[Scan]
initial_time=2016-01-27T18:37:26
final_time=2016-01-27T18:37:45
ip_count=19
run=1025
dataset=1
scan=6
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30146E-2
qbias_imon=-3.802E-6
ql1_vset=
ql1_vmon=-8.80019E1
ql1_imon=-6.06155E-10
ql2_vset=
ql2_vmon=-9.77516E-4
ql2_imon=4.03333E-10
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.73676E-9
ql4_vset=
ql4_vmon=4.76837E-5
ql4_imon=8.96549E-10
mult1=-9.51162E-9
mult2=-2.70065E-9
rf_tmon=-5.4377E-3
rf_agc=3.29551E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.60148E-3
ql5_imon=4.68004E-10
bslens_vset=-6.2E0
bslens_vmon=-6.69276E0
bslens_imon=2.30966E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19659E1
lens5a_imon=2.02191E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12479E2
lens4a_imon=2.0492E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5358E1
cs_ef1b_imon=2.85404E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04621E2
lens23_imon=1.02609E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04923E1
cs_ea1_imon=2.58007E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98936E0
lens1_imon=1.52037E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64608E1
os_ef1alow_imon=2.99928E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03956E1
cs_ea2_imon=1.51719E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84178E1
cs_ef1a_imon=2.92179E-5
olens2_vset=0.0E0
olens2_vmon=1.40667E-3
olens2_imon=3.85296E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.1149E1
os_restr1_imon=2.88179E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15412E1
os_ea1_imon=1.89555E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63551E1
os_ef1bup_imon=3.08685E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2167E0
cs_ionrep_imon=1.19439E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91896E2
cs_nozzle_imon=1.9348E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01779E1
cs_anode1_imon=2.95459E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99979E1
olens4_imon=8.8644E-11
tplens_vset=0.0E0
tplens_vmon=-1.65559E0
tplens_imon=-2.88269E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99822E1
iondef3_imon=8.57441E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98585E1
iondef2_imon=9.43803E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02946E2
lens6_imon=2.98353E-4
ql6_vset=1.0E-1
ql6_vmon=9.34124E-2
ql6_imon=4.43089E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26979E0
ionrepsh_imon=1.79008E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33669E1
lens5b_imon=2.17622E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74916E1
cs_ef2b_imon=3.13082E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.2095E-1
os_ea2_imon=-4.05069E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06084E2
lens4b_imon=2.00361E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70915E1
cs_ef2a_imon=3.16975E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.6348E0
os_ef2alow_imon=-2.56905E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.3976E-1
os_ef2bup_imon=-5.22878E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10775E1
os_restr2_imon=2.87422E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23081E2
cs_ionfoca_imon=6.30459E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02013E1
cs_anode2_imon=2.24209E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57981E1
iondef1_imon=5.30046E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50112E1
iondef4_imon=5.38851E-6
olens3_vset=-1.28E1
olens3_vmon=-1.2796E1
olens3_imon=2.27486E-9
olens1_vset=0.0E0
olens1_vmon=1.33514E-3
olens1_imon=3.8327E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14876E0
cs_ionaccel_imon=-1.84825E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.47284E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56465E1
einzel_imon=7.6518E-6
window_vset=0.0E0
window_vmon=1.91514E-1
window_imon=-1.09142E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82606E2
mask1_imon=2.39217E-4
mask2_vset=0.0E0
mask2_vmon=-1.86488E1
mask2_imon=-7.95896E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92675E3
multa_neg_imon=7.48427E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.75515E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50117E3
multb_neg_imon=7.36393E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.5488E0
defgridb_imon=6.07913E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33666E1
os_fil1_imon=5.69523E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.79755E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63361E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30436E1
cs_fil1_imon=9.98942E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.64012E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65798E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.64847E-2
os_fil2_imon=-2.46775E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.0374E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.65192E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31464E-1
cs_fil2_imon=-2.77409E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.35886E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21705E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31858E-3
inlet_lpb_pmon=2.25968E-2
chamber_ion_pmon=2.15696E-9
chamber_cvt_pmon=2.52362E-3
foreline_cvt_pmon=2.52362E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.49081E-1
res40_imon=-2.44651E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=142
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.49E2	0.0E0	1.47E2	4.1E1	-7.24736E-2	-8.80025E1	-9.29832E-4	-8.80003E1	3.09944E-4	5.07832E-3	9.32932E-2	1.58606E1	-1.98489E1	-1.99678E1	1.50226E1	2.159E-9	2.52061E-3	2.52061E-3	6.29665E-3	2.26059E-2
2.0E0	1.927E3	2.0E0	3.16E2	1.6E2	-7.23964E-2	-8.80024E1	-1.0252E-3	-8.80006E1	6.4373E-4	5.19753E-3	9.35078E-2	1.56497E1	-1.98957E1	-1.99696E1	1.49779E1	2.15566E-9	2.52045E-3	2.52045E-3	6.29919E-3	2.25819E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.18554E-2	-8.80022E1	-7.62939E-4	-8.80004E1	2.86102E-4	4.673E-3	9.35078E-2	1.58651E1	-1.98452E1	-2.00027E1	1.50094E1					
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.22418E-2	-8.80022E1	-9.29832E-4	-8.80002E1	1.66893E-4	4.86374E-3	9.33647E-2	1.57518E1	-1.98651E1	-1.9969E1	1.504E1	2.15441E-9	2.51739E-3	2.51739E-3	6.32356E-3	2.25867E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.40192E-2	-8.80021E1	-9.05991E-4	-8.80004E1	2.38419E-4	4.3869E-3	9.35555E-2	1.56497E1	-1.98332E1	-1.99702E1	1.49872E1	2.15791E-9	2.52697E-3	2.52697E-3	6.31858E-3	2.26369E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30918E-2	-8.80022E1	-5.96046E-4	-8.80002E1	1.19209E-4	4.62532E-3	9.33409E-2	1.59104E1	-1.98663E1	-2.00009E1	1.50461E1	2.15716E-9	2.51525E-3	2.51525E-3	6.30202E-3	2.26639E-2
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-7.32464E-2	-8.80023E1	-8.10623E-4	-8.80002E1	4.76837E-5	5.07832E-3	9.36508E-2	1.589E1	-1.98573E1	-1.99882E1	1.49764E1	2.15519E-9	2.52318E-3	2.52318E-3	6.3074E-3	2.25524E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.30918E-2	-8.80023E1	-9.29832E-4	-8.80003E1	2.14577E-4	5.07832E-3	9.3627E-2	1.56245E1	-1.98682E1	-1.99414E1	1.50184E1	2.15706E-9	2.5199E-3	2.5199E-3	6.30192E-3	2.27097E-2
1.2E1	4.0E1	0.0E0	4.85E2	3.23E2	-7.30918E-2	-8.80021E1	-1.07288E-3	-8.80003E1	9.53674E-5	4.673E-3	9.36031E-2	1.56407E1	-1.98386E1	-2.00021E1	1.50033E1	2.159E-9	2.51525E-3	2.51525E-3	6.29665E-3	2.26445E-2
1.3E1	2.0E0	0.0E0	5.25E2	3.53E2	-7.22418E-2	-8.80021E1	-6.19888E-4	-8.80001E1	1.43051E-4	5.00679E-3	9.35078E-2	1.58257E1	-1.98693E1	-1.99306E1	1.4992E1	2.158E-9	2.5188E-3	2.5188E-3	6.29098E-3	2.2572E-2
1.4E1	8.4E1	0.0E0	5.66E2	3.82E2	-7.29374E-2	-8.80023E1	-5.96046E-4	-8.80004E1	1.19209E-4	4.3869E-3	9.34124E-2	1.59267E1	-1.98687E1	-1.9954E1	1.49548E1	2.16081E-9	2.52867E-3	2.52867E-3	6.31837E-3	2.2631E-2
1.5E1	1.7E1	0.0E0	6.06E2	4.11E2	-7.35556E-2	-8.8002E1	-4.29153E-4	-8.80006E1	3.09944E-4	4.57764E-3	9.33886E-2	1.5708E1	-1.98843E1	-1.99131E1	1.50028E1	2.15706E-9	2.52428E-3	2.52428E-3	6.32386E-3	2.26506E-2
1.6E1	1.43E2	1.0E0	6.47E2	4.41E2	-7.27053E-2	-8.80021E1	-8.10623E-4	-8.80006E1	3.09944E-4	4.673E-3	9.34601E-2	1.5824E1	-1.9879E1	-1.99585E1	1.49788E1	2.15505E-9	2.52027E-3	2.52027E-3	6.35223E-3	2.25369E-2
1.7E1	1.99E2	0.0E0	6.87E2	4.7E2	-7.286E-2	-8.80024E1	-4.29153E-4	-8.80004E1	9.53674E-5	4.76837E-3	9.33409E-2	1.57945E1	-1.98764E1	-1.99514E1	1.50128E1	2.15706E-9	2.51334E-3	2.51334E-3	6.3074E-3	2.2572E-2
1.8E1	8.04E2	0.0E0	7.27E2	5.0E2	-7.286E-2	-8.80026E1	-5.72205E-4	-8.80003E1	1.90735E-4	4.98295E-3	9.33886E-2	1.59242E1	-1.98415E1	-2.0044E1	1.49971E1	2.15825E-9	2.51679E-3	2.51679E-3	6.3282E-3	2.25958E-2
1.9E1	9.24E2	0.0E0	7.68E2	5.29E2	-7.16233E-2	-8.80026E1	-6.19888E-4	-8.80004E1	4.29153E-4	5.17368E-3	9.33647E-2	1.57702E1	-1.98381E1	-1.99779E1	1.5001E1	2.15277E-9	2.52454E-3	2.52454E-3	6.32483E-3	2.26078E-2
2.0E1	8.0E0	0.0E0	8.08E2	5.58E2	-7.201E-2	-8.80025E1	-1.00136E-3	-8.80006E1	2.86102E-4	4.88758E-3	9.35316E-2	1.56419E1	-1.98489E1	-1.99672E1	1.50052E1	2.16085E-9	2.53139E-3	2.53139E-3	6.32356E-3	2.25867E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.26282E-2	-8.80023E1	-9.53674E-4	-8.8E1	3.09944E-4	4.95911E-3	9.36031E-2	1.57914E1	-1.98659E1	-1.99414E1	1.49964E1	2.15894E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.25329E-2
2.2E1	2.0E0	0.0E0	8.89E2	6.17E2	-7.29374E-2	-8.80021E1	-8.10623E-4	-8.80001E1	1.43051E-4	4.41074E-3	9.35793E-2	1.589E1	-1.98693E1	-1.99702E1	1.50184E1	2.15808E-9	2.51203E-3	2.51203E-3	6.3074E-3	2.26639E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.30146E-2	-8.80019E1	-9.77516E-4	-8.80003E1	4.76837E-5	4.60148E-3	9.34124E-2	1.57981E1	-1.98585E1	-1.99822E1	1.50112E1	2.15696E-9	2.52362E-3	2.52362E-3	6.31858E-3	2.25968E-2