[Scan]
initial_time=2016-01-27T18:40:06
final_time=2016-01-27T18:40:26
ip_count=19
run=1025
dataset=1
scan=12
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.20871E-2
qbias_imon=-3.81306E-6
ql1_vset=
ql1_vmon=-8.80022E1
ql1_imon=-5.72014E-10
ql2_vset=
ql2_vmon=-1.28746E-3
ql2_imon=4.55594E-10
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.80027E-9
ql4_vset=
ql4_vmon=1.43051E-4
ql4_imon=9.29546E-10
mult1=-9.92473E-9
mult2=-2.7065E-9
rf_tmon=-5.46898E-3
rf_agc=3.19709E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.76837E-3
ql5_imon=4.74E-10
bslens_vset=-6.2E0
bslens_vmon=-6.69438E0
bslens_imon=2.72881E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19514E1
lens5a_imon=1.99461E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1246E2
lens4a_imon=2.04902E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53484E1
cs_ef1b_imon=2.86593E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04615E2
lens23_imon=1.02016E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05162E1
cs_ea1_imon=2.59339E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0023E0
lens1_imon=1.30846E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64825E1
os_ef1alow_imon=2.98342E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03913E1
cs_ea2_imon=1.52921E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84322E1
cs_ef1a_imon=2.929E-5
olens2_vset=0.0E0
olens2_vmon=1.23978E-3
olens2_imon=3.97587E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11364E1
os_restr1_imon=2.86845E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15312E1
os_ea1_imon=1.88069E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63695E1
os_ef1bup_imon=3.09803E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2533E0
cs_ionrep_imon=1.19539E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91882E2
cs_nozzle_imon=1.93543E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01755E1
cs_anode1_imon=2.96144E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99978E1
olens4_imon=1.09529E-10
tplens_vset=0.0E0
tplens_vmon=-1.57654E0
tplens_imon=-3.02951E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99648E1
iondef3_imon=8.6842E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98719E1
iondef2_imon=9.52055E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02924E2
lens6_imon=2.98396E-4
ql6_vset=1.0E-1
ql6_vmon=9.30786E-2
ql6_imon=4.89521E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24309E0
ionrepsh_imon=1.79742E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33724E1
lens5b_imon=2.18315E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74573E1
cs_ef2b_imon=3.12326E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.40909E-1
os_ea2_imon=-5.91347E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06086E2
lens4b_imon=2.00634E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71138E1
cs_ef2a_imon=3.19317E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62879E0
os_ef2alow_imon=-2.56184E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.37958E-1
os_ef2bup_imon=-5.28283E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10913E1
os_restr2_imon=2.86918E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23064E2
cs_ionfoca_imon=6.3155E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01833E1
cs_anode2_imon=2.22443E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57559E1
iondef1_imon=5.16937E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49692E1
iondef4_imon=5.37049E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27962E1
olens3_imon=2.33608E-9
olens1_vset=0.0E0
olens1_vmon=1.52588E-3
olens1_imon=4.06706E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.17459E0
cs_ionaccel_imon=-1.88069E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0208E2
cs_ionfocb_imon=1.47259E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56435E1
einzel_imon=7.70226E-6
window_vset=0.0E0
window_vmon=1.92115E-1
window_imon=-9.43659E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82645E2
mask1_imon=2.39185E-4
mask2_vset=0.0E0
mask2_vmon=-1.86602E1
mask2_imon=-6.69758E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92655E3
multa_neg_imon=7.28187E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93713E3
defgrida_imon=6.36621E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50122E3
multb_neg_imon=7.14128E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.44042E0
defgridb_imon=6.05619E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3364E1
os_fil1_imon=4.33173E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=8.09788E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63473E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30368E1
cs_fil1_imon=9.98498E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63357E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65741E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.55092E-2
os_fil2_imon=-2.57587E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.23872E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.64915E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29393E-1
cs_fil2_imon=-2.34762E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.0281E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21726E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=2.2631E-2
chamber_ion_pmon=2.15706E-9
chamber_cvt_pmon=2.52099E-3
foreline_cvt_pmon=2.52099E-3
chamber_tmon=1.40018E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.31371E-1
res40_imon=-2.4321E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=182
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.7E2	1.0E0	1.47E2	4.1E1	-7.29374E-2	-8.80021E1	-9.29832E-4	-8.80001E1	4.05312E-4	4.88758E-3	9.3627E-2	1.59595E1	-1.98434E1	-1.99732E1	1.50076E1	2.11991E-9	2.51771E-3	2.51771E-3	6.31288E-3	2.26703E-2
2.0E0	2.042E3	2.0E0	3.16E2	1.6E2	-7.29374E-2	-8.80025E1	-1.21593E-3	-8.79998E1	3.33786E-4	4.79221E-3	9.33647E-2	1.5771E1	-1.98663E1	-1.99528E1	1.49662E1	2.14524E-9	2.52061E-3	2.52061E-3	6.29665E-3	2.25674E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.24736E-2	-8.80021E1	-1.0252E-3	-8.8E1	6.19888E-4	4.98295E-3	9.33409E-2	1.57472E1	-1.98729E1	-1.99591E1	1.49599E1	2.15696E-9	2.51804E-3	2.51804E-3	6.31299E-3	2.25769E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.20871E-2	-8.80022E1	-9.29832E-4	-8.8E1	3.8147E-4	4.86374E-3	9.35316E-2	1.59501E1	-1.9824E1	-1.9985E1	1.50491E1	2.1234E-9	2.51632E-3	2.51632E-3	6.32896E-3	2.25674E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.22418E-2	-8.80021E1	-1.4782E-3	-8.79999E1	6.19888E-4	5.00679E-3	9.38892E-2	1.59705E1	-1.98332E1	-1.9975E1	1.49806E1	2.1232E-9	2.51919E-3	2.51919E-3	6.31269E-3	2.26008E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.29374E-2	-8.80022E1	-1.35899E-3	-8.80002E1	5.72205E-4	4.88758E-3	9.36985E-2	1.59813E1	-1.98519E1	-1.99852E1	1.4986E1	2.11348E-9	2.51552E-3	2.51552E-3	6.30192E-3	2.25329E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27828E-2	-8.80019E1	-1.0252E-3	-8.79998E1	4.05312E-4	4.69685E-3	9.34124E-2	1.57737E1	-1.99036E1	-1.99307E1	1.50004E1	2.11256E-9	2.51693E-3	2.51693E-3	6.30182E-3	2.26569E-2
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-7.24736E-2	-8.80022E1	-1.14441E-3	-8.79997E1	5.24521E-4	4.8399E-3	9.33647E-2	1.57164E1	-1.98615E1	-1.99378E1	1.50346E1	2.11978E-9	2.51525E-3	2.51525E-3	6.3074E-3	2.25289E-2
1.2E1	3.2E1	0.0E0	4.85E2	3.23E2	-7.33239E-2	-8.80023E1	-1.28746E-3	-8.79998E1	1.66893E-4	5.03063E-3	9.32932E-2	1.56461E1	-1.98573E1	-1.99642E1	1.49679E1	2.14678E-9	2.51662E-3	2.51662E-3	6.32386E-3	2.25133E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.22418E-2	-8.80019E1	-9.53674E-4	-8.79998E1	1.66893E-4	4.8399E-3	9.35078E-2	1.59741E1	-1.98825E1	-2.00135E1	1.49902E1	2.15894E-9	2.5199E-3	2.5199E-3	6.32936E-3	2.2572E-2
1.4E1	8.2E1	0.0E0	5.66E2	3.82E2	-7.23964E-2	-8.80023E1	-9.29832E-4	-8.80001E1	5.72205E-4	5.05447E-3	9.30309E-2	1.58365E1	-1.98591E1	-1.99336E1	1.5031E1	2.15894E-9	2.51662E-3	2.51662E-3	6.33486E-3	2.26113E-2
1.5E1	2.7E1	0.0E0	6.06E2	4.11E2	-7.27053E-2	-8.80023E1	-9.53674E-4	-8.8E1	2.14577E-4	5.14984E-3	9.3174E-2	1.58882E1	-1.98735E1	-1.99732E1	1.49634E1	2.15706E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.25133E-2
1.6E1	1.38E2	0.0E0	6.47E2	4.41E2	-7.26282E-2	-8.80023E1	-1.21593E-3	-8.79999E1	3.8147E-4	4.52995E-3	9.32932E-2	1.59783E1	-1.98326E1	-1.99967E1	1.50256E1	2.15533E-9	2.52061E-3	2.52061E-3	6.30202E-3	2.25674E-2
1.7E1	1.96E2	0.0E0	6.87E2	4.7E2	-7.25507E-2	-8.80023E1	-1.26362E-3	-8.79997E1	5.48363E-4	4.52995E-3	9.33409E-2	1.59548E1	-1.9834E1	-2.00051E1	1.49451E1	2.15613E-9	2.52538E-3	2.52538E-3	6.29098E-3	2.2572E-2
1.8E1	7.85E2	0.0E0	7.27E2	5.0E2	-7.24736E-2	-8.80022E1	-8.34465E-4	-8.8E1	3.57628E-4	4.673E-3	9.34362E-2	1.5884E1	-1.98747E1	-1.99552E1	1.50244E1	2.15706E-9	2.52428E-3	2.52428E-3	6.3074E-3	2.25917E-2
1.9E1	9.99E2	1.0E0	7.68E2	5.29E2	-7.27828E-2	-8.80024E1	-9.29832E-4	-8.80002E1	3.33786E-4	4.91142E-3	9.33886E-2	1.57002E1	-1.98428E1	-1.99546E1	1.505E1	2.15349E-9	2.52276E-3	2.52276E-3	6.30202E-3	2.25482E-2
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-7.23189E-2	-8.80022E1	-6.19888E-4	-8.80003E1	3.57628E-4	5.14984E-3	9.34124E-2	1.5753E1	-1.98759E1	-1.99594E1	1.49356E1	2.15696E-9	2.52697E-3	2.52697E-3	6.32418E-3	2.25569E-2
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.20871E-2	-8.80022E1	-7.86781E-4	-8.8E1	7.39098E-4	4.76837E-3	9.3317E-2	1.59609E1	-1.98579E1	-1.99522E1	1.49854E1	2.15533E-9	2.51847E-3	2.51847E-3	6.31278E-3	2.25289E-2
2.2E1	4.0E0	0.0E0	8.89E2	6.17E2	-7.27828E-2	-8.80022E1	-8.10623E-4	-8.80001E1	6.91414E-4	4.8399E-3	9.32217E-2	1.57295E1	-1.98352E1	-1.99602E1	1.50731E1	2.15987E-9	2.52209E-3	2.52209E-3	6.30192E-3	2.26506E-2
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.20871E-2	-8.80022E1	-1.28746E-3	-8.80001E1	1.43051E-4	4.76837E-3	9.30786E-2	1.57559E1	-1.98719E1	-1.99648E1	1.49692E1	2.15706E-9	2.52099E-3	2.52099E-3	6.32936E-3	2.2631E-2