[Scan]
initial_time=2016-01-27T18:38:19
final_time=2016-01-27T18:38:39
ip_count=19
run=1025
dataset=1
scan=8
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.29374E-2
qbias_imon=-3.76881E-6
ql1_vset=
ql1_vmon=-8.80023E1
ql1_imon=-6.96516E-10
ql2_vset=
ql2_vmon=-1.07288E-3
ql2_imon=3.99828E-10
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-1.79857E-9
ql4_vset=
ql4_vmon=6.67572E-4
ql4_imon=9.0071E-10
mult1=-1.08963E-8
mult2=-2.09982E-9
rf_tmon=-6.37498E-3
rf_agc=3.1495E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.76837E-3
ql5_imon=5.00369E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64601E0
bslens_imon=2.70847E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19793E1
lens5a_imon=1.99053E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12471E2
lens4a_imon=2.05069E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53737E1
cs_ef1b_imon=2.87235E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0462E2
lens23_imon=1.0226E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05023E1
cs_ea1_imon=2.58426E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98904E0
lens1_imon=1.42575E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64545E1
os_ef1alow_imon=2.98217E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03893E1
cs_ea2_imon=1.54453E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84203E1
cs_ef1a_imon=2.93943E-5
olens2_vset=0.0E0
olens2_vmon=1.19209E-3
olens2_imon=4.17256E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11233E1
os_restr1_imon=2.87096E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15126E1
os_ea1_imon=1.89319E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63629E1
os_ef1bup_imon=3.09442E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24225E0
cs_ionrep_imon=1.19343E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91857E2
cs_nozzle_imon=1.93413E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01821E1
cs_anode1_imon=2.96445E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99975E1
olens4_imon=1.24395E-10
tplens_vset=0.0E0
tplens_vmon=-1.62869E0
tplens_imon=-3.81874E-7
iondef3_vset=-2.0E1
iondef3_vmon=-2.00039E1
iondef3_imon=8.57283E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.97317E1
iondef2_imon=9.40364E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02891E2
lens6_imon=2.98634E-4
ql6_vset=1.0E-1
ql6_vmon=9.34362E-2
ql6_imon=4.34172E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25557E0
ionrepsh_imon=1.79273E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33791E1
lens5b_imon=2.18276E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74623E1
cs_ef2b_imon=3.13091E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.23721E-1
os_ea2_imon=-5.8697E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06135E2
lens4b_imon=2.00331E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71246E1
cs_ef2a_imon=3.182E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62624E0
os_ef2alow_imon=-2.52593E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.61899E-1
os_ef2bup_imon=-5.2123E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10869E1
os_restr2_imon=2.86749E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23039E2
cs_ionfoca_imon=6.30554E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02035E1
cs_anode2_imon=2.25202E-5
iondef1_vset=1.6E1
iondef1_vmon=1.56545E1
iondef1_imon=5.06534E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49605E1
iondef4_imon=5.29687E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27961E1
olens3_imon=2.273E-9
olens1_vset=0.0E0
olens1_vmon=1.45435E-3
olens1_imon=3.76213E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1423E0
cs_ionaccel_imon=-1.81698E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.021E2
cs_ionfocb_imon=1.47306E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5622E1
einzel_imon=7.70174E-6
window_vset=0.0E0
window_vmon=2.2174E-1
window_imon=-1.03852E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82624E2
mask1_imon=2.39126E-4
mask2_vset=0.0E0
mask2_vmon=-1.86512E1
mask2_imon=-6.52767E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92555E3
multa_neg_imon=7.91235E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93719E3
defgrida_imon=6.16034E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50112E3
multb_neg_imon=7.45697E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.29949E0
defgridb_imon=6.10125E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33701E1
os_fil1_imon=5.38182E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=8.25469E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63325E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30337E1
cs_fil1_imon=9.98638E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62997E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65832E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.43161E-2
os_fil2_imon=-2.43171E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.36562E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.50419E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29028E-1
cs_fil2_imon=-2.33904E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.87156E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21823E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=2.25329E-2
chamber_ion_pmon=2.15706E-9
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.84691E-1
res40_imon=-2.35912E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=200
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.76E2	1.0E0	1.47E2	4.1E1	-7.32464E-2	-8.80023E1	-9.05991E-4	-8.80004E1	2.6226E-4	4.86374E-3	9.34839E-2	1.58433E1	-1.98641E1	-1.99768E1	1.50575E1	2.15997E-9	2.51814E-3	2.51814E-3	6.31269E-3	2.26197E-2
2.0E0	1.959E3	4.0E0	3.16E2	1.6E2	-7.38649E-2	-8.80022E1	-1.00136E-3	-8.80004E1	4.05312E-4	4.72069E-3	9.36508E-2	1.56989E1	-1.98525E1	-1.99852E1	1.49872E1	2.15624E-9	2.52169E-3	2.52169E-3	6.33977E-3	2.25867E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.40967E-2	-8.80021E1	-1.07288E-3	-8.80002E1	5.00679E-4	4.95911E-3	9.377E-2	1.58469E1	-1.98782E1	-2.00021E1	1.50033E1	2.15987E-9	2.52538E-3	2.52538E-3	6.3074E-3	2.25524E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.40192E-2	-8.80024E1	-1.19209E-3	-8.80004E1	3.09944E-4	5.07832E-3	9.35078E-2	1.59813E1	-1.98717E1	-1.99378E1	1.49968E1	2.15716E-9	2.52169E-3	2.52169E-3	6.31278E-3	2.26059E-2
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-7.36328E-2	-8.80023E1	-1.04904E-3	-8.80004E1	3.57628E-4	4.98295E-3	9.38416E-2	1.57218E1	-1.9844E1	-1.99816E1	1.49938E1	2.158E-9	2.52757E-3	2.52757E-3	6.3074E-3	2.25329E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30146E-2	-8.80022E1	-9.77516E-4	-8.80006E1	4.05312E-4	4.81606E-3	9.34839E-2	1.5766E1	-1.98617E1	-1.99484E1	1.50238E1	2.15145E-9	2.5199E-3	2.5199E-3	6.31837E-3	2.2572E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.24736E-2	-8.8002E1	-1.0252E-3	-8.80002E1	4.52995E-4	4.50611E-3	9.35316E-2	1.59633E1	-1.98591E1	-1.9993E1	1.49773E1	2.15808E-9	2.52276E-3	2.52276E-3	6.31278E-3	2.25867E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.39421E-2	-8.80019E1	-1.04904E-3	-8.8E1	2.38419E-4	4.76837E-3	9.35078E-2	1.57969E1	-1.98801E1	-1.99378E1	1.50303E1	2.15332E-9	2.52757E-3	2.52757E-3	6.32936E-3	2.26113E-2
1.2E1	4.0E1	0.0E0	4.85E2	3.23E2	-7.3401E-2	-8.80018E1	-1.04904E-3	-8.8E1	2.86102E-4	4.91142E-3	9.35555E-2	1.58449E1	-1.98501E1	-1.9969E1	1.49638E1	2.15894E-9	2.52209E-3	2.52209E-3	6.3074E-3	2.26113E-2
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.25507E-2	-8.80019E1	-1.23978E-3	-8.80002E1	5.72205E-4	4.69685E-3	9.38892E-2	1.56669E1	-1.98281E1	-1.99419E1	1.50091E1	2.15987E-9	2.52867E-3	2.52867E-3	6.34588E-3	2.26506E-2
1.4E1	7.0E1	0.0E0	5.66E2	3.82E2	-7.30918E-2	-8.80021E1	-1.16825E-3	-8.79999E1	6.19888E-4	5.126E-3	9.36031E-2	1.59074E1	-1.98476E1	-1.99522E1	1.49944E1	2.15808E-9	2.52276E-3	2.52276E-3	6.32356E-3	2.25482E-2
1.5E1	2.2E1	0.0E0	6.06E2	4.11E2	-7.37103E-2	-8.80021E1	-9.29832E-4	-8.80001E1	4.05312E-4	4.72069E-3	9.3627E-2	1.59705E1	-1.98735E1	-1.99666E1	1.50431E1	2.15332E-9	2.52099E-3	2.52099E-3	6.31837E-3	2.26506E-2
1.6E1	1.47E2	0.0E0	6.47E2	4.41E2	-7.27053E-2	-8.8002E1	-9.53674E-4	-8.8E1	3.09944E-4	4.29153E-3	9.35555E-2	1.57632E1	-1.99035E1	-1.9927E1	1.49854E1	2.15519E-9	2.5199E-3	2.5199E-3	6.3074E-3	2.26113E-2
1.7E1	1.63E2	0.0E0	6.87E2	4.7E2	-7.21643E-2	-8.80021E1	-5.24521E-4	-8.79999E1	4.29153E-4	4.55379E-3	9.35793E-2	1.58047E1	-1.99017E1	-1.9969E1	1.4992E1	2.15987E-9	2.52318E-3	2.52318E-3	6.30192E-3	2.26703E-2
1.8E1	8.07E2	0.0E0	7.27E2	5.0E2	-7.19325E-2	-8.80022E1	-1.00136E-3	-8.80001E1	3.33786E-4	4.673E-3	9.34839E-2	1.57093E1	-1.98578E1	-1.9997E1	1.49735E1	2.16081E-9	2.52867E-3	2.52867E-3	6.32936E-3	2.27295E-2
1.9E1	9.26E2	0.0E0	7.68E2	5.29E2	-7.23189E-2	-8.80024E1	-1.07288E-3	-8.79998E1	3.33786E-4	4.76837E-3	9.31978E-2	1.58782E1	-1.98811E1	-1.99738E1	1.49877E1	2.15879E-9	2.51838E-3	2.51838E-3	6.33592E-3	2.26226E-2
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-7.25507E-2	-8.80023E1	-1.09673E-3	-8.80004E1	6.67572E-4	4.72069E-3	9.35793E-2	1.5766E1	-1.98717E1	-1.99089E1	1.49542E1	2.15726E-9	2.52342E-3	2.52342E-3	6.3445E-3	2.2544E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.26282E-2	-8.80021E1	-1.19209E-3	-8.80003E1	5.96046E-4	4.673E-3	9.36747E-2	1.58918E1	-1.99011E1	-1.99738E1	1.50317E1	2.159E-9	2.51739E-3	2.51739E-3	6.31278E-3	2.25867E-2
2.2E1	5.0E0	0.0E0	8.89E2	6.17E2	-7.27053E-2	-8.80021E1	-9.05991E-4	-8.8E1	6.4373E-4	5.10216E-3	9.34362E-2	1.56419E1	-1.98567E1	-1.99732E1	1.49461E1	2.15706E-9	2.51662E-3	2.51662E-3	6.3074E-3	2.2572E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.29374E-2	-8.80023E1	-1.07288E-3	-8.80004E1	6.67572E-4	4.76837E-3	9.34362E-2	1.56545E1	-1.97317E1	-2.00039E1	1.49605E1	2.15706E-9	2.51662E-3	2.51662E-3	6.31837E-3	2.25329E-2