[Scan]
initial_time=2016-01-27T18:39:13
final_time=2016-01-27T18:39:32
ip_count=19
run=1025
dataset=1
scan=10
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.24736E-2
qbias_imon=-3.75961E-6
ql1_vset=
ql1_vmon=-8.80022E1
ql1_imon=-6.45006E-10
ql2_vset=
ql2_vmon=-1.19209E-3
ql2_imon=4.06587E-10
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.78219E-9
ql4_vset=
ql4_vmon=2.6226E-4
ql4_imon=8.43596E-10
mult1=-9.31021E-9
mult2=-2.89376E-9
rf_tmon=-4.9578E-3
rf_agc=3.31144E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.29289E-3
ql5_imon=4.66514E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6518E0
bslens_imon=2.45471E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20141E1
lens5a_imon=1.97905E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.125E2
lens4a_imon=2.05243E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53592E1
cs_ef1b_imon=2.87513E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04597E2
lens23_imon=1.02149E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04895E1
cs_ea1_imon=2.60095E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01801E0
lens1_imon=1.54394E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6444E1
os_ef1alow_imon=2.98217E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04229E1
cs_ea2_imon=1.54731E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84174E1
cs_ef1a_imon=2.93143E-5
olens2_vset=0.0E0
olens2_vmon=1.23978E-3
olens2_imon=4.06599E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11396E1
os_restr1_imon=2.87931E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15033E1
os_ea1_imon=1.89215E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63664E1
os_ef1bup_imon=3.08747E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23877E0
cs_ionrep_imon=1.19135E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91908E2
cs_nozzle_imon=1.93417E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01832E1
cs_anode1_imon=2.96063E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99973E1
olens4_imon=1.04964E-10
tplens_vset=0.0E0
tplens_vmon=-1.62173E0
tplens_imon=-3.88826E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99484E1
iondef3_imon=9.12555E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.989E1
iondef2_imon=9.40712E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02945E2
lens6_imon=2.98155E-4
ql6_vset=1.0E-1
ql6_vmon=9.32693E-2
ql6_imon=4.64833E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26311E0
ionrepsh_imon=1.7896E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33611E1
lens5b_imon=2.18346E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74658E1
cs_ef2b_imon=3.13057E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.64856E-1
os_ea2_imon=-5.41779E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06094E2
lens4b_imon=2.00484E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71246E1
cs_ef2a_imon=3.19555E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62624E0
os_ef2alow_imon=-2.55721E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.38731E-1
os_ef2bup_imon=-5.23315E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10706E1
os_restr2_imon=2.87722E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23063E2
cs_ionfoca_imon=6.31319E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01763E1
cs_anode2_imon=2.25376E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58852E1
iondef1_imon=5.05839E-6
iondef4_vset=1.53E1
iondef4_vmon=1.4989E1
iondef4_imon=5.35595E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27959E1
olens3_imon=2.30153E-9
olens1_vset=0.0E0
olens1_vmon=1.78814E-3
olens1_imon=3.83234E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13883E0
cs_ionaccel_imon=-1.85868E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02101E2
cs_ionfocb_imon=1.47285E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56278E1
einzel_imon=7.67046E-6
window_vset=0.0E0
window_vmon=2.31008E-1
window_imon=-1.10455E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82639E2
mask1_imon=2.39105E-4
mask2_vset=0.0E0
mask2_vmon=-1.86448E1
mask2_imon=-6.90995E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92637E3
multa_neg_imon=7.29706E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93705E3
defgrida_imon=6.73044E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50141E3
multb_neg_imon=7.3944E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.68812E0
defgridb_imon=6.06301E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33682E1
os_fil1_imon=4.15389E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.77974E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63709E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30343E1
cs_fil1_imon=9.98285E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62517E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66112E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.48136E-2
os_fil2_imon=-2.52438E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.53938E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.64837E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30651E-1
cs_fil2_imon=-2.2232E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.09567E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21731E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30182E-3
inlet_lpb_pmon=2.25968E-2
chamber_ion_pmon=2.15696E-9
chamber_cvt_pmon=2.5225E-3
foreline_cvt_pmon=2.5225E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.16548E-1
res40_imon=-2.39039E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=168
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.06E2	0.0E0	1.47E2	4.1E1	-7.19325E-2	-8.80023E1	-1.00136E-3	-8.79999E1	3.33786E-4	4.64916E-3	9.31978E-2	1.57346E1	-1.98992E1	-1.99273E1	1.49566E1	2.15817E-9	2.51709E-3	2.51709E-3	6.34982E-3	2.25819E-2
2.0E0	1.965E3	1.0E0	3.16E2	1.6E2	-7.31692E-2	-8.80021E1	-9.53674E-4	-8.80003E1	4.76837E-4	4.72069E-3	9.31501E-2	1.57182E1	-1.98549E1	-1.99732E1	1.5013E1	2.15706E-9	2.51662E-3	2.51662E-3	6.31837E-3	2.2572E-2
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.27828E-2	-8.80024E1	-1.07288E-3	-8.80003E1	4.76837E-4	4.62532E-3	9.33647E-2	1.57406E1	-1.9865E1	-1.99612E1	1.50022E1	2.15791E-9	2.5225E-3	2.5225E-3	6.3074E-3	2.25569E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.27828E-2	-8.80027E1	-1.0252E-3	-8.80003E1	8.10623E-4	4.79221E-3	9.27687E-2	1.59889E1	-1.98479E1	-1.99682E1	1.49879E1	2.15658E-9	2.51956E-3	2.51956E-3	6.32273E-3	2.27009E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.29374E-2	-8.80027E1	-1.07288E-3	-8.80005E1	5.00679E-4	4.93526E-3	9.30309E-2	1.59489E1	-1.98537E1	-1.99438E1	1.50274E1	2.15358E-9	2.51793E-3	2.51793E-3	6.28967E-3	2.25713E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27828E-2	-8.80025E1	-1.16825E-3	-8.80004E1	3.57628E-4	4.88758E-3	9.29356E-2	1.5946E1	-1.98452E1	-1.99797E1	1.49692E1	2.15073E-9	2.52061E-3	2.52061E-3	6.3074E-3	2.25674E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.22418E-2	-8.80023E1	-1.12057E-3	-8.80003E1	3.33786E-4	5.17368E-3	9.31501E-2	1.5705E1	-1.98226E1	-1.99576E1	1.50665E1	2.158E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.25329E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.23964E-2	-8.80022E1	-1.45435E-3	-8.80003E1	4.29153E-4	4.95911E-3	9.3174E-2	1.56845E1	-1.98501E1	-1.99882E1	1.49524E1	2.15907E-9	2.52342E-3	2.52342E-3	6.33388E-3	2.25819E-2
1.2E1	3.8E1	0.0E0	4.85E2	3.23E2	-7.23964E-2	-8.80025E1	-1.4782E-3	-8.80007E1	4.05312E-4	4.95911E-3	9.31025E-2	1.59489E1	-1.98483E1	-1.99456E1	1.50437E1	2.158E-9	2.51552E-3	2.51552E-3	6.31288E-3	2.26703E-2
1.3E1	2.0E0	0.0E0	5.25E2	3.53E2	-7.21643E-2	-8.80024E1	-1.00136E-3	-8.80006E1	3.09944E-4	5.10216E-3	9.31501E-2	1.58552E1	-1.98603E1	-1.99858E1	1.49752E1	2.15519E-9	2.52209E-3	2.52209E-3	6.29645E-3	2.25917E-2
1.4E1	8.1E1	0.0E0	5.66E2	3.82E2	-7.17779E-2	-8.80025E1	-6.91414E-4	-8.80004E1	6.19888E-4	4.57764E-3	9.35555E-2	1.58065E1	-1.98651E1	-1.99396E1	1.498E1	2.15894E-9	2.52318E-3	2.52318E-3	6.3074E-3	2.2572E-2
1.5E1	2.3E1	0.0E0	6.06E2	4.11E2	-7.23189E-2	-8.80023E1	-8.10623E-4	-8.80001E1	6.91414E-4	4.91142E-3	9.34839E-2	1.59152E1	-1.98531E1	-1.99372E1	1.50286E1	2.15613E-9	2.5199E-3	2.5199E-3	6.31837E-3	2.2631E-2
1.6E1	1.6E2	0.0E0	6.47E2	4.41E2	-7.23964E-2	-8.80024E1	-9.05991E-4	-8.80004E1	7.62939E-4	4.76837E-3	9.33886E-2	1.58089E1	-1.98975E1	-1.9942E1	1.50461E1	2.15706E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.2631E-2
1.7E1	1.83E2	0.0E0	6.87E2	4.7E2	-7.14689E-2	-8.80021E1	-9.53674E-4	-8.80003E1	8.82149E-4	4.673E-3	9.35316E-2	1.57206E1	-1.98771E1	-1.99744E1	1.4956E1	2.15613E-9	2.52209E-3	2.52209E-3	6.3074E-3	2.25329E-2
1.8E1	8.02E2	0.0E0	7.27E2	5.0E2	-7.33239E-2	-8.80023E1	-1.12057E-3	-8.80002E1	3.09944E-4	5.05447E-3	9.32217E-2	1.58274E1	-1.98605E1	-1.9965E1	1.49992E1	2.15238E-9	2.52209E-3	2.52209E-3	6.30192E-3	2.25917E-2
1.9E1	9.37E2	0.0E0	7.68E2	5.29E2	-7.31692E-2	-8.80022E1	-1.12057E-3	-8.80001E1	5.24521E-4	4.91142E-3	9.32455E-2	1.58264E1	-1.98661E1	-1.99659E1	1.50418E1	2.14982E-9	2.51847E-3	2.51847E-3	6.31817E-3	2.26059E-2
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-7.27828E-2	-8.80018E1	-1.57356E-3	-8.80002E1	5.00679E-4	4.45843E-3	9.3174E-2	1.59949E1	-1.98659E1	-1.9926E1	1.49929E1	2.15706E-9	2.51443E-3	2.51443E-3	6.35692E-3	2.26113E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.27828E-2	-8.80022E1	-1.21593E-3	-8.80003E1	4.29153E-4	4.74453E-3	9.34839E-2	1.58811E1	-1.98594E1	-1.99608E1	1.49902E1	2.15706E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.2572E-2
2.2E1	6.0E0	0.0E0	8.89E2	6.17E2	-7.20871E-2	-8.80023E1	-1.12057E-3	-8.80002E1	4.76837E-4	5.07832E-3	9.34839E-2	1.57114E1	-1.98508E1	-1.99892E1	1.50106E1	2.159E-9	2.52276E-3	2.52276E-3	6.31817E-3	2.25867E-2
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.24736E-2	-8.80022E1	-1.19209E-3	-8.80002E1	2.6226E-4	5.29289E-3	9.32693E-2	1.58852E1	-1.989E1	-1.99484E1	1.4989E1	2.15696E-9	2.5225E-3	2.5225E-3	6.30182E-3	2.25968E-2