[Scan]
initial_time=2016-01-27T18:39:39
final_time=2016-01-27T18:39:59
ip_count=19
run=1025
dataset=1
scan=11
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.286E-2
qbias_imon=-3.7741E-6
ql1_vset=
ql1_vmon=-8.80022E1
ql1_imon=-6.86717E-10
ql2_vset=
ql2_vmon=-6.4373E-4
ql2_imon=4.39703E-10
ql3_vset=
ql3_vmon=-8.79998E1
ql3_imon=-1.70304E-9
ql4_vset=
ql4_vmon=5.48363E-4
ql4_imon=8.93486E-10
mult1=-9.86583E-9
mult2=-2.75265E-9
rf_tmon=-4.53307E-3
rf_agc=3.4017E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.05447E-3
ql5_imon=4.59528E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65142E0
bslens_imon=2.20384E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1991E1
lens5a_imon=1.98902E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1251E2
lens4a_imon=2.05489E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53492E1
cs_ef1b_imon=2.86616E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04615E2
lens23_imon=1.02117E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0486E1
cs_ea1_imon=2.58803E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01019E0
lens1_imon=1.61579E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64487E1
os_ef1alow_imon=2.98374E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04299E1
cs_ea2_imon=1.55872E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.843E1
cs_ef1a_imon=2.92333E-5
olens2_vset=0.0E0
olens2_vmon=1.38283E-3
olens2_imon=4.01938E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11313E1
os_restr1_imon=2.88075E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15117E1
os_ea1_imon=1.86289E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63696E1
os_ef1bup_imon=3.07618E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24061E0
cs_ionrep_imon=1.21035E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91884E2
cs_nozzle_imon=1.93611E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01734E1
cs_anode1_imon=2.95982E-5
olens4_vset=-3.0E1
olens4_vmon=-2.9998E1
olens4_imon=9.77039E-11
tplens_vset=0.0E0
tplens_vmon=-1.62589E0
tplens_imon=-3.87667E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99644E1
iondef3_imon=8.63193E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.9844E1
iondef2_imon=9.7391E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02935E2
lens6_imon=2.98216E-4
ql6_vset=1.0E-1
ql6_vmon=9.34124E-2
ql6_imon=5.09048E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23723E0
ionrepsh_imon=1.7615E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33753E1
lens5b_imon=2.21127E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7463E1
cs_ef2b_imon=3.12483E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.51723E-1
os_ea2_imon=-5.41779E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06065E2
lens4b_imon=2.00432E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71136E1
cs_ef2a_imon=3.18443E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.66205E0
os_ef2alow_imon=-2.5294E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.37958E-1
os_ef2bup_imon=-5.26211E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10745E1
os_restr2_imon=2.85116E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23077E2
cs_ionfoca_imon=6.31145E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01775E1
cs_anode2_imon=2.2515E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57301E1
iondef1_imon=5.18875E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49896E1
iondef4_imon=5.34031E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27958E1
olens3_imon=2.30227E-9
olens1_vset=0.0E0
olens1_vmon=1.71661E-3
olens1_imon=4.13632E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12338E0
cs_ionaccel_imon=-1.88069E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02082E2
cs_ionfocb_imon=1.47214E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56162E1
einzel_imon=7.62297E-6
window_vset=0.0E0
window_vmon=1.89112E-1
window_imon=-9.64382E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8262E2
mask1_imon=2.39052E-4
mask2_vset=0.0E0
mask2_vmon=-1.86729E1
mask2_imon=-6.31916E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92654E3
multa_neg_imon=7.84109E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93719E3
defgrida_imon=6.38919E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50112E3
multb_neg_imon=7.24492E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.6393E0
defgridb_imon=6.46625E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33656E1
os_fil1_imon=4.41357E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.21791E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63603E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30378E1
cs_fil1_imon=9.97912E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62743E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6617E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.38808E-2
os_fil2_imon=-2.48577E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.91587E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.61709E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29943E-1
cs_fil2_imon=-2.33711E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.55518E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21628E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.26252E-2
chamber_ion_pmon=2.11256E-9
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40077E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.86622E-1
res40_imon=-2.37128E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=211
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.33E2	0.0E0	1.47E2	4.1E1	-7.29374E-2	-8.80021E1	-1.23978E-3	-8.80006E1	4.52995E-4	4.88758E-3	9.34124E-2	1.58607E1	-1.98389E1	-1.99504E1	1.49306E1	2.15741E-9	2.51621E-3	2.51621E-3	6.31974E-3	2.26039E-2
2.0E0	1.984E3	3.0E0	3.16E2	1.6E2	-7.32464E-2	-8.80022E1	-1.23978E-3	-8.80002E1	3.8147E-4	4.95911E-3	9.31501E-2	1.56679E1	-1.98467E1	-1.99583E1	1.49977E1	2.15913E-9	2.51575E-3	2.51575E-3	6.29703E-3	2.25958E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.35556E-2	-8.80022E1	-1.19209E-3	-8.80001E1	2.86102E-4	4.79221E-3	9.34362E-2	1.56091E1	-1.98535E1	-1.99762E1	1.49952E1	2.15965E-9	2.52384E-3	2.52384E-3	6.33112E-3	2.25713E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.201E-2	-8.80022E1	-1.04904E-3	-8.80002E1	1.43051E-4	4.95911E-3	9.33886E-2	1.58244E1	-1.98647E1	-1.99573E1	1.50208E1	2.15546E-9	2.52236E-3	2.52236E-3	6.33388E-3	2.25819E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.13915E-2	-8.80021E1	-1.26362E-3	-8.79999E1	0.0E0	4.93526E-3	9.33886E-2	1.59219E1	-1.98597E1	-1.99101E1	1.50058E1	2.15613E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.2631E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.201E-2	-8.80022E1	-8.34465E-4	-8.80001E1	3.09944E-4	4.98295E-3	9.36031E-2	1.56563E1	-1.98563E1	-1.99702E1	1.49481E1	2.15894E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.26113E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30146E-2	-8.80023E1	-1.16825E-3	-8.80003E1	-2.38419E-5	4.93526E-3	9.3317E-2	1.56635E1	-1.98705E1	-1.99756E1	1.49818E1	2.15314E-9	2.52362E-3	2.52362E-3	6.31299E-3	2.27172E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.30918E-2	-8.80027E1	-1.0252E-3	-8.80002E1	-4.76837E-5	4.74453E-3	9.34362E-2	1.5733E1	-1.98659E1	-1.99461E1	1.50286E1	2.15533E-9	2.52276E-3	2.52276E-3	6.29128E-3	2.26639E-2
1.2E1	4.7E1	0.0E0	4.85E2	3.23E2	-7.29374E-2	-8.80023E1	-8.82149E-4	-8.80002E1	2.6226E-4	4.74453E-3	9.34124E-2	1.58954E1	-1.98969E1	-1.99918E1	1.50214E1	2.158E-9	2.5199E-3	2.5199E-3	6.32936E-3	2.2572E-2
1.3E1	2.0E0	0.0E0	5.25E2	3.53E2	-7.27828E-2	-8.80025E1	-8.10623E-4	-8.80004E1	-2.38419E-5	4.81606E-3	9.35555E-2	1.56935E1	-1.98617E1	-1.99679E1	1.49848E1	2.15987E-9	2.52647E-3	2.52647E-3	6.30192E-3	2.26703E-2
1.4E1	6.3E1	0.0E0	5.66E2	3.82E2	-7.29374E-2	-8.80025E1	-1.04904E-3	-8.80001E1	7.15256E-5	4.41074E-3	9.3627E-2	1.57897E1	-1.98495E1	-1.9984E1	1.50274E1	2.15257E-9	2.52923E-3	2.52923E-3	6.33436E-3	2.25867E-2
1.5E1	3.4E1	0.0E0	6.06E2	4.11E2	-7.15461E-2	-8.80026E1	-1.07288E-3	-8.80004E1	1.90735E-4	4.95911E-3	9.34601E-2	1.58155E1	-1.98567E1	-1.9975E1	1.50286E1	2.12914E-9	2.52757E-3	2.52757E-3	6.32386E-3	2.26506E-2
1.6E1	1.46E2	0.0E0	6.47E2	4.41E2	-7.15461E-2	-8.80026E1	-8.10623E-4	-8.8E1	2.86102E-4	4.79221E-3	9.35078E-2	1.5872E1	-1.98434E1	-1.99384E1	1.49798E1	2.11807E-9	2.52428E-3	2.52428E-3	6.29098E-3	2.269E-2
1.7E1	1.91E2	0.0E0	6.87E2	4.7E2	-7.17007E-2	-8.80024E1	-1.00136E-3	-8.80001E1	2.14577E-4	4.69685E-3	9.34839E-2	1.5705E1	-1.98332E1	-1.99894E1	1.49969E1	2.14492E-9	2.52099E-3	2.52099E-3	6.31837E-3	2.26113E-2
1.8E1	8.3E2	1.0E0	7.27E2	5.0E2	-7.18554E-2	-8.80021E1	-8.34465E-4	-8.80001E1	0.0E0	5.14984E-3	9.35078E-2	1.5841E1	-1.98688E1	-1.99703E1	1.49818E1	2.12249E-9	2.51847E-3	2.51847E-3	6.31817E-3	2.27607E-2
1.9E1	9.53E2	0.0E0	7.68E2	5.29E2	-7.13915E-2	-8.80022E1	-7.86781E-4	-8.79999E1	9.53674E-5	5.29289E-3	9.34601E-2	1.59288E1	-1.98535E1	-1.99532E1	1.49644E1	2.1144E-9	2.51443E-3	2.51443E-3	6.33486E-3	2.27097E-2
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-7.17779E-2	-8.80024E1	-6.19888E-4	-8.79999E1	4.29153E-4	5.10216E-3	9.34839E-2	1.56767E1	-1.98555E1	-1.99708E1	1.5031E1	2.11346E-9	2.51954E-3	2.51954E-3	6.33977E-3	2.25674E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.17779E-2	-8.80023E1	-8.34465E-4	-8.8E1	4.76837E-4	5.17368E-3	9.33886E-2	1.58618E1	-1.98585E1	-1.99492E1	1.49947E1	2.11532E-9	2.51334E-3	2.51334E-3	6.30192E-3	2.269E-2
2.2E1	3.0E0	0.0E0	8.89E2	6.17E2	-7.201E-2	-8.80024E1	-1.0252E-3	-8.80004E1	4.29153E-4	5.03063E-3	9.3627E-2	1.59831E1	-1.98561E1	-1.99594E1	1.49397E1	2.1236E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.26506E-2
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.286E-2	-8.80022E1	-6.4373E-4	-8.79998E1	5.48363E-4	5.05447E-3	9.34124E-2	1.57301E1	-1.9844E1	-1.99644E1	1.49896E1	2.11256E-9	2.51739E-3	2.51739E-3	6.32356E-3	2.26252E-2