[Scan]
initial_time=2016-01-27T18:38:46
final_time=2016-01-27T18:39:06
ip_count=19
run=1025
dataset=1
scan=9
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.21643E-2
qbias_imon=-3.77692E-6
ql1_vset=
ql1_vmon=-8.80022E1
ql1_imon=-6.30069E-10
ql2_vset=
ql2_vmon=-9.77516E-4
ql2_imon=4.50766E-10
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.77993E-9
ql4_vset=
ql4_vmon=3.57628E-4
ql4_imon=9.32241E-10
mult1=-1.00053E-8
mult2=-2.66871E-9
rf_tmon=-4.24205E-3
rf_agc=3.37241E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.03063E-3
ql5_imon=4.58777E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67978E0
bslens_imon=2.47247E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19724E1
lens5a_imon=1.9766E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12539E2
lens4a_imon=2.05079E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53562E1
cs_ef1b_imon=2.86954E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04634E2
lens23_imon=1.02408E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04681E1
cs_ea1_imon=2.59671E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02357E0
lens1_imon=1.47436E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64572E1
os_ef1alow_imon=2.99171E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0359E1
cs_ea2_imon=1.54479E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84508E1
cs_ef1a_imon=2.93261E-5
olens2_vset=0.0E0
olens2_vmon=1.21593E-3
olens2_imon=3.77977E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11292E1
os_restr1_imon=2.88647E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15547E1
os_ea1_imon=1.88812E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63593E1
os_ef1bup_imon=3.07712E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2226E0
cs_ionrep_imon=1.19298E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91915E2
cs_nozzle_imon=1.93438E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01893E1
cs_anode1_imon=2.97369E-5
olens4_vset=-3.0E1
olens4_vmon=-2.9998E1
olens4_imon=9.33409E-11
tplens_vset=0.0E0
tplens_vmon=-1.61725E0
tplens_imon=-3.4136E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99822E1
iondef3_imon=8.82925E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98585E1
iondef2_imon=9.41325E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02914E2
lens6_imon=2.98434E-4
ql6_vset=1.0E-1
ql6_vmon=9.29594E-2
ql6_imon=4.87041E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2403E0
ionrepsh_imon=1.7791E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33717E1
lens5b_imon=2.17021E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74537E1
cs_ef2b_imon=3.11605E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.28029E-1
os_ea2_imon=-4.05069E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0608E2
lens4b_imon=2.00616E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71276E1
cs_ef2a_imon=3.20002E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61257E0
os_ef2alow_imon=-2.6159E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.56579E-1
os_ef2bup_imon=-5.31887E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10913E1
os_restr2_imon=2.87891E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2305E2
cs_ionfoca_imon=6.31061E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01737E1
cs_anode2_imon=2.25254E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58492E1
iondef1_imon=5.20135E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50352E1
iondef4_imon=5.20831E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27956E1
olens3_imon=2.25103E-9
olens1_vset=0.0E0
olens1_vmon=1.54972E-3
olens1_imon=4.03941E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16678E0
cs_ionaccel_imon=-1.75455E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02094E2
cs_ionfocb_imon=1.4741E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56201E1
einzel_imon=7.60495E-6
window_vset=0.0E0
window_vmon=2.17343E-1
window_imon=-9.68887E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82637E2
mask1_imon=2.39088E-4
mask2_vset=0.0E0
mask2_vmon=-1.86434E1
mask2_imon=-5.9047E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92705E3
multa_neg_imon=7.35685E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93709E3
defgrida_imon=6.20655E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50119E3
multb_neg_imon=7.46304E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.42183E0
defgridb_imon=6.06143E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33706E1
os_fil1_imon=4.572E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.60534E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63677E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30321E1
cs_fil1_imon=9.96924E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63885E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65946E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.45852E-2
os_fil2_imon=-2.31158E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.71925E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.43931E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.325E-1
cs_fil2_imon=-1.86709E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.55668E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21758E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.26832E-2
chamber_ion_pmon=2.15716E-9
chamber_cvt_pmon=2.52492E-3
foreline_cvt_pmon=2.52492E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.52394E-1
res40_imon=-2.54382E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.93E2	0.0E0	1.47E2	4.1E1	-7.20871E-2	-8.80023E1	-8.58307E-4	-8.80002E1	3.57628E-4	5.10216E-3	9.35555E-2	1.59813E1	-1.98825E1	-1.99738E1	1.50106E1	2.15533E-9	2.52384E-3	2.52384E-3	6.32896E-3	2.26252E-2
2.0E0	2.004E3	1.0E0	3.16E2	1.6E2	-7.35556E-2	-8.80022E1	-6.67572E-4	-8.79999E1	4.52995E-4	4.76837E-3	9.3317E-2	1.57795E1	-1.98651E1	-1.9927E1	1.4977E1	2.158E-9	2.52428E-3	2.52428E-3	6.29645E-3	2.25524E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.30146E-2	-8.80022E1	-1.07288E-3	-8.80001E1	3.09944E-4	4.98295E-3	9.35793E-2	1.57059E1	-1.98888E1	-1.99922E1	1.50406E1	2.15519E-9	2.51662E-3	2.51662E-3	6.31288E-3	2.26113E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.37103E-2	-8.80023E1	-9.05991E-4	-8.8E1	3.57628E-4	4.79221E-3	9.3317E-2	1.5805E1	-1.98664E1	-1.99591E1	1.50046E1	2.15314E-9	2.52473E-3	2.52473E-3	6.33538E-3	2.24971E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.34782E-2	-8.80021E1	-8.34465E-4	-8.80003E1	6.19888E-4	4.64916E-3	9.31978E-2	1.58924E1	-1.98651E1	-1.9951E1	1.49831E1	2.16085E-9	2.52492E-3	2.52492E-3	6.32896E-3	2.25289E-2
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.31692E-2	-8.80021E1	-1.00136E-3	-8.80003E1	2.6226E-4	4.93526E-3	9.33886E-2	1.58876E1	-1.98284E1	-1.99738E1	1.50388E1	2.158E-9	2.5199E-3	2.5199E-3	6.3074E-3	2.25329E-2
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-7.36328E-2	-8.80022E1	-5.96046E-4	-8.80002E1	2.38419E-4	5.00679E-3	9.34124E-2	1.56957E1	-1.98226E1	-2.00033E1	1.49998E1	2.15716E-9	2.52061E-3	2.52061E-3	6.31817E-3	2.26445E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.40192E-2	-8.80022E1	-7.39098E-4	-8.80001E1	2.14577E-4	4.60148E-3	9.34839E-2	1.56991E1	-1.98465E1	-1.99922E1	1.5016E1	2.15441E-9	2.51954E-3	2.51954E-3	6.32356E-3	2.25867E-2
1.2E1	3.9E1	0.0E0	4.85E2	3.23E2	-7.33239E-2	-8.80024E1	-8.58307E-4	-8.80001E1	4.76837E-5	5.05447E-3	9.3317E-2	1.58569E1	-1.98541E1	-1.99762E1	1.50256E1	2.16078E-9	2.52027E-3	2.52027E-3	6.32978E-3	2.26369E-2
1.3E1	3.0E0	0.0E0	5.25E2	3.53E2	-7.27828E-2	-8.80021E1	-1.19209E-3	-8.80002E1	4.52995E-4	4.57764E-3	9.33647E-2	1.56831E1	-1.984E1	-1.99772E1	1.49837E1	2.159E-9	2.52599E-3	2.52599E-3	6.32356E-3	2.26639E-2
1.4E1	8.3E1	0.0E0	5.66E2	3.82E2	-7.286E-2	-8.80023E1	-9.77516E-4	-8.8E1	4.52995E-4	4.72069E-3	9.35555E-2	1.56797E1	-1.98669E1	-1.9942E1	1.5007E1	2.15825E-9	2.51575E-3	2.51575E-3	6.33863E-3	2.25772E-2
1.5E1	3.0E1	0.0E0	6.06E2	4.11E2	-7.286E-2	-8.80023E1	-9.29832E-4	-8.80002E1	2.86102E-4	4.52995E-3	9.33886E-2	1.59227E1	-1.98434E1	-1.99755E1	1.49599E1	2.15894E-9	2.51443E-3	2.51443E-3	6.3074E-3	2.26113E-2
1.6E1	1.48E2	0.0E0	6.47E2	4.41E2	-7.22418E-2	-8.80022E1	-6.67572E-4	-8.8E1	6.4373E-4	4.74453E-3	9.34839E-2	1.56722E1	-1.986E1	-1.99671E1	1.50208E1	2.15647E-9	2.5199E-3	2.5199E-3	6.30221E-3	2.25958E-2
1.7E1	2.0E2	0.0E0	6.87E2	4.7E2	-7.27053E-2	-8.80021E1	-1.0252E-3	-8.80001E1	6.4373E-4	4.79221E-3	9.36508E-2	1.5902E1	-1.98537E1	-1.99732E1	1.50016E1	2.15887E-9	2.51804E-3	2.51804E-3	6.35223E-3	2.26569E-2
1.8E1	8.03E2	0.0E0	7.27E2	5.0E2	-7.29374E-2	-8.80017E1	-5.96046E-4	-8.8E1	4.29153E-4	4.673E-3	9.36747E-2	1.56941E1	-1.98591E1	-1.99492E1	1.4989E1	2.15613E-9	2.52099E-3	2.52099E-3	6.3074E-3	2.2572E-2
1.9E1	9.0E2	2.0E0	7.68E2	5.29E2	-7.29374E-2	-8.80019E1	-9.77516E-4	-8.79999E1	7.39098E-4	4.62532E-3	9.35078E-2	1.5615E1	-1.98275E1	-2.0034E1	1.50064E1	2.15808E-9	2.51739E-3	2.51739E-3	6.32356E-3	2.27607E-2
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-7.29374E-2	-8.80018E1	-8.82149E-4	-8.8E1	3.8147E-4	5.05447E-3	9.35793E-2	1.58221E1	-1.98122E1	-1.996E1	1.501E1	2.15519E-9	2.52099E-3	2.52099E-3	6.29645E-3	2.27097E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.3401E-2	-8.8002E1	-1.00136E-3	-8.8E1	6.4373E-4	4.64916E-3	9.34601E-2	1.59237E1	-1.98837E1	-1.99324E1	1.49976E1	2.15706E-9	2.52538E-3	2.52538E-3	6.32936E-3	2.25524E-2
2.2E1	4.0E0	0.0E0	8.89E2	6.17E2	-7.27053E-2	-8.80022E1	-9.05991E-4	-8.8E1	4.05312E-4	4.8399E-3	9.31501E-2	1.56262E1	-1.98989E1	-1.99602E1	1.50214E1	2.158E-9	2.52538E-3	2.52538E-3	6.3074E-3	2.26113E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.21643E-2	-8.80022E1	-9.77516E-4	-8.80002E1	3.57628E-4	5.03063E-3	9.29594E-2	1.58492E1	-1.98585E1	-1.99822E1	1.50352E1	2.15716E-9	2.52492E-3	2.52492E-3	6.31278E-3	2.26832E-2