[Scan]
initial_time=2016-01-27T18:36:59
final_time=2016-01-27T18:37:19
ip_count=19
run=1025
dataset=1
scan=5
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.31692E-2
qbias_imon=-3.81508E-6
ql1_vset=
ql1_vmon=-8.80021E1
ql1_imon=-6.23846E-10
ql2_vset=
ql2_vmon=-7.62939E-4
ql2_imon=4.22096E-10
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-1.71767E-9
ql4_vset=
ql4_vmon=4.05312E-4
ql4_imon=8.97539E-10
mult1=-9.86868E-9
mult2=-2.68791E-9
rf_tmon=-3.82997E-3
rf_agc=3.44434E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.45979E-3
ql5_imon=4.7518E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63727E0
bslens_imon=2.4999E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19994E1
lens5a_imon=1.99339E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12475E2
lens4a_imon=2.05096E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53736E1
cs_ef1b_imon=2.88372E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04579E2
lens23_imon=1.02024E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04882E1
cs_ea1_imon=2.60809E-5
lens1_vset=-2.7E0
lens1_vmon=-3.04716E0
lens1_imon=1.51908E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64951E1
os_ef1alow_imon=2.96418E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03815E1
cs_ea2_imon=1.52806E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84007E1
cs_ef1a_imon=2.92863E-5
olens2_vset=0.0E0
olens2_vmon=1.43051E-3
olens2_imon=3.99411E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11548E1
os_restr1_imon=2.87997E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15187E1
os_ea1_imon=1.89081E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63498E1
os_ef1bup_imon=3.07197E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25459E0
cs_ionrep_imon=1.19113E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91885E2
cs_nozzle_imon=1.93349E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01722E1
cs_anode1_imon=2.97354E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99976E1
olens4_imon=9.01461E-11
tplens_vset=0.0E0
tplens_vmon=-1.62708E0
tplens_imon=-2.29188E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.9976E1
iondef3_imon=8.74798E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98613E1
iondef2_imon=9.4106E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02921E2
lens6_imon=2.98226E-4
ql6_vset=1.0E-1
ql6_vmon=9.35555E-2
ql6_imon=3.99637E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.36316E0
ionrepsh_imon=1.80845E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33645E1
lens5b_imon=2.16896E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74788E1
cs_ef2b_imon=3.10977E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.41325E-1
os_ea2_imon=-6.2601E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06078E2
lens4b_imon=2.00615E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71064E1
cs_ef2a_imon=3.1951E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.64152E0
os_ef2alow_imon=-2.62297E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.5584E-1
os_ef2bup_imon=-5.53844E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10818E1
os_restr2_imon=2.88184E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23068E2
cs_ionfoca_imon=6.3034E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01472E1
cs_anode2_imon=2.23962E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57576E1
iondef1_imon=5.18407E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50553E1
iondef4_imon=5.30007E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27955E1
olens3_imon=2.28857E-9
olens1_vset=0.0E0
olens1_vmon=1.50204E-3
olens1_imon=3.71015E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12328E0
cs_ionaccel_imon=-1.88568E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02096E2
cs_ionfocb_imon=1.47499E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56218E1
einzel_imon=7.39966E-6
window_vset=0.0E0
window_vmon=2.15102E-1
window_imon=-9.5752E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82636E2
mask1_imon=2.38972E-4
mask2_vset=0.0E0
mask2_vmon=-1.86319E1
mask2_imon=-6.91797E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92661E3
multa_neg_imon=7.74844E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93729E3
defgrida_imon=6.4831E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50147E3
multb_neg_imon=7.13074E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.48287E0
defgridb_imon=6.00391E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33652E1
os_fil1_imon=3.98681E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.96019E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6291E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30386E1
cs_fil1_imon=9.96307E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63463E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6555E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.666E-2
os_fil2_imon=-2.38181E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.93146E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.87353E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31669E-1
cs_fil2_imon=-1.85785E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.08008E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21709E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=2.26445E-2
chamber_ion_pmon=2.159E-9
chamber_cvt_pmon=2.52384E-3
foreline_cvt_pmon=2.52384E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.11157E-1
res40_imon=-2.57057E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=148
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.97E2	0.0E0	1.47E2	4.1E1	-7.286E-2	-8.80018E1	-1.12057E-3	-8.79998E1	-1.66893E-4	4.81606E-3	9.36508E-2	1.56533E1	-1.98651E1	-1.9975E1	1.50034E1	2.15199E-9	2.51498E-3	2.51498E-3	6.3074E-3	2.26022E-2
2.0E0	1.91E3	2.0E0	3.16E2	1.6E2	-7.31692E-2	-8.8002E1	-8.82149E-4	-8.80004E1	2.14577E-4	4.79221E-3	9.33886E-2	1.56707E1	-1.9835E1	-1.99684E1	1.50238E1	2.15992E-9	2.52169E-3	2.52169E-3	6.30202E-3	2.24714E-2
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.30146E-2	-8.80021E1	-1.23978E-3	-8.80003E1	0.0E0	5.03063E-3	9.33647E-2	1.58905E1	-1.98552E1	-2.00092E1	1.5001E1	2.15987E-9	2.52428E-3	2.52428E-3	6.32936E-3	2.269E-2
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.25507E-2	-8.80022E1	-1.00136E-3	-8.80001E1	1.43051E-4	4.88758E-3	9.3627E-2	1.59996E1	-1.98747E1	-1.99673E1	1.49935E1	2.15624E-9	2.51847E-3	2.51847E-3	6.32896E-3	2.26252E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.16233E-2	-8.80021E1	-8.82149E-4	-8.80004E1	3.09944E-4	5.126E-3	9.36985E-2	1.59631E1	-1.98647E1	-1.99939E1	1.49626E1	2.15624E-9	2.51739E-3	2.51739E-3	6.31817E-3	2.25867E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.03869E-2	-8.80021E1	-7.86781E-4	-8.80004E1	9.53674E-5	4.74453E-3	9.33647E-2	1.59873E1	-1.98657E1	-1.99618E1	1.49602E1	2.15987E-9	2.52209E-3	2.52209E-3	6.32386E-3	2.26113E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.08504E-2	-8.8002E1	-9.29832E-4	-8.80001E1	1.19209E-4	5.126E-3	9.36031E-2	1.59946E1	-1.98615E1	-1.9927E1	1.50429E1	2.15716E-9	2.52923E-3	2.52923E-3	6.31817E-3	2.25867E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.18554E-2	-8.80019E1	-5.72205E-4	-8.80001E1	2.38419E-4	5.22137E-3	9.35555E-2	1.5936E1	-1.98753E1	-1.99536E1	1.5012E1	2.16081E-9	2.51662E-3	2.51662E-3	6.34037E-3	2.25917E-2
1.2E1	4.5E1	0.0E0	4.85E2	3.23E2	-7.10825E-2	-8.8002E1	-9.05991E-4	-8.80004E1	4.76837E-4	5.24521E-3	9.35793E-2	1.58014E1	-1.98322E1	-1.99791E1	1.49926E1	2.16173E-9	2.51804E-3	2.51804E-3	6.3074E-3	2.26369E-2
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.17779E-2	-8.80019E1	-8.10623E-4	-8.80002E1	2.38419E-5	5.65052E-3	9.36747E-2	1.56461E1	-1.98122E1	-2.00081E1	1.49923E1	2.15519E-9	2.52318E-3	2.52318E-3	6.32386E-3	2.26506E-2
1.4E1	9.4E1	0.0E0	5.66E2	3.82E2	-7.17779E-2	-8.80019E1	-9.29832E-4	-8.8E1	7.15256E-5	5.43594E-3	9.35555E-2	1.57926E1	-1.98664E1	-1.99874E1	1.49596E1	2.15257E-9	2.51739E-3	2.51739E-3	6.3074E-3	2.25674E-2
1.5E1	2.7E1	0.0E0	6.06E2	4.11E2	-7.201E-2	-8.80022E1	-9.05991E-4	-8.80001E1	7.15256E-5	5.45979E-3	9.34362E-2	1.59177E1	-1.98585E1	-1.99588E1	1.5016E1	2.15992E-9	2.51954E-3	2.51954E-3	6.32896E-3	2.26639E-2
1.6E1	1.48E2	0.0E0	6.47E2	4.41E2	-7.26282E-2	-8.80023E1	-9.53674E-4	-8.80002E1	1.90735E-4	5.07832E-3	9.34839E-2	1.57476E1	-1.98489E1	-1.996E1	1.50142E1	2.15887E-9	2.52027E-3	2.52027E-3	6.31858E-3	2.25569E-2
1.7E1	1.91E2	1.0E0	6.87E2	4.7E2	-7.286E-2	-8.80024E1	-7.39098E-4	-8.8E1	2.14577E-4	5.03063E-3	9.37223E-2	1.58666E1	-1.98663E1	-1.9969E1	1.50274E1	2.159E-9	2.52276E-3	2.52276E-3	6.29665E-3	2.25097E-2
1.8E1	7.94E2	1.0E0	7.27E2	5.0E2	-7.27828E-2	-8.80022E1	-4.76837E-4	-8.80003E1	3.33786E-4	5.24521E-3	9.35316E-2	1.59687E1	-1.98621E1	-1.99678E1	1.50106E1	2.15613E-9	2.52428E-3	2.52428E-3	6.29098E-3	2.2572E-2
1.9E1	9.26E2	0.0E0	7.68E2	5.29E2	-7.25507E-2	-8.80021E1	-1.00136E-3	-8.8E1	1.43051E-4	5.03063E-3	9.32932E-2	1.58254E1	-1.98588E1	-1.99277E1	1.49804E1	2.158E-9	2.51662E-3	2.51662E-3	6.31837E-3	2.26703E-2
2.0E1	1.1E1	0.0E0	8.08E2	5.58E2	-7.22418E-2	-8.80019E1	-5.96046E-4	-8.79999E1	4.76837E-4	5.4121E-3	9.36031E-2	1.56562E1	-1.98683E1	-1.99796E1	1.50224E1	2.15292E-9	2.52093E-3	2.52093E-3	6.30221E-3	2.2503E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.23964E-2	-8.80022E1	-8.82149E-4	-8.80001E1	5.24521E-4	5.17368E-3	9.33886E-2	1.55734E1	-1.97419E1	-2.00219E1	1.50244E1	2.15673E-9	2.51874E-3	2.51874E-3	6.31321E-3	2.25455E-2
2.2E1	5.0E0	0.0E0	8.89E2	6.17E2	-7.286E-2	-8.80021E1	-1.0252E-3	-8.80003E1	5.72205E-4	5.36442E-3	9.35793E-2	1.58415E1	-1.98499E1	-1.99532E1	1.49576E1	2.15613E-9	2.52099E-3	2.52099E-3	6.3074E-3	2.25917E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.31692E-2	-8.80021E1	-7.62939E-4	-8.8E1	4.05312E-4	5.45979E-3	9.35555E-2	1.57576E1	-1.98613E1	-1.9976E1	1.50553E1	2.159E-9	2.52384E-3	2.52384E-3	6.30202E-3	2.26445E-2