[Scan]
initial_time=2016-01-27T18:40:33
final_time=2016-01-27T18:40:52
ip_count=19
run=1025
dataset=1
scan=13
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.17779E-2
qbias_imon=-3.76824E-6
ql1_vset=
ql1_vmon=-8.80023E1
ql1_imon=-6.45435E-10
ql2_vset=
ql2_vmon=-7.39098E-4
ql2_imon=4.41229E-10
ql3_vset=
ql3_vmon=-8.79998E1
ql3_imon=-1.7205E-9
ql4_vset=
ql4_vmon=5.24521E-4
ql4_imon=9.40299E-10
mult1=-1.00294E-8
mult2=-2.7765E-9
rf_tmon=-5.0772E-3
rf_agc=3.34658E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.62532E-3
ql5_imon=4.7878E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63393E0
bslens_imon=2.52672E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.2027E1
lens5a_imon=1.98243E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12479E2
lens4a_imon=2.05243E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53445E1
cs_ef1b_imon=2.86697E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04644E2
lens23_imon=1.02089E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04842E1
cs_ea1_imon=2.57478E-5
lens1_vset=-2.7E0
lens1_vmon=-2.97828E0
lens1_imon=1.25145E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64683E1
os_ef1alow_imon=2.97441E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03763E1
cs_ea2_imon=1.54145E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84381E1
cs_ef1a_imon=2.93792E-5
olens2_vset=0.0E0
olens2_vmon=1.21593E-3
olens2_imon=4.32837E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11272E1
os_restr1_imon=2.8771E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15121E1
os_ea1_imon=1.88192E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.635E1
os_ef1bup_imon=3.08226E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26137E0
cs_ionrep_imon=1.19502E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91883E2
cs_nozzle_imon=1.93341E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01944E1
cs_anode1_imon=2.96711E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99978E1
olens4_imon=1.11377E-10
tplens_vset=0.0E0
tplens_vmon=-1.63481E0
tplens_imon=-3.65486E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99546E1
iondef3_imon=8.80375E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98729E1
iondef2_imon=9.44337E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02889E2
lens6_imon=2.98374E-4
ql6_vset=1.0E-1
ql6_vmon=9.32217E-2
ql6_imon=4.68397E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29381E0
ionrepsh_imon=1.80008E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33877E1
lens5b_imon=2.19617E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74596E1
cs_ef2b_imon=3.12726E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.26452E-1
os_ea2_imon=-5.28371E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06108E2
lens4b_imon=2.00492E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70906E1
cs_ef2a_imon=3.18605E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62353E0
os_ef2alow_imon=-2.64293E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.44716E-1
os_ef2bup_imon=-5.23778E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11002E1
os_restr2_imon=2.87143E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23054E2
cs_ionfoca_imon=6.30763E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01842E1
cs_anode2_imon=2.2511E-5
iondef1_vset=1.6E1
iondef1_vmon=1.56359E1
iondef1_imon=4.92629E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50166E1
iondef4_imon=5.23895E-6
olens3_vset=-1.28E1
olens3_vmon=-1.2796E1
olens3_imon=2.34711E-9
olens1_vset=0.0E0
olens1_vmon=1.85966E-3
olens1_imon=4.37868E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13622E0
cs_ionaccel_imon=-1.75095E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02074E2
cs_ionfocb_imon=1.47214E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5625E1
einzel_imon=7.50944E-6
window_vset=0.0E0
window_vmon=1.97896E-1
window_imon=-1.0252E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82632E2
mask1_imon=2.39112E-4
mask2_vset=0.0E0
mask2_vmon=-1.86432E1
mask2_imon=-6.60297E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92533E3
multa_neg_imon=8.35085E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93736E3
defgrida_imon=6.30088E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=7.29806E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.73037E0
defgridb_imon=6.16183E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33642E1
os_fil1_imon=3.90676E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.50848E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6338E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30401E1
cs_fil1_imon=9.97858E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63135E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66025E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.51512E-2
os_fil2_imon=-2.57362E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.38889E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.6038E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30526E-1
cs_fil2_imon=-2.61416E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.24013E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21799E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.35786E-3
inlet_lpb_pmon=2.25569E-2
chamber_ion_pmon=2.15696E-9
chamber_cvt_pmon=2.51804E-3
foreline_cvt_pmon=2.51804E-3
chamber_tmon=1.40062E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.67025E-1
res40_imon=-2.40372E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.58E2	0.0E0	1.47E2	4.1E1	-7.3401E-2	-8.80018E1	-1.04904E-3	-8.80003E1	3.8147E-4	4.8399E-3	9.34839E-2	1.56178E1	-1.9835E1	-1.99732E1	1.49824E1	2.14166E-9	2.52113E-3	2.52113E-3	6.31357E-3	2.2626E-2
2.0E0	1.945E3	3.0E0	3.16E2	1.6E2	-7.3401E-2	-8.8002E1	-1.16825E-3	-8.8E1	4.05312E-4	4.57764E-3	9.34601E-2	1.5906E1	-1.98667E1	-1.99512E1	1.50665E1	2.13934E-9	2.52209E-3	2.52209E-3	6.31288E-3	2.269E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.3401E-2	-8.80024E1	-8.10623E-4	-8.79998E1	6.19888E-4	4.86374E-3	9.32932E-2	1.59778E1	-1.98647E1	-1.99738E1	1.49524E1	2.15051E-9	2.51552E-3	2.51552E-3	6.32386E-3	2.2572E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.30918E-2	-8.80024E1	-3.57628E-4	-8.8E1	6.4373E-4	4.74453E-3	9.32455E-2	1.57278E1	-1.9826E1	-1.99918E1	1.50064E1	2.158E-9	2.5199E-3	2.5199E-3	6.32386E-3	2.25917E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27828E-2	-8.80024E1	-8.10623E-4	-8.80001E1	3.09944E-4	4.3869E-3	9.34601E-2	1.58906E1	-1.98458E1	-1.993E1	1.50136E1	2.159E-9	2.52169E-3	2.52169E-3	6.3074E-3	2.25674E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.29374E-2	-8.80024E1	-6.4373E-4	-8.8E1	5.48363E-4	4.74453E-3	9.34839E-2	1.59339E1	-1.98831E1	-1.99708E1	1.50274E1	2.15791E-9	2.52585E-3	2.52585E-3	6.32978E-3	2.25968E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.23189E-2	-8.80025E1	-1.0252E-3	-8.80001E1	5.00679E-4	4.57764E-3	9.33647E-2	1.5738E1	-1.9841E1	-1.99642E1	1.50136E1	2.15894E-9	2.52209E-3	2.52209E-3	6.32386E-3	2.2572E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.15461E-2	-8.80025E1	-8.10623E-4	-8.80001E1	7.62939E-4	4.22001E-3	9.36747E-2	1.56647E1	-1.9823E1	-1.99654E1	1.49668E1	2.15706E-9	2.52099E-3	2.52099E-3	6.32386E-3	2.2769E-2
1.2E1	3.1E1	0.0E0	4.85E2	3.23E2	-7.20871E-2	-8.80023E1	-6.4373E-4	-8.8E1	4.05312E-4	4.72069E-3	9.34124E-2	1.59363E1	-1.99023E1	-1.99444E1	1.50268E1	2.15987E-9	2.5188E-3	2.5188E-3	6.33486E-3	2.2631E-2
1.3E1	2.0E0	0.0E0	5.25E2	3.53E2	-7.37874E-2	-8.80024E1	-8.34465E-4	-8.80001E1	7.15256E-5	5.24521E-3	9.36031E-2	1.59536E1	-1.98629E1	-1.99709E1	1.49818E1	2.15613E-9	2.52538E-3	2.52538E-3	6.3074E-3	2.26113E-2
1.4E1	6.8E1	0.0E0	5.66E2	3.82E2	-7.35556E-2	-8.80023E1	-1.00136E-3	-8.80002E1	2.14577E-4	4.60148E-3	9.36031E-2	1.59946E1	-1.98579E1	-1.9951E1	1.49738E1	2.15808E-9	2.52599E-3	2.52599E-3	6.33977E-3	2.26445E-2
1.5E1	2.0E1	0.0E0	6.06E2	4.11E2	-7.30918E-2	-8.8002E1	-1.04904E-3	-8.80003E1	3.33786E-4	4.64916E-3	9.35555E-2	1.57602E1	-1.9841E1	-1.99246E1	1.50557E1	2.16175E-9	2.52099E-3	2.52099E-3	6.32386E-3	2.2572E-2
1.6E1	1.4E2	0.0E0	6.47E2	4.41E2	-7.30918E-2	-8.80021E1	-9.53674E-4	-8.79999E1	5.72205E-4	4.93526E-3	9.36031E-2	1.57206E1	-1.98735E1	-1.99552E1	1.50076E1	2.15808E-9	2.51954E-3	2.51954E-3	6.3074E-3	2.26832E-2
1.7E1	2.0E2	0.0E0	6.87E2	4.7E2	-7.34782E-2	-8.80021E1	-6.67572E-4	-8.79998E1	-1.19209E-4	4.86374E-3	9.32693E-2	1.59128E1	-1.98819E1	-1.99552E1	1.49331E1	2.15987E-9	2.52099E-3	2.52099E-3	6.31837E-3	2.25133E-2
1.8E1	7.68E2	0.0E0	7.27E2	5.0E2	-7.18554E-2	-8.80021E1	-5.48363E-4	-8.80004E1	2.38419E-5	4.50611E-3	9.34839E-2	1.58362E1	-1.98682E1	-1.9962E1	1.50497E1	2.15519E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.25329E-2
1.9E1	1.0E3	0.0E0	7.68E2	5.29E2	-7.31692E-2	-8.80022E1	-8.82149E-4	-8.80001E1	3.8147E-4	4.72069E-3	9.36747E-2	1.56977E1	-1.98579E1	-1.9942E1	1.49632E1	2.158E-9	2.51443E-3	2.51443E-3	6.33486E-3	2.26506E-2
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-7.286E-2	-8.8002E1	-1.07288E-3	-8.79998E1	3.09944E-4	4.81606E-3	9.3317E-2	1.58293E1	-1.98633E1	-1.99558E1	1.50629E1	2.15533E-9	2.51739E-3	2.51739E-3	6.31817E-3	2.26639E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.25507E-2	-8.80022E1	-1.00136E-3	-8.8E1	2.14577E-4	4.48227E-3	9.35555E-2	1.59719E1	-1.98735E1	-1.99768E1	1.49686E1	2.16078E-9	2.5225E-3	2.5225E-3	6.32978E-3	2.26971E-2
2.2E1	9.0E0	0.0E0	8.89E2	6.17E2	-7.27053E-2	-8.80021E1	-8.82149E-4	-8.80001E1	9.53674E-5	4.43459E-3	9.33409E-2	1.57395E1	-1.98722E1	-1.99365E1	1.50136E1	2.15716E-9	2.52061E-3	2.52061E-3	6.28592E-3	2.25289E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.17779E-2	-8.80023E1	-7.39098E-4	-8.79998E1	5.24521E-4	4.62532E-3	9.32217E-2	1.56359E1	-1.98729E1	-1.99546E1	1.50166E1	2.15696E-9	2.51804E-3	2.51804E-3	6.35786E-3	2.25569E-2