[Scan]
initial_time=2016-01-27T18:37:53
final_time=2016-01-27T18:38:12
ip_count=19
run=1025
dataset=1
scan=7
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.23189E-2
qbias_imon=-3.81333E-6
ql1_vset=
ql1_vmon=-8.80022E1
ql1_imon=-6.0308E-10
ql2_vset=
ql2_vmon=-8.82149E-4
ql2_imon=4.13573E-10
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.6716E-9
ql4_vset=
ql4_vmon=2.86102E-4
ql4_imon=9.00078E-10
mult1=-9.77651E-9
mult2=-2.78448E-9
rf_tmon=-4.86691E-3
rf_agc=3.24444E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.64916E-3
ql5_imon=5.07617E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62708E0
bslens_imon=2.65735E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1984E1
lens5a_imon=2.00133E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12468E2
lens4a_imon=2.04986E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53801E1
cs_ef1b_imon=2.87334E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04593E2
lens23_imon=1.0219E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04861E1
cs_ea1_imon=2.60022E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01301E0
lens1_imon=1.56187E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64355E1
os_ef1alow_imon=2.98544E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03945E1
cs_ea2_imon=1.53565E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84472E1
cs_ef1a_imon=2.93134E-5
olens2_vset=0.0E0
olens2_vmon=1.14441E-3
olens2_imon=4.11236E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11273E1
os_restr1_imon=2.88424E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15083E1
os_ea1_imon=1.88033E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6359E1
os_ef1bup_imon=3.07613E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.261E0
cs_ionrep_imon=1.18831E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91879E2
cs_nozzle_imon=1.93424E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01873E1
cs_anode1_imon=2.96364E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99977E1
olens4_imon=8.43406E-11
tplens_vset=0.0E0
tplens_vmon=-1.6109E0
tplens_imon=-4.15341E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99462E1
iondef3_imon=8.80274E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98657E1
iondef2_imon=9.38292E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02895E2
lens6_imon=2.98403E-4
ql6_vset=1.0E-1
ql6_vmon=9.32693E-2
ql6_imon=4.6978E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.22283E0
ionrepsh_imon=1.7872E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33817E1
lens5b_imon=2.18874E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74741E1
cs_ef2b_imon=3.12284E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.10691E-1
os_ea2_imon=-5.90923E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06107E2
lens4b_imon=2.00527E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71323E1
cs_ef2a_imon=3.18161E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62348E0
os_ef2alow_imon=-2.52162E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.34282E-1
os_ef2bup_imon=-5.26179E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10974E1
os_restr2_imon=2.87023E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23069E2
cs_ionfoca_imon=6.2947E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01659E1
cs_anode2_imon=2.25719E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58672E1
iondef1_imon=5.07734E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49391E1
iondef4_imon=5.11504E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27961E1
olens3_imon=2.29261E-9
olens1_vset=0.0E0
olens1_vmon=1.38283E-3
olens1_imon=3.70288E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14312E0
cs_ionaccel_imon=-1.83269E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02094E2
cs_ionfocb_imon=1.47366E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56185E1
einzel_imon=7.71509E-6
window_vset=0.0E0
window_vmon=2.21763E-1
window_imon=-1.31112E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82627E2
mask1_imon=2.39333E-4
mask2_vset=0.0E0
mask2_vmon=-1.86629E1
mask2_imon=-6.49431E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92627E3
multa_neg_imon=7.66527E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93717E3
defgrida_imon=6.56215E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5014E3
multb_neg_imon=7.26067E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.58018E0
defgridb_imon=5.96288E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33681E1
os_fil1_imon=4.99606E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.74661E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63281E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30422E1
cs_fil1_imon=9.9832E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63157E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6573E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.4538E-2
os_fil2_imon=-2.63281E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.46988E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.64294E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32448E-1
cs_fil2_imon=-2.01653E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.02679E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21799E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=2.25917E-2
chamber_ion_pmon=2.158E-9
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.40042E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.35384E-1
res40_imon=-2.43599E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=166
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.31E2	0.0E0	1.47E2	4.1E1	-7.38649E-2	-8.8002E1	-9.29832E-4	-8.80003E1	3.33786E-4	5.05447E-3	9.34362E-2	1.5861E1	-1.98582E1	-1.99242E1	1.50184E1	2.15661E-9	2.52029E-3	2.52029E-3	6.32518E-3	2.26561E-2
2.0E0	1.981E3	0.0E0	3.16E2	1.6E2	-7.40967E-2	-8.80019E1	-1.0252E-3	-8.80004E1	3.09944E-4	4.88758E-3	9.34124E-2	1.57442E1	-1.98522E1	-1.99876E1	1.49698E1	2.15636E-9	2.52659E-3	2.52659E-3	6.33919E-3	2.26008E-2
3.0E0	5.0E0	0.0E0	4.85E2	2.79E2	-7.31692E-2	-8.80019E1	-8.82149E-4	-8.80005E1	1.43051E-4	4.88758E-3	9.36031E-2	1.58597E1	-1.98793E1	-1.99558E1	1.50028E1	2.15977E-9	2.52407E-3	2.52407E-3	6.3131E-3	2.24802E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.32464E-2	-8.80021E1	-9.29832E-4	-8.80003E1	2.86102E-4	4.62532E-3	9.33886E-2	1.5693E1	-1.98643E1	-1.99732E1	1.49764E1	2.15455E-9	2.51393E-3	2.51393E-3	6.31269E-3	2.25252E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.3401E-2	-8.80022E1	-5.48363E-4	-8.80005E1	2.6226E-4	5.00679E-3	9.35793E-2	1.5723E1	-1.98511E1	-1.99549E1	1.5004E1	2.15887E-9	2.52027E-3	2.52027E-3	6.29624E-3	2.26169E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27828E-2	-8.80022E1	-5.72205E-4	-8.80006E1	3.57628E-4	4.74453E-3	9.31501E-2	1.5741E1	-1.98747E1	-1.9948E1	1.50449E1	2.159E-9	2.52815E-3	2.52815E-3	6.30202E-3	2.26252E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.3401E-2	-8.80024E1	-8.10623E-4	-8.80004E1	3.57628E-4	4.76837E-3	9.3174E-2	1.56905E1	-1.98867E1	-1.99726E1	1.49974E1	2.15519E-9	2.51662E-3	2.51662E-3	6.32386E-3	2.25133E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.20871E-2	-8.80021E1	-9.29832E-4	-8.80005E1	3.57628E-4	4.93526E-3	9.35078E-2	1.58775E1	-1.98493E1	-1.99673E1	1.49794E1	2.158E-9	2.5199E-3	2.5199E-3	6.31837E-3	2.24157E-2
1.2E1	3.2E1	0.0E0	4.85E2	3.23E2	-7.3401E-2	-8.80023E1	-9.05991E-4	-8.80004E1	2.14577E-4	5.14984E-3	9.32932E-2	1.56899E1	-1.98791E1	-1.99462E1	1.50178E1	2.15716E-9	2.51632E-3	2.51632E-3	6.3074E-3	2.25289E-2
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.30146E-2	-8.80023E1	-6.19888E-4	-8.80003E1	-2.38419E-4	4.76837E-3	9.33647E-2	1.59649E1	-1.98336E1	-2.00136E1	1.49979E1	2.15594E-9	2.52069E-3	2.52069E-3	6.31925E-3	2.25571E-2
1.4E1	7.0E1	0.0E0	5.66E2	3.82E2	-7.25507E-2	-8.80024E1	-8.10623E-4	-8.80005E1	2.86102E-4	4.72069E-3	9.36747E-2	1.591E1	-1.98723E1	-1.98729E1	1.49638E1	2.16033E-9	2.52219E-3	2.52219E-3	6.31429E-3	2.26621E-2
1.5E1	1.1E1	0.0E0	6.06E2	4.11E2	-7.31692E-2	-8.80024E1	-7.86781E-4	-8.80005E1	2.38419E-4	4.74453E-3	9.36031E-2	1.56395E1	-1.98753E1	-1.99402E1	1.50455E1	2.159E-9	2.51847E-3	2.51847E-3	6.3074E-3	2.25674E-2
1.6E1	1.45E2	0.0E0	6.47E2	4.41E2	-7.27053E-2	-8.80025E1	-6.67572E-4	-8.80002E1	3.8147E-4	4.91142E-3	9.34362E-2	1.56504E1	-1.98594E1	-2.00127E1	1.49487E1	2.15894E-9	2.52428E-3	2.52428E-3	6.32936E-3	2.2631E-2
1.7E1	2.06E2	0.0E0	6.87E2	4.7E2	-7.33239E-2	-8.80022E1	-6.67572E-4	-8.80002E1	5.48363E-4	4.95911E-3	9.35316E-2	1.57046E1	-1.98759E1	-1.99377E1	1.49794E1	2.15624E-9	2.51417E-3	2.51417E-3	6.34518E-3	2.25867E-2
1.8E1	8.25E2	2.0E0	7.27E2	5.0E2	-7.3401E-2	-8.80025E1	-9.53674E-4	-8.80003E1	5.24521E-4	4.8399E-3	9.35316E-2	1.59283E1	-1.98541E1	-1.99502E1	1.50623E1	2.15982E-9	2.52027E-3	2.52027E-3	6.3074E-3	2.26369E-2
1.9E1	9.6E2	0.0E0	7.68E2	5.29E2	-7.32464E-2	-8.80025E1	-9.05991E-4	-8.80004E1	4.05312E-4	4.86374E-3	9.38177E-2	1.57302E1	-1.98531E1	-1.99618E1	1.49627E1	2.15533E-9	2.52815E-3	2.52815E-3	6.30202E-3	2.25482E-2
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-7.32464E-2	-8.80024E1	-6.4373E-4	-8.80005E1	3.57628E-4	5.00679E-3	9.37223E-2	1.56857E1	-1.98633E1	-1.99408E1	1.4996E1	2.158E-9	2.52099E-3	2.52099E-3	6.29645E-3	2.25917E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.27828E-2	-8.80024E1	-5.48363E-4	-8.80003E1	3.09944E-4	4.79221E-3	9.34601E-2	1.5677E1	-1.98275E1	-1.99408E1	1.50219E1	2.158E-9	2.52428E-3	2.52428E-3	6.31288E-3	2.26113E-2
2.2E1	6.0E0	0.0E0	8.89E2	6.17E2	-7.29374E-2	-8.80024E1	-6.67572E-4	-8.80006E1	6.19888E-4	4.81606E-3	9.32217E-2	1.59405E1	-1.9841E1	-1.99468E1	1.50238E1	2.159E-9	2.52061E-3	2.52061E-3	6.31817E-3	2.25867E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.23189E-2	-8.80022E1	-8.82149E-4	-8.80002E1	2.86102E-4	4.64916E-3	9.32693E-2	1.58672E1	-1.98657E1	-1.99462E1	1.49391E1	2.158E-9	2.51552E-3	2.51552E-3	6.32386E-3	2.25917E-2