-9
mult2=-2.91728E-9
rf_tmon=-5.81906E-3
rf_agc=3.12739E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.72069E-3
ql5_imon=4.81653E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65712E0
bslens_imon=2.37192E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19899E1
lens5a_imon=1.99713E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12444E2
lens4a_imon=2.04905E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5346E1
cs_ef1b_imon=2.85188E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04616E2
lens23_imon=1.022E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0485E1
cs_ea1_imon=2.58834E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00471E0
lens1_imon=1.51755E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64729E1
os_ef1alow_imon=2.99063E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03871E1
cs_ea2_imon=1.52849E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84448E1
cs_ef1a_imon=2.92468E-5
olens2_vset=0.0E0
olens2_vmon=1.21593E-3
olens2_imon=3.97611E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.1152E1
os_restr1_imon=2.88035E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15462E1
os_ea1_imon=1.88213E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63467E1
os_ef1bup_imon=3.08794E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22927E0
cs_ionrep_imon=1.19287E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91895E2
cs_nozzle_imon=1.93442E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01785E1
cs_anode1_imon=2.95387E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99981E1
olens4_imon=9.10878E-11
tplens_vset=0.0E0
tplens_vmon=-1.65285E0
tplens_imon=-2.59691E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99172E1
iondef3_imon=8.84282E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98776E1
iondef2_imon=9.34751E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02925E2
lens6_imon=2.98559E-4
ql6_vset=1.0E-1
ql6_vmon=9.33886E-2
ql6_imon=4.51314E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27793E0
ionrepsh_imon=1.74046E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33742E1
lens5b_imon=2.19216E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74711E1
cs_ef2b_imon=3.11893E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.60135E-1
os_ea2_imon=-5.55298E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06103E2
lens4b_imon=2.00763E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71143E1
cs_ef2a_imon=3.18849E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.6396E0
os_ef2alow_imon=-2.53661E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.22341E-1
os_ef2bup_imon=-5.38735E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10853E1
os_restr2_imon=2.85692E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23041E2
cs_ionfoca_imon=6.28883E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01803E1
cs_anode2_imon=2.25362E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58787E1
iondef1_imon=5.23426E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49992E1
iondef4_imon=5.34166E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27959E1
olens3_imon=2.25339E-9
olens1_vset=0.0E0
olens1_vmon=1.40667E-3
olens1_imon=3.82483E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13735E0
cs_ionaccel_imon=-1.75816E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02099E2
cs_ionfocb_imon=1.47183E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56123E1
einzel_imon=7.77434E-6
window_vset=0.0E0
window_vmon=1.85508E-1
window_imon=-1.01213E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82616E2
mask1_imon=2.39084E-4
mask2_vset=0.0E0
mask2_vmon=-1.86722E1
mask2_imon=-7.16609E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9269E3
multa_neg_imon=7.24222E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93709E3
defgrida_imon=6.48518E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5014E3
multb_neg_imon=7.18454E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.45847E0
defgridb_imon=6.30493E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33649E1
os_fil1_imon=4.79424E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.59332E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62614E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30407E1
cs_fil1_imon=9.97705E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62306E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65104E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.55092E-2
os_fil2_imon=-2.5158E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.93839E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.18537E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29522E-1
cs_fil2_imon=-2.52782E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.29239E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21609E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33486E-3
inlet_lpb_pmon=2.2631E-2
chamber_ion_pmon=2.15332E-9
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.64097E-1
res40_imon=-2.39245E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=167
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.53E2	0.0E0	1.47E2	4.1E1	-7.25507E-2	-8.80022E1	-9.53674E-4	-8.80002E1	5.96046E-4	4.86374E-3	9.34124E-2	1.59206E1	-1.98865E1	-1.9962E1	1.49495E1	2.15894E-9	2.5199E-3	2.5199E-3	6.32936E-3	2.2572E-2
2.0E0	1.929E3	0.0E0	3.16E2	1.6E2	-7.27053E-2	-8.80023E1	-1.14441E-3	-8.80003E1	6.4373E-4	4.74453E-3	9.33409E-2	1.58147E1	-1.9879E1	-1.99352E1	1.50284E1	2.15907E-9	2.51709E-3	2.51709E-3	6.3074E-3	2.2544E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.24736E-2	-8.80023E1	-1.21593E-3	-8.80007E1	4.29153E-4	5.03063E-3	9.35316E-2	1.57392E1	-1.98434E1	-1.99755E1	1.5007E1	2.15685E-9	2.52635E-3	2.52635E-3	6.27335E-3	2.26431E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.23964E-2	-8.80021E1	-1.0252E-3	-8.80006E1	4.05312E-4	5.05447E-3	9.37462E-2	1.6E1	-1.98555E1	-1.99798E1	1.4979E1	2.159E-9	2.51632E-3	2.51632E-3	6.33436E-3	2.26445E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.33239E-2	-8.80021E1	-8.34465E-4	-8.80004E1	4.05312E-4	4.86374E-3	9.36031E-2	1.59038E1	-1.98296E1	-1.99516E1	1.50153E1	2.15716E-9	2.52384E-3	2.52384E-3	6.33977E-3	2.26252E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.40967E-2	-8.80023E1	-1.00136E-3	-8.80004E1	4.52995E-4	4.60148E-3	9.3317E-2	1.56681E1	-1.986E1	-1.99703E1	1.50248E1	2.15706E-9	2.52977E-3	2.52977E-3	6.33486E-3	2.25524E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.31692E-2	-8.80022E1	-9.29832E-4	-8.80003E1	5.00679E-4	4.57764E-3	9.3317E-2	1.56797E1	-1.9811E1	-1.99756E1	1.49872E1	2.15894E-9	2.5199E-3	2.5199E-3	6.33486E-3	2.26506E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.31692E-2	-8.8002E1	-1.00136E-3	-8.80002E1	4.05312E-4	4.74453E-3	9.32217E-2	1.56433E1	-1.98564E1	-1.99443E1	1.49758E1	2.158E-9	2.5199E-3	2.5199E-3	6.30192E-3	2.25133E-2
1.2E1	4.2E1	0.0E0	4.85E2	3.23E2	-7.35556E-2	-8.80018E1	-9.77516E-4	-8.80001E1	5.72205E-4	5.00679E-3	9.34362E-2	1.56397E1	-1.98802E1	-1.99145E1	1.49968E1	2.15533E-9	2.51954E-3	2.51954E-3	6.29665E-3	2.26059E-2
1.3E1	3.0E0	0.0E0	5.25E2	3.53E2	-7.23189E-2	-8.80021E1	-6.91414E-4	-8.8E1	5.00679E-4	4.74453E-3	9.34839E-2	1.56713E1	-1.99258E1	-1.99924E1	1.5019E1	2.15706E-9	2.52099E-3	2.52099E-3	6.32936E-3	2.26703E-2
1.4E1	6.4E1	0.0E0	5.66E2	3.82E2	-7.31692E-2	-8.80018E1	-7.15256E-4	-8.80001E1	5.24521E-4	4.93526E-3	9.35555E-2	1.58534E1	-1.98699E1	-1.996E1	1.50418E1	2.158E-9	2.51771E-3	2.51771E-3	6.32936E-3	2.26506E-2
1.5E1	2.1E1	0.0E0	6.06E2	4.11E2	-7.30146E-2	-8.80018E1	-5.72205E-4	-8.80001E1	3.57628E-4	4.8399E-3	9.35793E-2	1.58131E1	-1.98458E1	-1.9987E1	1.50196E1	2.16081E-9	2.52209E-3	2.52209E-3	6.29645E-3	2.2631E-2
1.6E1	1.57E2	0.0E0	6.47E2	4.41E2	-7.22418E-2	-8.80018E1	-8.34465E-4	-8.80001E1	3.8147E-4	5.05447E-3	9.35316E-2	1.56983E1	-1.98687E1	-1.99666E1	1.49662E1	2.15696E-9	2.52027E-3	2.52027E-3	6.31299E-3	2.25968E-2
1.7E1	1.69E2	0.0E0	6.87E2	4.7E2	-7.19325E-2	-8.80021E1	-1.33514E-3	-8.80001E1	5.00679E-4	4.72069E-3	9.37223E-2	1.5785E1	-1.98685E1	-1.99419E1	1.49988E1	2.15624E-9	2.51847E-3	2.51847E-3	6.32356E-3	2.25867E-2
1.8E1	7.72E2	0.0E0	7.27E2	5.0E2	-7.25507E-2	-8.80018E1	-1.14441E-3	-8.80001E1	5.24521E-4	4.86374E-3	9.34839E-2	1.59844E1	-1.98659E1	-1.99527E1	1.50061E1	2.16091E-9	2.51472E-3	2.51472E-3	6.3282E-3	2.25772E-2
1.9E1	9.17E2	0.0E0	7.68E2	5.29E2	-7.23189E-2	-8.8002E1	-1.04904E-3	-8.80002E1	4.05312E-4	4.57764E-3	9.35555E-2	1.59489E1	-1.98812E1	-1.9988E1	1.50282E1	2.15872E-9	2.52106E-3	2.52106E-3	6.31321E-3	2.26286E-2
2.0E1	9.0E0	0.0E0	8.08E2	5.58E2	-7.25507E-2	-8.80018E1	-1.04904E-3	-8.80001E1	4.29153E-4	4.60148E-3	9.36031E-2	1.58834E1	-1.98453E1	-1.99601E1	1.5011E1	2.15716E-9	2.51739E-3	2.51739E-3	6.32356E-3	2.25482E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.17779E-2	-8.8002E1	-1.43051E-3	-8.79999E1	4.05312E-4	4.33922E-3	9.33647E-2	1.56767E1	-1.98464E1	-1.99666E1	1.49944E1	2.15879E-9	2.52293E-3	2.52293E-3	6.3131E-3	2.25005E-2
2.2E1	4.0E0	0.0E0	8.89E2	6.17E2	-7.19325E-2	-8.80019E1	-1.00136E-3	-8.79999E1	5.00679E-4	4.60148E-3	9.35555E-2	1.56936E1	-1.98428E1	-1.99934E1	1.49938E1	2.15613E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.25524E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.24736E-2	-8.80021E1	-8.82149E-4	-8.80001E1	1.43051E-4	4.72069E-3	9.33886E-2	1.58787E1	-1.98776E1	-1.99172E1	1.49992E1	2.15332E-9	2.51771E-3	2.51771E-3	6.33486E-3	2.2631E-2